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Industrial Metrology from Carl Zeiss We make it visible. Contact and optical sensors from a 360° perspective
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Page 1: Contact and optical sensors

I n d u s t r i a l M e t r o l o g y f r o m C a r l Z e i s s

We make it visible.

Contact and optical sensors from a 360° perspective

TS 45126 CZ/Druckschrift – Sensoren – 60-25-093-englisch 1/11.6.2007

Page 2: Contact and optical sensors

Bright future with sensors from Carl Zeiss

The product line of Carl Zeiss Industrial

Metrology – the technology leader – is

extremely versatile and includes coordinate

measuring machines, sensors, software,

technical service, comprehensive customer

service and support. Carl Zeiss sets the

standard not only for measuring machines,

but also for sensors. They meet the increas-

ing expectations on quality and flexibility.

For premium measuring performance and

peak productivity.

Whatever your needs – active or passive,

optical or contact, touch-trigger or scanning

– the world of sensors from Carl Zeiss offers

the solution.

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Page 3: Contact and optical sensors

Contact Flexible Optical

ContentsSensor mount:

RDS 4|5

Sensors:

RST-P 6|7

ViSCAN 8|9

DTS 10|11

LineScan 12|13

VASTXXT 14|15

DTDynaTouch 16|17

VASTXT 18|19

VASTgold 20|21

EagleEyeNavigator 22|23

Probe Change Magazine 24 | 25

Technical Data 26 | 27

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Page 4: Contact and optical sensors

RDS.

Sensor mount

Compatible

sensors:

RST-P

ViSCAN

DTS

LineScan

VAST XXT

The basis for maximum flexibility.

The best articulating probe holder in its

class enables you to reach virtually all

angles using many single positions.

TheRDSarticulatingprobeholderisparticularly

well-suitedformeasuringcomplexparts,where

featuresrequiremanystyliwithdifferentspatial

directions.Itreachesupto20,736positionsin

2.5-degreeincrements–thereforeproviding

accesstoeverypartfeature.Thisismadepossible

bythehorizontallyandperpendicularlyallocated

rotaryaxeswithrotationalrangesofplus/minus

180degrees.

Furthermore,theRDS-CAAfortouch-trigger

sensorsleadstoshortercalibratingtimes:onlya

fewspatialanglepositionsrequirecalibration.

ProgrammingtimesarealsoreducedastheRDS

canbeeasilypositionedusingthejoystickonthe

controlpanel. 360˚

360˚

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Page 5: Contact and optical sensors

RDSThe accuracy and range of motion offered by RDS is unparalleled by any other articulating system. RDS is also highly f lexible: contact and optical sensors are also used with this sensor carrier.

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Page 6: Contact and optical sensors

RST-P.

As a result of a unique combination of

technical features, the RST-P touch-trigger

sensor enables a broad range of applica-

tions and delivers high precision in all

probing directions.

Thecharacteristicfeatureofthissensoristhe

fastanddynamiccaptureofmeasurementdata

throughsingle-pointprobing,freefromstylus

bendingandmechanicalhysteresis.

RST-Pworksaccordingtoadualprinciple.This

meansitdeliverstheactualprobingpulsefrom

thePiezo-electricelementslocatedinfrontofthe

kinkpoint.Thethree-pointbearingalsoservesas

amechanicalkinkpointthatverifiesprobingand

protectstheRST-Pfromdamagecausedby

contactwiththeworkpieceandcollisions.

Moreover,thedeflectionforcescausedbythe

bearingsanddirectiondonotinfluencethe

measuringresult:RST-Pdeliversthesameaccuracy

inallprobingdirections.Specialcalibrationsare

notrequiredforslantedmeasuringorprobing

tasks.

Touch-trigger sensors

Precision in all probing directions.

Intheautomotive,engineering,tool-makingand

mold-makingindustries,thissensoristhebest

solutionforlinearmeasurementsonprismatic

partsorfastpointsequencesonanysurface.

