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Compact and Lightweight UV and Green ns Lasers · Explorer One 4 050 100 150 200 Pulse Repetition...

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Applications • LED manufacturing processes • OLED manufacturing processes • Intra-glass and glass surface marking • UID marking (on plastics, glass, metals, semiconductors) • Functional marking (on plastics, glass, metals, inside glass) • Wafer marking and processing • Resistor and inductance trimming • Micromachining – drilling, cutting of thin foils • Thin film scribing and processing • Additive manufacturing – stereolithography • MALDI-TOF mass spectrometry • Laser microdissection • Flat panel display (FPD) repair • UV titling • LIDAR Explorer ® One Compact and Lightweight UV and Green ns Lasers The Spectra-Physics Explorer ® One is the most compact series of UV and green diode pumped solid state (DPSS) q-switch lasers in its class. The It’s in the Box design incorporates features such as the very compact air cooled design, short pulse width, high peak power and a feature rich software into one single package to satisfy customer needs with benefits such as ease-of-use and handling, high process quality and short time-to-market in cost sensitive tools. The Explorer One laser models are available on three platforms. The standard platform provides up to 800 mW and 355 nm, 2 W at 532 nm. High energy models are available with pulse energies exceeding 120 µJ at 349 nm, 80 µJ at 355 nm and 200 µJ at 532 nm. The extended power platform, Explorer One XP, is available with power exceeding 2 W at 355 nm and 5 W at 532 nm. The high power platform, the Explorer One HP, is available with a power exceeding 6 W at 355 nm. • High Power – Up to >6 W at 355 nm and 5 W at 532 nm • Lightweight – only 1.5 and 4.1 kg, air cooled design • Unique It’s in the Box design – smaller than any competitive product • Feature rich software for ease-of-use and simplified integration • E-Track active pulse energy and power control • Single pulse energy measurement from single shot to 500 kHz • Rugged, reliable design and construction for demanding 24/7 applications The Explorer One Advantage 1
Transcript

Applications

• LED manufacturing processes• OLED manufacturing processes• Intra-glass and glass surface marking• UID marking (on plastics, glass, metals,

semiconductors)• Functional marking (on plastics, glass,

metals, inside glass)• Wafer marking and processing• Resistor and inductance trimming• Micromachining – drilling, cutting of thin foils• Thin film scribing and processing• Additive manufacturing – stereolithography• MALDI-TOF mass spectrometry• Laser microdissection• Flat panel display (FPD) repair• UV titling• LIDAR

Explorer® One™ Compact and Lightweight UVand Green ns Lasers

The Spectra-Physics Explorer® One™ is the most compact series of UV and green diode pumped solid state (DPSS) q-switch lasers in its class. The It’s in the Box™ design incorporates features such as the very compact air cooled design, short pulse width, high peak power and a feature rich software into one single package to satisfy customer needs with benefits such as ease-of-use and handling, high process quality and short time-to-market in cost sensitive tools.

The Explorer One laser models are available on three platforms. The standard platform provides up to 800 mW and 355 nm, 2 W at 532 nm. High energy models are available with pulse energies exceeding 120 µJ at 349 nm, 80 µJ at 355 nm and 200 µJ at 532 nm. The extended power platform, Explorer One XP, is available with power exceeding 2 W at 355 nm and 5 W at 532 nm. The high power platform, the Explorer One HP, is available with a power exceeding 6 W at 355 nm.

