R. Baptist CEA LETI-DRFMC, 10-12 March 2004 1st NanoSpain Workshop San Sebastian, Spain

From NanosciencesFrom Nanosciences to to Nanotechnologies Nanotechnologies at theat the CEACEA--

Grenoble Grenoble ResearchResearch CenterCenter

Robert BAPTIST

Direction de la Recherche Technologique

R. Baptist CEA LETI-DRFMC, 10-12 March 2004 1st NanoSpain Workshop San Sebastian, Spain

Competence Centre300 p.

Nanotec 300

1000 p.

Crolles 2

3000 p.

Alliance

actual

Nanotechnologies

Nanoelectronics

Education

ESRF, ILL, CNRS

A site for science and technology

R. Baptist CEA LETI-DRFMC, 10-12 March 2004 1st NanoSpain Workshop San Sebastian, Spain

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4 000 persons200 / 300 mm silicon platform

Education

Industry

• Multidisciplinarity• Excellence • Critical mass• Technological platform

ResearchFully operational in 2005

R. Baptist CEA LETI-DRFMC, 10-12 March 2004 1st NanoSpain Workshop San Sebastian, Spain

830 CEA employees450 others(persons seconded from industry, postgraduates…)

CEA73%

CNRS16%

University11%

~196 Senior Scientists48%

~65 Technical Support 16%

~126 temporary research staffwith 81 PhD students

Post Docs, visiting scientists

31%

~20 Admin. Support5%

407 CEA, CNRS and University employees

R. Baptist CEA LETI-DRFMC, 10-12 March 2004 1st NanoSpain Workshop San Sebastian, Spain

Objectives of DRFMCObjectives of DRFMC

A Department ofFUNDAMENTAL RESEARCHFUNDAMENTAL RESEARCH

in the fields of Condensed Matter and Chemistry

Wide Wide range of range of competencescompetences::Physics, Chemistry, Bio-chemistry, Cryo-technology

AimsAims::ØUnderstanding & establishing laws

ØDevelopments of novel concepts, materials, components

ØDevelopment of research tools

ØValorisation of results (Industry or technology depmts of CEA)

ØFormation of young researchers

R. Baptist CEA LETI-DRFMC, 10-12 March 2004 1st NanoSpain Workshop San Sebastian, Spain

Different types of collaborationØInternal ProjectsØCommon R&D contracts, RTBØCommon laboratoriesØExchange of people

DRFMC : DRFMC : link between academic research andlink between academic research and LETILETI

CEADRFMC

Academic Research

CEALETI

Industry

EMIRDelphi

Sofradir

SPINTECMICAMApibioSilicon

PhotonicsUltimateMOSFET

PolymerElectronics

UV,Visible,IRLight Emitters

Waferbonding

CharacteRization

tools

Nanostructuration

Partnership with Partnership with LETI in MINATECLETI in MINATEC

R. Baptist CEA LETI-DRFMC, 10-12 March 2004 1st NanoSpain Workshop San Sebastian, Spain

NanoNano--MagnetismMagnetism• Spintronics, Nanoclusters• Magnetic memories « MRAM »• Magnetic dots for Ultra High Density recording

NanoNano--ChemistryChemistry•Molecular Electronics « Post-CMOS »•Polymer Electronics•Biotech

NanoNano--PhotonicsPhotonics•Silicon photonics « Optical interconnects », Compound SC•QDots, µcavities, Photonic crystals•IR&Visible&UV Light Emitters

NanoNano--ElectronicsElectronics•Nano MOSFET, SET•Nanostructuration

100nm

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NanoNano--CharacterizationCharacterization•Holographic TEM, MEIS, STM-AFM•ESRF

SimulationSimulation•SiGeC,Si,transport, devices

ActivitiesActivities inin NanosciencesNanosciences & & Nanotechnologies (MINATEC)Nanotechnologies (MINATEC)

R. Baptist CEA LETI-DRFMC, 10-12 March 2004 1st NanoSpain Workshop San Sebastian, Spain

NanoNano--CrystalsCrystals•Fluorescent labeling

BiochipsBiochips•Novel biochips, fundamental mechanisms•Label free SPR imaging

DNA Damage /DNA Damage / RepairRepair•Photo and radio induced DNA lesions•detection of DNA lesions at cellular level•Biochips for DNA repair•Cosmetology, cancer therapy

