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GORE Bulk High Purity Chemical Filters...GORE ® Bulk High Purity Chemical Filters For Semiconductor...

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Gore is the world leader in polytetrafluoroethylene (PTFE) membrane technology. Our advanced filter technology offers a significant improvement in performance with the combination of high flow and retention, compared to existing filter technologies. Description High flow, high retention, hydrophobic PTFE membrane in a low-extractables, high density polyethylene (HDPE) cartridge Improve Performance with GORE ® Filters Advanced Membrane Technology Gore’s technological advancements to the most critical part of the filter — the membrane — result in significantly improved performance compared to other filters in its class. GORE ® Bulk High Purity Chemical Filters utilize our latest PTFE membrane technology. This technology significantly increases the open porous area available for fluid flow, while the structural characteristics of the membrane ensure a high level of retention. High retention and flow combined with low extractables Low Extractable Materials The combination of materials in GORE ® Bulk High Purity Chemical Filter, Series HCOEE result in very low metal ion and organic extractables. These filters are ideal for processing ultrapure chemicals used in semiconductor and flat panel display processing. Ideal Applications: • High throughput chemical filling and packaging systems • High-turnover recirculation filter systems Products: • Ultrapure electronic-grade chemicals • Wet etch and clean chemicals, and specialty blends • Acids, bases, and solvents • High viscosity fluids Pores Liquid flow Conventional Filtration Media GORE ® Filters make it possible to get the best combination of flow and retention GORE Filtration Media Small pores to enable higher retention Increased open porous area for higher flow Filter media Performance Features and Benefits PTFE Membrane High chemical resistance of PTFE Backed by more than 30 years of PTFE experience and innovation from Gore Excellent Particle Capture Unique structural characteristics ideal for ultrapure filtration Achieve desired retention and high flow capacity High Flow Rate Upgrade retention without capital expenditure Decrease package fill times and increase production capacity Reduce costs with fewer filters purchased All HDPE components Low metal ion and organic extractables Configured for drop-in upgrade to existing systems Quality assured 100% Integrity Tested Clean room manufacturing environment ISO9001:2000 Certified Benefits realized may vary with existing process conditions and capabilities. GORE ® Bulk High Purity Chemical Filters Series HCOEE 50nm | 20nm
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Page 1: GORE Bulk High Purity Chemical Filters...GORE ® Bulk High Purity Chemical Filters For Semiconductor and microelectronicS Grade chemicalS Series HCOEE 50nm | 20nm Cartridge Dimensions

Gore is the world leader in polytetrafluoroethylene (PTFE) membrane technology. Our advanced filter technology offers a significant improvement in performance with the combination of

high flow and retention, compared to existing filter technologies.

DescriptionHigh flow, high retention, hydrophobic PTFE membrane in a low-extractables, high density polyethylene (HDPE) cartridge

Improve Performance with GORE® Filters Advanced Membrane Technology Gore’s technological advancements to the most critical part of the filter — the membrane — result in significantly improved performance compared to other filters in its class.

GORE® Bulk High Purity Chemical Filters utilize our latest PTFE membrane technology. This technology significantly increases the open porous area available for fluid flow, while the structural characteristics of the membrane ensure a high level of retention.

High retention and flow combined with low extractables

Low Extractable MaterialsThe combination of materials in GORE® Bulk High Purity Chemical Filter, Series HCOEE result in very low metal ion and organic extractables. These filters are ideal for processing ultrapure chemicals used in semiconductor and flat panel display processing.

Ideal Applications:• High throughput chemical filling and packaging systems

• High-turnover recirculation filter systems

Products:• Ultrapure electronic-grade chemicals

• Wet etch and clean chemicals, and specialty blends

• Acids, bases, and solvents

• High viscosity fluids

Pores

Liquid flow

Conventional Filtration Media

GORE® Filters make it possible to get the best combination of flow and retention

GORE™ Filtration MediaSmall pores to enable

higher retentionIncreased open porous area

for higher flow

Filter media

Performance Features and Benefits • PTFE Membrane

High chemical resistance of PTFE Backed by more than 30 years of PTFE experience and

innovation from Gore

• Excellent Particle Capture Unique structural characteristics ideal for ultrapure filtration Achieve desired retention and high flow capacity

• High Flow Rate Upgrade retention without capital expenditure Decrease package fill times and increase production capacity Reduce costs with fewer filters purchased

• All HDPE components Low metal ion and organic extractables

Configured for drop-in upgrade to existing systems

• Quality assured 100% Integrity Tested Clean room manufacturing environment ISO9001:2000 Certified Benefitsrealizedmayvarywithexistingprocessconditionsandcapabilities.

GORE® Bulk High Purity Chemical Filters Series HCOEE

50nm | 20nm

Page 2: GORE Bulk High Purity Chemical Filters...GORE ® Bulk High Purity Chemical Filters For Semiconductor and microelectronicS Grade chemicalS Series HCOEE 50nm | 20nm Cartridge Dimensions

GORE® Bulk High Purity Chemical Filters

For Semiconductor and microelectronicS Grade chemicalS

Series HCOEE

50nm | 20nm

Estimated Flow Performance for a20-inch Filter with 1 cP Liquid

Estimated Flow Performance for a30-inch Filter with 1 cP Liquid

Performance DataEstimated Flow Performance for a10-inch Filter with 1 cP Liquid

Materials of Construction Series ...................................... HCOEE

Retention Rating ..................... 50nm, 20nm

Filter Membrane ..................... Hydrophobic polytetrafluoroethylene (PTFE)

Support and Drainage Layers .. High density polyethylene (HDPE)

Core, Cage, and End Caps ........ High density polyethylene (HDPE)

Sealing Method ....................... Thermal Bond, no resins or binders

Cartridge Configuration Cartridge Adaptor ................... 222 double O-ring style

O-ring Options ......................... Standard: TEFLON® encapsulated VITON® Optional: TEFLON® encapsulated Silicone, EPDM

Othersavailableuponrequest

Maximum Operating Conditions Maximum Operating Temperature .......................... 60°C (140°F)

Maximum Forward Differential Pressure .............. 3.4 bar (50 psi) @20°C (68°F)

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PleaseconsultwithyourlocalGorerepresentativeforsizingrecommendationsforhigherviscosityfluids.

