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Development of Si-doped 8-inch GaAs substrates · Umtormlty ot In-plane dlstrlbutlon ot carrier,...

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Page 1: Development of Si-doped 8-inch GaAs substrates · Umtormlty ot In-plane dlstrlbutlon ot carrier, and residual strain are as good as for 6-inch LED substrates. We expect these substrates

Page 2: Development of Si-doped 8-inch GaAs substrates · Umtormlty ot In-plane dlstrlbutlon ot carrier, and residual strain are as good as for 6-inch LED substrates. We expect these substrates

Page 3: Development of Si-doped 8-inch GaAs substrates · Umtormlty ot In-plane dlstrlbutlon ot carrier, and residual strain are as good as for 6-inch LED substrates. We expect these substrates

Page 4: Development of Si-doped 8-inch GaAs substrates · Umtormlty ot In-plane dlstrlbutlon ot carrier, and residual strain are as good as for 6-inch LED substrates. We expect these substrates

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