Compatible

measuring machines:

CONTURA G�

ACCURA

PRISMO navigator

PRO/PRO T

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Page 7: Contact and optical sensors

RST-PRST-P features a robust, long-lasting, wear-free design and high sensitivity – consistently in all spatial directions.

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Page 8: Contact and optical sensors

ViSCAN.

The complexity of test pieces today is so

extensive that contact or optical sensors

alone are no longer sufficient. With the

ViSCAN 2D optical probe, it is now possible

to perform touch and optical measurements

on one machine.

ThehallmarkofViScanisitsflexibilityinall

aspects:combinedwithRDS,itpermitsmeasure-

mentsinallspatialdirectionswithoutrechucking

thepart.Differentlensescanalsobeused.The

workingdistanceispracticallyindependentofthe

lensused,allowingthemeasurementofdeep

features.Inadditiontothemeasurementinthe

picture,theauto-focussystemalsopermits

measurementsperpendiculartothecameraplane.

ViScanisparticularlywell-suitedforthemeasure-

mentofpartswithverysmallortwo-dimensional

geometriesand/orsoftmaterialssuchassheet

metal,rubberorplasticparts.Difficultmeasure-

mentscanalsobeperformedonlow-contrasttest

piecessuchaspunchedcomponentsorprinted

circuitboardsusingtheoptional,mobiletrans-

mittedlightstages.

Spotlight on two dimensions.

Optical sensors

Compatible

measuring machines:

CONTURA G�

ACCURA

PRISMO navigator

O-INSPECT

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Page 9: Contact and optical sensors

ViSCANThe ViScan optical probe is an outstanding tool for 2D image analysis on small parts and for non-contact measurements of soft workpieces.

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Page 10: Contact and optical sensors

DTS.

The optical diode stylus works like a

contact, touch-trigger single-point stylus,

but functions as a non-contact stylus

because of its built-in LED diode beam.

WithDTS,clampingworkpiecesisnolonger

required–deformationsareavoidedandbothsoft

andsensitivepartssuchasplasticine,clay,wood,

plastics,foamparts,materialorlacquered

surfacescanbeeasilyprobed.Usersbenefitfrom

fast,easyandsafeprobingwithouthavingto

thinkaboutcontactwiththeworkpiece.

WithDTS,theprobingdirectiondoesnot

influencethemeasurementsincethissensoris

symmetricallydesigned.Inclinedsurfacesup

toaninclinationangleof70degreesoran

entiresphericalsectionwithasectorangleof

140degreescanalsobeprobed.

Optical sensors

Point-by-point optical data capture.

Compatible

measuring machines:

CONTURA G�

ACCURA

PRISMO navigator

PRO/PRO T

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Page 11: Contact and optical sensors

DTSThe diode stylus features a compact design and low weight. There are no mechanical wear-and-tear parts and therefore no need for maintenance.

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Page 12: Contact and optical sensors

LineScan.

LineScan is the tool of choice when captur-

ing the entire surface of forms using point

clouds is important – whether for a com-

parison with available nominal CAD data

sets or for the creation of a new CAD model.

LineScanisextremelyfast:upto250,000points

persecondcanbecapturedforhigh-speed

digitizing.Theshortmeasuringtimesleadtoa

considerableincreaseinproductivity.CALYPSO

measuringsoftwareandtheautomaticsensor

changeonmachinesfeaturingmasstechnology

alsocontributetothehighproductivityofthis

sensor.Theaccuracyalsoincreasesthankstothe

definablepointgridsandconsolidationpossibili-

tiesforintelligentpointreduction.

TheLineScanpackageincludesascanner,cables,

softwareandextensivedatabasesforsensor

orientation,illuminationandscanningsettings,

andworkpiececoordinatesystems.

Optical sensors

Compatible

measuring machines:

CONTURA G�

ACCURA

PRISMO navigator

PRO/PRO T

Point clouds at the speed of light.

