May 18 2005 1

Sensors

May 18 2005 2

Future Technology Center

• Technology Trends• Statistical trend analysis of technologies (patents & papers) and markets• Analysis and assessment of industrial roadmaps• Workshops with technology leaders and business innovators

• Business Assessment• Matching future technologies with individual business lines• Selection and assessment business opportunities and future innovations• Strategic business partners in the field

• Concept Creation• Defining innovation routes and new product concepts• Conceptual elaboration of specific innovative productlines

• Development & implementation• Business case assessment• Technological feasibility• Partnerships and system engineering for further development and

implementation

May 18 2005 3

Outline

• why “lab on chip” , “mems” sensors and rf-sensors

• several examples, commercial & in development

• performance data (indicative)

• some future concepts for defense

• ideas for cooperation

May 18 2005 4

Bench Process

Book Size System

cm

Watch Size System

dm

m Micro System

Several micro system platforms1) Si (CMOS)2) Glass/ceramic (high temperature)3) Plastic (low cost, disposable) mm

Lab on chip, microlab (fluidic)

Rapid, Specific and Sensitive Micro (Fluidic) Detection System

May 18 2005 5

0.5mm

4.0 mm

500 um

Airbag Accelerometers

Inertial Measurement

Units

Fuel Injection Nozzle

Tire Pressure Sensors

Microelectromechanical Systems: Advanced Materials and Fabrication Methods

...and MEMS

MEMS are physically small and integrate electrical, mechanical and sensoriccomponents (micro electro mechanical systems)

1 micron beams

Accelerometer

Platforms1) Si (CMOS)2) Glass/ceramic (high temperature)

May 18 2005 6

Why “Lab on chip” Thanks to miniaturisation down to micron & nano level:

• small dimensions function integration possible (dsp, rf-wireless)(mm, µm, nm) efficient thermal and material transport

cheap, easy for mass productionportable, point of analysisdisposable

• small sample volume fast response(µL, nL, pL) high throughput

multi parallel analysis, matrix arraysingle cell/molecule detectionless chemical waste

• high sensor-sample ratio high sensitivityhigh signal to noise

Shrink volume by 108

Improve power efficiency by108

ENIAC~1950 Jornada

~2000

Stan Williams, HP

May 18 2005 7

• Signal to noise improvements:

yocto(10-24) joule, atto(10-18) newton, femto (10-15) mol/L, ppb, single molecule

• Miniaturization – size/weight - arrays

• Lower power, potentially scavenged

• Locally process data into information

Nanocalorimeter; Roukes CITCantilever Sensor; Thundat ORNL

Lab-on-a-chip; Sandia

+

15 μ

NanoAu Chemiresistor; Snow NRL

Magneticbead

DNA-coatedpad

Fieldgeneration wire

Shortingmetal

Magnetoresistivestrip

GMR Biosensor; Whitman/Prinz, NRL

Why nanostructures for sensing

May 18 2005 8

Cantilever Array-based Artificial Nose

M.K. Baller, et al., Ultramicroscopy 82, 1 (2000); F.M. Battiston, et al., Sensors & Actuators 77, 122 (2001)

Gases and Vapours- ppm range

May 18 2005 9

Gas sensor array metal oxide type, NRL

1

10

100

2-propanol benzene toluene 2-nitro-toluene

dete

ctio

n lim

it [p

pb]

Detection limits at 250..300 °C

G a s e s

SE1

Substrate: Si/SiO2 or Al2O3

SE2 SE3

Gradient membraneSiO2 or Al2O3Thickness 2 to 20 nm

Heater (Pt)

Gas detector layer SnO2 or WO3, Pt-endowed, approx. 150 nm

Platinum electrodes Thickness 1 µm

Cross-section of a 3X3.5 mm2 microarray

with 16 sensor segments

Temperature gradient50°C / 2mm

Gases and Vapors - ppb level

NO2, H2O, NH3, CH4 , SO2, CO2, H2S, alcohols, aromatics

May 18 2005 10

Microfluidic lab-on-chip systems

May 18 2005 11

Sample preparation & sensing, csmise, tno

Micro pump

Micro sensor

Body fluid

Outlet

filterGeneticallyengineeredcell amplifier

Geneticallyengineeredcell sensor

May 18 2005 12

Droplet based microfluidics, csmise

• Droplet-based microfluidics

• Electrically control surface tension to drive droplets

• Reconfigurable digital microfluidic circuits

• Fluorescence or magnetic bead detection

May 18 2005 13

Bacteriological DNA fingerprinting, caltech, tno

peristaltic pump micro valvecell lysis

substrate solutionenzyme solutionwash solution

lysis reagent

E. colisample

probe solutiondrain

DNAsensor

DNA / RNA

500 nm

1.5

μm Sample preparation

May 18 2005 14

• counting and measuring cells – one by one• measuring level of soluble factor by fluorescent labeling :

