Energy and Sustainability atgy yTexas Instruments

Manufacturing and BuildingsManufacturing and Buildings

Sunil ThekkepatSunil Thekkepat

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TI Businesses

2009 TI Revenue* by Segment: $10.4 billion

Education Technology$0.4 billion

Semiconductor $10.0 billion

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TI sales at a glance. . .

TI Sales by Product SC Sales by Region SC Sales by Industry

$13.7B SC Total

40% DSP

40% Asia 50% Communications

40% Analog

25% Europe

30% Computer

$0.5B EdTech

20% Other

20% U.S.

15% Japan<10% Industrial/Other

5% Automotive

<10% Consumer

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TI Technology is all around you

MultimediaPhones

Digital Audio

WirelessInfrastructure

DigitalStill Cameras

Bluetooth

PDAsVideo Security

Signal Processing

Automotive Power Over Ethernet

PMP Player

IP phones

Digital TVDSP and Analog

AffordableHandsets

PMP Player

Digital Video Recorder/ServerDigital Radio

Converged Devices Disk Drives

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Digital Motor ControlMedical VoIP Gateway

TI’s Global Presence and Texas RootsManufacturing, design or sales operations in more

than 30 countriesTI locationMajor TI location

(1) Fab in Germany

(2) Fabs in Japan

(1) D i C t

27 large sites

14.7 million gsf

(1) AT in Mexico(4) AT in Asia

• (2) Philippines

(1) Design Center in France

• (2) Philippines• (1) Taiwan• (1) Malaysia

(1) Design Center in India

(6) Fabs in Texas(4) Dallas, (1) Sherman, (1) Houston

60% f~ 60% of global energy use is in Texas

Texas Energy Use

1 5 million mWh/yr

(1) 250mW power plant = or = 125,000 average Tx homes

490 W f i d t bi95

1.5 million mWh/yr 490 mW of wind turbines

Energy Use / Cost by Type

2008 Energy Use (mmBTU)

AT it F b D t C t Offi

2008 Energy Spend ($K)

AT sites Fabs Data Center Office

1 839 606 21%906,575, 10%

AT sites Fabs Data Center Office

87% from electricty13% from natural gas

$34,275 , 16% $24,420 , 12%

AT sites Fabs Data Center Office

1,839,606, 21%200,000, 2% $3,778 , 2%

5,939,045, 67%1 MMBtu = 293 1 kWh $149,052 , 70%

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1 MMBtu = 293.1 kWh 1 kWh = 0.003412 MMBtu

$ , ,

Note, we spend about $1M more per year on water than on natural gas

Energy Breakdown2008 ISMI A/T Energy

Misc (PVAC, DI, MUA, Steam, . . . )

PCW2%

Process Eq.40%Recirc Air

8%

Lighting3%

Exhaust2%

10%2%

20%

Assy/Test Wafer Fab

CHW

CDA14%

8%

CHW21%

80% Mfg Tools Fac Systems

Process Tools Breakdown

Non-Process Pumps

UPS Controller4% Mini Environ

1%

Plasma Clean3%RF Gen

6%

Facilities Systems Breakdown

Exhaust7%

MU Air5%

PC Water Pump3%

CDA4% 45%

Process Pumps52%Misc

12%

Pumps9%

Heaters

Chillers42%

N2 Plant12%

UP Water8%

7%55%

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13%Recirc Fans19%

What is a wafer fab?A very big clean facilityA very big, clean facility . . .

Total space:1 100 000 gsf (102 000 m2)

. . . that fabricates very small chips on large silicon wafers

1,100,000 gsf (102,000 m2)Clean room space:

220,000 sf (20,400 m2)

Hair = 80,000 nm dia

2 mm

300 mm diameter1500-5000 chips ea30,000 wafers/mo

2 mm

2 mm

86nm

39nm

G98

30,000 a e s/ o1 billion chips/yr

Atom = 0.1 nm diaDNA = 2 nm dia

Gate = 39 nm dia

The Opportunity• Very tight temperature and humidity requirements . . .

– 70F+/-2 (21C+/-1) and 45% RH +/- 3%

• Combined with a large amount of exhaust and subsequent make up airmake up air . . .

– 650,000 cfm (307 m3/sec) = 2 Macy’s Kermit balloons per second

• Combined with the need to recirculate a large volume of air through the filters for cleanlinessthrough the filters for cleanliness . . .

