Part-financed by the European Union (European Regional Development Fund
Dissemination and fostering of plasma based technological innovation A joint Baltic Sea project within Interreg IVB
Power management for different non-thermal plasma devices Dr inż. Marcin Hołub
mgr inż. Michał Balcerak
●Welcome !
●A few organisational remarks
●Types of non-thermal plasma sources – electrical point of view
●Electrical characteristics of non-thermal plasma
●Reactor models
●Plasma power measurement and calculation
●A few words about dielectrics
●Types of power sources
●A few practical examples
●Closing remarks
2 Plasma assisted VOC cleaning and …
Outline:
●Welcome !
●A few organisational remarks
●Types of non-thermal plasma sources – electrical point of view
●Electrical characteristics of non-thermal plasma
●Reactor models
●Plasma power measurement and calculation
●A few words about dielectrics
●Types of power sources
●A few practical examples
●Closing remarks
3 Plasma assisted VOC cleaning and …
Outline:
●Welcome !
●A few organisational remarks
●Types of non-thermal plasma sources – electrical point of view
●Electrical characteristics of non-thermal plasma
●Reactor models
●Plasma power measurement and calculation
●A few words about dielectrics
●Types of power sources
●A few practical examples
●Closing remarks
4 Plasma assisted VOC cleaning and …
Outline:
●Welcome !
●A few organisational remarks
●Types of non-thermal plasma sources – electrical point of view
●Electrical characteristics of non-thermal plasma
●Reactor models
●Plasma power measurement and calculation
●A few words about dielectrics
●Types of power sources
●A few practical examples
●Closing remarks
5 Plasma assisted VOC cleaning and …
Outline:
Definition: Voltage is a representation of the electric potential energy per unit charge. If a unit of electrical charge were placed in a location, the voltage indicates the potential energy of it at that point. In other words, it is a measurement of the energy contained within an electric field, or an electric circuit, at a given point. Voltage is a scalar quantity. The SI unit of voltage is the volt, such that 1 volt = 1 joule/coulomb.
Definition: Electrical current is a measure of the amount of electrical charge transferred per unit time. It represents the flow of electrons through a conductive material. Current is a scalar quantity (though in circuit analysis, the direction of current is relevant). The SI unit of electrical current is the ampere, defined as 1 coulomb/second.
Typical passive elements used in electrical engineering:
-Capacitors
-Resitors
-Inductors
Plasma sources – low pressure and one atmosphere pressure systems
Plasma
Source: H Conrads M Schmidt „Plasma generation and plasma sources”, Plasma sources sci. And techn. 9 (2000), pp. 441-454
Source: G.J.J Winands: Efficient streamer plasma generation, PhD thesis, T.U of Eindhoven, 2007
Plasma sources – low pressure and one atmosphere pressure systems
Plasma sources – low pressure and one atmosphere pressure systems
Source: Vijay Nehra, Ashok Kumar and H K Dwivedi: „ Atmospheric Non-Thermal Plasma Sources” International Journal of Engineering, Volume (2) : Issue (1)
From electrical point of view:
•frequency – low frequency and high frequency systems (including RF and MW plasma)
•voltage type: DC and AC (pulsed) systems
• voltage value: critical voltage and maximum voltage are basi parameters
•voltage shape: pulsed (unipolar and bipolar), ac-continuous, ac-pdm
• supply construction (grid based systems, power electronic, resonant etc.)
• efficiency: high – low efficiency systems
●Welcome !
●A few organisational remarks
●Types of non-thermal plasma sources – electrical point of view
●Electrical characteristics of non-thermal plasma
●Reactor models
●Plasma power measurement and calculation
●A few words about dielectrics
●Types of power sources
●A few practical examples
●Closing remarks
11 Plasma assisted VOC cleaning and …
Outline:
Plasma sources – low pressure and one atmosphere pressure systems
Source: H Conrads M Schmidt „Plasma generation and plasma sources”, Plasma sources sci. And techn. 9 (2000), pp. 441-454 Source: J. Reece Roth: Mechanisms of Sterilization, Decontamination, and Surface Energy Enhancement by Exposure to the One Atmosphere Uniform Glow Discharge Plasma (OAUGDP)
Based on electric field excitation: DC discharges Generally created in closed discharge vessels using interior electrodes. Different types of discharges and plasmas can be obtained depending on the applied voltage and discharge current.
