Coupled Thermal-Electrical Transient Analysis of 3D Fuses and Interconnects

Self Heating Effects of Resistive Metals

Coupled Thermal-Electrical Transient Analysis of 3D Fuses and Interconnects

• This presentation covers: •  Transient 3D thermal-electrical analysis in fuses and metal structures • Benefits are understanding heat generation inside metal structures and heat conduction

flow

Coupled Thermal-Electrical Transient Analysis of 3D Fuses and Interconnects

- 2 -

Coupled Thermal-Electrical Transient Analysis of 3D Fuses and Interconnects

Generation of a 3D Metal Structure for Thermal-Electrical Analysis

2-D cross sectional view. Wiring Structure.

- 3 -

Coupled Thermal-Electrical Transient Analysis of 3D Fuses and Interconnects

Generation of a 3D Metal Structure for Thermal-Electrical Analysis

Victory Cell is used to create the 3D structure.

- 4 -

Coupled Thermal-Electrical Transient Analysis of 3D Fuses and Interconnects

Generation of a 3D Metal Structure for Thermal-Electrical Analysis

Victory Cell is used to generate the 3D tetrahedral mesh generation.

- 5 -

Coupled Thermal-Electrical Transient Analysis of 3D Fuses and Interconnects

Transient Analysis of Metal Self Heating

Drain Current Drain Voltage

Time-dependence of drain voltage and current.

- 6 -

Coupled Thermal-Electrical Transient Analysis of 3D Fuses and Interconnects

• Victory Device solves the 3D coupled thermal-electrical transient analysis.

Transient Analysis of Metal Self Heating

- 7 -

Lattice temperature versus transient time.

Coupled Thermal-Electrical Transient Analysis of 3D Fuses and Interconnects

Transient Analysis of Metal Self Heating

Potential at t = 100ns Potential at t = 200ns

- 8 -

Coupled Thermal-Electrical Transient Analysis of 3D Fuses and Interconnects

Transient Analysis of Metal Self Heating

Log(10) of Current Density at T = 100ns.

- 9 -

Coupled Thermal-Electrical Transient Analysis of 3D Fuses and Interconnects

Transient Analysis of Metal Self Heating

Joule Heating Power at t = 100ns.

- 10 -

Coupled Thermal-Electrical Transient Analysis of 3D Fuses and Interconnects

Transient Analysis of Metal Self Heating

Lattice Temperature at t=100ns. Power turns off at this point.

Thermal conduction continues even beyond this 200ns.

- 11 -

Coupled Thermal-Electrical Transient Analysis of 3D Fuses and Interconnects

• This presentation demonstrates: • Creation of a 3D wiring structure using Victory Cell •  Tetrahedral mesh generation required for arbitrary shaped 3D structures • Self heating simulation capability for metals as well as semiconductors using

Victory Device • Coupled 3D Thermal-Electrical transient analysis using Victory Device

Summary

- 12 -