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CONFIDENTIAL Optimization of LOCA Gap Fill Process by High … · 2018-10-08 · Lip gap=0.5mm,...

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Copyright © 2011 MMC RYOTEC CORPORATION ALL RIGHTS RESERVED CONFIDENTIAL Optimization of LOCA Gap Fill Process by High Precision Slot Die Naoki S. Rikita Technical Director R&D Marketing Division, MMC RYOTEC Corporation 7F. KFC BLDG 1 - 6 - 1, YOKOAMI, SUMIDA - KU, TOKYO, 1300015 JAPAN *T. Kanayama, *K. Takahashi, *A. Hayashi, *T. Ito *Gifu Plant, Wear Resistant Tool Dev, MMC RYOTEC email: [email protected] Phone: +81 - 3 - 5819 - 5264 Fax: +81 - 3 - 5819 - 5259 RDM201602
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Page 1: CONFIDENTIAL Optimization of LOCA Gap Fill Process by High … · 2018-10-08 · Lip gap=0.5mm, Coating area = 90.8mm×52.4mm LOCA =5,000-7,000CPS Hybrid Bump height=10.53 um Bump

Copyright © 2011 MMC RYOTEC CORPORATION ALL RIGHTS RESERVED

CONFIDENTIAL

Optimization of LOCA Gap Fill Process by High Precision Slot Die

Naoki S. RikitaTechnical DirectorR&D Marketing Division, MMC RYOTEC Corporation7F. KFC BLDG 1-6-1, YOKOAMI, SUMIDA-KU, TOKYO, 1300015 JAPAN*T. Kanayama, *K. Takahashi, *A. Hayashi, *T. Ito*Gifu Plant, Wear Resistant Tool Dev, MMC RYOTECemail: [email protected]: +81-3-5819-5264Fax: +81-3-5819-5259 RDM201602

Page 2: CONFIDENTIAL Optimization of LOCA Gap Fill Process by High … · 2018-10-08 · Lip gap=0.5mm, Coating area = 90.8mm×52.4mm LOCA =5,000-7,000CPS Hybrid Bump height=10.53 um Bump

Copyright © 2011 MMC RYOTEC CORPORATION ALL RIGHTS RESERVED

CONFIDENTIAL

Adhesive = LOCALiquid Optical Clear Adhesive (LOCA) is well known

material for touch panel display and flexible sensors. Since LOCA was used for touch panel display, many non-uniformity issues and fill process issues are reported. High precision Slot Die solved these issues, instead of dispenser nozzle. This paper explain new coating technique by high precision Slot Die.

Page 3: CONFIDENTIAL Optimization of LOCA Gap Fill Process by High … · 2018-10-08 · Lip gap=0.5mm, Coating area = 90.8mm×52.4mm LOCA =5,000-7,000CPS Hybrid Bump height=10.53 um Bump

Copyright © 2011 MMC RYOTEC CORPORATION ALL RIGHTS RESERVED

CONFIDENTIAL

Tungsten Carbide lipsStainless steel lips

Stainless steel bodyMachine stage

Substrate

Single substrate process

Over view of Slot Die

Page 4: CONFIDENTIAL Optimization of LOCA Gap Fill Process by High … · 2018-10-08 · Lip gap=0.5mm, Coating area = 90.8mm×52.4mm LOCA =5,000-7,000CPS Hybrid Bump height=10.53 um Bump

Copyright © 2011 MMC RYOTEC CORPORATION ALL RIGHTS RESERVED

CONFIDENTIAL

Resistive typePET

OCA 50umITO Film

ITO FilmOCA 25 - 50um

PC/Glass

LCD

Cover (Glass/PC)OCA over 150um

Touch PanelOCA over 150um

LCD

Capacitive type

Three Bond HP

Cover glass

Touch panel

Display

•OCA tape is good material on less than 7 inch flat panel.•On over 7 inch flat panel, the rework and the tact time, over flow are big issues.

