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Precision Optics Coating systems that think for themselves
Precision OpticsCoating systems that think for themselves
Coating systems that think for themselves…Achieve maximum yields for even the most complex optical stack designs using
“real time re-optimisation software”. The spectrum recorded after each layer of
the stack is deposited is analysed in just a few seconds and in case of significant
deviations new thicknesses and target spectra for the remaining layers are
calculated and adjustments made to the rest of the coating process automatically.
›› Recover wayward processes
›› Achieve enhanced yields
…so you can find time for the next task!
Turn your production vision into reality using Evatec’s knowhow in optical thin film production.
We deliver hardware, processes and the most advanced control systems ever to manage development and production of complex optical coating processes.
Develop your process with ease
Use our integration package to take you all the way from initial thin film design through layer monitoring strategy and recipe generation on the coater itself.
Run your process with confidence
Our systems will make “real time” adjustments throughout the coating process to reduce errors and maximise yields.
Optical Thin Film Powerhouse
3. Recalculate remaininglayers or continuewithout changes
1. Layerdeposition
2. Checkspectrum
Thereoptimisation
loop
ProcessStart
ProcessEnd
E GunsFrom 1 to 64 pocket, single or co-evap, for dielectrics, metals and TCOs
Mass Production
CoatingExecution
Recipe Generator
MonitoringStrategy
Thin FilmDesign
A choice of coating technologiesChoose from evaporation, PIAD, sputter or PECVD. You can be confident that we
use all our own platforms, source designs and software systems to ensure perfect
integration of hardware, sources and system operation. Our process specialists
are on hand to help you choose the best technology for your substrate type and
application and run sampling.
Thermal EvaporationStandard and custom designs for complex substrate geometries and a large variety of coating materials
PIADImproved film qualities, lower process temperatures and shorter process times
SputterMetals, dielectrics and TCOs. Closed loop reactive processes. Co-sputter for complex materials
Mass Production
CoatingExecution
Recipe Generator
MonitoringStrategy
Thin FilmDesign
A choice of platform typesWith over 1400 systems in production around the world, the BAK evaporator
remains a firm favourite for production of optical coatings, but its now available in
more variants than ever with custom solutions for extended throw, load lock and
split chamber. Sputter is now well established for high quality optical coatings
and we offer the MSP dedicated batch tool with a proven track record in optics
production or the Radiance sputter tool with cassette to cassette handling for the
ultimate in automation.
Radiance (cassette to cassette)
Integrate sputter, PECVD and plasma etch processes on a single tool for precision optics.
Custom engineering
From custom “ flip” systems to robot substrate handling and cassette to cassette solutions.
BAK Evaporators
Platform sizes from 0.5 to 1.4m. Evaporation, PIAD and Ion Plating.
MSP Sputter
Outstanding optical and mechanical stabilities, Process repeatabilitiesT50 ± <0.2%*.
*For Fabry Perot filter, T50, falling edge 567nm, 6 non consecutive runs.
Optics ToolboxFrom theoretical design to fi nal recipe with ease. Avoid transcribing errors between design steps & reduce development times
Mass Production
CoatingExecution
Recipe Generator
MonitoringStrategy
Thin FilmDesign
Hardware | Processes | Advanced Control Systems
Fast track from development to production“Optics Toolbox” integrates all steps from the fi rst thin fi lm design using industry
standard design packages like Filmstar™, Essential Macleod™ and Optilayer™
all the way to the fi nal coating in one seamless series. The choice is yours -
quartz or broadband optical monitoring, evaporation or sputter.
Quartz MonitoringSingle or 6 way quartz with increased sampling rates for termination accuracy
Optical MonitoringUV to IR, monochromatic or broadband, test glasses or direct substrate measurement
Optical PyrometryOutstanding control of temperature distribution across coating zone for hot IR coating processes
The Optical Thin Film Powerhouse
Evatec Ltd.
Lochrietstrasse 14
CH-8890 Flums
Switzerland
Tel: + 41 81 720 1080
Fax: + 41 81 720 1081
www.evatecnet.com
About Evatec
Evatec offers complete solutions for thin film deposition and etch
in the optical and semiconductor markets. Evatec engineers
are able to offer practical production advice from R&D to
prototyping and mass production. We recognize that no single
technique offers the answer to all problems. With a technology
portfolio including standard and enhanced evaporation as well
as sputter, we are ready to offer sampling services and custom
engineering to meet our customers individual needs.
We provide sales and service through our global network
of local offices. For more information visit us online at
www.evatecnet.com or contact our head office.
Product descriptions, photos and data are supplied within the brochure for general information only
and may be superseded by any data contained within Evatec quotations, manuals or specifications.