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Evaluation of fluence dependent variations of capacitance and generation current parameters by transient technique E.Gaubas, T.Čeponis, J.Kusakovskij, A.Uleckas, S.Sakalauskas, and J.Vaitku Vilnius University, Institute of Applied Research, Vilnius, Lithuania (VU) Outline Motivation for alternative techniques vs. impedance based frequency domain one Principles of Barrier Evaluation by Linearily Increasing Voltage (BELIV) technique Fluence dependent BELIV characteristics Temperature dependent BELIV characteristics for reverse- biased diodes Detector- barrier evaluation summary Photo-conductivity gain in heavily irradiated full-depleted detectors
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Page 1: Evaluation of fluence dependent variations of capacitance and generation current parameters by transient technique E.Gaubas, T.Čeponis, J.Kusakovskij,

Evaluation of fluence dependent variations of capacitance and generation current parameters by transient technique

E.Gaubas, T.Čeponis, J.Kusakovskij, A.Uleckas, S.Sakalauskas, and J.Vaitkus

Vilnius University, Institute of Applied Research, Vilnius, Lithuania (VU)

Outline

Motivation for alternative techniques vs. impedance based frequency domain one

Principles of Barrier Evaluation by Linearily Increasing Voltage (BELIV) technique

Fluence dependent BELIV characteristics

Temperature dependent BELIV characteristics for reverse-biased diodes

Detector- barrier evaluation summary

Photo-conductivity gain in heavily irradiated full-depleted detectors

Summary

Page 2: Evaluation of fluence dependent variations of capacitance and generation current parameters by transient technique E.Gaubas, T.Čeponis, J.Kusakovskij,

Applicable only when diode can be emulated by the linear elements Uac<<kT/e

CP CS (UR) Cb0 (1+U/Ubi)-1/2

Cb0=(eND0S2/2eUbi)1/2 slope C-2 vs U ND; intersect. Ubi-UF=0 Ubi

Ubi=(kT/e)ln(NAp+ND/ni2)

at least Uac/URdc<<1`

Motivation for alternative techniques vs. impedance based frequency domain one

Limitations for impedance, frequency domain based C-V (LRC) techniques Principle (LCR meter) “works” only if complexity (jXC) appears due to conductance/impedance

LRC phasor

Whether standard paradigm of C-V technique is valid when diode current iCigen, icapt for UR -?

Page 3: Evaluation of fluence dependent variations of capacitance and generation current parameters by transient technique E.Gaubas, T.Čeponis, J.Kusakovskij,

Applicable only when diode can be emulated by the linear elements Uac<<kT/e

CP CS (UR) Cb0 (1+U/Ubi)-1/2

Cb0=(eND0S2/2eUbi)1/2

Ubi=(kT/e)ln(NAp+ND/ni2)

at least Uac/URdc<<1`

Motivation for alternative techniques vs. impedance based frequency domain one

Limitations for impedance, frequency domain based C-V (LRC) techniques Principle (LCR meter) “works” only if complexity (jXC) appears due to conductance/impedance

LRC phasor

Whether standard paradigm of C-V technique is valid when diode current iCigen, icapt & how to correlate with I-V -?

-200 -150 -100 -50 0 5010-13

10-11

10-9

10-7

10-5

10-3

I (A

)

U (V)

Neutron irradiated diodes:

=1E13 cm-2

=1E14 cm-2

=1E16 cm-2

Why huge difference in CP and Cs appears for heavily irradiated diode -?Why C-V measurements are improved at high frequencies-?Why extracted depletion voltage depends on frequency -?

100 kHz

50 100 150 200 250101

102

Neutron irradiated diodesf=100 kHz

Cp, =1012 cm-2

Cs, 1012 cm-2

Cp, 1014 cm-2

Cs, 1014 cm-2

Cp, 1016 cm-2

Cs, 1016 cm-2C

(pF

)

UR (V)

Page 4: Evaluation of fluence dependent variations of capacitance and generation current parameters by transient technique E.Gaubas, T.Čeponis, J.Kusakovskij,

Motivation for alternative techniques vs. impedance based frequency domain one

Limitations for impedance, frequency domain based C-V (LRC) techniques Principle (LCR meter) “works” only if complexity (jXC) appears due to conductance/impedance

LRC phasor

Whether standard paradigm of C-V technique is valid when diode current iCigen, icapt for UR -?

