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Fate of CMP Nanoparticles During Fate of CMP Nanoparticles During Wastewater Treatment Wastewater Treatment F. Gomez , D. Brown, J. Field, F. Shadman, R. Sierra Dept Chemical and Environmental Engineering The University of Arizona (E-mail: [email protected] ) NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing
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Page 1: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

Fate of CMP Nanoparticles During Fate of CMP Nanoparticles During Wastewater TreatmentWastewater Treatment

F. Gomez, D. Brown, J. Field, F. Shadman, R. Sierra

Dept Chemical and Environmental EngineeringThe University of Arizona (E-mail: [email protected])

NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing

Page 2: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

OutlineOutline

� INTRODUCTIONNanoparticlesWastewater Treatment

� OBJECTIVES

� MATERIALS AND METHODS

� RESULTS

� CONCLUSIONS

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Page 3: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

Introduction: Nanoparticle definitionIntroduction: Nanoparticle definition

Nanoparticles (NPs): Materials with at least one dimension of 1 to 100 nm

Adapted from Andrew Schneider’s “Amid nanotech's dazzling promise, health risks grow”, 2010

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Page 4: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

What makes nanomaterials interesting?

� Small size:Surface area, atoms exposed

� Shape (spheres, flakes, tubes, rods, etc.):Pattern of molecular bonds

� Chemical composition: Crystal structure, pollutants on surface

� Solubility:Dispersion or agglomeration

Quantum effects and bulk properties!!

Introduction: Properties of nanoparticlesIntroduction: Properties of nanoparticles

Fullerene

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Page 5: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

Benefits associated to nanomaterials

� Environmental: Pollution prevention, remediation/treatment

� Water: Improve water quality

� Energy: Increase efficiency, production, and storage

� Materials: Increase selectivity in chemical reactions, replacement of toxicmaterials

� Agriculture: Genetic improvement of plants and animals

Introduction: Properties of nanoparticlesIntroduction: Properties of nanoparticles

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Page 6: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

� Semiconductor industry:

Chemical-mechanical planarization (CMP)

Photolithography

� Automotive catalysts

� Magnetic recording media

� Sunscreens

Introduction: Nanoparticles marketIntroduction: Nanoparticles market

Major nanomaterials consumers:

1 trillion dollar market by 2015NSF, 2001

� Sporting goods � Food packing materials � Stain-resistant clothing � Healthcare products � Cosmetics

Household products containing nanomaterials:

Developed by the U.S. Air Force

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Page 7: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

Little is known about the fate of nanoparticles in the environment

and possible toxic effects on living organisms

Introduction: Potential risksIntroduction: Potential risks

EPA’s Technology White Paper, 2007

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Page 8: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

Introduction: Potential risksIntroduction: Potential risks

Nanoparticles Effects

Fullerenes (C60)Antibacterial; oxidative stress; may induce DNA damage in plasmids

Titanium dioxide (TiO2)Antibacterial; oxidative stress; may damage DNA; tissue thickening

Zinc oxide (ZnO)Oxidative stress; may damage DNA; pulmonary adverse effects

Cerium oxide (CeO2)Oxidative stress; thickening of heart tissue, could bind to cell membrane of Gram-negative bacteria

NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing

Exposure:� Inhalation� Ingestion� Dermal

8

Page 9: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

Introduction: Fate of NPs in the EnvironmentIntroduction: Fate of NPs in the Environment

� It is large unknown

� Agglomeration/sedimentation and partitioning onto solids are thought to control their fate in the environment

� Could travel long distances if mixed with stabilizers or attached to organic matter

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Page 10: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

Wastwater Treatment Plant

Industry

Buildings

Homes

Water bodies

Effluent

Industry Buildings

Homes

WWTP

Adapted from http://www.epa.gov

How do nanomaterials get to wastewater treatment plants (WWTP)?

How do nanomaterials get to wastewater treatment plants (WWTP)?

NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing

Muller and Nowack, 2008, estimated TiO2 and Nano-Ag reaching WWTP39% nano-Ag64% TiO2

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Page 11: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

WWTPs remove harmful organisms and pollutants

http://www.biosolids.com.au/what-are-biosolids.php

Primary treatmentRemove large solids (rags

and debris) and smaller inorganic grit

Secondary treatmentRemoves organic

contaminants using microorganisms to consume

biodegradable organics

Tertiary treatmentRemoves nutrients and may

include disinfection of the effluent

Introduction: Wastewater treatmentIntroduction: Wastewater treatment

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Page 12: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

Screening/Grit

removal

Screening/Grit

removal

Primary Settler

Primary Settler

BiologicalTreatmentBiologicalTreatment

SecondarySettler

SecondarySettler DisinfectionDisinfection

Influent Effluent

PRIMARY TREATMENT SECONDARY TREATMENT

Anaerobic digestionAnaerobic digestion

DisposalSludge

Triangle Wastewater Treatment Plant

Durham, NC

Introduction: Wastewater treatmentIntroduction: Wastewater treatment

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Page 13: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

Introduction: Wastewater treatmentIntroduction: Wastewater treatment

Returned activated sludge (RAS)

High water content

Forms flocs

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Page 14: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

Introduction: Removal during treatmentIntroduction: Removal during treatment

Possible removal mechanisms

Gravity Settling

Ad- and/or absorption

_ _ _ _ _ _

_ _ _ _ _ _

+ + +

+ +

Intake

Entrapment by A/S flocs

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Page 15: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

Introduction: Removal during treatmentIntroduction: Removal during treatment

No conclusive results have yet been obtained

� Activated sludge process attained high removal of CeO2 from synthetic medium(Limbach et al. 2008)

Limbach et al, 2008

� Iron oxide (Fe3O4) cored SiO2 NPs coated with a nonionic surfactanteffectively removed during primary treatment. Unfunctionalized NPs escaped with the effluent (Jarvie et al, 2009).

Jarvie et al, 2009

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Page 16: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

� To investigate the removal of CeO2 nanoparticles

(NPs) in municipal wastewater during activated

sludge treatment

� To elucidate the mechanisms responsible for their

removal from aqueous dispersions

ObjectivesObjectives

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Page 17: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

[1] NPs stock; [2] peristaltic pump feeding NPs; [3] activated sludge bioreactor; [4] settling tank; [5] peristaltic pump feeding wastewater; [6] effluent; [7] influent; [8] aeration

Aeration tank:

Vreactor = 1.19 LHRT = 9 to 10 hrs

Settler:

Vreactor = 0.6 LHRT = 5 to 6 hrs

Lab-scale secondary treatmentLab-scale secondary treatment

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Page 18: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

Lab-scale secondary treatmentLab-scale secondary treatment

The system was operated under two different conditions:

� Synthetic wastewaterComposition according to OECD

� Real wastewaterPrimary-treated wastewater collected in a weekly basis from a local WWTP

Component Concentration (mg/L)

Peptone 220

Meat extract 150

Urea 10

K2HPO4 8

NaHCO3 200

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Page 19: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

NP Stock:

Concentrated stock prepared by sonication (pH = 3.4)

CeO2 (50nm)

Concentrated stock diluted in acidic water (pH = 3.4)

Transmission electron microscope image of nano-sized ceria with average particle size 50 nm

Ultrasonic processor

Nanoparticle stock dispersionNanoparticle stock dispersion

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Page 20: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

� Total Ce concentration ICP- OES

Inductively coupled plasma-optical emission spectroscopy instrument (ICP-OES)

Microwave-assisted digestion

Reduces interference by organic matter

� Filtered Ce concentration(< 200 nm)

Image the sample by scanning it

with a high-energy electron beam

� Scanning electron microscopy(SEM)

Fate of nanoparticlesFate of nanoparticles

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Directly measured

in ICP-OES

Page 21: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

� Chemical oxygen demand (COD)

Spectrophotometer

� Acetic acid removal

Indirect measurement of the organic content

Sample + Strong oxidant 150°C

Agilent 7890A GC

Measured by Gas-Chromatography with Flame Ionization Detector (GC-FID)

