End-Spoiling of Electrodes from Photonis

June, 24th 2010

Qing Peng, Anil U. Mane, Jeffery W. Elam

ALD Research Program, Process Technology Research Group

Energy Systems Division.

SEM of Endspoiling_ one end of 20 um MCP

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MCP NiCrElectrode is 10um into pore

EDX of Endspoiling_ one end

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NiCr NiCr

Ni Al

O Na Si

SEM of Endspoiling_ other end of 20 um MCP

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MCPNiCr

EDX of Endspoiling_ other end of 20 um MCP

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NiCr NiCr

Ni

Al

O

NaSi

Summary

The endspoiling from Photonis is goodThe penetration of NiCr is around 10um

and consistent with theoretical value 10 um if 45 degree angle is used.

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