• High Power – Up to >6 W at 355 nm and 5 W at 532 nm

• Lightweight – only 1.5 and 4.1 kg, air cooled design

• Unique It’s in the Box™ design – smaller than any competitive product

• Feature rich software for ease-of-use and simplified integration

• E-Track™ active pulse energy and power control

• Single pulse energy measurement from single shot to 500 kHz

• Rugged, reliable design and construction for demanding 24/7 applications

The Explorer One Advantage

1

The Explorer One Family consists of rugged and durable industrial laser designed for longevity and long-term stability in 24/7 applications. Exceptional performance including short pulse width for minimum heat affected zone, unmatched pulse-to-pulse stability and superior beam quality (M2 typically <1.1) makes this laser the perfect tool for precision manufacturing. The lasers’ very compact It’s in the Box design offers a single package solution that allows fast and low cost integration for machine tool builders especially when space is a limiting factor. The very small dimensions of the all-in-one concept as well as low heat dissipation make this laser family the technology of choice for a small tabletop-like instrument. The combination of high output power and air cooled design reduces complexity, thereby resulting in short product development cycles and fast return of investment for our customers.

Versatility and flexibility are realized by integrating advanced and value-added hardware and software elements such as E-Pulse™ pulse energy control, burst mode, on-demand auto-calibration and single pulse energy measurements up to 500 kHz. The new E-Track™ dynamic pulse energy control feature actively measures and controls the laser for continual energy and power stabilization even under rapidly changing operating set points or environments. E-Track enables “on-the-fly” adjustments and fast gating for precision micromachining applications such as scribing marking, and drilling of tiny features.

In addition the Explorer One laser’s output power is adjustable to optimize the laser performance to the application needs. The system can be operated using TTL and analog control signals. Real-time pulse energy values are available on the integrated analog port.

Explorer One

2

Explorer One Specifications1, 4

3

Explorer One 349-60

Explorer One 349-120

Explorer One 355-1

Explorer One HE 355-100

Explorer One HE 532-200

Explorer One 532-2

Output Characteristics

Wavelength 349 nm 355 nm 532 nm

Gain Medium Nd:YLF Nd:YVO4 Nd:YAG Nd:YAG Nd:YVO4

Pulse Energy 60 µJ @ 1 kHz 120 µJ @ 1 kHz 25 µJ @ <30 kHz 80 µJ @ 10 kHz 200 µJ @ 10 kHz 40 µJ @ 50 kHz

Output Power 60 mW @ 1kHz 120 mW @ 1 kHz 800 mW @ 50 kHz 800 mW @ 10 kHz 2 W @ 10 kHz 2 W @ 50 kHz

Pulse Width (FWHM) <5 ns <10 ns <15 ns <15 ns <15 ns

Pulse Energy Noise (rms)2 <3% <3% <3% <3% <3%

Long Term Stability (rms) <2% <2% <2% <2% <2%

Repetition Rate Range Single shot to 5 kHzSingle shot to

200 khzSingle shot to

60 kHzSingle shot to

60 kHzSingle shot to

200 khz

Jitter, Laser Pulse to Opto-Sync < ±0.5 ns — — — — —

Beam Characteristics2

Spatial Mode M2 <1.3, TEM00 M2 <1.3, TEM00 M2 <1.2, TEM00

Beam Diameter, at waist (1/e2)0.145 mm ±0.02 mm

0.16 mm ±0.025 mm

0.19 mm ±0.035 mm

0.182 mm ±0.037 mm

0.18 mm ±0.020 mm

0.21 mm ±0.021 mm

Beam Divergence, full angle (1/e2) 3.2 ± 0.5 mrad 3.0 ± 0.5 mrad 2.5 ± 0.6 mrad 2.5 ± 0.6 mrad 3.8 ± 0.5 mrad 3.5 ± 0.5 mrad

Beam Ellipticity2 1 ±0.2 1 ±0.2 1 ±0.2

Polarization Ratio >100:1 (vertical) >100:1 (vertical) >100:1 (horizontal)

Operating Conditions

Warm-up Time (cold start to >95% full power)

<10 min

Operating Voltage 24 VDC ±2 V

Maximum Inrush Current <4 A

Maximum Power Consumption <75 W

Typical Power Consumption <50 W

Laser Head Thermal Heat Dissipation

<75 W

Operating Temperature

Laser Head 18–40°C (relative humidity <80%; dew point <20°C)3

Storage Temperature Range -20 to 60°C (<90% relative humidity, non-condensing)