●Welcome !
●A few organisational remarks
●Types of non-thermal plasma sources – electrical point of view
●Electrical characteristics of non-thermal plasma
●Reactor models
●Plasma power measurement and calculation
●A few words about dielectrics
●Types of power sources
●A few practical examples
●Closing remarks
13 Plasma assisted VOC cleaning and …
Outline:
Plasma reactor as electric load – equivalent circuit
Source: Tomasz Jakubowski, "Rezonansowy przekształtnik tranzystorowy do zasilania reaktora plazmy nietermicznej" (eng.: "Resonant transistor converter for supply the non-thermal plasma reactor") PhD thesis, West Pomeranian University of Technology, Szczecin (2012)
Plasma reactor as electric load – equivalent circuit
Source: Tomasz Jakubowski, "Rezonansowy przekształtnik tranzystorowy do zasilania reaktora plazmy nietermicznej" (eng.: "Resonant transistor converter for supply the non-thermal plasma reactor") PhD thesis, West Pomeranian University of Technology, Szczecin (2012)
Plasma reactor as electric load – equivalent circuit
Source: Tomasz Jakubowski, "Rezonansowy przekształtnik tranzystorowy do zasilania reaktora plazmy nietermicznej" (eng.: "Resonant transistor converter for supply the non-thermal plasma reactor") PhD thesis, West Pomeranian University of Technology, Szczecin (2012)
Plasma reactor as electric load – equivalent circuit
Plasma reactor as electric load – equivalent circuit
Plasma reactor as electric load – equivalent circuit
C(t)
Cw
Sb
Rb
Lb
S
R(t)
Rw
Source: B. G. Rodríguez-Méndez, R. López-Callejas, R. Peña-Eguiluz, A. Mercado-Cabrera, R. Valencia-Alvarado, S. R. Barocio, A. de la Piedad-Beneitez, J. S. Benítez-Read, and J. O. Pacheco-Sotelo,: A MODEL OF PLASMA DISCHARGES IN PRERCING REGIME FOR WATER TREATMENT, 25th IASTED, Feb. 6-8, Lanzarote, Spain A. Mizuno, Y. Yamazaki, S. Obama, E. Suzuki, K. Okazaki: „Effect of Voltage Waveform on Partial Discharge in Ferroelectric Pellet Layer for Gas Cleaning”, IEEE Transactions on Industry Applications, Vol. 29, No 2, March/April (1993)
●Welcome !
●A few organisational remarks
●Types of non-thermal plasma sources – electrical point of view
●Electrical characteristics of non-thermal plasma
●Reactor models
●Plasma power measurement and calculation
●A few words about dielectrics
●Types of power sources
●A few practical examples
●Closing remarks
20 Plasma assisted VOC cleaning and …
Outline:
In case of AP systems usually four major approaches are used. 1. Analytical approach: uses empirical knowledge in order to estimate the amount of power delivered to reactor systems. Electrochemical scientists established such equations quite early (Manley’s equation) but it is often problematic to measure or estimate parameters necessary for calculations, moreover they tend to drift as a function of voltage and time.
ig
D
GDpeakDig U
C
CCUfCUP 4
where Uig – critical voltage, f – supply voltage frequency, Upeak – supply voltage peak value.
Efficiency and power measurement systems and circuits
2. Power calculation based on momentary voltage – current waveform. Simple and adequate in case of pulsed and DC systems, gives precise results. Enables single pulse energy measurement on case of pulsed systems. Still, in case of filamentary discharges the measurement os problematic due to extreme short duration of singular pulses, and large distortion of measurement signals (see figure).
Efficiency and power measurement systems and circuits
3. Lissajous curve approach. These parallelograms present charge – voltage dependency. The area of the figure can be recalculated into energy (power) and in addition give the possibility to calculate reactor’s capacitances.
T
PP dU)t(UCdtdt
dQ)t(UE
Efficiency and power measurement systems and circuits
Efficiency and power measurement systems and circuits
Source: Tomasz Jakubowski, "Rezonansowy przekształtnik tranzystorowy do zasilania reaktora plazmy nietermicznej" (eng.: "Resonant transistor converter for supply the non-thermal plasma reactor") PhD thesis, West Pomeranian University of Technology, Szczecin (2012)
4. Differential measurement. Output power is measured while supplying a plasma reactor and a HV capacitor (bank) with comparable capacitance. Then, assuming supply system’s efficiency does not change, the power difference is assumed to be connected with plasma system energy delivery.