– 4,400,000 cfm (2077 m3/sec) = 22 Goodyear blimps a minute

• Combined with hundreds of process tools with vacuum pumps, RF generators, and support equipment . . .p p , g , pp q p

• Combined with extensive use of deionized (DI) water to rinse the wafers during processing . . .

Could lead to annual power consumption of 170,000 mWh (10,000+ homes worth)and water consumption of 3 million gallons/day (6,000 homes worth)

Annual utility bills could total $20M $25M99

Annual utility bills could total $20M - $25M

Production vs. Operation

• To make a single chip requires an average of:– 0.2 kWh of electricity (75% front end / 25% back end) = .131kg of CO2e

0 2 gallons of water– 0.2 gallons of water– Variability is about 4X

• A fairly large fab can produce about 1 billion chips per year– 200 million kWh/yr = 131,000 metric tons CO2e/yr

• Alternate = (24) 3MW wind turbines in west Texas– 200 million gallons/yr

• In just 5 years of operation a chip will use: – 0.006 kWh for a small battery powered device (2 AA batteries of energy)– 1,575 kWh for a 24 hour/day high powered internet server– Variability is 250,000X

• In 5 years of operation those billion chips could use:– Between 3,000 kWh to 1.6 billion kWh

However, many chips are used in energy saving applications that save billi f kWh

100

,billions of kWh per year.

Sustainability

101

What is Sustainability?

• Simply: The Balance of People, Profit, and the Planet

• Officially: "to meet the needs of the present without compromising theOfficially: to meet the needs of the present without compromising the ability of future generations to meet their own needs.” - Brundtland Commission, 1989

• At TI: Reducing waste and inefficiency – ZERO wasted resources

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Our TI History

• Leadership in Business Ethics– Fair work practices; honesty & integrity

TI Founders literally wrote a book on ethics (TI Ethics Booklet 1961)– TI Founders literally wrote a book on ethics (TI Ethics Booklet, 1961)

• Strong Community Engagement / Corporate Citizenship– United Way– Education support & involvement– Arts & cultural support– Diversity leadership

• Economic Prosperity– One of the technology pioneers and leaders in Dallas– Profit sharing for employees

• Environment– History of regulatory compliance– Energy management since 1973

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Energy management since 1973

Environmental PolicyTexas Instruments Incorporated responsibly creates, makes and markets technology for innovators around the world. TI consistently complies with applicable regulations and customer requirements. TI commits to continual improvement of its operations, progressively reducing the potential impact of its activities, by focusing on employee health and safety, productivity and pollution prevention. This commitment is tracked through the setting and reviewing of relevant objectives and targets for TI operations

Management and employee commitment and accountability

through the setting and reviewing of relevant objectives and targets for TI operations.

Risk assessments of activities and processes

Natural resource and energy conservationgy

Emergency preparedness

Product stewardship

Supplier and contractor relationship

Product stewardship

Rich Templeton

104Public information and influences on public policy Rich Templeton

President & Chief Executive Officer

Facilities Sustainable Strategy• New Construction

– LEED-NC Certified – Life Cycle Cost vs. just first cost

• Commute Solutions– DART, Vanpools, Carpools, etc.

Greenho se Gases• Existing Buildings

– LEED-EB standards

Utilit U R d ti

• Greenhouse Gases– GHG footprint reporting; PFC

reductions

W t Effi i• Utility Use Reduction– Best Practice Checklist

• Waste Efficiency– Reduce, Reuse, Recycle – 95%

waste efficiency

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New Construction

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RFAB History

• Pre 2002 – Good history of ESH and resource saving activity

• 2002 – Began serious research into sustainable building topics2002 Began serious research into sustainable building topics

• 2003 – Worked with suppliers / vendors on future tool improvements

• 2003 – Held design session with RMI2003 Held design session with RMI

• 2004 – Began design of RFAB, registered with LEED

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Our Manufacturing Tools

• Typical ToolHeat

Exhaust

ToolUtilities

Chill ( )

Dedicated HVAC POU abatement

Vacuum Pump(s) RF generator(s)

Chiller(s)

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p( )

Supplier - Vacuum Pumps

• Vacuum Pumps: (reduced cooling load by >300 tons)– Large fab will have over 600 pumps

Met with suppliers and asked about product efficiency roadmap– Met with suppliers and asked about product efficiency roadmap– We were one step removed from direct purchase (vacuum pumps come

with the manufacturing tool), so feedback to pump manufacturer was “low price” not “low operating cost”