Physical Characteristics

Laser Head (L × W × H) 6.5 x 3.74 x 3 in (165 x 95 x 76.1 mm)

Beam Hight 25.4 mm 24.5 mm 25.4 mm

Weight 2.87 lbs (1.3 kg)

Static Alignment Tolerance

Beam Position <±0.25 mm

Beam Angle <±1 mrad

Software Features

First Pulse Suppression (FPS) ü ü ü ü ü ü

E-Pulse (Constant Energy Mode) ü ü ü ü ü ü

E-Track (Closed Loop Energy Control ü ü ü ü ü ü

1. Due to our continuous product improvement program, specifications may change without notice.2. Specified at nominal power/energy and repetition rate (see power/energy specifications)3. Housing temperature at base.4. Explorer One is a Class IV - High Power Laser, whose beam is, by definition, a safety and fire hazard. Take precautions to prevent exposure to the direct and reflected beams. Diffuse as well as specular reflections can

cause severe skin or eye damage.

Explorer One

4

0 50 100 150 200Pulse Repetition Frequency (kHz)

3

2.5

0

0.5

1

60

50

40

30

20

10

0

2

1.5

Powe

r (W

)

Pulse

Wid

th (n

s)

Explorer One 532-2 Power (W)Explorer One 355-1 Power (W)Explorer One 532-2 Pulse Width (ns)Explorer One 355-1 Pulse Width (ns)

Explorer One - Power and Pulse Width1

0 50 100 150 200 250Pulse Repetition Frequency (kHz)

50

0

10

20

20

16

12

8

4

18

14

10

6

2

0

40

30

Pulse

Ene

rgy (

µJ)

Pulse

Ene

rgy N

oise

(%)

Explorer One 355-1 Pulse Energy (µJ)Explorer One 532-2 Pulse Energy (µJ)Pulse Energy Noise (% rms)

Explorer One - Pulse Energy and Noise1

0 10 20 30 40 50Pulse Repetition Frequency (kHz)

500

0

100

200

20

16

12

8

4

18

14

10

6

2

0

400

300

Pulse

Ene

rgy (

µJ)

450

50

150

350

250

Explorer One 355-100 Pulse Energy (µJ)Explorer One 532-200 Pulse Energy (µJ)Pulse Energy Noise (% rms)

Pulse

Ene

rgy N

oise

(%)

Explorer One - Pulse Energy and Noise1

0 1 2 3 4 5Pulse Repetition Frequency (kHz)

200

0

50

100

10

8

6

4

2

9

7

5

3

1

0

Powe

r (W

)

Pulse

Ene

rgy N

oise

(%)

175

150

25

75

125

Explorer One 349-120 Power (mW)Explorer One 349-60 Power (mW)Pulse Energy Noise (% rms)

Explorer One - Power and Pulse Energy Noise1

0 10 20 30 40 50Pulse Repetition Frequency (kHz)

2.5

0

0.5

1

50

40

30

20

10

45

35

25

15

5

0

2

1.5

Powe

r (W

)

Pulse

Wid

th (n

s)

Explorer One 532-200 Power (W)Explorer One 355-100 Power (W)Explorer One 532-200 Pulse Width (ns)Explorer One 355-100 Pulse Width (ns)

Explorer One - Power and Pulse Width1

0 1 2 3 4 5Pulse Repetition Frequency (kHz)

150

0

50

100

20

16

12

8

4

18

14

10

6

2

0

Pulse

Ene

rgy (

µJ)

Pulse

Wid

th (n

s)

25

75

125

Explorer One 349-60 Pulse Energy (µJ)Explorer One 349-120 Pulse Energy (µJ)Pulse Width (ns)

Explorer One - Pulse Energy and Pulse Width1

1. Typically measured performance; not a guaranteed or warranted specification.

Explorer One XP 532-5 Explorer One XP 355-2 Explorer One HP 355-4 Explorer One HP 355-6