TheLineScanopticalsensoristhetoolofchoice,

particularlyforcarbodies,mold/toolmaking,

modelconstructionanddesign,aswellasfor

touch-sensitiveorfinelystructuredsurfaces.

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Page 13: Contact and optical sensors

LineScanWhen a fast measurement of freeform workpieces for a smooth form measure-ment is required, the LineScan optical sensor is the ideal choice.

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Page 14: Contact and optical sensors

VAST XXT.

VAST XXT permits high-accuracy scanning

on the RDS articulating probe holder with

small dimensions.

Therearealargenumberofmeasuringappli-

cationsthatcanbenefitfromtheflexibilityofan

articulatingprobeholdercombinedwithscanning

capability.VASTXXTisidealforsuchtasks.

Asareplacementfortouch-triggersensors,VAST

XXTincreasestheoperationalsafetyandaccuracy

ofthemeasurements.Italsoaddsscanning

functionality,thusprovidinginformationonthe

formofthefeatures.

Thedesignoflightweightscanningsensorsonthe

articulatingprobeholderrequiresdifferentsensor

modules.Withonlytwomodules,VASTXXT

coversthetypicalstyluslengthrangesforthis

sensordesign.Thissensoracceptslateralstyliup

to40mm.Itisalsosuitableforfixedinstallation.

Scanning sensors

Compatible

measuring machines:

CONTURA G�

ACCURA

PRISMO navigator

TS 45126 CZ/Druckschrift – Sensoren – 60-25-093-englisch 1/11.6.2007

Scanning the different way.

1�

Page 15: Contact and optical sensors

VASTCombined with RDS, VAST XXT is particu-larly well-suited for measurements of parts requiring many angular positions. Light-weight and short stylus configurations such as the star probe are used here.

XXT

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Page 16: Contact and optical sensors

DT DynaTouch.

Measuring sensors

Scoring points with speed.

Compatible

measuring machines:

CONTURA G�

ACCURA

What makes this single-point probe system

so special? DT measures using a very robust,

integrated dynamic system, thus making it

more reliable and reproducible than traditi-

onal single-point systems.

Complexstylusconfigurationscanbeflexiblyused

withDT:theautomaticweightcompensation

enablestheinstallationofheavystyliupto500g

andeventheuseofone-sidedweights.Deep

boreswithextensionsupto500mmcanbe

measuredjustaseasilyastinyfeatureswithstylus

tipsassmallas0.6mm.DTdeliversstablesingle-

pointresultsthroughmulti-pointacceptanceand

thedynamicdeterminationofmeanvalues.

BecausetheDTsensorisself-centering,itis

possibletomeasureaV-nut,gearorathreaded

hole,forexample.

Whenapplicationsrequiremorethansingle-point

measuring,DTcanbeinexpensivelyupgradedto

VASTXTandthustoscanning.VASTXTfitsthe

samereceptacleandpermitsthesamestyli

combinationsandweights.

Thestylusadapterandrackareidentical;existing

measuringprogramscanbeeasilyused.

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Page 17: Contact and optical sensors

DTThe DT DynaTouch six-way probe makes it possible to use different styli in a single configuration. And it is an excellent value for the money.

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Page 18: Contact and optical sensors

VAST XT.

The line of active VAST sensors plays a

major role in all metrology applications

that demand maximum precision with large

stylus configurations. VAST XT provides the

foundation for entry into the world of active

scanning technology.

VAST XT continually monitors probe deflection.

The same low measuring force is generated and

regulated by the probe – thus minimizing dynamic

influences such as stylus bending.

In addition to active scanning, this sensor also

permits single-point measurements: for example,

the sensor enables the flexible use of complex

stylus configurations and self-centering.

As a result of its high-speed scanning capabilities,

VAST XT can complete practically any task: form

and length measurements, curve and freeform

measurements, and reverse engineering. The

applications cover plastic machined parts and

Styrofoam, brake components, crankshafts,

engine blocks and turbine blades.