Efficiency and power measurement systems and circuits
Efficiency and power measurement systems and circuits
Mains
resonant
converter
Transformer
Hf, WV
Pulse
shaping
circuit
Re
akt
or
NT
P
Pin_AC Pin_DC Pout_NN Pout_WN Pout_reaktor
in
out
P
P
Efficiency and power measurement systems and circuits
end
init
init
endinit
E
E
U
UU
2
22
1CUE 2
●Welcome !
●A few organisational remarks
●Types of non-thermal plasma sources – electrical point of view
●Electrical characteristics of non-thermal plasma
●Reactor models
●Plasma power measurement and calculation
●A few words about dielectrics
●Types of power sources
●A few practical examples
●Closing remarks
28 Plasma assisted VOC cleaning and …
Outline:
Source: Agilent: basics of measuring the dielectric properties of materials
A material is classified as “dielectric” if it has the ability to store energy when an external electric field is applied. If a DC voltage source is placed across a parallel plate capacitor, more charge is stored when a dielectric material is between the plates than if no material (a vacuum) is between the plates. The dielectric material increases the storage capacity of the capacitor by neutralizing charges at the electrodes, which ordinarily would contribute to the external field. The capacitance with the dielectric material is related to dielectric constant. If a DC voltage source V is placed across a parallel plate capacitor (Figure 1), more charge is stored when a dielectric material is between the plates than if no material (a vacuum) is between the plates.
Where C and C0 are capacitance with and without dielectric, k‘ = e'r is the real dielectric constant or permittivity, and A and t are the area of the capacitor plates and the distance between them (Figure 1). The dielectric material increases the storage capacity of the capacitor by neutralizing charges at the electrodes, which ordinarily would contribute to the external field. The capacitance of the dielectric material is related to the dielectric constant as indicated in the above equations.
The complex dielectric constant k consists of a real part k' which represents the storage and an imaginary part k'' which represents the loss. The following notations are used for the complex dielectric constant interchangeably :
k = k* = e r = e*r
cycleperstoredEnergy
cycleperlostEnergy
___
___tan
Source: Agilent: basics of measuring the dielectric properties of materials
The magnitude of the breakdown field depends on a number of factors, such as the time dependence of the electric field, the geometry of the sample and of electrodes, the nature of electrodes. In general there will be a progressive reduction of breakdown strength with increasing thickness and increasing time of the pulse duration.
cycleperstoredEnergy ___
cycleperlostEnergy ___
Source: Agilent: basics of measuring the dielectric properties of materials
●Welcome !
●A few organisational remarks
●Types of non-thermal plasma sources – electrical point of view
●Electrical characteristics of non-thermal plasma
●Reactor models
●Plasma power measurement and calculation
●A few words about dielectrics
●Types of power sources
●A few practical examples
●Closing remarks
35 Plasma assisted VOC cleaning and …
Outline:
Power supply system configurations – DBD reactors
Power supply system configurations
Power supply system configurations
Load
Power
electronic
converter
Control system
Energy
source
Power switch
Power supply system configurations
Power electronic devices – solid state switches
Source: Alex. Q. Huang: Power
semiconductors and wind power, 04.05.2005
Power supply system configurations
Power supply system configurations
Power electronic devices – solid state switch stacks
Source: Behlke
FEATURES
Voltage up to 120 kV
Pk. currents up to 32 kA
di/dt's up to 32 kA/ μs
Rise times 1 ns ... 500 ns
Peak power up to 256 MW
Galvanic isolation
TTL control input
Integrated thermotrigger
Various cooling options
Very small & light weight
Highly reliable
Power supply system configurations
High power switches – mechanical, gaseous, vacuum, spark gap
Source: Easier to Build Rotary Spark Gap Designs by Terry Blake
Mechanical switches: up to 100kV, kA Problems: mechanical wear, materials
Krytron: up to 100kV, kA Problems: frequency, life expectancy, triggering
