e-
Inner region
Outer region
Jonathan Tennyson
Quantemol
University College London
UCL
April 2014
Electron collisions for
technological plasma models
Founded in 2004 as a University College London spin-off providing user friendly interfaces for sophisticated academic codes
Distribute 3 software packages:
UK R-matrix Code
GlobalKin Code Feedstock gases
Power Heat
Waste products
HPEM Code
User friendly interface on top of Kushner’s HPEM
VS
2D results
1D graphs and EEDF
Data export for comparison
Power coupling: CCP
Ar/Cl2: 0.8/0.2
2Freq: 10 MHZ 500 W 100 MHZ 750 W
Flow: 300 sccm
Electron kinetics: Monte-Carlo Solver
Wafer Size: 300 mm Chemistry: 10 species, 37 reactions
Running time: approx. 1 to 1.5 days
Electron Density Distribution
Extensively validated
and widely used in
industry
Uniquely designed for
simulation of low
pressure plasma
Has large variety of
physical model options
Released: March 2014
Intuitive interface
Multiple visualisation
capability
Easy-to-use reactor “painter”
Example library
Job runner with single and
simultaneous queuing
Parameter optimization
capability
An Introduction to the
programme
Processes: at low impact energies
Elastic scattering
AB + e AB + e
Electronic excitation
AB + e AB* + e
Dissociative attachment / Dissociative recombination
AB + e A + B
A + B
Vibrational excitation
AB(v”=0) + e AB(v’) + e
Rotational excitation
AB(N”) + e AB(N’) + e
Impact dissociation
AB + e A + B + e
Impact ionization (e,2e)
AB + e AB + e + e
Processes: at low impact energies
Photoionisation
AB + hn AB+ + e
All go via (AB)** . Can also look for bound states
Also consider:
New feature in
H H
Inner region
Outer region R-matrix
boundary
The R-matrix method J. Tennyson, Electron - molecule
collision calculations using the R-matrix
method, Phys. Rep., 491, 29 (2010).
e-
Electron – water rotationally resolved cross sections:
Differential cross sections (DCS) at 6 eV
DJ=1
DJ=0
DJ=all
*
Cho et al (2004)
Jung et al (1982)
R-matrix (2004)
A. The UK Molecular R-Matrix Codes
• Freely available online
• People can join as users on CCPForge
• Comprehensive but hard to use
(Can take a whole PhD (3 years) to correctly run one molecule!)
B. Quantemol-N
• Easy to use graphical interface
• Very simple input, requires little scientific knowledge or training
• Extra features (ionisation, dissociative attachment estimator,
high energy electronic excitation, etc)
Two methods of doing R-matrix calculations:
CCPQ Collaborative Computational Project Q - Quantum Dynamics
Main advantages of using Quantemol-N:
User friendly interface, which vastly
simplifies setting up an R-matrix simulation.
Full tutorial system to reduce learning curve.
Library containing 40+ examples.
Easy to use results format.
24/7 service support from Quantemol team.
Quantemol-N 4.1 can calculate:
Elastic cross-sections
Electronic excitation cross-sections (extended to high energies with BEf)
Super-elastic cross-sections between excited states
Electron impact dissociation
Scattering reaction rates
Resonance parameters
Dissociative electron attachment cross-sections estimator
Differential cross-sections
Momentum transfer cross-sections
Rotational excitation cross-sections
Atomic cross-sections
Electron impact ionisation at all energies
Red: features not in standard code
Examples obtained using
Quantemol-N
Chlorine – Dissociative Attachment
DZP basis for the target and frozen bond-length of 1.988Angstrom.
CAS-CI representation: 20 core electrons are frozen (Cl 1s, 2s and 2p orbitals).
14 active electrons are distributed as: (4 - 6σg, 4 - 5σu, 2πu, 2πg)14.
Lowest virtual orbitals of σg, σu and πu retained in the scattering calculation
48 target states in the close-coupling expansion.
Dissociative electron attachment cross sections for Cl2
Calculations used the DEA cross section estimator in Quantemol-N
Oxygen – Dissociative Attachment
Calculations: 6-311G* target basis at frozen bond length of 1.2144 A.
Target CAS: 4 core electrons frozen,and10 electrons in 12 valence orbitals:
(1σg, 1σ
u)4 (2σ
g, 3σ
g, 2σ
u, 3σ
u, 1π
u, 2π
u, 1π
g)12.
Scattering calculation augmented with the 4σg, 4σ
u and 2π
g orbitals.
48 states retained in close-coupling expansion.
Silane Ramsauer–Townsend minimum and
other features in good agreement
with experiment and theory
CF2 radical
-Highly reactive and therefore difficult species to
work with in the laboratory
R-matrix calculation
- Equilibrium geometry (C2v point group)
- Target Gaussian basis set: cc-pVTZ
- Included 8 target states
- Level: Full valence CI (MCSCF orbitals)
- R-matrix radius: 10 a0
CF2 radical
CF2 radical
Thanks for listening
UK R-matrix Code
GlobalKin Code Feedstock gases
Power Heat
Waste products
HPEM Code
Thank you for listening!
Some useful websites:
http://cccbdb.nist.gov/ - Good for
geometries, data comparisons
https://bse.pnl.gov/bse/portal - Basis set
database
Contact: Anna Dzarasova, +44 (0) 207 679 34 76, [email protected]
Methane
Electron – water (rotationally averaged)
elastic cross sections
Integral cross section
A Faure, JD Gorfinkel & J Tennyson, J Phys B, 37, 801 (2004)
Neopentane -17 atoms - no previous theory - Ramsauer-Townsend (RT) minimum at ~0.2eV in good agreement with experiment. - Bigger molecules are possible.
Electron – water Momentum transfer cross section
Cho et al (2004)
Johnstone & Newell
CF2 C6H6 C5H12 SiH4
Cl2 C3H4 NO2 C2H6
O2 C2 NO C3H8
H2O C3H6 O3 HCN
H3+ CaF+ PH3 HNC
CH4 CaF BF3 SiO
C3N CF N2 CS
Cl2O CO2 CO F2
CONH3 BF3 H2 HBr
Progress...
... plus a whole host of work done elsewhere.
Dominant interactions Inner region: can write exact H
Exchange
Correlation Adapt quantum chemistry codes
Outer region Long-range multipole polarization potential
Adapt electron-atom codes
High l functions required
Integrals over finite volume
Include continuum functions
Special measures for orthogonality
CSF generation must be appropriate
Many degenerate channels
Long-range (dipole) coupling
Boundary Target wavefunction has zero amplitude
R-matrix method for electrons: inner region wavefunction
Yk = A Si,j ai,j,k fiN hi,j + Si bj,k fj
N+1
fiN= target states = CI target built from nuclear centred GTOs
fjN+1= L2 functions
H H
e inner region
hi,j = continuum orbitals = GTOs centred on centre of mass
(within the Fixed-Nuclei approximation)
a
A = Anti-symmetriser
ai,j,k and bj,k variationally determined coefficients