COSMOS

Components and Smart Machines with

Micro-Nano Surface Embedded Sensors

The Vision

• Improved interaction between human and machines.

• Smart machines with imbedded sensors will improve safety, lifetime and performance.

• Short periods with improper operation with critical parameters may be avoided.

• Create intelligent surfaces of the future.

The GoalDevelop a sensor embedded into a strong, self lubricating, diamond like carbon (DLC) coating.

Substrate

CCr-CrN layer

CVD DLC

EmbeddedSensor

Cross-disciplinary task

Surface embeddedsensors

Sensor design andtechnology

DLC coating technology

3D structurization

Interface:Wiring and electronics

Sensor test

Coating test

The Team• Acreo

– Peter Leisner• Sintef,

– N. Peter Østbø• Danish Technological Institute

– Lars Pleth Nielsen • VTT

– Helena Ronkainen

Danish Technological Institute (DTI)

Responsible: Centre Manager, M.Sc., Ph.D. Lars Pleth Nielsen

Contribution:– Plasma-enhanced Si3N4 as a potential electric insulator– Wear-resistant PVD/CVD coatings– Ion beam accelerator for metal doping of DLC– Thermocouple based on e.g. copper/constantan– Testing of sensors and coatings

Acreo AB, Sweden

Responsible: Manager, Ph.D. Peter Leisner

Contribution:– 3D-micro structuring– Sensor design– Wiring and electronic connectors to sensor unit– Interface to the surrounding

Sintef/MiNaLAB, Norway

Responsible: Research Scientist, Ph.D. (Dr. ing.) N. Peter Østbø

Contribution:– Know-how and capability within piezoelectric thin films– Plasma-enhanced Si3N4 (restricted to compatible substrates)– ALD coatings (advanced oxides, nitrides etc.)– 2D-3D micro structuring– Sensor design– Materials and chemistry (polymers, wear-resistant coatings)

VTT Technical Research Centre of Finland

Responsible: Senior Research Scientist, Dr. (Tech.) Helena Ronkainen

Contribution:– Sensor design– Wear-resistant coatings: Diamond like carbon coatings– Integration of piezoelectric material (e.g. AlN) with patterned

MEMS structures– Integration of electronics– Tribological test of sensor structures