Dimension Measurementof Test Disks for RDDSl

KEK

YWATANABE

1. Measurement method

l ZEISS CMM General view , specification etc.

2. Performance of CMM measurement

3. Measurement procedure of test disks

4. Typical measurement results

& comparison to SLAC contour measurement

5. Results

6. Discussion

n

ZEISS UPMC-850 CARAT

l Measurement volume

X axis 850mm, Y axis 1200mm , Z axis 600mm

l Maximum weight

1500kg

l Measurement accuracy (VDI / VDE 2617)

Every axis Ul 0.5+L / 900 pm =+ -0.5 pm /60mm

Space u3 0.8+L / 600 pm

l Probe head

Universal probe head

l Probe(for Universal probe head)

Diameter 4 lmm

Length 16mm

l CNC program

From alignment to measurement & data output

Measurement of reference gauges1. Block gauge

*Industrial standard gauge grade 00

(JIS grade00 6Ot-0.00012 Parallelism 0.00006)

* CMM agreed within 1 pm in X,Y

2. Reference cylinder (made of copper)

* Made by KEK

* OD @61.000 ID @ 22.000

* KEK CMM agreed with Mitsutoyo within 0.6 pm

* Want to compare with SLAC CMM

Should be studied once more after maintenance of CMM

1. Measurement of Block Gauges (Probe @ 3,pressure 0.2N)

Gauges length z X Y

60mm 60.0017 60.0009 60.0003t- 0.00015 * 0.0002 -t 0.0003

z-z x-x Y-Y

1 1 1 1

2. Measurement of Reference Gauges

Made by

KEK

KEK

KEK

REFl

REF2

REF3

oD(61.000/zo”c) ID(Z1.996/20°C)

KEIK-CMM Mitsutoyo KIZK- CMM Mitsutoyo

20°C 19.8”C 20°C 19sc

61.0023 2 1.9969

to.1 kO.1

61.0013 21.9991

61.0017 61.0013 21.9985 2 1.9990

to.1 61.0012 to.1 21.9991

61.0013 21.9992

61.0018 61.0014 21.9993 21.9993

kO.2 61.0014 -to.1 21.9991

Disk measurement method1. Temperature

* Room temperature 20°ct2”c

* Disk surface temperature (Before & after CMM all+O5”c)

2. Measurement condition* Probe diameter 4 lmm

* Probing pressure 0.2N(variable 0.05N to 1N)

* Probing speed lmm/sec(set at almost minimum)

3. Probe calibration* Calibration sphere Ceramics 4 15 6 points calibration

Vacuum chuck

.

.

.

Material A15052

Vacuum area 4x46 Pressure -1kg

Disk does not move by proving (Pressure>>Probing Pressure)

Top surface is machined by Ultra-precision lathe before each batch

Merit 1. Stability of disk against pressure

2. Less distortion due to fixing

3. Full of experience in turning lathe machining

1. The thickness cannot be measured directly

2. Both sides cannot be measured at once

. Demerit

n

Measurement process of rough machining disk

Alignment

HOM @

HOM @

Measurement

. OD

. P- 2a

* Zb(Z-0.1)

* k!l

- !s* HOM 0 d

. HOM 0 d

. HOM @ d

* HOM @ d

. Slit 0 3mm

1.5mm

h

. Slit 0 3mm

1.5mm

h

* Slit 0 3mm

1.5mm

h

. Slit @ 3mm

1.5mm

h

. Slit 0 Depth +-

* Slit @ Depth +-

. Slit @ Depth t -

. Slit 0 Depth -+

SURFACE

CIRCLE

CIRCLE

CIRCLE

4point

4point

3point

3point

ZEROPOINT,TR.SPACE

ZEROPOINT

ADR PROG23

CIRCLE 4point

POINT 4point (Surface of

CIRCLE 4point Vacuum Chuck)

CIRCLE lpoint

POINT 4point

POINT lpoint

CIRCLE 4point

CIRCLE 4point

CIRCLE 4point

CIRCLE 4point

POINT Zpoint

POINT Zpoint

POINT lpoint

POINT Zpoint

POINT Zpoint

POINT lpoint

POINT Ppoint

POINT 2point

POINT lpoint

POINT Spoint

POINT Ppoint

POINT lpoint

POINT +- lpoint

POINT i: lpoint

POINT t lpointPOINT * lpoint

-3-

III CMM measurement point (rough cut cell!

Xaxts

-

Measurement process of final machining disk

Alignment

HOM @

HOM 0

SURFACE

CIRCLE

CIRCLE

CIRCLE

lpoint

lpoint

lpoint

4point

ZEROPOINT,TR.SPACE

ZEROPOINT

SYMMETRY

ADR PROG23

. OD

* P. 2a

. 2b(Z-0.1)

* Zb(Z-0.3)

. g1

. @

. Slit @ Depth

. Slit 0 Depth

. Slit @ Depth

. Slit 0 Depth

CIRCLE 4pointPOINT lpoint

CIRCLE lpoint

CIRCLE 4point

CIRCLE 4pointPOINT lpoint

POINT lpoint

POINT 2pointPOINT 2point

POINT Spoint

POINT 2point

L%lrface of

Vacuum Chuck)

-4.