The krytron uses arc discharge to handle very high voltages and currents (several kV and several kA peak). The krytron is a development of triggered spark gaps originally developed for radar transmitters during World War II. There are four electrodes in a krytron. Two are conventional anode and cathode. One is a keep-alive electrode, arranged to be close to the cathode. The keep-alive has a low positive voltage applied, which causes a small area of gas to ionize near the cathode. High voltage is applied to the anode, but primary conduction does not occur until a positive pulse is applied to the trigger electrode ("Grid" in the image above). Once started, arc conduction carries a considerable current. Problems: frequency, materials, life expectancy, triggering circuitry (500V – 2kV to trigger) Sprytron: vacuum trytron
Power supply system configurations
High power switches – mechanical, gaseous, vacuum, spark gap
Thyratron: tens of kV, tens of kA Problems: life expectancy, materials
Thyratrons evolved in the 1920s from early vacuum tubes such as the UV-200, which contained a small amount of argon gas to increase its sensitivity as a radio signal detector; and the German LRS Relay tube, which also contained argon gas. Gas rectifiers which predated vacuum tubes, such as the argon-filled General Electric "Tungar bulb" and the Cooper-Hewitt mercury pool rectifier, also provided an influence. A thyratron is basically a "controlled gas rectifier". Irving Langmuir and G. S. Meikle of GE are usually cited as the first investigators to study controlled rectification in gas tubes, circa 1914. The first commercial thyratrons didn't appear until circa 1928. Modern applications include pulse drivers for pulsed radar equipment, high-energy gas lasers, radiotherapy devices, and in Tesla coils and similar devices. Thyratrons are also used in high-power UHF television transmitters, to protect inductive output tubes from internal shorts, by grounding the incoming high-voltage supply during the time it takes for a circuit breaker to open and reactive components to drain their stored charges. This is commonly called a "crowbar" circuit. Thyratrons have been replaced in most low and medium-power applications by corresponding semiconductor devices known as Thyristors (sometimes called Silicon-controlled rectifiers, or SCRs) and Triacs. However, switching service requiring voltages above 20 kV and involving very short risetimes remains within the domain of the thyratron. Variations of the thyratron idea are the krytron, the sprytron, the ignitron, and the triggered spark gap, all still used today in special applications.
1. DC sources
Power supply system configurations
Switch mode power supplies: high- end solution
Rectifier /
Voltage
multiplier
Line
FilterSMPS
Power Factor
Corrector
Power supply system configurations
Voltage multiplier: Cockroft-Walton multiplier
+
+ +
+ + +
+ + + +
+ + + + +
Power supply system configurations
Voltage multiplier: Greinacher cascade
Power supply system configurations
DC supply prototype
Power supply system configurations
2. AC sources
Power supply system configurations
Power supply system configurations
Source: Henryka Danuta Stryczewska: „TECHNOLOGIE PLAZMOWE W ENERGETYCE I INśYNIERII ŚRODOWISKA”,
Wydawnictwo Politechniki Lubelskiej Lublin 2009
Limited efficiency ! – around 40% for low power systems Up to 9x% for large power applications
Power supply system configurations
Power supply system configurations
Power supply system configurations
OUTPUT POWER CONTROL
Output power control by repetition period & pk-pk voltage changing
Output power control by pk-pk voltage changing
PULSE DENSITY MODULATION (PDM)
EFFICIENCY OF POWER CONVERSION
WEST POMERANIAN UNIVERSITY OF TECHNOLOGY TEST STAND
RESONANT CONVERTER MODULE
HIGH VOLTAGE TRANSFORMER
RESONANT CONVERTER MODULE
MARITIME ACADEMY TEST STAND
Power supply system configurations
3. Pulsed sources
Power supply system configurations
Solid state pulse power modulators (SSPPM) are used in physics research (plasma technology)
Very high demands on voltage amplitude and pulse duration
System topologies are known multiplying the output voltage / switch blocking voltage ratio (usually the factor is up to f=2)
