Date post: | 18-Nov-2014 |
Category: |
Business |
Upload: | jeffrey-funk-creating-new-industries |
View: | 1,961 times |
Download: | 0 times |
When Will the Market Growth for MEMS (Micro-
Electronic Mechanical Systems) Accelerate?
5th Session in MT5009
Jeffrey Funk
Division of Engineering and Technology Management
National University of Singapore
For information on other technologies, see http://www.slideshare.net/Funk98/presentations
Session Technology
1 Objectives and overview of course
2 When do new technologies become economically feasible?
3 Two types of improvements: 1) Creating materials that
better exploit physical phenomena; 2) Geometrical scaling
4 Semiconductors, ICs, electronic systems
5 MEMS and Bio-electronic ICs
6 Lighting, Lasers, and Displays
7 DNA sequencing and Nanotechnology
8 Human-Computer Interfaces
9 Superconductivity and Solar Cells
10 Deepavali, NO CLASS
This is Fifth Session of MT5009
Objectives
What are the important dimensions of performance for
MEMS and electronic systems?
What are the rates of improvement?
What drives these rapid rates of improvement?
Will these improvements continue?
What kinds of new electronic systems will likely emerge from
the improvements in MEMS?
What does this tell us about the future?
As Noted in Previous Session, Two main
mechanisms for improvements
Creating materials (and their associated processes) that better
exploit physical phenomenon
Geometrical scaling
Increases in scale
Reductions in scale
Some technologies directly experience improvements while
others indirectly experience them through improvements in
“components”
A summary of these ideas can be found in
1) What Drives Exponential Improvements? California Management Review, May 2013
2) Technology Change and the Rise of New Industries, Stanford University Press, January 2013
Both are Relevant to MEMS
Creating materials (and their associated processes) that better
exploit physical phenomenon
Materials created for MEMS with better characteristics for specific
applications
Geometrical scaling
Increases in scale: larger wafers/production equipment
Reductions in scale: small feature sizes for MEMS. This is most important driver
of improvements for MEMS
Some technologies directly experience improvements while
others indirectly experience them through improvements in
“components”
Better MEMS lead to better electronic systems
Outline
What is MEMS and what are the applications?
MEMS and Moore’s Law (Benefits of scaling)
Challenges for MEMS
Example of micro-gas analyzers
Example of MEMS for Ink Jet Printer
Example of MEMS for filters and other components for mobile
phone chips
Improvements in MEMS make new forms of electronic systems
possible
Conclusions
Increasingly Detailed View
of a Micro-Engine
Source: http://www.memx.com/
Micro-engine Gear Train Multi-level springs that
that are part of Micro-Engine
Side view of springs
Ratchet Mechanism Actuator Torsional Acutator
Early Optical Switch Clutch Mechanism Anti-reverse mechanism
http://www.memx.com/
Accelerometer
less detail
more detail
Inertial Sensor
(includes
accelerometer
and gyroscope)
less detail
more detail
Source: Yole, July 2013
Source: 2011
International
Technology
Roadmap
for Semiconductors
Other sensors include: position, motion,
pressure (altitude
measurement), temperature,
magnetic field (electronic compass),
humidity, light (image) and audio sound
(microphone) The integration path towards
the Inertial Measurement Unit (IMU) is to
join 3-axis accelerometers, 3-axis gyro-
scopes, 3-axis magnetometers (compass),
and a pressure sensor
(altimeter). This is referred to as a 10
degree of freedom (DOF) multimode
sensor.
Source: MEMS Technology Roadmapping, Michael Gaitan, NIST Chair, iNEMI and ITRS
MEMS Technology Working Groups Nano-Tec Workshop 3, 31 May 2012
Outline
What is MEMS and what are the applications?
