GreaseLubricationseriesmolecularpumps OperatingInstruction · ShanghaiEVPVacuumTechnology.Co.LTD...

Shanghai EVP Vacuum Technology. Co. LTD

High Capability FB Grease Lubrication Molecular PumpFB-300、650、1300、2000

Grease Lubrication series molecular pumpsOperating Instruction

SHANGHAI EVP VACUUM TECHNOLOGY CO., LTD.


FB-series Grease lubrication molecular pump through a multistage dynamic and

static relatively high speed rotation of the turbine blades to realize exhaust-mechanical

vacuum pump . When pumping in the turbo molecular pump having a molecular flow

speed large area, high compression ratio characteristics, and energy-efficient than the

steam pollution diffusion pump, oil-free. FB series greased molecular pump is currently

the largest caliber molecular pump pumping speed with 100KF inlet and outlet

diamensions.

This pump has been pumping gas pump non-selective, no memory effect, because

of the high molecular weight gas has a high compression ratio, so that the pump does not

require cold trap and an oil baffle to access to clean high vacuum and ultra-high vacuum .

Its widely used in electronics, metallurgy, chemical industry, scientific research in various

fields and vacuum technology.

Brief introduction

0.1 Overview

0.2 Structure feature

FB series grease lubrication molecular pumps use the precision bearings as its sustainer, with

water cooling or air cooling as its cooling method, therefore, the ambient temperature for air cooling

pump working must be under 28 ℃. The pump operation is stable after its rotor‘s dynamic equilibrium.

The mouse cage type tri phase motor is used as pump driver. Bearings lubricated with grease lubrication,

Grease lubrication series can be installed at any angle.


You are kindly required to read carefully this users’ manualbefore you have a better understanding of the pump, so thatyou can have a good use of this molecular pump.


Part I: Mechanical part

One：Molecular pump installation dimensions and technical parameters

1. FB-300 grease lubrication molecular pump1.1 FB-300 grease lubrication molecular pump Installation size

FB-300 grease lubrication molecular pump form size, mounting and connecting dimensions：seefig-1

Fig-1 FB-300 grease lubrication molecular pump form size, mounting and connecting dimensions


1.2 FB-300 Technological data

FB-300 Technological parameters：see table 1；Pumping speed curve: see fig.2; Pressure ratio of

the nitrogen and hydrogen: see fig. 3.table 1 Table 1 FB-300 grease lubrication molecular pump technical data

model FB-300 compound molecular pumpHigh vacuum flange(mm) 100 CF 100 ISO-KBacking pipe flange(mm) 25 KFPumping speed l/s(to air) 300

Compressiveratio

N2 >108

H2 >1X103

Ultimate pressure(Pa) <8×10-7

Rotational speed (rpm) 33000Vibration value ≤0.1μm

Running up time (min) 3.5Running down time (min) 4

(Recommended) Backing pump (L/S) 2Cooling mode air cooling

Cooling water flow (L/min) /Heater input voltage (v) AC220

Installation position ArbitraryPump weight (kg) ≈11

Fig.2 FB-300 molecular pump performance curve Fig.3 Compressive ratio curve of FB-650 molecular pump to

Nitrogen and Hydrogen


2. FB-650 grease lubrication molecular pump2.1 FB-650 grease lubrication molecular pump Installation sizeFB-650 grease lubrication molecular pump form size, mounting and connecting dimensions：see fig-4



2.2 FB-650 technological data

FB-650 technological parameters：see table 2；Pumping speed curve: see fig.5; Pressure ratio of

the nitrogen and hydrogen: see fig. 6.Table 2 FB-650 grease lubrication molecular pump technical datamodel FB-650 molecular pump

High vacuum flange(mm) 150 CF 160 ISO-KBacking pipe flange(mm) 40 KF

Protective gas inflatable flange(mm) 16KFPumping speed l/s(to air) 650

Compressive ratioN2 >109

H2 >1X104Ultimate pressure(Pa) <8×10-8 <5×10-7Rotational speed (rpm) 24000

Vibration value ≤0.1μmRunning up time (min) 5

Running down time (min) 7(Recommended) Backing pump (L/S) 4-8

Cooling mode Water coolingCooling water temperature (℃) ≤25

Cooling water flow quantity (L/min) 1Heater input voltage (v) AC220


Fig.5 FB-650 molecular pump performance curveFig.6 Compressive ratio curve of FB-650 molecular

pump to Nitrogen and Hydrogen




Fig-7 FB-1300 grease lubrication molecular pump form size, mounting andconnecting dimensions


3.2 FB-1300 technological dataFB-1300 Technological parameters：see table 3；Pumping speed curve: see fig.8; Pressure ratio of thenitrogen and hydrogen: see fig. 9.