PleaseconsultwithyourlocalGorerepresentativeforsizingrecommendationsforhigherviscosityfluids.

PleaseconsultwithyourlocalGorerepresentativeforsizingrecommendationsforhigherviscosityfluids.

Liquid Flow Rate (L/min) per 10" Filter - 1cP

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Liquid Flow Rate (L/min) per 20" Filter - 1cP

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Liquid Flow Rate (L/min) per 30" Filter - 1cP

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Liquid Flow Rate (gpm)0 5 10 15 20 25

0 5 10 15 20 25 30

Page 3: GORE Bulk High Purity Chemical Filters...GORE ® Bulk High Purity Chemical Filters For Semiconductor and microelectronicS Grade chemicalS Series HCOEE 50nm | 20nm Cartridge Dimensions

GORE® Bulk High Purity Chemical Filters

For Semiconductor and microelectronicS Grade chemicalS

Series HCOEE

50nm | 20nm

Cartridge Dimensions

A Length 10-inch: 271 mm (10.7 in.) B Length 10-inch: 256 mm (10.1 in.) C Diameter: 69 mm (2.7 in.)

20-inch: 512 mm (20.2 in.) 20-inch: 497 mm (19.6 in)

30-inch: 754 mm (29.7 in.) 30-inch: 739 mm (29.1 in.)

Please contact Gore for dimensions of finned configuration.

AB

C

HCOEE 0020 300 2FL TV 000

product family rating length configuration o-ring option

HCOEE 0020 20nm 100 10-inch 2FL 222 Flat TV TEFLON® encapsulated VITON® 000 0050 50nm 200 20-inch 2FN 222 Finned TS TEFLON® encapsulated Silicone 300 30-inch EP EPDM 00 None

Example:

Part Numbers | Ordering InformationTo order, select from the columns in this table.

Page 4: GORE Bulk High Purity Chemical Filters...GORE ® Bulk High Purity Chemical Filters For Semiconductor and microelectronicS Grade chemicalS Series HCOEE 50nm | 20nm Cartridge Dimensions

The Science Behind GORE® Filters Polytetrafluoroethylene (PTFE) is the ideal choice for microfiltration media, because it is thermally and chemically resistant, mechanically strong, non-shedding and chemically inert. Engineered using Gore’s unique membrane technology, GORE® Bulk High Purity Chemical Filters provide several times the flow rate with equal or better retention than conventional filters. Gore’s advanced PTFE microfiltra-tion membranes have more pores in any given area, which results in a high flow rate. At the same time, the small pore size ensures consistently high retention rates.

The Gore Advantage W. L. Gore & Associates, founded in 1958, creates innovative, technology-driven solutions such as high-performance GORE-TEX® fabrics, medical devices that treat aneurysms, and electronic cables used in space exploration. Gore products have set new standards for reliability and performance in the consumer, industrial, electronic, medical and surgical markets.

For more than 30 years, Gore has supplied reliable, chemically inert, exceptionally pure PTFE-based products for microelectronics fabrication and process equipment. Gore’s most advanced PTFE membranes are only available in GORE® Filters for ultra high purity liquid microfiltration.

Gore’s advanced PTFE microfiltration membrane

GORE® Bulk High Purity Chemical Filters

For Semiconductor and microelectronicS Grade chemicalS

GORE® Filters Redefining Filtration Performance

Contact Us Gore has sales offices and plants throughout the world. For detailed selection criteria, technical assistance or installation guidelines, please contact your local Gore representative:

China +86.21.5172.8299Germany +49.89.4612.2389Japan +81.3.6746.2572 Singapore +65.6.733.2882

South Korea +82.2.393.3411 Taiwan +886.2.2173.7799 United States +1.410.392.3200

The GORE® Filters’ quality system is certified according to ISO9001:2008 standards.

FOR MICROELECTRONICS USE ONLY. Not for use in food, drug, cosmetic or medical device manufacturing, processing, or packaging operations.

The information provided is based on Gore’s previous experiences and/or test results. Gore gives this information to the best of its knowledge, but assumes no legal responsibility. Customers are asked to check the suitability and performance of the product in their specific applications. This information is subject to change and is not to be used for specification purposes. Gore’s terms and conditions of sale apply to the sale of the products by Gore.

GORE, GORE-TEX and designs are trademarks of W. L. Gore & Associates. TEFLON and VITON are registered trademarks of DuPont.

© 2012-2014 W. L. Gore & Associates, Inc. All rights reserved. Printed in USA.

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EB14W. L. Gore & Associates, Inc.

201 Airport Road • Elkton, MD 21921 • USAPhone: +1.410.392.3200 • Toll-Free (US): +1.800.542.3146 Email: [email protected]

gore.com/filters


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