MEMS and Moore’s Law
Challenges for MEMS
Example of micro-gas analyzers
Example of MEMS for Ink Jet Printer
Example of MEMS for filters and other components for mobile
phone chips
Improvements in MEMS make new forms of electronic systems
possible
Conclusions
Figure 2. Declining Feature Size
0.001
0.01
0.1
1
10
100
1960 1965 1970 1975 1980 1985 1990 1995 2000
Year
Mic
rom
ete
rs (
Mic
rons)
Gate Oxide
Thickness
Junction Depth
Feature length
Source: (O'Neil, 2003)
Source: AStar
http://www2.imec.be/content/user/File/MtM%20WG%20report.pdf
Another Way to Look at “More than Moore (MtM)”
Source: Clark Ngyuen, August and September 2011 Berkeley lectures
Accelerometer
Another Way to Look at “More than Moore”
Source: Clark Ngyuen, August and September 2011 Berkeley lectures
Early Application:
Limitations of Scaling for Accelerometers
Since displacement is proportional to size of mass in
accelerometer
Smaller mass leads to weaker sensitivity to displacement
Thus smaller features (e.g., springs) are bad
This led to pessimistic view towards MEMS
Solution for MEMS-based accelerometers
Integrate transistors with MEMS device to compensate for the poor
sensitivity of MEMS-based accelerometers
put transistors close to the MEMS device in order to reduce
parasitic capacitance
Source: Clark Ngyuen, August and September 2011 Berkeley lectures
Nevertheless, improvements were made to accelerometers in the form of smaller size chips. Source:
Trends and frontiers of MEMS, Wen H. Ko; Cs: sensing capacitance
Source: MEMS Technology Roadmapping, Michael Gaitan, NIST Chair, iNEMI and ITRS MEMS Technology Working Groups Nano-Tec
Workshop 3, 31 May 2012
But then other Applications Began to Emerge
Gyroscopes
Micro-fluidics
Digital mirror device
Optical switches
These applications benefited a lot from smaller sizes! Emphasis
changed
from “adding transistors” to “reducing feature size”
from “integration of transistors and mechanical functions” to chips
with only mechanical functions/devices
Source: Ngyuen, Berkeley lecture
Source: Clark Ngyuen, August and September 2011 Berkeley lectures
Source: Clark Ngyuen, August and September 2011 Berkeley lectures
CastAR, a projected augmented reality system that displays
3D projections right in front of you. The frames of the glasses
contain micro-projectors that cast 3D images that change perspective depending on your orientation.
Benefits of Size Reduction: MEMS (2)
Feature sizes are currently much larger than those on ICs (40 years behind)
MEMS: around or less than one micron
ICs: 22 nanometers (0.02 microns)
Partly because
devices are different (e.g., much overlap of layers)
processes (e.g., wet vs. plasma etching) are slightly different……
As feature sizes get smaller, we can expect large changes in our world
Current feature sizes of 0.5 to 1.0 microns for MEMS and thus industry is
like ICs were in 1980
Improvements in MEMS will probably have similar impact as ICs have had
since 1980
Source: Nyugen’s Berkeley lectures and
http://www.boucherlensch.com/bla/IMG/pdf/BLA_MEMS_Q4_010.pdf
High Surface Area is Important for
many Applications
Example Applications: filtration, separation,
sunlight collection, surface charge storage or
catalysis
Highly regular fractal structures lead to high surface
areas.
The procedure uses the built-in capability of the crystal
lattice to
form self-similar octahedral structures with minimal
interference of the constructor. The silicon fractal can be
used directly
or as a mold to transfer the shape into another material.
Moreover, they can be dense, porous, or like a wireframe.
We
demonstrate, after four levels of processing, that the initial
number of octahedral structures is increased by a factor of
625.
http://nextbigfuture.com/search?updated-max=2013-06-23T07:23:00-
07:00&max-results=7&start=28&by-date=false
Outline
What is MEMS and what are the applications?