Ionic recognitionIonic recognition•Sequestration of heavy (toxic) metals•New Contrast agents for MRI•Selective extraction of actinides from lanthanides (nuclear waste disposal)

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Activities at theActivities at the interfaceinterface with with BiotechBiotech (NANOBIO)(NANOBIO)

R. Baptist CEA LETI-DRFMC, 10-12 March 2004 1st NanoSpain Workshop San Sebastian, Spain

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GrenobleLETI / MINATEC

ToulouseLAAS

LilleIEMN

PARISIEF / LPN

Nano electronics III-V

CMOS EmbeddedNano insideHybrid

Nano systems

Nano Optics

Universities

The Basic Technological Research

Biology/Health

Micro-Nanotechnologies

MEMS and Micro-systems

3D Integration

Photonics

New architectures

and system integration

R. Baptist CEA LETI-DRFMC, 10-12 March 2004 1st NanoSpain Workshop San Sebastian, SpainProgrammes RTB LETI et DRFMC

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(12,0) (12,0)(11,0)

metal semiconductor metal

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R. Baptist CEA LETI-DRFMC, 10-12 March 2004 1st NanoSpain Workshop San Sebastian, Spain

20032003

• 4 post-docs and 3 PhD financed by CEA-LETI and working with DRFMC under the direction of 5experienced researchers for this RTB program.

• Equipment provided to DRFMC:Vacuum STM-AFM for nanochemistry applications. Measurement of I(V)characteristics on nanodevices

• Implementation of a 200mm CVD reactor for parallel and massive growing of carbon nanotubes

RTBRTB ProgramProgram «« PostPost--CMOS moléculaire 200mmCMOS moléculaire 200mm »»

R. Baptist CEA LETI-DRFMC, 10-12 March 2004 1st NanoSpain Workshop San Sebastian, Spain

• Generic patents deposited by DRFMC and LETI• Publications

• Mutual knowledge « nanoscience AND nanotechnology »• Exemple : How to apply the quantum simulationdeveloped for transistors with carbon nanotubes to the nanometric silicon devices (ultimate MOSFET)?• Exemple : How to use nanobiotechnologies developed at LETI to investigate self-assembling of clusters and nanowires for studies in magnetism?

• Common programs (IST-FET) run at the two laboratories

OtherOther actionsactions

R. Baptist CEA LETI-DRFMC, 10-12 March 2004 1st NanoSpain Workshop San Sebastian, Spain

OMNT : 150 experts to surveyscience and technology

• Many scientists from and among the 150 scientific and

technical experts who analyse the scientific actuality and its evolution

• Specificity of MicroNanoMultidisciplinarityUpstream – Downstream

• Exhaustiveness and neutralityCEA, CNRS, Universities, High Schools

• … and also experts of marketing and of capital risks

OMNT : Observatoire des Micro et NanoTechnologies

R. Baptist CEA LETI-DRFMC, 10-12 March 2004 1st NanoSpain Workshop San Sebastian, Spain

Links Links with academic research still presentwith academic research still present

DRFMC belongs to the academic research world

partnership with CNRSCNRS and UNIVERSITYUNIVERSITY labslabs

ØCommon labs with CNRS & CNRS & UniversityUniversityØPartner in IPMCIPMC (Institute of Condensed Matter Physics)

Management of Research Tools

ØManagement of Experimental lines at ESRFESRF and ILLILL

ØCGRMCGRM (Grenoble Magnetic Resonance Center)

ØProduction of Liquid HeLiquid He

R. Baptist CEA LETI-DRFMC, 10-12 March 2004 1st NanoSpain Workshop San Sebastian, Spain

Alliance Crolles

Grenoble city of

Joseph FourierUniversity

CEA - MINATECCNRS, FMNT, IPMC,ESRFLaue Langevin InstituteINPG (education)UniversityPhD, Post-Docs,…

and…

R. Baptist CEA LETI-DRFMC, 10-12 March 2004 1st NanoSpain Workshop San Sebastian, Spain

LETI-MINATECCentre

Grenoble

3D Integration

CSEM

Neuchâtel

Microsystems

NMRC

CorkNanophotonics

Nanobiotechnology

IMEC

Leuven

microelectronics

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