Scanning sensors

Compatible

measuring machines:

CONTURA G2

GageMax navigator

ACCURA

“All systems go” for active scanning.

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Page 19: Contact and optical sensors

VAST XT accepts complex and thus heavy stylus configurations: stylus lengths up to 500 mm and stylus weights up to 500 g can be combined with VAST XT.

VASTXT

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Page 20: Contact and optical sensors

VAST gold.

The active scanning sensor offers higher

dynamics through optimized moving masses

and higher rigidity resulting from optimized

joints.

VASTgoldistheidealsensorforcontactscanning

andsingle-pointmeasurementswithlongstyliup

to800mmandstylusweightsupto600g.

Asymmetricalstylusconfigurationscanalsobe

usedwithVASTgold.

Inaddition,VASTgoldfeatureshighscanning

speedsupto300mmpersecondwithnavigator

technology,goodcollisionprotectionforall

directionsofmovementandveryhighaccuracy.

Theprobingforcecanbeadjustedtothestylus

geometryandtheworkpiecematerialandis

alwaysconstant–itcanbeprogrammedbetween

50and1000milli-newtons.

Incombinationwithnavigatortechnologyin

particular–object-orientedCALYPSOsoftware

withautomaticallygeneratedmeasurement

strategiesfromCarlZeiss–VASTgoldincreases

themeasuringperformanceandthusproductivity

considerably.

Scanning sensors

Compatible

measuring machines:

ACCURA

PRISMO navigator

CenterMax navigator

MMZ G, MMZ T

Peak scanning performance guaranteed.

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Page 21: Contact and optical sensors

Size, form and position in one setting on one machine in one reference system – that is VAST gold.

VAST gold

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Page 22: Contact and optical sensors

EagleEye Navigator.

Optical sensors

Compatible

measuring machines:

PRO/PRO T

Car body measurement in sharp focus.

Quality assurance in car body construction

is among the most complex tasks in metro-

logy. EagleEye Navigator is based on a com-

pletely new optical measuring technology

that precisely meets these demands.

Automobile manufacturing requires measurements

of countless bores in addition to edges, sections

or transitions. Checking bores is extremely time-

consuming work, particularly for serial inspection.

EagleEye Navigator leads to time savings of almost

50% for the entire car body. Typical procedures in

traditional measuring methods are completely

eliminated: no assembly and disassembly of

threaded adapters, no material, and storage or

handling costs.

Also, the use of EagleEye Navigator immediately

reduces reaction times and simultaneously

increases the quality of pressed parts. This results

in top-quality evaluations of the results with

information on the diameter, position and form of

the part feature down to the nearest micrometer.

EagleEye Navigator turns your measuring machine

into production equipment.

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Page 23: Contact and optical sensors

EagleEye Navigator is based on a very simple principle of physics: triangulation. This states that all elements of a triangle can be calculated if two angles and a side of the triangle are known.

EagleEye

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Page 24: Contact and optical sensors

MSR, MSR mini, ProMax, ProMax light.

Probe Change Magazines

MSR, MSR mini,

ProMax and ProMax

light are ideal for

the entire range

of sensors from

Carl Zeiss.

Extras in the premium segment.

When different parts are measured, a

variety of stylus configurations are required.

These are managed and changed using CNC

measuring programs. This challenge can be

easily mastered with a probe rack expansion

from Carl Zeiss.

MSR, MSR mini

TheMSRmulti-sensorrackisanintelligentand

economicalsolutionforallbridge-typemeasuring

machines.Thefreelyselectablesensorandstylus

storagelocationsensureahighlevelofflexibility,

thuskeepingallfuturesystemenhancementson

thetableforoperatorsofZEISScoordinate

measuringmachines.