MEMS and Moore’s Law
Challenges for MEMS
Example of micro-gas analyzers
Example of MEMS for Ink Jet Printer
Example of MEMS for filters and other components for mobile
phone chips
Improvements in MEMS make new forms of electronic systems
possible
Conclusions
http://semimd.com/blog/2011/12/06/silicon-foundries-to-expand-into-mems-business/
Bottom Line: development costs are very high so
applications must have very high volumes
Integrated Circuits
(CMOS)
MEMS
Materials Roughly the same for each
application
Different for each
application
Processes Roughly the same for each
application (CMOS)
Different for each
application
Equipment Roughly the same for each
application
Different for each
application
Masks Different for each application. But
common solutions exist! ASICs
(application specific ICs),
Microprocessors
Different for each
application and thus high
volumes are needed
Solutions?
Can we identify a set of common materials, processes and
equipment that can be used to make many types of MEMS?
Using common materials, processes and equipment involve
tradeoffs
Use sub-optimal ones for each application
But benefit overall from economies of scale; similar things occurred
with silicon-based CMOS devices
One obvious option
Can we make MEMS with materials, processes, and equipment used
to fabricate CMOS ICs?
Or should we look for a different set of materials, processes and
equipment?
Since 2006,
Akustica designs and
manufactures
MEMS microphones
using its unique and
patented CMOS
MEMS technology
http://akustica.com/technology.asp
Emergence of foundries
reflects the emergence
of somewhat common
materials and equipment
Source: http://itersnews.com/?p=30549
Still Many Challenges and Questions
Do these foundries make multiple types of MEMS using the
same materials, processes and equipment?
If so, how many types of MEMS are made using the same types
of materials, processes and equipment?
How can we characterize the progress in this area?
Can this progress be quantified to help us understand the
extent to which the market for MEMS may accelerate in the
near future?
Outline
What is MEMS and what are the applications?
MEMS and Moore’s Law (Benefits of scaling)
Challenges for MEMS
Example of micro-gas analyzers
Example of MEMS for Ink Jet Printer
Example of MEMS for filters and other components for mobile
phone chips
Improvements in MEMS make new forms of electronic systems
possible
Conclusions
Gas Chromatography
Gases must be separated, analyzed, and purified for a wide
variety of applications
These include laboratories, factories, water treatment
plants, fish farms, and many more
Separation, which is the first step in any analysis is usually
called gas chromatography and involves columns that are
made of glass or other materials
MEMS enables much smaller gas chromatographs
Source: Clark Ngyuen, August and September 2011 Berkeley lectures; ppb: parts per billion;
ppt: parts per trillion
Source: Clark Ngyuen, August and September 2011 Berkeley lectures
Source: Clark Ngyuen, August and September 2011 Berkeley lectures
(1)
Source: Clark Ngyuen, August and September 2011 Berkeley lectures
(2)
Outline
What is MEMS and what are the applications?
MEMS and Moore’s Law (Benefits of scaling)
Challenges for MEMS
Example of micro-gas analyzers
Example of MEMS for Ink Jet Printer
Example of MEMS for filters and other components for mobile
phone chips
Improvements in MEMS make new forms of electronic systems
possible
Conclusions
Ink Jet Printers
While their hardware costs are much lower than those of
laser printer (perhaps 1/10)
the annual cost of their cartridges can be much higher than the cost
of their hardware
e.g., higher maintenance costs due to clogging,
they print much more slowly than do laser printers
Gradually changing because MEMS reduces the amount of
ink and thus the time for printing and the frequency of
installing a new cartridge
Fires ink drops of between less than 1 pico-liter
and these drops can be made smaller. The smaller
drops increase resolution, allowing faster drying,
and reduce ink consumption
Ink Jet Printers can also be used to Print
Biological Materials Ink jet printing can be used to print all the components that make up
a tissue (cells and matrix) to generate structures analogous to tissue (bio printing)
Smaller feature sizes on these MEMS enable better resolution of tissue
1 pico liter volumes have 10 micron feature sizes, which is about the size of a cell
Need the right material, bio-reactor, and the ejection of the bio-material may adversely impact on the cell
This can also be done with 3D printers, but are they experiencing rapid rates of improvement?