Output Characteristics

Wavelenght 532 nm 355 nm 355 nm

Gain Medium Nd:YVO4 Nd:YVO4 Nd:YVO4

Pulse Energy 63 µJ@ 80 kHz 25 µJ @ 80 kHz >50 µJ @ 80 kHz >60 µJ @ 100 kHz

Output Power 5 W @ 80 kHz 2 W @ 80 kHz >4 W @ 80 kHz >6 W @ 100 kHz

Pulse Width (FWHM) <12 ns @ 80 kHz <10 ns @ 80 kHz <15 ns @ 80 kHz, 4 W <12 ns @ 100 kHz, 6 W

Pulse Energy Noise (rms)2 <3% <4% <2%

Long Term Stability (rms) <±2% <2%

Repetion Rate Range Single shot to 300 kHz3 Single shot to 500 kHz

Jitter, Laser Pulse to Opto-Sync — — — —

Beam Characteristics2

Spatial Mode M2 <1.3, TEM00 M2 <1.3, TEM00

Beam Diameter, at waist (1/e2) 0.18 mm ±0.027 mm 0.16 mm ±0.024 mm 1.1 mm ±0.25 mm 1.3 mm ±0.33 mm

Beam Divergence, full angle (1/e2) 3.9 ±0.8 mrad 3.5 ±0.8 mrad 0.5 ±0.2 mrad

Beam Ellipticity2 1 ±0.1 1 ±0.2

Polarization Ratio >100:1 (horizontal) >100:1 (vertical) >100:1 (vertical)

Operating Conditions

Warm-up Time (cold start to >95% full power) <10 min <10 min

Operating Voltage 24 VDC ±2 V 24 VDC ±2 V

Maximum Inrush Current <9 A <10 A

Maximum Power Consumption <150 W <160 W <180 W

Typical Power Consumption <100 W <120 W <130 W

Laser Head Thermal Heat Dissipation <150 W <160 W <180 W

Operating Temperature

Laser Head 18–40°C (relative humidity <80%; dew point <20°C)3 18–40°C (relative humidity <80%; dew point <20°C)3

Storage Temperature Range -20 to 60°C (<90% relative humidity, non-condensing) -20 to 60°C (<90% relative humidity, non-condensing)

Physical Characteristics

Laser Head (L × W × H) 9.45 x 3.74 x 3.7 in (240 x 95 x 94 mm) 11.42 x 5.51 x 3.35 in (280 x 130 x 85.1 mm)

Beam Height 35 mm 34.1 mm 43.2 mm

Weight 6.84 lb (3.1 kg) 9.25 lb (4.2 kg)

Static Alignment Tolerance

Beam Position <±0.3 mm <±0.5 mm

Beam Angle <±1 mrad <±1 mrad

Software Features

First Pulse Suppression (FPS) ü ü ü ü

E-Pulse (Constant Energy Mode) ü ü ü ü

E-Track (Closed Loop Energy Control) — — ü ü

1. Due to our continuous product improvement program, specifications may change without notice.2. Specified at nominal power/energy and repetition rate (see power/energy specifications)3. Housing temperature at base.4. Explorer One is a Class IV - High Power Laser, whose beam is, by definition, a safety and fire hazard. Take precautions to prevent exposure to the direct and reflected beams. Diffuse as well as specular reflections can

cause severe skin or eye damage.