Why huge difference in CP and Cs appears for heavily irradiated diode -?Why C-V measurements are improved at high frequencies-?Why extracted depletion voltage depends on frequency -?

108 109

UFD-non

108 109108 109

UFD-non

30 Hz

Applicable only when diode can be emulated by the linear elements Uac<<kT/e

CP CS (UR) Cb0 (1+U/Ubi)-1/2

Cb0=(eND0S2/2eUbi)1/2

Ubi=(kT/e)ln(NAp+ND/ni2)

Page 5: Evaluation of fluence dependent variations of capacitance and generation current parameters by transient technique E.Gaubas, T.Čeponis, J.Kusakovskij,

Motivation for alternative techniques vs. impedance based frequency domain one

i*gen

LRC phasor becomes multi-dimensional

Limitations for impedance, frequency domain based C-V (LRC) techniques Principle (LRC meter) “works” only if complexity (jXC) appears due to impedance

How are the generation and carrier capture currents included into standard C-V for (heavily) irradiated pin diodes-? with large igen=eniw(U)S/gen

gen=2cosh(EL-Ei)/vTNL- short i=iC+(igen+idiff - complex quatn.)

Igen,capt=eniw(U)S/gen,capt becomes a complex quantity for ac U~

Is it possible to separate an impact of igen, capt from C-V to correlate with I-V -?

Technical limitations for LRC-meters based measurements- necessary to make measurements in the range of low UR voltages to avoid the impact of igen,~ U1/2 - LRC meters with small ac voltage U~<<kT/e

- dc and ac voltage sources connected in series (dependence on Rin dc), - noise (Uns) suppressed dc voltage sources due to small Uns <<U~,

- no additional loops (capacitors, resistors), limitations to ground for LRC-meters with wide range of external dc voltages

Indications that LRC impedance principle and a paradigm of parameter extraction does not work anymore:- appears huge difference between CP and CS - artefact of principle due to i*

gen,- impossible to separate iC and i*

gen,

- appears crucial reverse voltage drop:

e.g. Ugen=igenRdepl=w2(U)/gen and indefinite voltage drop (on junction and within bulk) Utechn =Ugen UFD shifts crucially to the high voltage/high frequency range due to increase of Ugen with Uext

- depletion width becomes indefinite (un-known gen) - estimation by iteration procedure-- simulations by TCAD/SPICE or approach of positive root w(Uex)=[20 (Ubi+Uext )/{eND(1+20 /eNDgen)}]1/2 – valid for Uac/Udc<<1; necessary additional parameters)

- intricate (w(Uext)) dependence on frequency, temperature, voltage - due to gen

- appears an artificial effective doping Nefart= ND(120 /eNDgen) – seeming variations

Page 6: Evaluation of fluence dependent variations of capacitance and generation current parameters by transient technique E.Gaubas, T.Čeponis, J.Kusakovskij,

Principles to include igen, capt

To include dominant physical processes, analysis of Cbj(U)=0S/w(U) is an alternative way with estimation of w(U) by iteration procedure- approach of positive w(U) root using Ugen=w2/gen,capt

valid for Uac/Udc<<1 and leads to different Neff=ND (120 /eND+gen,-capt) for 1/gen (+) and for 1/capt (-)

)2

1(

)(2)(2)(

,

0

,0,,0,

captgenDD

extRbi

D

captgenextRbiextR

eNeN

UU

eN

UUUUw

Motivation for alternative techniques vs. impedance based frequency domain one

Alternative measurement techniques capable to separate components

Evaluation of w(Ujunct) by simulations by TCAD/SPICE etc.

captgen

iC

SUwenUwiUi

,

)()]([)(

Page 7: Evaluation of fluence dependent variations of capacitance and generation current parameters by transient technique E.Gaubas, T.Čeponis, J.Kusakovskij,

BELIV technique

U(t)=UP/PLt =At

LIV ramp A=UP/PL = U/t

PL= 10 ns 500 sUP= 0.01 5 V

Cb= 2 pF 40 µF with resolution 0.2 pF | (2-20 pF)