A classical Marx topology pulse power source 1
1 E. Marx, Patent DE455933, 13 Feb 1928
Power supply system configurations
66
67
ns
V660
d
d
ns
V524
d
d
%90%10
%100%0
t
U
t
U
Solid state pulse power modulators (SSPPM) are used in physics research (plasma technology)
Very high demands on voltage amplitude and pulse duration
System topologies are known multiplying the output voltage / switch blocking voltage ratio (usually the factor is up to f=2)
Electrical pulse generators as in 2 2 R. A. Fitch et al. , Patent US3366799, 30 Jan 1968
tUU iout cos13
Power supply system configurations
Proposed topology:
Power supply system configurations
Proposed topology:
Power supply system configurations
Proposed topology:
tUU iout cos21
nUU iout 3(max)
Ui – initial voltage
n – number of stages
Simulations led for Ui = 600V
Power supply system configurations
Measurement results:
Measurements were led using LeCroy WaveRunner 6100A digital oscilloscope, PPE 20kV voltage probe and Fluke ISM 5010 current shunt
Practical conversion factor per stage f=2,88
Maximal voltage for 600V supply: 17,3 kV
Power supply system configurations
Power supply system configurations
Magnetic compressors:
Source: CH Smith, DM Nathasingh „Magnetic Characteristics of Amorphous Metal Saturable Reactors in Pulse Power Systems” IEEE Conference Record of Power Modulator Symposium, 1990 - Institute of Electrical and Electronics Engineers
zSBdtV
T
nout Fe
2/
0
)(
C3C1 C2
L1 L2 L3
R
73
Source: http://softsolder.com/2010/09/08/resistance-soldering-transformer/
Measurement results:
Single stage magnetic compressor;
Rise time compression from 690ns to 300ns (2,3 times)
Power supply system configurations
Measurement results:
Power supply system configurations
dark blue - input voltage (5kV/div) bright blue - output voltage (5kV/div) green – current (20A/div) red – loss enerty in core (50mJ/div)
Proposed topology:
Power supply system configurations
M1
TRS
D1
L1
PG
M5D5
L5
M2
R
Pearson
Current
Monitor
HV
Probe
C2
C1
T
AT1
AT2
UC1
UC2
UAT2
UAT1
UM
Ciw2
Ciw1
prim.
prim.
se
c.
se
c.
Proposed topology:
Power supply system configurations
High voltage generator in staged arrangement: 1 – autotransformer unit on a common carcass, 2 – Power transistors and dedicated drivers, 3 – module capacitors.
High voltage generator unit in star arrangement: 1 – autotransformer unit on a common carcass, 2 – power transistors and C1, C2 capacitors
Proposed topology:
Power supply system configurations
Output voltage (blue, 4kV/div) and current (green, 4A/div) waveform for star generator arrangement.
Power supply system configurations
Voltage, current, voltage slope steepness (dV/dt), momentary reactor power and the plasma energy for different power supply parameters and an initial voltage of Uinit=4kV.
80
81
iCCD imaging
82
iCCD imaging
„positive corona” „negative corona”
●Welcome !
●A few organisational remarks
●Types of non-thermal plasma sources – electrical point of view
●Electrical characteristics of non-thermal plasma
●Reactor models
●Plasma power measurement and calculation
●A few words about dielectrics
●Types of power sources
●A few practical examples
●Closing remarks
83 Plasma assisted VOC cleaning and …
Outline:
84
Historical view
Source: M.H. Cho, K. B. Ko, Y. C. Byun: Environmental Applications of Plasmas, 8th APCPST at Cairns, Australia, July 3, 2006
Plasma assisted VOC cleaning and …
Process of destroying insect life „by means of electrical disruptive conduction”: patented already in 1920 in United States by Franklin S. Smith
Source: F. S. Franklin, US patent 1 352 699
Plasma assisted VOC cleaning and …
A few practical examples:
Sources: Ozonia Ltd, Stettbachstrasse 1, Switzerland
Plasma assisted VOC cleaning and …
Patent nr P 345938: „Urządzenie do wytwarzania i wprowadzania ozonu do cieczy i/lub gazów oraz układ do wytwarzania i
wprowadzania ozonu do cieczy i/lub gazów”, - device for production and dispersion of ozone In liquid environment
Inlet
Gasket
Outlet
~HV Metal casing HV electrode Dielectric barrier Nut
Dispersing unit
Plasma assisted VOC cleaning and …
Plasma assisted VOC cleaning and …
Example for waste water from chemical plant „Organika-Azot” in Jaworzno. Rection time – 10min. Analyses led by chemical plant laboratory.