Benefits:

• FlexibleassemblyoftheMSRwithalluseable

stylusandsensorstoragelocations

• Verticallyadjustableassemblylevelfor

customizeduse

• Robustandsturdydesign

• Standard:twostoragelevels,expandableto

threelevels

ProMax, ProMax light

Tentofifteenstyliareoftenstoredontwolevels

inthemeasuringrangeforthemeasurementof

complexworkpieces.Atypicalstylusrackthus

requiresupto25percentofthemeasuringrange

oftheCMM.Thetravelrangebecomeslimitedas

aresultoftherigidstylusrack,particularlyduring

themeasurementoflargeworkpiecesforwhich

verylongstyli(intheYdirection)areused.The

solution:ProMaxautomaticallymovesthemulti-

sensorrackoutofthemeasuringrangewhena

stylusisnotneeded.

Benefits:

• Thestyliarenolongerinthecollisionrange

• ProMaxlightcanbedirectlyusedwithexisting

measuringprogramswithoutchanges

• ProMaxlightfeaturesarobustdesignandcan

beconfiguredaseasilyasthestandardrack

• CALYPSOandCMM-OScompatible

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Page 25: Contact and optical sensors

MSR and ProMax are the tool of choice when many stylus configurations are required for measurements.

MSRProMax

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Page 26: Contact and optical sensors

Technical Data

RDS

RST-P ViSCAN DTSLineScan

Design Touch-triggersingle-point Camerasensorwithautofocus Opticaltriangulationlinesensor Diodestylus Passivescanningsensor Activesingle-pointsensor Activescanningsensor Activescanningsensor Opticaltriangulation

sensor linesensor

Probing procedure Singlepoint Optical2Dscanning Opticallinescanning Optical1D Single-point,scanning Single-point, Single-point, Single-point, Self-centeringoptical

self-centeringmeasuring self-centeringscanning, self-centeringscanning, linescanning,

navigatorcapable navigatorcapable navigatorcapable

Probing force * – – – Dependsonstyluslength: Continuousfrom0.05to1N Continuousfrom0.05to1N Continuousfrom0.05to1N –

0.01–0.13N

Probe measuring range Cameraresolution: 25mm(extended55mm) 50x70µm +/–0.5mm +/–1.5mm Upto±0.3mmwithVAST1 Upto±0.3mmwithVAST1

768pixels(horizontal)x Upto±1.0mmwithVAST2 Upto±1.0mmwithVAST2

576pixels(vertical)

Probe deflection range – – – max.±3mm max.±2mm max.±2mm max.±3mm

Measuring speed Singlepoints:upto1.5s/point 250,000points/s Singlepoint:upto1.8s/point Singlepoints:upto2s/point Singlepoint:upto2s/point Singlepoint:upto2s/point

(upto1000lines/s Scanningupto150points/s Scanningupto200point/s Scanningupto300points/s

or1000points/line)

Probe Change Magazine CNCchangeinconjunction CNCchangeinconjunction CNCchangeinconjunction CNCchangeinconjunction CNCchangeinconjunction CNCchangeinconjunction CNCchangeinconjunction CNCchangeinconjunction

Manualchangeviasoftware withprobemagazineand withprobemagazineand withprobemagazineand withprobemagazineand withprobemagazineand withprobemagazineand withprobemagazineand withprobemagazineand

(electromagneticreceptable) controllersoftware controllersoftware controllersoftware controllersoftware controllersoftware controllersoftware controllersoftware;RST-Tvia controllersoftware

activeinterfacechangeable

Sensor extensions max.300mm – – max.100mm – – –

Stylus weight max. [g] max.10g – – max.10g max.500g max.500g max.600g

Stylus length max. [mm] max.90mm – – max.250mmwithTL2 max.500mm max.500mm max.800mm

min. sphere diameter [mm] 0.5mm – 0.6mmwithTL2 0.6mm 0.6mm 0.3mm

0.3mmwithTL1

Working distance – 75–90mm 75mm(extended83mm) 40mm – – – –

Resolution – 6.0µmx6.0µmpixelsize 12.5µm;linearityinz:±50µm –

Laser class – Illuminationequipmentisalso 2M(nospecialprotective 2 –

laserclass measures)

Line width – – max.20mm(extended46mm) –

*Nominal force during a measurement, the force at the moment of contact is up to 5x higher.