UC=iC*50 =10 mV 4 pF|A=5*E8 V/s

GLIVpin

diode

RL=50 oscilloscope

GLIVGLIVpin

diode

RL=50 oscilloscope

Cryo-chamber

AT-DSO-6102A

iC

LIV always starts from U(t)=0

Page 8: Evaluation of fluence dependent variations of capacitance and generation current parameters by transient technique E.Gaubas, T.Čeponis, J.Kusakovskij,

BELIV technique, model and simulations

2/30

)1(

21

)()(

bi

bib

bbC

U

At

U

At

ACU

CUC

t

U

dt

dqti

dxxt

xitit

RCC

RCCM

0]

)(exp[)(

1)(

2/10

2/30 )1()1(

)1(

21

)()()()(big

iTBk

eAt

diff

bi

bibgdiffCR U

AtSwenei

U

At

U

At

ACtitititi

])0()0(2

3)

4

)0(()0(

4

)0([

)0(2

gcc

gC

g

bie ii

ii

i

Ai

Ut

Reverse bias

Short transient processes acting in series due to tD, DR, capt, gen

etc (to complete a circuit) determine a delay,- reduction of the initial displacement current step. Similar effect perturbs the C-V characteristic at UR0 measured by impedance technique (LRC-meters).

0 2 107

4 107

6 107

8 107

1 106

0

5 105

1 104

1.5 104

2 104

2.5 104

3 104

2.8 104

1.4 108

jc t 4( )

jcM t 4 2 1010

jcM t 4 2 108

jcM t 4 2 107

1 1061 10

11 t

Displacementcurrent

Charge extractioncurrent

te

0 5 107

1 106

0

1 104

2 104

3 104

4 104

3.7 104

5.185 105

jc t 4( )

jcg t 4( )

1 1061 10

11 t

Charge extraction

Charge generation

Page 9: Evaluation of fluence dependent variations of capacitance and generation current parameters by transient technique E.Gaubas, T.Čeponis, J.Kusakovskij,

BELIV technique UF model

U(t)=UP/PLt =At

)1(i))(

1(2

}])(

1[)

)(1(

)2

)(1(

{)(

)()()()()(

)/)(2/10

)(

02/3

0

TkteUdiff

bi

F

R

iTk

teU

B

Fdiff

bi

F

bi

F

bF

diffFRCdiffCFF

BFB

F

eU

tUwene

Tk

teUC

UtU

UtU

Ct

tU

tititititi

Forward biasUF(t)=At-RLiF(t),

Transcendental, iterative simulations

Page 10: Evaluation of fluence dependent variations of capacitance and generation current parameters by transient technique E.Gaubas, T.Čeponis, J.Kusakovskij,

BELIV transients – measurement technique

0 2 4 6 80.00

0.04

0.08

UG

LIV

(a.

u.),

dU

GLI

V/d

t (a.

u.)

t (s)

Ampl

itude

BEL

IV (V

) Si diode A = 4 V/s 2 V/s 1 V/s 0.5 V/s 0.3 V/s

0.0

0.1

0.2

0.3

0.4

0.5

0.6

GLIV signal Differentiated GLIV signal

A = 0.5 V/s

a ba- Barrier evaluation by linearily increasing voltage (BELIV) technique based on charge extraction current transients measured in the non-irradiated and irradiated with small fluence pin diode at reverse (UR) biasing by LIV pulses.

b- Charge injection BELIV transients for forward (UF) biased pin diode irradiated with small fluence varying ramp A of LIV pulses.

