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Visionary Sensor Technology Gemini MAG500, MPG500 Vacuum Gauge Wide Range – Heavy Worker The compact solution for vacuum measurement in challenging environments
V i s i o n a r y S e n s o r Te c h n o l o g y
GeminiM A G 5 0 0 , M P G 5 0 0 V a c u u m G a u g e
W i d e R a n g e – H e a v y W o r k e rT h e c o m p a c t s o l u t i o n
f o r v a c u u m m e a s u r e m e n t i n c h a l l e n g i n g e n v i r o n m e n t s
Gemini MAG500, MPG500 Vacuum Gauges
The INFICON Gemini Inverted Magnetron Vacuum Gauge is the workhorse for all vacuum measurement application. Gemini combines two sensor systems into one small device to measures from atmosphere to 1x10 – 9 mbar. The patented (pending) ultra-low magnetic stray field design opens up a whole new range of applications. A unique interchangeable dual chamber sensor unit avoids cleaning cycles and reduces maintenance, making Gemini the most robust and economical vacuum gauge of its kind.
Typical applications• Base pressure monitoring and control, from atmosphere to high vacuum in evaporation and sputter coating applications.• General vacuum measurement – industrial furnaces, architectural glass, semiconductor, refrigeration and air conditioning.• Analytical and R & D applications – mass spectrometry, electron microscopes, medical, ophthalmic, optical and high energy physics.
Gemini Cold Cathode and combination comes with fully integrated digital electronics, providing ultimate flexibility for system integration.Cold cathode and Pirani combination option provides seamless transition, reliability, practicality and flexibility across wide ranging applications.
For more detailed information and product documentation refer to inficon.com.
Gemini MAG500, MPG500 Vacuum Gauges
The INFICON Gemini Inverted Magnetron Vacuum Gauge is the workhorse for all vacuum measurement application. Gemini combines two sensor systems into one small device to measures from atmosphere to 1x10 – 9 mbar. The patented (pending) ultra-low magnetic stray field design opens up a whole new range of applications. A unique interchangeable dual chamber sensor unit avoids cleaning cycles and reduces maintenance, making Gemini the most robust and economical vacuum gauge of its kind.
Typical applications• Base pressure monitoring and control, from atmosphere to high vacuum in evaporation and sputter coating applications.• General vacuum measurement – industrial furnaces, architectural glass, semiconductor, refrigeration and air conditioning.• Analytical and R & D applications – mass spectrometry, electron microscopes, medical, ophthalmic, optical and high energy physics.
Gemini Cold Cathode and combination comes with fully integrated digital electronics, providing ultimate flexibility for system integration.Cold cathode and Pirani combination option provides seamless transition, reliability, practicality and flexibility across wide ranging applications.
For more detailed information and product documentation refer to inficon.com.
Reliable fast ignition
Pressure 10-2 [mbar]
Igni
tion
time
MAG500 /MPG500
Others
Electrical connections
CompactFCC RJ45
ClassicD-Sub 9 pin
Different plugs
Output signal shaping
drop in
Selectable measuring current
Chamber Pressure
Mea
surin
g C
urre
nt
high Z, typically Argon
low Z, typically Hydrocarbons
Standard high current mode
Low current mode
nothing sticksNo magnetic stray field Corrosion proof
feed through
Standard X Ceramic coated
Dual chamber functional protection
Process side
Compact size
1 Electronic unit 2 Replacement sensor 3 Ionization insert chamber
Quick & easy maintenance
1 2 3
Combination gauge
1x10-9 mbar
10-3 mbar
10-2 mbar
1000 mbar
Cold cathode Pirani
Features at a Glance
• Long lifetime in harsh environments• Zero maintenance – replaceable insert• Excellent ignition properties – proven design• Low magnetic stray field – analytical applications• Compact size
Measurement RangeMAG500 and MPG500
10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 100 101 102 103
Measuring range Measuring information range
MPG500 1x10-8…100 mbarAccuracy +/- 30%
MAG500 1x10-9…1x10-2 mbar
MAG500 1x10-8…1x10-2 mbar Accuracy +/- 30%
MPG500 1x10-9…1000 mbar
Long lifetime
Ti TiN SSMaterial
Con
tam
inat
ion
rate
MAG500 / MPG500
othersSelectable insert chamber materials
Hig
hLo
w
inficon.com [email protected] twitter.com/inficon Due to our continuing program of product improvements, specifications are subject to change without notice.
tibb10e1 ©2013 INFICON
ExcELLEnt custoMER suppoRt is a coMMitMEnt
INFICON provides a global network of sales and service centers. These centers are staffed with local service and application experts who can assist you in choosing the best solution for your individual product application and provide fast support if service is needed.
Asia and Pacifica
CHINAINFICON Ltd.BeijingPhone: +86.10.6590.0164E-mail: [email protected]
INDIAINFICON PVT. Ltd.PunePhone: +91.20.4120.4854E-mail: [email protected]
JAPANINFICON Co. Ltd.Yokohama-shi, Kanagawa-ken Phone: +81.45.471.3328E-mail: [email protected]
KOREAINFICON Ltd.Kyunggi-doPhone: +82.31.783.2942E-mail: [email protected]
SINGAPORE and AUSTRALIAINFICON PTE Ltd.SingaporePhone: +65.6631.0300E-mail: [email protected]
TAIWANINFICON Co. Ltd.Chupei CityPhone: +886.3.552.5828E-mail: [email protected]
Americas
INFICON Inc.East Syracuse, NYPhone: +1.315.434.1100E-mail: [email protected]
Europe, Middle East and Africa
INFICON GmbHColognePhone: +49.221.567.881.00E-mail: [email protected]
