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Digital Microelectronic Circuits The VLSI Systems Center - BGU Lecture 2+: The Manufacturing Process 1
Digital Microelectronic
Circuits
(361-1-3021 )
Manufacturing Integrated Circuits
Presented by: Mr. Adam Teman
Appendix to
Lecture 2:
Digital Microelectronic Circuits The VLSI Systems Center - BGU Lecture 2+: The Manufacturing Process
Motivation
2
1~3 Years…
Digital Microelectronic Circuits The VLSI Systems Center - BGU Lecture 2+: The Manufacturing Process
Solution
3
Digital Microelectronic Circuits The VLSI Systems Center - BGU Lecture 2+: The Manufacturing Process
The Printing Process
4
Digital Microelectronic Circuits The VLSI Systems Center - BGU Lecture 2+: The Manufacturing Process
The Photolithographic Process
5
Digital Microelectronic Circuits The VLSI Systems Center - BGU Lecture 2+: The Manufacturing Process
Transistor Layout
6
Digital Microelectronic Circuits The VLSI Systems Center - BGU Lecture 2+: The Manufacturing Process
CMOS Process/Transistors
7
Digital Microelectronic Circuits The VLSI Systems Center - BGU Lecture 2+: The Manufacturing Process
Basic Process Flow
8
Lightly Doped Wafer
Grow Field Oxide
Define Wells
Grow Gate Oxide
Deposit Poly Gate
Etch Gates
Implant Source/Drain
Deposit Isolation
Oxide and Contacts
Deposit Metal 1
Deposit Isolation
Oxide and Via 1
Deposit Metal 2