Reverse biasing Forward biasing

0 2 4 610-5

10-4

10-3

10-2

A

mp

litu

de

BE

LIV

(V

)

t (s)

= 1012 n/cm2

Upulse-forward

= 0.3V

t pulse

= 28 s

2.8 s 1.4 s 0.24 s

Barrier (charge)capacitance Diffusion (storage charge)

capacitance

Page 11: Evaluation of fluence dependent variations of capacitance and generation current parameters by transient technique E.Gaubas, T.Čeponis, J.Kusakovskij,

0 10 20 300.00

0.04

0.08

0.12

0.16

Encapsulated Si diode A = 0.14 V/s

Up = 1V, t

pulse= 7s

Up = 2V, t

pulse= 15s

Up = 4V, t

pulse= 30s

Am

plitu

de B

ELI

V (

mV

)

t (s)

BELIV transients – measurement technique

UR pulse duration dependent BELIV transients at a constant LIV ramp is equivalent to Cb -V~t

Page 12: Evaluation of fluence dependent variations of capacitance and generation current parameters by transient technique E.Gaubas, T.Čeponis, J.Kusakovskij,

BELIV transients on WODEAN pad-detectors neutron-irradiated with fluences 1012 -1016 n/cm2

a ba- LIV pulse duration (LIV ramp) dependent BELIV transients at reverse (UR) bias. b- Comparison of charge extraction (UR) and

injection (UF) BELIV transients measured on diodes irradiated by neutrons of different fluence.

To separate the displacement, generation/capture and diffusion currents, a wide range of duration/voltage and perfect LIV pulses are necessary.

For diodes irradiated with rather small fluence charge extraction current prevails for Rev biasing, while charge storage (diffusion) capacitance dominates for Frw biased diodes.

In heavily irradiated material generation and recombination currents dominate. Voltage on junction is governed by Ujnc=At-iRL

Reverse bias Reverse & Forward bias

0.0 0.2 0.4 0.6 0.8 1.00.0

0.1

0.2

0.3

0.4

0.5

0.6

Am

plitu

de B

ELI

V (V

)

t (s)

MCZ n-type Si diode, = 1012 n/cm2 T=300K, U

pulse-reverse= 5V

tpulse

= 1 s 0.2s 0.1s 0.05s

Barrier capacitance prevails for short LIV pulses

0.0 0.5 1.0 1.50.000

0.002

0.004

0.006

0.008

0.010

0.00

0.01

0.02

0.03

0.04

1015 n/cm2 Up= 2V

Forward Up= 2V

Reverse 0.2V Reverse 2V

Ampl

itude

BEL

IV (V

)

t (s)

1012 n/cm2

Forward Up= 0.2V

Reverse Up= 0.2V

Reverse Up= 2V

Cb

dominates for1E12 n/cm2

Igen & irecdominate for1E16 n/cm2

Page 13: Evaluation of fluence dependent variations of capacitance and generation current parameters by transient technique E.Gaubas, T.Čeponis, J.Kusakovskij,

BELIV results –dependence on fluence

a ba- Variations of BELIV transients with irradiation fluence for reverse biased Si pin pad-detector at the same LIV parameters (A= 3 MV/s, PL =1.5 s). b- Injection current BELIV transients for different fluence neutron irradiated Si pin diodes. The extreme points (te, tFk) are denoted on transients.

0.0 0.4 0.8 1.210-4

10-3

10-2

10-1

Am

plit

ud

e B

EL

IV (

V)

t (s)

MCZ n-type Si diode T=300K, U

pulse-reverse=5V, t

pulse=1.5s

=1E12 n/cm2

1E13 n/cm2

1E14 n/cm2

1E16 n/cm2

0.0 0.4 0.8 1.2

10-3

10-2

10-1

tFk

iR(t)

iCdiff

(t)

iCF

(t)

MCZ n-type Si diode T=300K, U

F,GLIV=0.3V,

PL=1.5s

=1E12 n/cm2

1E13 n/cm2

1E14 n/cm2

1E16 n/cm2

Am

plit

ud

e B

EL

IV (

V)

t (s)

iC(t)

te

Page 14: Evaluation of fluence dependent variations of capacitance and generation current parameters by transient technique E.Gaubas, T.Čeponis, J.Kusakovskij,

BELIV results –dependence on temperature

Temperature dependent variations of BELIV transients in heavily (with fluence of 1016 n/cm2) irradiated Si pin diode.