– Pump manufacturers had efficiency to offer and delivered >35% improvement in just a couple of years

– Annual operating savings of about $4k/yr per pumpWorked with industry consortium (ISMI) and vendors to develop an idle– Worked with industry consortium (ISMI) and vendors to develop an idle signal protocol (SEMI E54 standard)

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Supplier – Point of Use Chiller

• Process Cooling (PC) Water / POU Chiller – A couple hundred point of use chillers are used in a large fab for specific

li / h ti t kcooling / heating tasks– Most units are compressor based– Thermoelectric chillers are smaller, less expensive, run tighter control

temperatures use less cooling water and operate for about 1/10th the costtemperatures, use less cooling water, and operate for about 1/10th the cost (0.5kW vs 5kW)

– Reduced delta P and increased delta T in heat exchangers

Chuck

TC Feedback

(50-75 ft)Chuck

TC Feedback

(50-75 ft)

Chuck

RTD

Chuck

RTD

TCCompressor Pump

DI Cartridge

DI Water

TC Feedback

HeaterCoolingWater

TCCompressor Pump

DI Cartridge

TCCompressor PumpPump

DI Cartridge

DI Water

TC Feedback

HeaterCoolingWater

TE ModulePump

Cooling

Controller6 ft

TE ModulePumpPumpPump

Cooling

Controller6 ft

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Tank

Heat Exchanger

Tank

Heat ExchangerPower Supply

Cooling Water Power Supply

Cooling Water

Supplier - Exhaust

• Exhaust: (reduced exhaust load by >100,000 cfm)– All exhausted air must be meticulously reconditioned– Returned some general exhaust (heat) to space– Identified top tool internal constraints and worked pressure drop issues– Still have many opportunities

Typical tool i t i i iinterior piping

New, improved interior piping

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interior piping

Supplier – POU Abatement

• POU Abatement– Wet burn scrubbers for point of use abatement – Worked with supplier on more efficient burner (natural gas)– Worked with supplier on more efficient water chamber– Combo has reduced natural gas and water use by 50% each

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Facilities Equipment Energy

• Chiller Plant– Negawatts to reduce the need – right size the plant to the load

High efficiency chillers optimized system (variable speed pumps/towers)– High efficiency chillers – optimized system (variable speed pumps/towers)– Split chiller plant – high temp (50-54F) / low temp (40-42F)– Heat recovery (also saves water)

• Recirculating Air– Reduce the quantity of air– Specify high cfm/Watt units (variable speed, good motor/fan design)

S t ff t l d– System effect – low pressure drop

• Compressed Air– Check system for leaks and losses– Match compressor type to load– Heat recovery

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Sustainable Sites

< Areas were restored to native prairie grass to minimize irrigation and provide biodiversity.

Compost tubesPond collects runoff from most of the 92 acres. 2.7 million gallon base + 2 million gallon buffer. The pond meters runoff and settles sediment. Pond water is used for all site irrigation.and settles sediment. Pond water is used for all site irrigation.

Windmill drives an air

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d d es a acompressor to aerate the pond.

Sustainable Sites

Typical silt fence

Reflective roof saves energy and reduces the urban heat island effect. Concrete, instead of asphalt, also reduces heat buildup.

< Solar bollards guide the way and full cutoff downlights

Covered parking for bicycles and showers /

gpreserve dark skies

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Covered parking for bicycles and showers / lockers encourage alternate transportation. >

Sustainable Sites

þ SS Credit 8 - Light Pollution Reduction

Full cutoffdown light Bollard –

L.E.D. light, solar poweredsolar powered

Down lightfor flag

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Typical Texas Admin Bldg Energy

Typical Texas Office Building Energy End Use

MiAdmin Cooling Load Typical Texas Bldg

Heating6%

Water Heating5%

Misc5%

g yp g

People

People-Lat4%

Lighting42%Office

Equipment18%

Lighting29%

V til ti

Vent-Latent6%

3%

C li /

Ventilation14%

Cooling/ Ventilation

24%PC/Equip

14%RoofWindows

12%

Walls11%

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7%12%

Energy Savings – Shell and AdminPassi e solar orientation ith e terior shading– Passive solar orientation with exterior shading

– Energy and Daylight modeling– Optimized glazing (high VLT, low SHGC, low U value)

R fl ti f (hi h fl ti it hi h i i it )– Reflective roof (high reflectivity, high emissivity)– Natural daylighting with light shelves– High efficiency lighting (motion + daylight sensors)