Device structure

Page 5: CONFIDENTIAL Optimization of LOCA Gap Fill Process by High … · 2018-10-08 · Lip gap=0.5mm, Coating area = 90.8mm×52.4mm LOCA =5,000-7,000CPS Hybrid Bump height=10.53 um Bump

Copyright © 2011 MMC RYOTEC CORPORATION ALL RIGHTS RESERVED

CONFIDENTIAL

CoverTouch sensor

LOCA over 200umLCM

Cover

Touch sensorLOCA over 200um

OLED

Cover

Touch sensor

LOCA over 200um

LCM

CoverLOCA 100-175um

Touch sensor

LOCA over 200um

LCM

Glass

GG type OGS type on-cell type in-cell type

Cover

OCATouch sensor

LOCA over 200umLCM

Film

Touch sensor

【G1F type】The location of L-OCA①「Cover Glass」+「Touch sensor」②「Touch sensor」+「LCM」

with SUS framewithout SUS frame less

LCMLOCA

CoverLOCA

LOCALCM

Device structures

Page 6: CONFIDENTIAL Optimization of LOCA Gap Fill Process by High … · 2018-10-08 · Lip gap=0.5mm, Coating area = 90.8mm×52.4mm LOCA =5,000-7,000CPS Hybrid Bump height=10.53 um Bump

Copyright © 2011 MMC RYOTEC CORPORATION ALL RIGHTS RESERVED

CONFIDENTIAL

Dexerials

How to use LOCA in the production

Page 7: CONFIDENTIAL Optimization of LOCA Gap Fill Process by High … · 2018-10-08 · Lip gap=0.5mm, Coating area = 90.8mm×52.4mm LOCA =5,000-7,000CPS Hybrid Bump height=10.53 um Bump

Copyright © 2011 MMC RYOTEC CORPORATION ALL RIGHTS RESERVED

CONFIDENTIAL

Frameor

Black Matrix

LOCA

Short tact time

Non over flow of LOCA

No bubble & No streak

Requirement of LOCA coat

Page 8: CONFIDENTIAL Optimization of LOCA Gap Fill Process by High … · 2018-10-08 · Lip gap=0.5mm, Coating area = 90.8mm×52.4mm LOCA =5,000-7,000CPS Hybrid Bump height=10.53 um Bump

Copyright © 2011 MMC RYOTEC CORPORATION ALL RIGHTS RESERVED

CONFIDENTIAL

Issues1. Long tact time by nozzle painting2. Over flow of LOCA Excess coat of LOCA3. Air bubble

Conventional dispense nozzle process for L-OCA

Over flow of LOCA

Page 9: CONFIDENTIAL Optimization of LOCA Gap Fill Process by High … · 2018-10-08 · Lip gap=0.5mm, Coating area = 90.8mm×52.4mm LOCA =5,000-7,000CPS Hybrid Bump height=10.53 um Bump

Copyright © 2011 MMC RYOTEC CORPORATION ALL RIGHTS RESERVED

CONFIDENTIAL

L-OCA requirement

3,000 - 50,000cps

Coating THK: 7”=100 - 200um >>> 42”=800um

SD

BM or Frame

Cover Glass

1mm - 3.5mmBonding Process

Slot Die process for L-OCA

L-OCA

Progress1. Short tact time by Slot Die2. Non over flow of LOCA Proper coat of LOCA3. No air bubble

Page 10: CONFIDENTIAL Optimization of LOCA Gap Fill Process by High … · 2018-10-08 · Lip gap=0.5mm, Coating area = 90.8mm×52.4mm LOCA =5,000-7,000CPS Hybrid Bump height=10.53 um Bump

Copyright © 2011 MMC RYOTEC CORPORATION ALL RIGHTS RESERVED

CONFIDENTIAL

Tungsten CarbideLong Nose Lip

Impossible Possible

Progressed coating method by Slot Die

Conventional structure Progressed structureThis invention is patent pending.