0.0 0.1 0.2 0.3

10

20

30

40

50

Am

plit

ud

e B

EL

IV (

mV

)

t (s)

1016 n/cm2 , U

pulse-reverse= 8V, t

pulse=0.25s

T = 170K 200 250 273 294

-200 -150 -100 -50 0 5010-13

10-11

10-9

10-7

10-5

10-3

I (A

)

U (V)

Neutron irradiated diodes:

=1E13 cm-2

=1E14 cm-2

=1E16 cm-2

T=294 K

Ubi still exists (for 1E16 n/cm2) but diode at RT resembles a photo-resistor at large Ubias

Page 15: Evaluation of fluence dependent variations of capacitance and generation current parameters by transient technique E.Gaubas, T.Čeponis, J.Kusakovskij,

Photo-conductivity gain (PCG)

PCG=tdr,h/tdr,e CCE>1 if tdr,e<tdr,h<Rec

CCE0 for Rec<tdr

- radiation induced generation (trapping) centers (increased density with fluence) enhance probability for PCG processes;

- reduction of tdr by enhancement of U>UFD and by reduction of d~lh;

- resolvable PCG pulses if time gap tar between arrival of HE particles tar>tr

p+ n+

iat FD

-+

tdr,h=lh2/hU

tdr,e=le2/eU

for tdr,e<tdr,h to keep el. neutrality additional carrier(s) is injected from electrode or thermally generated in vicinity of electrode

tr

Rec

gT

n, H+

Page 16: Evaluation of fluence dependent variations of capacitance and generation current parameters by transient technique E.Gaubas, T.Čeponis, J.Kusakovskij,

Summary: detector- barrier evaluation by LIV

For barrier evaluation better to control Ubi=(kT/e)ln(NAND/ni2)

BELIV shows ND is invariable, barrier exists, detector functional, but necessary to shift the operational range towards high () frequency/short time domain range, to decrease bias voltage (to suppress igen) etc.

Optimization of the detector’ functionality is possible only by a trade-off among desirable parameters:

- necessity to shift the time domain TD towards short shaping time TD1/ is compatible with LHC operation regime, but, to reduce an impact of igen, rec , it is desirable to keep rec,gen >TD>DR (reduction of DR is possible by enhancement of doping);

- to suppress igen, rec - reduction of the operational voltages, temperature and base thickness d;

- to reach full-depletion – enhancement of operational voltage, but increases a problem with igen~U1/2 ;

- to reduce impact of g-r noises – enhancement of detector volume V=Sd through base thickness or area S ( 3-D detectors); - to approach a photo-conductivity gain regime (to increase CCE) enhancement of operational voltage and proper reduction of base thickness d;

Page 17: Evaluation of fluence dependent variations of capacitance and generation current parameters by transient technique E.Gaubas, T.Čeponis, J.Kusakovskij,

Summary

Validity of a simple paradigm (standard C-V method) of the parameter extraction from C-V characteristics in irradiated diodes should be verified for every experimental regime and adjusted by selecting , UR, Uac, T parameters

Developed BELIV transient technique enables one to control variations of Ubi and generation current dependent on fluence and temperature. Increase of generation current for reverse biased diode and reduction of diffusion capacitance/current due to recombination of injected carriers in forward biased diodes leads to the symmetric (Rev/Frw) I-V/C-V transient characteristics. Symmetry of these characteristics indicate the dominant mid-gap centers/clusters with pinned EF.

BELIV shows Ubi and ND is invariable and detector is functional, while in heavily irradiated detectors for 20 Hz< <10 MHz deterioration of characteristics is determined by capt,gen.

Optimization of the detector’ functionality is possible only by a trade-off among desirable parameters. CCE can be increased through proper design of detector (d) and applied detection regimes (U, response) to reach PCG.

Page 18: Evaluation of fluence dependent variations of capacitance and generation current parameters by transient technique E.Gaubas, T.Čeponis, J.Kusakovskij,

Thank You for attention!

Page 19: Evaluation of fluence dependent variations of capacitance and generation current parameters by transient technique E.Gaubas, T.Čeponis, J.Kusakovskij,

ni/ND

20 10 0 10 201

10

10015

1

taug x( )

taur x 0.01( )

taur x 0.001( )

taur x 0.0001( )

2020 xEDL-Ei

Gen

erat

ion

lif

etim

e

Rec

om

bin

atio

n li

feti

me

re

c, g

en

=h/e=n0/p0

Trivial remarks concerning SRH relations between recombination – generation lifetime

n-Si

Photo-injection URT

ne pe > ni2

ne · pe < ni2ne · pe - ni

2 =0

n-Si

Photo-injection URT

ne pe > ni2

ne · pe < ni2ne · pe - ni

2 =0

Without applied E field

With applied dc E field

Eqv.