Sources: Brian Derby, Printing and Prototyping of Tissues and Scaffolds, Science 338, 16 Nov 2012, p 921. Thermal Inkjet Printing in Tissue Engineering and Regenerative Medicine, Xiaofeng Cui, Thomas Boland, Darryl D. D’Lima, and Martin K. Lotz
Outline
What is MEMS and what are the applications?
MEMS and Moore’s Law (Benefits of scaling)
Challenges for MEMS
Example of micro-gas analyzers
Example of MEMS for Ink Jet Printer
Example of MEMS for filters and other components for mobile
phone chips
Improvements in MEMS make new forms of electronic systems
possible
Conclusions
Source: Clark Ngyuen, August and September 2011 Berkeley lectures
Mass is function of length (L), width (W), and h (height); Q is amplification factor,
V is voltage; d is distance between bottom of beam and underlying material
Scaling of Mechanical Resonator
Operates slightly different from guitar string
Calculations show that frequency rises as 1/L2
Replacing anchored beam with free-free beam and reducing L
(length) to 2 microns, W and H to nano-dimensions, causes
frequency to rise to above 1 GHz
Inexpensive mechanical resonators can replace electrical filters
Which also enables the use of multiple filters and thus communication
at many frequency bands (and thus cognitive radio)
There is no theoretical limit to reducing sizes and thus increasing
frequencies
Source: EE C245/ME C218: Introduction to MEMS, Lecture 2m: Benefits of Scaling I
Making Resonators with semiconductor processes/equipment
Source: Clark Ngyuen, August and September 2011 Berkeley lectures
But calculations show that disks scale better than do beams or springs
(t = inner
radius)
Source: Clark Ngyuen, August and September 2011 Berkeley lectures
Multiple Disks Provide Better Performance
Source: Clark Ngyuen, August and September 2011 Berkeley lectures; RF BPF: radio frequency bypass filter
Source: Clark Ngyuen, August and September 2011 Berkeley lectures
RF = radio frequency; SAW = surface acoustic wave: VCO: voltage controlled oscillators
Other Discrete Components can also be Replaced by Smaller
MEMS components
Source: Clark Ngyuen, August and September 2011 Berkeley lectures
Source: Clark Ngyuen, August and September 2011 Berkeley lectures
Source: Clark Ngyuen, August and September 2011 Berkeley lectures
Another
application
for MEMs
in
phones,
GPS,
and
other
devices
Outline
What is MEMS and what are the applications?
MEMS and Moore’s Law
Challenges for MEMS
Example of micro-gas analyzers
Example of MEMS for Ink Jet Printer
Example of MEMS for filters and other components for mobile
phone chips
Improvements in MEMS make new forms of electronic systems
possible
Conclusions
Improvements in MEMS make new
forms of electronic systems possible
Some systems were discussed in the previous session
Others include
Oil and Gas Drilling, Internet of Things
3D scanners, printers, holographic displays, eye-tracking devices
autonomous vehicles for land, undersea, in space, and other applications
More big data analysis
better health care and management of buildings, dams, bridges,
power plants……..
Improvements in other components such as lasers are needed before these systems become economically feasible
Fracking and Modern Day Drilling
Drilling has changed……….
Better sensors, ICs, control
monitors, joy sticks, other
controls, and horizontal drilling
Along with chemical based
slurries that are pumped into the
ground to break up shale
The US will probably be a net
energy exporter in a few yearshttps://www.rigzone.com/training/insight.asp?insight_id=292&c_id=24
Pre-Fab Housing from DIRTT
http://www.dirtt.net/
No screws, nails, snap fits
change dimensions of one part, automatically changes
dimensions on other parts through better CAD
Uses ICE software, borrowed from video games
Direct connection with manufacturing
Quick installation
No wastage
Easy to reconfigure designs and rooms
Internet of Things
Everything is being connected to the Internet
New forms of sensors including MEMS-based sensors are making
the Internet of Things possible
Smaller modems help
Intel Builds World’s
Smallest 3G modemhttp://www.bbc.com/news/technology-28939873
Intel Builds World’s
Smallest 3G modem
Internet of Things?