Page 11: CONFIDENTIAL Optimization of LOCA Gap Fill Process by High … · 2018-10-08 · Lip gap=0.5mm, Coating area = 90.8mm×52.4mm LOCA =5,000-7,000CPS Hybrid Bump height=10.53 um Bump

Copyright © 2011 MMC RYOTEC CORPORATION ALL RIGHTS RESERVED

CONFIDENTIAL

Coating width

Conventional structure Progressed structure

Page 12: CONFIDENTIAL Optimization of LOCA Gap Fill Process by High … · 2018-10-08 · Lip gap=0.5mm, Coating area = 90.8mm×52.4mm LOCA =5,000-7,000CPS Hybrid Bump height=10.53 um Bump

Copyright © 2011 MMC RYOTEC CORPORATION ALL RIGHTS RESERVED

CONFIDENTIAL

LOCA =5,000-7,000CPS HybridTarget wet THK=100um

Experiments of Coating

Step1: Initial purgeStep2: Coating (Filling)

Page 13: CONFIDENTIAL Optimization of LOCA Gap Fill Process by High … · 2018-10-08 · Lip gap=0.5mm, Coating area = 90.8mm×52.4mm LOCA =5,000-7,000CPS Hybrid Bump height=10.53 um Bump

Copyright © 2011 MMC RYOTEC CORPORATION ALL RIGHTS RESERVED

CONFIDENTIALLOCA =5,000-7,000CPS Hybrid, Target wet THK=100um, Coating velocity = 15mm/sec

Page 14: CONFIDENTIAL Optimization of LOCA Gap Fill Process by High … · 2018-10-08 · Lip gap=0.5mm, Coating area = 90.8mm×52.4mm LOCA =5,000-7,000CPS Hybrid Bump height=10.53 um Bump

Copyright © 2011 MMC RYOTEC CORPORATION ALL RIGHTS RESERVED

CONFIDENTIALLOCA =5,000-7,000CPS Hybrid, Target wet THK=100um, Coating velocity = 30mm/sec

Without the frame.

Page 15: CONFIDENTIAL Optimization of LOCA Gap Fill Process by High … · 2018-10-08 · Lip gap=0.5mm, Coating area = 90.8mm×52.4mm LOCA =5,000-7,000CPS Hybrid Bump height=10.53 um Bump

Copyright © 2011 MMC RYOTEC CORPORATION ALL RIGHTS RESERVED

CONFIDENTIALLOCA =5,000-7,000CPS Hybrid, Target wet THK=100um, Coating velocity = 80mm/sec

Page 16: CONFIDENTIAL Optimization of LOCA Gap Fill Process by High … · 2018-10-08 · Lip gap=0.5mm, Coating area = 90.8mm×52.4mm LOCA =5,000-7,000CPS Hybrid Bump height=10.53 um Bump

Copyright © 2011 MMC RYOTEC CORPORATION ALL RIGHTS RESERVED

CONFIDENTIALLOCA =5,000-7,000CPS Hybrid, Target wet THK=100um, Coating velocity = 80mm/sec

With Double Frame

Page 17: CONFIDENTIAL Optimization of LOCA Gap Fill Process by High … · 2018-10-08 · Lip gap=0.5mm, Coating area = 90.8mm×52.4mm LOCA =5,000-7,000CPS Hybrid Bump height=10.53 um Bump

Copyright © 2011 MMC RYOTEC CORPORATION ALL RIGHTS RESERVED

CONFIDENTIAL

T1

T2

T3

T=T1=T2=T2

Tungsten Carbide Long Nose Lip

L

3T ≦ L ≦ 18TT=0.2mm-0.5mm

Page 18: CONFIDENTIAL Optimization of LOCA Gap Fill Process by High … · 2018-10-08 · Lip gap=0.5mm, Coating area = 90.8mm×52.4mm LOCA =5,000-7,000CPS Hybrid Bump height=10.53 um Bump

Copyright © 2011 MMC RYOTEC CORPORATION ALL RIGHTS RESERVED

CONFIDENTIAL

Comparison data by Long Nose Lip,Stainless Steel vs Tungsten Carbide

Same dimension and same structure of Long Nose LipTarget wet THK=100um

Non homogeneous

Homogeneous

Lack rigidity Enough rigidity LOCA =5,000-7,000CPS HybridTarget wet THK=100umCoating velocity = 0.9m/minute

Page 19: CONFIDENTIAL Optimization of LOCA Gap Fill Process by High … · 2018-10-08 · Lip gap=0.5mm, Coating area = 90.8mm×52.4mm LOCA =5,000-7,000CPS Hybrid Bump height=10.53 um Bump