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Page 27: Contact and optical sensors

RDS

RST-P ViSCAN DTSLine Scan

VAST XXT

CONTURA G�

ACCURA

PRISMO navigator

GageMax

CenterMax

PRO/PRO T

MMZ G, MMZ T

Measuring machine

Sensors

VAST gold

EagleEyeVAST XT gold

DT

VAST goldVAST XXT EagleEye

Design Touch-triggersingle-point Camerasensorwithautofocus Opticaltriangulationlinesensor Diodestylus Passivescanningsensor Activesingle-pointsensor Activescanningsensor Activescanningsensor Opticaltriangulation

sensor linesensor

Probing procedure Singlepoint Optical2Dscanning Opticallinescanning Optical1D Single-point,scanning Single-point, Single-point, Single-point, Self-centeringoptical

self-centeringmeasuring self-centeringscanning, self-centeringscanning, linescanning,

navigatorcapable navigatorcapable navigatorcapable

Probing force * – – – Dependsonstyluslength: Continuousfrom0.05to1N Continuousfrom0.05to1N Continuousfrom0.05to1N –

0.01–0.13N

Probe measuring range Cameraresolution: 25mm(extended55mm) 50x70µm +/–0.5mm +/–1.5mm Upto±0.3mmwithVAST1 Upto±0.3mmwithVAST1

768pixels(horizontal)x Upto±1.0mmwithVAST2 Upto±1.0mmwithVAST2

576pixels(vertical)

Probe deflection range – – – max.±3mm max.±2mm max.±2mm max.±3mm

Measuring speed Singlepoints:upto1.5s/point 250,000points/s Singlepoint:upto1.8s/point Singlepoints:upto2s/point Singlepoint:upto2s/point Singlepoint:upto2s/point

(upto1000lines/s Scanningupto150points/s Scanningupto200point/s Scanningupto300points/s

or1000points/line)

Probe Change Magazine CNCchangeinconjunction CNCchangeinconjunction CNCchangeinconjunction CNCchangeinconjunction CNCchangeinconjunction CNCchangeinconjunction CNCchangeinconjunction CNCchangeinconjunction

Manualchangeviasoftware withprobemagazineand withprobemagazineand withprobemagazineand withprobemagazineand withprobemagazineand withprobemagazineand withprobemagazineand withprobemagazineand

(electromagneticreceptable) controllersoftware controllersoftware controllersoftware controllersoftware controllersoftware controllersoftware controllersoftware;RST-Tvia controllersoftware

activeinterfacechangeable

Sensor extensions max.300mm – – max.100mm – – –

Stylus weight max. [g] max.10g – – max.10g max.500g max.500g max.600g

Stylus length max. [mm] max.90mm – – max.250mmwithTL2 max.500mm max.500mm max.800mm

min. sphere diameter [mm] 0.5mm – 0.6mmwithTL2 0.6mm 0.6mm 0.3mm

0.3mmwithTL1

Working distance – 75–90mm 75mm(extended83mm) 40mm – – – –

Resolution – 6.0µmx6.0µmpixelsize 12.5µm;linearityinz:±50µm –

Laser class – Illuminationequipmentisalso 2M(nospecialprotective 2 –

laserclass measures)

Line width – – max.20mm(extended46mm) –

DT VAST XT gold

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Page 28: Contact and optical sensors

Carl ZeissIndustrielle Messtechnik GmbH73446 Oberkochen/GermanySales: 01803 336 336Service: 01803 336 337Telefax: 07364 203870Email: [email protected]/imt

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