http://www.bbc.com/news/technology-28939873
Cost of Autonomous Vehicles (e.g., Google Car) Falls as Improvements
in MEMS and Other “Components” Occur
Source: Wired Magazine, http://www.wired.com/magazine/2012/01/ff_autonomouscars/3/
Better MEMS, ICs, Cameras, GPS, Lasers Making Autonomous Vehicles Economically Feasible
1 Radar: triggers alert when something
is in blind spot
2 Lane-keeping: Cameras recognize lane
markings by spotting contrast between road
surface and boundary lines
3 LIDAR: Light Detection and Ranging system
depends on 64 lasers, spinning at upwards of 900
rpm, to generate a360-degree view
4 Infrared Camera: camera detects
objects
5 Stereo Vision: two cameras build a
real-time 3-D image of the road ahead
6 GPS/Inertial Measurement: tells us
location on map
7 Wheel Encoder: wheel-mounted
sensors measure wheel velocity
ICs interpret and act on this data
What an Autonomous Vehicle Sees
When Will AVs Become Economically
Feasible?
Cost of “Google Car” is $150,000 of which most is for electronic components (e.g., about $70,000 is for LIDAR)
Current rates of improvement are 30%-40%
If costs drop 25% a year, cost of electronics will drop by 90% in ten years
What about dedicating roads or lanes in roads to AVs?
Would this reduce the technical requirements of the cars and thus make them cheaper?
Cars could rely more on wireless communication than on sensors
AVs could move very quickly thus reducing travel time, no more traffic jams!
http://www.theguardian.com/technology/2013/jun/02/autonomous-cars-expensive-google-
Roads dedicated to AVs can have higher speeds and
thus higher Fuel Efficiencies
Other Advantages of Roads Dedicated
to Autonomous Vehicles
Less congestion
Less traffic tickets and police officers
Fewer crashes, accidents, deaths, ambulances,
insurance expenditures
Denser cities and thus lower energy expenditures
Sources: see next slide
Sources from last slideA highly popular article on Slashdot and Reddit Futurologymakes note that the Google driverless car has not gotten a traffic ticket after driving 700,000 miles. Local government revenue in the USA was $1.73 trillion in 2014. So the traffic tickets make up 0.38% of the local government revenue.
Self driving cars could save $500 billion in the USA from avoided crashes and traffic jams and can boost city productivity by 30% of urban GDP after a few decades enabling larger and denser cities. So traffic tickets are 1.2% of the $500 billion from avoided crashes and traffic jams in the US. It is even less worldwide with more crashes and traffic jam costs. It is 0.15% of the 30% of urban GDP. In 2010, there were an estimated 5,419,000 crashes, killing 32,885 and injuring 2,239,000 in the United States. According to the National Highway Traffic Safety Administration (NHTSA), 33,561 people died in
motor vehicle crashes in 2012, up 3.3 percent from 32,479 in 2011. In 2012, an estimated 2,362,000 people were injured in motor vehicle crashes, up 6.5 percent from 2,217,000 in 2011. In 2012, the average auto liability claim for property damage was $3,073; the average auto liability claim for bodily injury was $14,653. In 2012, the average collision claim was $2,950; the average comprehensive claim was $1,585. The Centers for Disease Control and Prevention says in 2010 that the cost of medical care and productivity losses associated with motor vehicle crash injuries was over $99 billion, or nearly $500, for each licensed driver in the United States. All car crash costs in the USA are estimated at $400 billion per year. In 2013, worldwide the total number of road traffic deaths remains unacceptably high at 1.24 million per year
Traffic Congestion $100 billion cost in the USAIn the USA, using standard measures, waste associated with traffic congestion summed to $101 billion of delay and fuel cost. The cost to the average commuter was $713 in 2010 compared to an inflation-adjusted $301 in 1982 Sixty million Americans suffered more than 30 hours of delay in 2010 1.9 billion gallons of fuel were wasted because of traffic congestion Traffic congestion caused aggregate delays of 4.8 billion hours. Transport 2012.org puts
a 200 billion Euro price tag on congestion in Europe (approximately 2% of GDP). Central America also has its traffic woes. Let’s not forget other countries. On the weekend, Panama found that the price of congestion for business and the community was somewhere between $500 million-$2 billion annually. According to the Asian Development Bank, road congestion costs economies 2%–5% of gross domestic product every year due to lost time and higher transport costs.