Copyright © 2011 MMC RYOTEC CORPORATION ALL RIGHTS RESERVED

CONFIDENTIALL ≦ 18T

Bow shapeBow shape

Flat shape

Tungsten Carbide Long Nose Lip

L=5.5mmTarget wet THK=100um, Coating gap=125umLip gap=0.5mmCoating area = 90.8mm×52.4mmLOCA =5,000-7,000CPS Hybrid

L=5.4mmT=0.3mm

L=6.0mmT=0.3mm

L=6.6mmT=0.3mm

Page 20: CONFIDENTIAL Optimization of LOCA Gap Fill Process by High … · 2018-10-08 · Lip gap=0.5mm, Coating area = 90.8mm×52.4mm LOCA =5,000-7,000CPS Hybrid Bump height=10.53 um Bump

Copyright © 2011 MMC RYOTEC CORPORATION ALL RIGHTS RESERVED

CONFIDENTIAL

15mm/sec Flow direction profile

-20

0

20

40

60

80

100

120

140

160

0 20 40 60

Flow direcion[mm]

THK[

μm]

20mm/sec Flow direction profile

-20

0

20

40

60

80

100

120

140

160

0 20 40 60

Flow direction[mm]

THK[

μm]

Data comparison on Flow direction by coating velocity

Bump

L=5.5mm, Target wet THK=100um, Coating gap=125umLip gap=0.5mm, Coating area = 90.8mm×52.4mmLOCA =5,000-7,000CPS Hybrid

Bump height=19.53 um Bump height=18.49um

Page 21: CONFIDENTIAL Optimization of LOCA Gap Fill Process by High … · 2018-10-08 · Lip gap=0.5mm, Coating area = 90.8mm×52.4mm LOCA =5,000-7,000CPS Hybrid Bump height=10.53 um Bump

Copyright © 2011 MMC RYOTEC CORPORATION ALL RIGHTS RESERVED

CONFIDENTIAL

40mm/sec Flow direction profile

-20

0

20

40

60

80

100

120

140

160

0 20 40 60

Flow direction[mm]

THK[

μm]

30mm/sec Flow direction profile

-20

0

20

40

60

80

100

120

140

160

0 20 40 60

Flow direction[mm]

THK[

μm]

Data comparison on Flow direction by coating velocity

Bump

L=5.5mm, Target wet THK=100um, Coating gap=125umLip gap=0.5mm, Coating area = 90.8mm×52.4mmLOCA =5,000-7,000CPS Hybrid

Bump height=20.88 um Bump height=18.75um

Page 22: CONFIDENTIAL Optimization of LOCA Gap Fill Process by High … · 2018-10-08 · Lip gap=0.5mm, Coating area = 90.8mm×52.4mm LOCA =5,000-7,000CPS Hybrid Bump height=10.53 um Bump

Copyright © 2011 MMC RYOTEC CORPORATION ALL RIGHTS RESERVED

CONFIDENTIAL

80mm/sec Flow direction profile

-20

0

20

40

60

80

100

120

140

160

0 20 40 60

Flow direction[mm]

THK[

μm]

60mm/sec Flow direction profile

-20

0

20

40

60

80

100

120

140

160

0 20 40 60

Flow direction[mm]

THK[

μm]

Data comparison on Flow direction by coating velocity

Bump

L=5.5mm, Target wet THK=100um, Coating gap=125umLip gap=0.5mm, Coating area = 90.8mm×52.4mmLOCA =5,000-7,000CPS Hybrid

Bump height=19.46 um Bump height=17.16um BEST

Page 23: CONFIDENTIAL Optimization of LOCA Gap Fill Process by High … · 2018-10-08 · Lip gap=0.5mm, Coating area = 90.8mm×52.4mm LOCA =5,000-7,000CPS Hybrid Bump height=10.53 um Bump

Copyright © 2011 MMC RYOTEC CORPORATION ALL RIGHTS RESERVED

CONFIDENTIAL

20mm/sec WEB direction profile

-200

2040

6080

100120

140160

0 20 40 60 80 100

WEB direction[mm]

THK[μ

m]

15mm/sec WEB direction profile

-20

0

20

40

60

80

100

120

140

160

0 20 40 60 80 100

WEB direction[mm]

THK[

μm]