R>0

G<0

ni/ND

20 10 0 10 201

10

10015

1

taug x( )

taur x 0.01( )

taur x 0.001( )

taur x 0.0001( )

2020 x(EDL-Ei)/kT

Gen

erat

ion

lif

etim

e

Rec

om

bin

atio

n li

feti

me

re

c, g

en

DLnn

iDLei

DLrec NvkT

EE

n

n

NvR

ni

e 1

|]cosh(2

1[1

DL

iDL

igen NvkT

EE

Gn

)cosh(2

/

Page 20: Evaluation of fluence dependent variations of capacitance and generation current parameters by transient technique E.Gaubas, T.Čeponis, J.Kusakovskij,

Calibration of LRC-meters

0 200 400 600 800 1000

103

104

105

C

(pF

)

Uac

(mV)

Neutron irradiated diode

=1013 cm-2, UR=0V, f=10 kHz

Waine Kerr 6440B C

p

Cs

QuadTech 7600 C

p

Cs

0 300 600 900

300

400

500

C (

pF)

Uac

(mV)

Neutron irradiated diode, =1013 cm-2

UR=1V, f=10 kHz

Waine Kerr 6440B C

p

Cs

QuadTech 7600 C

p

Cs

Page 21: Evaluation of fluence dependent variations of capacitance and generation current parameters by transient technique E.Gaubas, T.Čeponis, J.Kusakovskij,

BELIV results –dependence on fluence

0.0 0.4 0.8 1.210-4

10-3

10-2

10-1

ig(t)

iC(t)

te

Am

plitu

de B

ELI

V (V

)

t (s)

MCZ n-type Si diode T=300K, U

R, GLIV=5V,

PL=1.5s

=1E12 n/cm2

1E13 n/cm2

1E14 n/cm2

1E16 n/cm2

0.0 0.4 0.8 1.2

10-3

10-2

10-1

tFk

iR(t)

iCdiff(t)

iCF(t)

MCZ n-type Si diode T=300K, U

F,GLIV=0.3V,

PL=1.5s

=1E12 n/cm2

1E13 n/cm2

1E14 n/cm2

1E16 n/cm2

Am

plit

ude

BE

LIV

(V

)t (s)

a ba- Variations of BELIV transients with irradiation fluence for reverse biased Si pin pad-detector at the same LIV parameters (A= 3 MV/s, PL =1.5 s). b- Injection current BELIV transients for different fluence neutron irradiated Si pin diodes. The extreme points (te, tFk) are denoted on transients.

Page 22: Evaluation of fluence dependent variations of capacitance and generation current parameters by transient technique E.Gaubas, T.Čeponis, J.Kusakovskij,

Relation among Cb,, Rdepl and LRC: Y,Rp ,Cp

pL

x

nn ekT

eUpxp

]1[exp)( 0ti

aeUUU 0

pL

x

nUn ekT

eUpxp

]1[exp|)( 000

pL

xti

antieaUUn e

kT

eUUepxp

]1

)([exp|)( 0

00

Rcapt

p

Rcaptp

p

x

an

tipL

x

an

tiapL

x

n

a

tiapL

x

n

tiapL

x

n

pL

x

npL

xti

anaUan

i

L

tx

Lifwhen

ekT

eU

kT

eUpee

kT

eU

kT

eUp

kT

eeUe

kT

eUp

e

kTUifonly

kT

eeUe

kT

eUp

kT

eU

kT

eUUeep

ekT

eUpe

kT

eUUepxp

,

,

00

00

00

00

000

00

00

1

expexpexp

]1[expexp]1exp1)(

[exp

]1[exp]1)(

[exp|)(

RcaptdifppacacUn

pacUp

pUn

pUp

ijjkT

eU

x

peDj

kT

eUeD

x

peDj

,,

000

1)(|

|

]1)[exp(|

|

bdepl

Rcaptdifppac

pCi

RBiGijj

kT

e

U

jY

11)( ,,


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