More traffic density and Larger, More Productive City populations can boost GDP by 30%
Google told the world it has developed computer driving tech that is basically within reach of doubling (or more) the capacity of a road lane to pass cars. Pundits don’t seem to realize just how big a deal this is – it could let cities be roughly twice as big, all else equal. Seminal work by Ciccone and Hall
(1996) assessed the impacts of density on productivity in the US, and found that doubling employment density, and keeping all other factors constant, increased average labor productivity by around 6%. Subsequent work by Ciccone (1999) found that in Europe, all other things being equal, doubling employment density increased productivity by 5%. A third paper (Harris and Ioannides, 2000) applies the logic directly to metropolitan areas and also finds a 6% increase in productivity with a doubling of density. More recent work by Dan Graham (2005b, 2006) examines the relationship between increased effective density (which takes into account time travelled between business units) and increased productivity across different industries. Graham finds that across the whole economy, the urbanisation elasticity (that is, the response of productivity to changes in density) is 0.125. This means that a 10% increase in effective density, holding all other factors constant, is associated with a 1.25% increase in productivity for firms in that area. Doubling the density of an area would result in a 12.5% increase in productivity. Economist Robin Hanson noted that doubling the population of
any city requires only about an 85% increase in infrastructure, whether that be total road surface, length of electrical cables, water pipes or number of petrol stations. This systematic 15% savings happens because, in general, creating and operating the same infrastructure at higher densities is more efficient, more economically viable, and often leads to higher-quality services and solutions that are impossible in smaller places. Interestingly, there are similar savings in carbon footprints — most large, developed cities are ‘greener’ than their national average in terms of per capita carbon emission. Road capacity could be boosted by 4 times using robotic cars. This could be another 30% boost to productivity.
http://nextbigfuture.com/2014/05/for-self-driving-car-future-traffic.html#more
Drones
Transportation of medical and other supplies with propeller driven drones that use batteries and a distributed network of charging stations
How about using solar power for drones that provide satellite services (economist, the west wind blows afresh, August 30, 2014) Easier to launch than satellites
Lower altitudes reduces cost of optics
How about underwater drones, perhaps for managing fish farms http://edition.cnn.com/2013/11/06/tech/innovation/underwater-drones/index.html?hpt=te_t1
“Big Data” Analysis was Discussed in Session 3
What kinds of software and hardware will emerge that enable more
extensive data analysis of output from
Particle accelerators, telescopes
DNA sequencing equipment,
other types of scientific and medical equipment
What kinds of mathematical models will be the basis for this
hardware and software so as to make predictions, rather than
pursue more efficient algorithms
better translations
better predictions of flu trends, inflation, health problems, loan
defaults, rising food prices, and even social problems such as riots or
terrorism
Big Data: A Revolution That Will Transform How We Live, Work, and Think, Viktor Mayer-Schonberger, Kenneth Cukier
Sensors Enable More Types of “Big Data”
Analysis and System Control
Higher resolution camera chips
Better MEMS (micro-electronic mechanical systems)
Better camera chips, ICs and other sensors enable better process control and better collection of data, extending the Internet to more devices
What types of hardware and software will emerge that will enable better traffic management
Traffic sensors, smart cards, better fare management
Predictive analytics with better computers
Navigation systems with better ICs and MEMS
Goal should be to dramatically reduce public and private vehicle breakdowns and accidents
These systems may have larger impact on energy usage than will
improvements in batteries
Sensors will enable new systems and improvements to existing systems
Mobile Phones Enable Greater Access and
Control of Sensors
Wireless Access and Control of Sensors Environmental (temperature, pressure, gas content)
Physiological (heart rate, brain wave, blood pressure)
For vehicular and human traffic and many types of infrastructure (factories, buildings, dams, bridges, power plants)
The phone may become a major collection, analysis, and control point for data Control and program the thermostat, lighting, and other appliances in
homes
Rent bicycles, vehicles and other things to increase capacity utilization and reduce energy usage
Outline
What is MEMS and what are the applications?