Data comparison on WEB direction by coating velocity

Small bump

L=5.5mm, Target wet THK=100um, Coating gap=125umLip gap=0.5mm, Coating area = 90.8mm×52.4mmLOCA =5,000-7,000CPS Hybrid

Bump height=13.94 um Bump height=11.87um

Page 24: CONFIDENTIAL Optimization of LOCA Gap Fill Process by High … · 2018-10-08 · Lip gap=0.5mm, Coating area = 90.8mm×52.4mm LOCA =5,000-7,000CPS Hybrid Bump height=10.53 um Bump

Copyright © 2011 MMC RYOTEC CORPORATION ALL RIGHTS RESERVED

CONFIDENTIAL

40mm/sec WEB direction profile

-20

0

20

40

60

80

100

120

140

160

0 20 40 60 80 100

WEB direction[mm]

THK[

μm]

30mm/sec WEB direction profile

-20

0

20

40

60

80

100

120

140

160

0 20 40 60 80 100

WEB direction[mm]

THK[

μm]

Data comparison on WEB direction by coating velocity

Small bump

L=5.5mm, Target wet THK=100um, Coating gap=125umLip gap=0.5mm, Coating area = 90.8mm×52.4mmLOCA =5,000-7,000CPS Hybrid

Bump height=10.53 um Bump height=11.95um

Page 25: CONFIDENTIAL Optimization of LOCA Gap Fill Process by High … · 2018-10-08 · Lip gap=0.5mm, Coating area = 90.8mm×52.4mm LOCA =5,000-7,000CPS Hybrid Bump height=10.53 um Bump

Copyright © 2011 MMC RYOTEC CORPORATION ALL RIGHTS RESERVED

CONFIDENTIAL

80mm/sec WEB direction profile

-20

0

20

40

60

80

100

120

140

160

0 20 40 60 80 100

WEB direction[mm]

THK[

μm]

60mm/sec WEB direction profile

-20

0

20

40

60

80

100

120

140

160

0 20 40 60 80 100

WEB direction[mm]

THK[

μm]

Data comparison on WEB direction by coating velocity

Small bump

L=5.5mm, Target wet THK=100um, Coating gap=125umLip gap=0.5mm, Coating area = 90.8mm×52.4mmLOCA =5,000-7,000CPS Hybrid

Bump height=10.75 um Bump height=10.23um BEST

Page 26: CONFIDENTIAL Optimization of LOCA Gap Fill Process by High … · 2018-10-08 · Lip gap=0.5mm, Coating area = 90.8mm×52.4mm LOCA =5,000-7,000CPS Hybrid Bump height=10.53 um Bump

Copyright © 2011 MMC RYOTEC CORPORATION ALL RIGHTS RESERVED

CONFIDENTIALPrevious our study of bump reduction

Page 27: CONFIDENTIAL Optimization of LOCA Gap Fill Process by High … · 2018-10-08 · Lip gap=0.5mm, Coating area = 90.8mm×52.4mm LOCA =5,000-7,000CPS Hybrid Bump height=10.53 um Bump

Copyright © 2011 MMC RYOTEC CORPORATION ALL RIGHTS RESERVED

CONFIDENTIAL

Trend of coating gap vs Ski Jump(Bump), Coating widthCoating width: 246mm Target Wet THK: 100um(WET)

The inverse proportionSki Jump(Bump) vs Coating width

10mm/sec 30mm/sec

Previous our study of bump reduction

Page 28: CONFIDENTIAL Optimization of LOCA Gap Fill Process by High … · 2018-10-08 · Lip gap=0.5mm, Coating area = 90.8mm×52.4mm LOCA =5,000-7,000CPS Hybrid Bump height=10.53 um Bump

Copyright © 2011 MMC RYOTEC CORPORATION ALL RIGHTS RESERVED

CONFIDENTIALConclusion

1. Tungsten Carbide Long Nose is useful to LOCA process for Sensor and Touch panel.

2. Stainless Steel Long Nose is not enough rigidity for this process.

3. Tungsten Carbide Long Nose outperformed to Stainless steel Long Nose.

4. It seems that higher coating velocity is suitable for this process.

5. Tungsten Carbide Long Nose Length must be 3T ≦ L ≦ 18T & T=0.2mm-0.5mm in this study.

6. In previous our study explained How to reduce the bump.


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