Xaxis

Vccwm cnuch

Time of measurement

* Setting 5 minutes

* Edit of program 2h / 1 type

* Alignment 1 Rough : 20 minutes / disk

and

Measurement Final : 10 minutes / disk

* Output data 2 minutes

Comparison of typical data of #102,#153Those taken by KEK and SLAC

a,b,gLgWDall consistent within 2-3 pm

except #102B

12

-B11

10

9

8

7

E

5:b

L

tY

1

t

-.___. ;,___. ---

ILI I I I I I

I- 4 - 3 - 2 - 1 0 1

121.9,bm Nom. curve : Act. curve: Tolerance y.

Dscrptlon: RODS TEST CELL X102 Element : PROFILE-CURVSer. No. : TEST/003 File No. : x**)c% Department: MET-06Qcustomer : JUWEN WAN6 Draw. No.: PF-290-287-39 E

X Y Z Nr.Farm . . . . . . . . . 0.01313 Min. Deviat.: -0.00848 0 . 6 3 2 5 . 7 9 0 0 . 0 0 0 7 9Lower Toler. :-0.00400 Max. Deviat.: 0 a00464 -1.467 10.154 0.000 157Upper Toler. : 0.00400Error Magnif.: 30No. of points: 168

M E TInspectionSLAC Department- 060 -Established 1962

-----53.1999 5:17Ptl SLAURRD-Q 650 926 5368 NO.409 P.2

,21.9-,.m Nom. curve :

:Talerance :---------

Dscrptlon; RODS Xst CELL +I53 - ; i ~Elemnt : PRoFILEJUR~

SBr. NO. : T-NO.1JUWCN HAF&

File No. :, ?t-wrX ;, oepartment:'HEl~Ol3QCustolner : Draw. No.: PF-290~2/37-?$ E

,;. ..,;k Y- . . z NP.

Form * 0.61678 Min. Oeviat.: -0.Oi40E1 ,, ib.644 2,868 -3.734 e8e . , . . . . . .Lower Toler. :-0.00400 Wax. Oeviat.! ‘.Q .00270 A ise, . 3.612 -4.702 ii5Upper .Toler. : 0.00400Error Hagnif.: :. 30No. of.points: _. ice-. I' .

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TESTRDDS gl (final)

Most data are with larger than design by 4 to 10 microns.

l gl -x+n gl -Y+

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z -2.992$ - 3

8u -3.01

-3.02

-3.03

-3.04

-3.05

TESTRDDS depth of 3mm slits (final) Slit are with +20um except #102 rough machined diskThose may change due to final machining

---- 6 depl-1n depl-2

A dep2-1l dep2-2m dep3-1

l dep3-2o dep4-1A dep4-2

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TESTRDDS-3mm slit width(rough=final)

Scattering is within Z!I 1 Oum for each lot

3.01

z25 3s?3

2.99

.2 . 9 8 .. . . . . . t . . . . . . Tt . . . . ~.:.:.-- . . .. 2Tr . . ...‘... ~.2...‘P*...‘..m .. . . . ...’

2 . 9 7

-t slit3-1 W

+- slit3-2W-+ slit3-3W

slit3-4W

0.04

0.03

0.02

0.01

t-0.03

-0.04

-0.05

-0.06

Position of 3mm slits

Within ?I 1 OumThose #102 may be due to training stagein CMM or machining?

6 slit3 ldiff axis

w slit3-2diff axisA slit3-3diff axis

slit3 4diff axis

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Position of 1.5mm slits

Same as 3mm slit_._ __.. _-..-..- .__ . .._. _. .^ . ..,,.. ,.- ., .__ ..~ .._ _ ._.: . . . ..-- .._ . -.- -.

4 slitl.5-1 diff axisn slitl.5-2diff axisA slitl.5-3diff axis

slitl.5-4diff axis

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- 3

-3.02

zY8= -3.04

-3.06

-3.08

TESTRDDS-3mm slits depth(as of rough machining) Slit are within + 20um except #102 rough machined diskthose may change due final machining

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ..*.........................................................................................*.........................*...*.........*......................................................l depl-1

n depl-2

dep2-1

dep2-2

⌧ dep3-1

l dep3-2

-t dep4-1

- dep4-2

Cell No.

Conclusion

1. We can measure disk using ZEISS at KEK

with precision of about 1 pm in diameter , width , depth etc.

2. Precision of thickness measure is bad. About several pm

3. One disk can be measured using the present method

in 2-hours programming and O.&hour measurement for

rough and final in total

Development of the measuring RDDSl

fl We need to establish a fixture by

Re-designing the chuck to measure thickness

Studying of fixture to set disk vertically

To precisely measure thickness

To measure both sides at once

fl Software for 200 different disks

Present CMM is Difficult to edit program for each discrete data

Very time consuming to program

Should we investigate the usage of other machine?