MEMS and Moore’s Law
Challenges for MEMS
Example of micro-gas analyzers
Example of MEMS for Ink Jet Printer
Example of MEMS for filters and other components for mobile
phone chips
Improvements in MEMS make new forms of electronic systems
possible
Conclusions
Conclusions and Relevant Questions for
Your Group Projects (1)
Some types of MEMS greatly benefit from reductions in scale
Finding these MEMS is a big challenge
Part of this challenge is understanding the types of phenomena that
benefit from reductions in scale
For MEMS that benefit from reductions in scale
expect further improvements as additional reductions are achieved
Since most MEMS are still fabricated with feature sizes of microns or in
some cases tenths of micrometers, we are still far from minimum
feature sizes found on ICs of about 20 nanometers
This suggests that large improvements in MEMS can still be expected
for many applications
Conclusions and Relevant Questions for
Your Group Projects (2)
Another challenge is identifying a set of common materials, processes and equipment that can be used to make many types of MEMS
Can we identify a set of common materials, processes and equipment that can be used to make many types of MEMS
What kind of progress is being made in this area?
What are the major types of materials, processes and equipment that are used in the fabrication of bio-electronic ICs?
Is a convergence occurring in the use of materials, processes, and equipment
Appendix
MEMS design tools
Create individual 2-D layers, stack them on top of each other,
and create complex 3-D devices
• Design tools (e.g., 3D process simulator) enable
designers to visualize their creations before they are
built
Similar to CAD tools for ICs
Improvements in ICs lead to better CAD tools
Design libraries have been developed which enable designers to
create complex designs from multiple standard components
Similar to standard cell libraries with ICs
Source: http://www.memx.com/design_tools.htm
Design Library Process simulator
http://www2.imec.be/content/
user/File/MtM%20WG%20report.pdf
http://www.google.com.sg/imgres?q=laboratory+on+a+chip+market+size&hl=en&biw=1280&bih=933&tbm=isch&tbnid=AkXuNv_HgBmSrM:&
imgrefurl=http://pubs.rsc.org/en/content/articlehtml/2008/lc/b811169c&docid=JN9ixr33C73xUM&imgurl=http://www.rsc.org/ej/LC/2008/
b811169c/b811169c-
f2.gif&w=391&h=649&ei=fTd1UOiAOM3PrQeNuYDwAQ&zoom=1&iact=hc&vpx=695&vpy=90&dur=1862&hovh=289&hovw=174&tx=85&ty=
135&sig=111839047613402311162&page=2&tbnh=144&tbnw=87&start=30&ndsp=36&ved=1t:429,r:15,s:30,i:213
Source: Boucher-Lensch
Associates LLC
MEMS Technology,
2nd Edition
But Packaged Size will Always be Much Bigger than Minimum
Feature Size…..
Source: Technology Watch
http://www.lboro.ac.uk/departments/mm/research/
IPM-KTN/pdf/Technology_review/mems-recent-
developments-future-directions.pdf
Source: Technology Watch http://www.lboro.ac.uk/departments/
mm/research/IPM-KTN/pdf/Technology_review/mems-recent-
developments-future-directions.pdf
Source: http://www.isuppli.com/MEMS-and-Sensors/MarketWatch/Pages/MEMS-Market-
Rebounds-in-2010-Following-Two-Year-Decline.aspx
Source :
http://www.memsindustrygroup.org/fil
es/MEMSTrends_April2012_iMN.pdf
Source :
http://www.memsindustryg
roup.org/files/MEMSTrends
_April2012_iMN.pdf