Modern logic and memory devices require complex structures of
Copper layers and vias which function like highways to transport
electrons between chip components and transistors.
Today’s leading logic processors require more than 10 metal
layers incorporating about 30 miles of interconnect wires. Leading
chipmakers have succeeded in extending the Cu interconnects up to
5nm and beyond. To enable this progress, new ECD chemistries and
processes have been developed.
The QUALI-LINE® PRIMÅ analyzer provides on-line chemical
metrology of BEOL Cu ECD processes for Logic and Memory devices:•
Optimized fill of Via/Trench structures• Complies with tight
tolerance specs for successful
deposition of each layer• Supports ultra-low/traditional/high Cu
concentration
chemistries
Maximizes Yield and Reliability• Sets a new standard for
accuracy/ repeatability specs
for Cu chemistries• Fast analysis of all main components,
including super-fast,
independent Cu and Acid analysis which is important when Cu
range is less then 10g/L
• By-products analysis for chipmakers who extend the life of
their plating bath – DRAM, NAND
Rapid Conversion to HVM• The QUALI-LINE PRIMÅ analyzer
configuration can be
easily rolled-out from R&D to high volume manufacturing•
Minimal consumption of reagents and parts• No additional chemicals
required (all reagents are
chemistry components)• Predictive maintenance using a new
Analyzer Health
Monitor (AHM) system
Newly Designed Platform• The QUALI-LINE PRIMÅ analyzer is
designed for reliable
performance over time and application• Minimal, predictable
maintenance• Utilizes ECI Technology’s wide library of Cu ECD
applications
Low Cost per Analysis
Simplified Process Control
Rapid Ramp-up to High-Volume Manufacturing
Comprehensive Control of Chemistry
Analysis of Byproduct
QUALI-LINE® PRIMÅOnline Chemical Management System for Cu
Interconnects
Enabling Precise Plating forSub-10nm Devices
We Keep Your Chemistry Right™
QUALI-LINE® PRIMÅ is a registered trademark of ECI Technology,
Inc. All other trademarks are the property of their respective
owners. ECI Technology reserves the right to change specifications
without notice. © 2020 ECI Technology, Inc. All rights reserved.
2020.06
Analysis of known Good and Bad Bath from customer site
Features• Automatic Standard Generation (ASG), with validation
and calibration • Flexible modular design • The most advanced
by-products analysis• Intelligent self-diagnostics• NOWPak® reagent
delivery system available• Optional dosing/replenishment system•
Optional SECS/GEM• MTBF > 2160 hour, MTTR < 2 hours• Complies
with the industry safety standards: S2/S8 and CE
Specifications*
Component Type Component Accuracy (%) RSD (%)
OrganicAccelerator 3 2
Leveler 3 2
Suppressor 3 2
InorganicCopper 3 1.5
Acid 3 1.5
Chloride 3 2
By-Products
ABP 5 5
SBP 5 5
BPA 5 5*Chemistry Dependent
Results shows tank analysis accuracy and RSD < 3% using ASG
for > 6 months
Suppressor Accelerator Leveler
Con
cent
ratio
n
AcceleratorTime
LevelerSuppressor0.8
0.9
1
1.1
3/02/201610:54:48 AM
3/02/201611:45:59 AM
3/02/201612:37:05 PM
3/02/20163:10:25 PM
3/02/20164:01:18 PM
3/02/20164:52:07 PM
By-P
rodu
ct S
igna
l
STD Good Bad
Good
BadBy-
Prod
uct S
igna
l
3/02/201910:54:48 AM
3/02/201911:45:59 AM
3/02/201912:37:05 PM
3/02/20193:10:25 PM
3/02/20194:01:18 PM
3/02/20194:52:07 PM
Backed by ECI Technology’s Global SupportContact us for more
details. Call or visit us online:
Headquarters (USA)
ECI Technology60 Gordon Drive, TotowaNew Jersey, 07512T: +1
(973) 890-1114E: [email protected]
www.ecitechnology.com
Global Offices
Japan T: +81-45-620-4661E: [email protected]
KoreaT: +82-31-262-8503E: [email protected]
TaiwanT: +011-886-03-573-5899E:
[email protected]
Distribution Partners
Cerma Precision, Inc. – JapanT: +03-3643-2921E:
[email protected]
ISI – IsraelT: +972-3-9232202E: [email protected]
TELTEC North – GermanyT: +49-7-903-91-44-0E:
[email protected]
TELTEC South – FranceT: +33-467-22-40-00E:
[email protected]
WESI Technology – ChinaT: +86-21-5058-0051E:
[email protected]
WKK DISTRIBUTION LTD.Hong KongT: +852-2357-8888E:
[email protected]
WKK SINGAPORET: +65 6741 7322DDI: +65 6469 6506E:
[email protected]