D d t ll d til ti ( t l CO )– Demand controlled ventilation (control on CO2)– Attention to detail on insulation and infiltration

118

Indoor Environmental Quality

• CO2 sensor controlled ventilation

• Low emission materialsLow emission materials– Paints– Carpet– Adhesives and sealantsAdhesives and sealants

• Thermal comfort

• Daylight and views• Daylight and views

119

Cost / BenefitW i t d <1% f th j t t (<$1 5M) i LEED l t d it• We invested <1% of the project cost (<$1.5M) in LEED related items –predominately efficiency improvements that we would consider regardless of LEED

Th ll j t t 30% LESS th i 300 f b• The overall project cost 30% LESS than our previous 300mm fab.

• The first full year we should recover $1M in operating savings

• At full build out we will save >$4 0M per year in operating costs`• At full build out we will save >$4.0M per year in operating costs– 20% energy reduction (facility is 38% better than code minimum design)– 40% water use reduction

50% emissions reduction– 50% emissions reduction– LEED Gold Certified Office and Fabwww.ti.com/rfab

120

Existing Buildings

121

Utility Savings & Best Practices

• Utility saving projects– Began dedicating capital to utility savings projects in late 2005– Initial payback threshold was 3 years – later reduced to 1.5 years– Buildings also implement local expense projects each year

• Best Practices ChecklistBest Practices Checklist– Checklist of of 49 good practices that buildings can use to assess their

performance– Benchmarked every site in 2008, average improvement of 4.5% in 2009y , g p– Refining and growing the list to become more of a Best Practice Standard– lncorporating LEED-EB credits into this list

122

Resource Efficiency2009 Results

2009 Combined Capital and ExpenseCount Cost Units Saved Units Savings Payback

6 $45,000 61,750 kgal $230,000 0.278 $1 854 500 33 973 918 kWh $3 272 948 0 678 $1,854,500 33,973,918 kWh $3,272,948 0.62 $205,000 12,600 Mbtu $170,000 1.20 $0 - other $0 #DIV/0!

86 $2,104,500 $3,672,948 0.6

Annual Energy SavingsAnnual Energy Savings

50,000

60,000

160

180

mWh # projects

30,000

40,000

MW

h

80

100

120

140

# pr

ojec

ts

-

10,000

20,000

2006 2007 2008 20090

20

40

60

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2006 2007 2008 2009

Year

• Implement conservation projects

TI Energy- 2010 and Beyond• Engaging Sites Worldwide.

– Local market insight and understanding

– Opportunities worldwide

• Implement conservation projects– Executing on known solutions or best

practices worldwide including LEED best practices.

– Develop standards for efficiency– Evaluate energy cost and options

for Real Estate engagements– Adapting to changing Market

Condition

– Develop standards for efficiency improvements and implement projects. E.g. Chiller Plant Improvements, Heat Recovery, Lighting

– Work with industry groups to advance y gtool efficiency for all manufacturers

– Develop Technology Roadmap for emerging areas• Incorporating alternate and

renewable energy. gy– Evaluating utility level renewable

opportunity– Onsite generation

– Solar

• Enabling TI products and Engaging TI’er

– Communicate clear strategy for energy.

– Implement visible projects thatSolar– Cogeneration – Reviewing emerging areas

– Implement visible projects that incorporates TI products.

– Information and Education

124

TI Energy Team

Mark LeypoldtypEnergy Supply Manager

Paul WestbrookSustainability Development Manager

Sunil ThekkepatWW Energy Strategy Manager

125

Summary

126

Recent Strides in Sustainability

• Excellent commute solutions program and results

• First LEED Gold fab in the world – raised the bar on our industryFirst LEED Gold fab in the world raised the bar on our industry

• First LEED bldg in the entire country of the Philippines (Baguio Silver)

• Dedicated capital funds toward utility reduction projectsDedicated capital funds toward utility reduction projects

• Good focus by sites on expense utility savings projects

• Corporate Citizenship Report (GRI formatted) beginning in 2007• Corporate Citizenship Report (GRI formatted) beginning in 2007

• Report our carbon footprint publicly (2.1 MMtons/yr)

• Best Practice Standards will help all sites improve• Best Practice Standards will help all sites improve

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Recent Strides in Sustainability

• ISMI (Sematech) work with vendors on tool efficiency

• Some efficient vacuum pump and solid state chiller installations at TISome efficient vacuum pump and solid state chiller installations at TI

• VFD’s and airflow improvements in data centers

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