Reactor performanceReactor performance

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Page 22: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

Results: Average particle size (CeO2)Results: Average particle size (CeO2)

Diameter Size Average (nm)

[CeO2] = 200 ppm

pH = 3.46

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Page 23: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

Results: Stability particle size (CeO2) in aqueous suspensionResults: Stability particle size (CeO2) in aqueous suspension

CeO2 NP aggregate in municipal wastewater

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Page 24: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

0

2

4

6

8

10

1 10 100 1000 10000

Particle size (nm)

% In

tens

ity

Average particle size (nm) 132 ± 1 Zeta potential (mV) 44.5 ± 1.1

Average particle size distribution

of nano-sized CeO2 in acidic media (pH 3.2)

Results: Average particle size (CeO2)Results: Average particle size (CeO2)

SampleAvg

Particle size (nm)

Std Dev

CeO2 (pH 3.2) 132 1

CeO2 (pH 7.5) 9035 46

CeO2 + Real WW (pH 7.5)

5567 114

CeO2 + Synthetic WW

(pH 8.02)175 6

Average particle size distribution

in different media

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Page 25: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

Results: Fate of CeO2Results: Fate of CeO2

Total Ce Removal by Activated Sludge Treatment

95.7%avg removal

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Page 26: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

< 200 nm CeO2 Removal by Activated Sludge Treatment

98.7% avgremoval

NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing

Results: Fate of CeO2Results: Fate of CeO2

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Page 27: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

< 25 nm CeO2 Removal by Activated Sludge Treatment

97.2% avgremoval

NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing

Results: Fate of CeO2Results: Fate of CeO2

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Page 28: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

Total Ce removal (Real WW) Ce < 200 nm removal (Real WW)

Ce < 200 nm removal (Synthetic WW)

95.7% avg removal 98.7% avg removal

Total Ce removal (Synthetic WW)

94.3% avg removal 78.9% avg removal

NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing

Results: Fate of CeO2Results: Fate of CeO2

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Page 29: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

66.8% avgremoval

Removal of Organic Matter by Activated Sludge Treatment (Real Wastewater)

Results: Reactor performanceResults: Reactor performance

Fresh wastewater batch

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Page 30: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

Acetate Removal by Activated Sludge Treatment (Real Wastewater)

Fresh wastewater batch

93.4% avgremoval

NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing

Results: Fate of CeO2Results: Fate of CeO2

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Page 31: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

0.00

1.20

2.40

3.60

Day 0 Day 49 Day 58

Co

nce

ntr

atio

n (

gV

SS

/L)

Results: Reactor performanceResults: Reactor performance

Volatile Suspended Solids in the Aeration Tank

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Page 32: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

Original sludge(t= 0 day)Bioreactor

Results: CeO2 + sludgeResults: CeO2 + sludge

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Page 33: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

3 Sample from Bioreactor

Element microanalysis by energy dispersive X-ray

spectroscopy (EDS)

Results: CeO2 + sludgeResults: CeO2 + sludge

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Protozoa

Extracellular material

Bacteria

Page 34: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

� CeO2 is highly removed during secondary treatment. Only a small fraction of the NPs (< 5%) detected in the effluent.

� Neutral pH values promote agglomeration of NPs dramatically increasing their average particle size compared to the size in a pH 3 solution.

� CeO2 did not cause microbial inhibition, as demonstrated by the continuous removal COD and acetate.

ConclusionsConclusions

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Page 35: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

� Fate of aluminum oxide (Al2O3) NPs in municipal

wastewater during activated sludge treatment.

Ongoing WorkOngoing Work

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Page 36: Fate of CMP Nanoparticles During Wastewater Treatment · Little is known about the fate of nanoparticles in the environment and possible toxic effects on living organisms Introduction:

ISMI/Sematech

SRC/Sematech Engineering Research Center for Benign Environmental Semiconductor Manufacturing (ERC)

Mexican National Science and Technology Foundation (CONACyT)

AcknowledgmentsAcknowledgments

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