• hormones, antibodies, antigens, DNA • quick and accurate• compact tool for cells diagnostics• micro optical mechanical device (MOMS)

Micro flowcytometer (cell counter)

May 18 2005 15

Micro X-ray source & detector (amptek)

Miniature carbon nanotube field emission X-ray tube

May 18 2005 16

Spectrometer on a chip (B-I)

Microspectrometer on chip by Boehringer-Ingelheim

May 18 2005 17

SPR surface plasmon resonance

SPR detects changes in refractive index in the immediate vicinity of the surface layer of a sensor chip. The SPR angle shifts when biomolecules bind to the surface.

SPR is non-invasive (process reactor, fluidic chip)

May 18 2005 18

Gas sensing with carbon nanotubes

Chemiresistorfor volatiles

Biosensorfor in situ life detection,biomedical applications

May 18 2005 19

Micro gaschromatograph, C2V, tno

• Dimensions: 7x7x7 mm3• Det. limit: <1 ppm• Response time: 25ms • Int. volume: < 1 µl • Dead volume: 0.1 µL • Temperature: 80 / 150 C

May 18 2005 20

HPLC on Chip (Tai, Caltech)agilent

9 Extrated Individual Peptides

Total

The chip performance is as good as commercial system

Gradient Pumps Passive Mixer

ESI Nozzle

Column

Sample Injector Electrodes

1 cm

May 18 2005 21

Caltech: Integrated Large-Scale Micro/NanoFluidics

Check Valve

Electrolysis Pump

In-Channel Check Valve

Parylene ChannelMicro Pump

Reaction Chamber or Reservoir

100 μmMicro Active Valve

Thermal Flow

Sensor

May 18 2005 22

Single molecule detection, Wang JHU

Sample preparation, Microfluidics, Optical cavity fluidic channel & Biosensing Chips

Electrical Molecular Manipulationand Positioning Single Molecule Dynamics

Quatum dot fluorescenceSingle Molecule Detection

Fluidic manipulation plus quantum-dot fluorescence in optical cavity channel

May 18 2005 23

Indicative sensitivities bio(molecule)sensor

ppb (gaseous)Metal oxide nanostructures, nanotubes/wiresChemical

10-3/4CalorimetricThermal

10-8/9

10-13

(10-14)

SPR (surface plasmon resonance)PWG (planar waveguide fluorescence, in dev)THz (early experimental phase, in dev)

Other optical

10-12/13

10-15/16

Membrane (catalytic hybridization)Enzymatic assisted charge transfer

ElectricalElectrochemical

ppm (gaseous)ppb (gaseous)ppm, 10-9

Cantilever resonator (tuning fork)Nanotube/nanowire resonatorsSAW (surface acoustic waves)

Mechanical/acoustic

10-13/14

10-14/16

GMR/nanobeads (in development)concentration step (to be developed)

Magnetic

10-10/11

10-12

PCR (polymerase chain reaction) Elisa (enzyme linked immunoabsorbent assay)

Fluorescence

Sensitivity(mol/liter)

PrincipleTechnology

May 18 2005 24

Future: senstenna, passive RF-readable sensorRF-antenna circuit with reactivepolymer or sensitized nanotubes(TNO)

Passive RFID-tag with integrated sensor function

Semi-active credit card sized sensor with logic/battery

Operates without battery, activated by RF reader��PDA, mobile with ZigBee, BluetoothApplications: health monitoring, BC sensing, food

quality

May 18 2005 25

Future: B/C sensing with conductive polymers in passive or semi active system

May 18 2005 26

Body sensor functionalities Body condition•T (core temperature, skin temperature)•Heart rate•ECG(electrocardiogram) sensor for monitoring heart activity•EEG (electroencephalography) sensor for monitoring brain electrical activity•EMG (electromyography) sensor for monitoring muscle activity•Hydratation•Moisture level of wounds•Bacterial contanimation•Glucose/lactate level in blood•Drug delivery, need for medication•Ph value of sweat, body fluids•Chemical and bio influences•Air quality, breath sensing•Blood pressure sensor• Body position/motion•Motion, acceleration•Positioning body (indoor/outdoor)•Body parts position• Body environment (B/C/N/T/humidity/air)

May 18 2005 27

Body sensors, BAN

IMEC human++, UWB BAN

May 18 2005 28

Body sensors, BAN

May 18 2005 29

Body sensors, medical BAN

May 18 2005 30

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Thank you

END

Thank you !frank.simonis@tno.nlfrank.simonis@tno.nlsteven.schilthuizen@tno.nlsteven.schilthuizen@tno.nl