Explorer One XP/HP Specifications1, 4

5

Explorer One

6

0 100 200 400 50050 150 300 350250 450Pulse Repetition Frequency (kHz)

6

5

0

1

2

50

45

40

30

35

25

20

10

15

5

0

4

3

Powe

r (W

)

Pulse

Wid

th (n

s)

XP 532-5 Power (W)XP 355-2 Power (W)XP 532-5 Pulse Width (ns)XP 355-2 Pulse Width (ns)

Explorer One XP - Power and Pulse Width1

0 100 200 300 400 500Pulse Repetition Frequency (kHz)

80

0

40

20

16

12

8

4

18

14

10

6

2

0

Pulse

Ene

rgy (

µJ)

60

20

45050 150 250 350

XP 355-2 Pulse Energy (µJ)XP 532-5 Pulse Energy (µJ)Pulse Energy Noise (% rms)

Pulse

Ene

rgy N

oise

(%)

Explorer One XP - Pulse Energy and Noise1

0 100 200 300 400 500Pulse Repetition Frequency (kHz)

80

0

40

20

16

12

8

4

18

14

10

6

2

0

Pulse

Ene

rgy (

µJ)

60

20

45050 150 250 350

HP 355-4 Pulse Energy (µJ)HP 355-6 Pulse Energy (µJ)Pulse Energy Noise (% rms)

Pulse

Ene

rgy N

oise

(%)

Explorer One HP 355 - Pulse Energy and Noise1

0 100 200 400 50050 150 300 350250 450Pulse Repetition Frequency (kHz)

8

6

0

1

2

35

30

25

20

10

15

5

0

4

3

Powe

r (W

)

Pulse

Wid

th (n

s)

7

5

HP 355-4 Power (W)HP 355-6 Power (W)HP 355-4 Pulse Width (ns)HP 355-6 Pulse Width (ns)

Explorer One HP 355 - Power and Pulse Width1

1. Typically measured performance; not a guaranteed or warranted specification.

Explorer One

Explorer One Dimensions Explorer One Optional Heatsink

Dimensions in inch (mm)Dimensions in inch (mm)

6.5(165)

1.87(47.4)

1(25.4)

3.74(95)

0.16(4)

3(76.1)

Side ViewRear View

Front View Top View

2.205(56)

4.134(105)

7.047(179)

Side View

Top ViewFront View

Explorer One XP Dimensions

Explorer One XP Optional Heatsink

Dimensions in inch (mm)

Top View

Front View

Side View

Back View

8.64(219.5)

9.45(240)

3.74(95)

1.87(47.5)

3.69(93.6)

1.38*(35)

1.87(47.5)

* Beam height varies for different models. Please see specifications.

Top View

3.39(86)

0.24(6)

3.5(88.9)

Front View

Side View

Back View

12.99(330)

5.00(127)

3.58(91)

Dimensions in inch (mm)

Explorer One

© 2020 Newport Corporation. All Rights Reserved. Explorer, Spectra-Physics and the Spectra-Physics logo are registered trademarks of Newport Corporation. One, It’s in the Box, E-Track and E-Pulse are trademarks of Newport Corporation. Spectra-Physics Santa Clara, California, Stahnsdorf, Germany, Ranweil, Austria and Tel Aviv, Israel have all been certified compliant with ISO 9001.

www.spectra-physics.com

3635 Peterson Way, Santa Clara, CA 95054, USA PHONE: 1-800-775-5273 1-408-980-4300 FAX: 1-408-980-6921 EMAIL: [email protected]

Belgium +32-(0)0800-11 257 [email protected] +86-10-6267-0065 [email protected] France +33-(0)1-60-91-68-68 [email protected] / Austria / Switzerland +49-(0)6151-708-0 [email protected] +81-3-3556-2705 [email protected]

Korea +82-31-8021-1600 [email protected] +31-(0)30 6592111 [email protected] +65-6664-0040 [email protected] +886-3-575-3040 [email protected] Kingdom +44-1235-432-710 [email protected]

SP-DS-20200116

Explorer One HP Dimensions

Dimensions in inch (mm)

Explorer One HP Optional Heatsink

Dimensions in inch (mm)

5.51(140)

11.4(290)

3.07(78)

3.27(83)

9.92(252)

11.02(280)

5.31(134.9)

5.12(130)

3.45(87.6)

3.35(85.1)

1.7(43.2)

1.89(48.1)


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