Plasma assisted VOC cleaning and …
Sources: R. Brandemburg „Power plant exhaust cleaning project meeting”, 22.02.2008
Direct Indirect
“Plasma only”
Plasma
Enhanced Catalyst
Plasma treatment of polluted gases
Plasma Driven
Catalyst
Wet/Hybrid
Systems
E
P E P
P
P C P+C
L
E P
E
P
C
Exhaust
Plasma
Catalyst
P
Plasma assisted VOC cleaning and …
93
Zastosowania do usuwania odorantów – stan badań (w Polsce i na świecie)
Źródło: M.H. Cho, K. B. Ko, Y. C. Byun: Environmental Applications of Plasmas, 8th APCPST at Cairns, Australia, July 3, 2006
Plasma assisted VOC cleaning and …
94 Plasma assisted VOC cleaning and …
Typical problematic chemicals in waste water treatment outlet air:
●H2S
●NH3,
●DMS
●Merkaptanes
Biofilters ? ●Size !!! No cotrollability !! Runnung costs! Temperature
dependency; no significant reduction of DMS or merkaptanes.
95
Deodorization
Źródło: Julien Jarrige and Pierre Vervisch Decomposition of Gaseous Sulfide Compounds in Air by Pulsed Corona Discharge
Sulfuric acid
(DMS)
Plasma assisted VOC cleaning and …
97
Exemplary results
Źródło: Firma Envisolve: www.envisolve.com
Plasma assisted VOC cleaning and …
98
Application examples
Źródło: Firma Envisolve: www.envisolve.com
Plasma assisted VOC cleaning and …
99
Exemplary results
Source: Ma, Chen, Ruan: „H 2 S and NH 3 Removal by Silent Discharge Plasma and Ozone Combo-System”, Plasma Chemistry and Plasma Processing, Vol. 21, No. 4, December 2001 ( 2001)
Plasma assisted VOC cleaning and …
Plasma assisted VOC cleaning and …
Source: Mizuno: „Industrial applications of atmospheric non-thermal plasma in environmental remediation”, Plasma Phys. Control. Fusion 49 (2007) A1–A15
Lewobrzeżna Oczyszczalnia Ścieków, Poznań – Aquanet.
Plasma assisted VOC cleaning and …
Analytics: ozone detector, FID, FTIR, mass chromatography. H2S detector IR (GasAlertMicro 5 IR)
Power control
Catalyst temp. Control
Flow control
Plasma assisted VOC cleaning and …
Plasma assisted VOC cleaning and …
Olfactometry according to PN-EN 13725:2007 (EN 13725:2003) „Jakość powietrza. Oznaczanie stężenia zapachowego metodą olfaktometrii dynamicznej”
Moc plazmy: 1,53 Wh/Nm3
Plasma assisted VOC cleaning and …
H2S human sensitivity od 0.0007 do 0,2 mg/m³
(DMS) (CH3)2S
(DMDS) C2H6S2
Plasma assisted VOC cleaning and …
Plasma assisted VOC cleaning and …
Plasma assisted VOC cleaning and …
Plasma assisted VOC cleaning and …
109
Zastosowania do usuwania odorantów – koszty inwestycji i eksploatacji
Źródło: Firma Envisolve: www.envisolve.com
Plasma assisted VOC cleaning and …
●Welcome !
●A few organisational remarks
●Types of non-thermal plasma sources – electrical point of view
●Electrical characteristics of non-thermal plasma
●Reactor models
●Plasma power measurement and calculation
●A few words about dielectrics
●Types of power sources
●A few practical examples
●Closing remarks
110 Plasma assisted VOC cleaning and …
Outline:
Summary
Source: German Ministry Report: Plasma Technology Process Diversity + Sustainability , nov 2001
Experts estimate that, in Germany alone, sales of products that owe their existence to plasma technology now amount to about 45 billion Euro per year; worldwide the annual value is placed at about 500 billion Euro.
In 1995 worldwide sales of such products were approximately seven billion Euro; in 2005 they are expected to reach 27 billion Euro. This represents an average growth rate of 15 %. In Germany alone, well over 200 companies are active in the field of low-temperature plasma technology.
Summary
“There are more
things between
anode and cathode
than dreamt of in
our philosophy !”
H. Raether,
(1909-1986)
Electrical engineer?
Source: Dr Ronny Brandemburg, INP
Dissemination and fostering of plasma based technological innovation A joint Baltic Sea project within Interreg IVB
Thank You for Your kind attention !
Dr inż. Marcin Hołub [email protected]; www.we.zut.edu.pl
Mgr inż. Michał Balcerak [email protected]; www.we.zut.edu.pl
113 Plasma assisted VOC cleaning and …