Table 3 FB-1300 grease lubrication molecular pump technical dataModel FB-1300

High vacuum flange(mm) 200 CF/200 ISO-KBacking pipe flange(mm) 40 KF


Compressiveratio

N2 >109H2 >1X104

Ultimate pressure(Pa) <8×10-8/<5×10-7Rotational speed (rpm) 24000

Vibration value ≤0.15Running up time (min) ＜5


Cooling mode Water coolingCooling water temperature (℃) ≤20Cooling water flow (L/min) 1~2Heater input voltage (v) AC220


Fig.8 FB-1300 grease lubrication molecular

pump performance curveFig.9 Compressive ratio curve of FB-1300

molecular pump to Nitrogen and Hydrogen






3.2 FB-2000 technological dataFB-2000 Technological parameters：see table 4；Pumping speed curve: see fig.10; Pressure ratio of thenitrogen and hydrogen: see fig. 11

Table 4 FB-2000 grease lubrication molecular pump technical dataModel FB-2000

High vacuum flange(mm) 250 CF/250 ISO-KBacking pipe flange(mm) 50 KF


Compressiveratio

N2 >109H2 >1X104

Ultimate pressure(Pa) <8×10-8/<5×10-7Rotational speed (rpm) 24000

Vibration value ≤0.15Running up time (min) ＜5


Cooling mode Water coolingCooling water temperature (℃) ≤20Cooling water flow (L/min) 1~2

Pump body baking temperature(℃)

<120

Heater input voltage (v) AC220Installation position ArbitraryPump weight (kg) ≈35

Fig.10 FB-2000 grease lubrication molecular

pump performance curve

Fig.11 Compressive ratio curve of FB-2000

molecular pump to Nitrogen and Hydrogen


Two：Molecular pump installation, use and maintenance

1. Regarding ultimate pressureThe data of the molecular pump “ultimate pressure” is achieved in accordance with 《 the

performance testing method of the turbo molecular pump》of ISO international standard testing program.After baking the pump body and testing covering (24 hours’ drying degas), the minimum pressurenumerical value is gradually acquired within the testing covering. In practice, “ultimate pressure”numerical value has much concern with the working pressure of the backing pump attached and theefficient pumping speed. So it is very important to choose high performance backing pump for gettinghigher vacuum degree and shortening the degassing time.

Because of the specificity of the degassing principle of the pump, it should have a large air inletthat is as wide as possible, and a possible direct air pipe should be set between the air inlet and thevacuum chamber, therefore, to optimize the efficiency of the molecular pump to get the higher ultimatevacuum.2. Installation and operation2.1 Installation

Inspection work should be done before mounting to make sure that the molecular pump is in good

condition after the transportation.

The method is as follows: with the reference of the pump power supply directions, 1. connect the

power cable correctly with the pump; 2. Do not connect the water supply, do not pump; 3. Start the pump

to make sure whether it is operating without any abnormal noises, then press the stop button to stop the

operation immediately, please NOTE that the power frequency must be under 25Hz while in trial

operation.

2.2 High vacuum flange connection

The connection of the molecular pump

with high vacuum flange can be used to be

hanged on, or the pump is fixed on abasement,

the molecular pump must be fixed stably when

connecting the high vacuum flange with the

vacuum system by the metal bellows.


2.3 Backing vacuum connection

A backing valve should be equipped between the backing pump and the molecular pump to avoidthe oil retroaction from the mechanical pump after stopping the molecular pump.

2.4 outleting gas connection

To create a clean vacuum environment, the vacuum system can be filled nitrogen or dry air after

the molecular pump stop working. This could be done by connecting an inlet valve on the backing pipe,

or inlet air by the high vacuum valve on the top high vacuum.3. Cooling

Because of the high speed rotation of the bearing, the high temperature of the pump body and the

motor, while the molecular pump is working, the temperature of the bearing and the motor must be

reduced.

A water pipe (10 mm of out diameter/ 1mm thickness) can be directly connected with the pump’s

inlet. The pure water can be used to the circulation system, and the precipitated tap water can also be

used for cooling (the water temperature should be below 28℃).

Emergent shorts of the water supply and the overheat of the circulated water temperature will

cause the body temperature sensor to alarm, at this time, the power supply will immediately alarm and

stop outputting.

The gap between the emergent shorts of water supply/water overheating and temperature sensor

alarm is about 15 minutes (that depends on the temperature changing time).4. The baking of molecular pump

The cleanness is one of the basic conditions for the ultimate pressure of the inside pump, the

vacuum pipe and the vacuum chamber. Therefore the vacuum system and the pump must be baked so

that it can achieve the best ultimate pressure in the shortest time.

The seal surface of the flange is not allowed to have any scratch on,therefore, the sealing edge on the flange seal surface can not betouched by any hard matter.


The baking should proceed while the molecular pump is normally running, and the cool circulation

water of the pump must be in operation.

The baking temperature for the pump should be below 120 ℃, the baking temperature for the high

vacuum flange should be below 150 ℃, the baking temperature for the vacuum system should be below

300 ℃.

NOTE: Baking temperature over the above limitation would damage the pump

part.

Baking time depends on the prospective ultimate working pressure and the contaminative degrees

of the pump system, generally speaking, baking time is up to 48 hours, but the shortest time is not less

than 4 hours.Generally, to achieve 10-4 Pa vacuum degree needs not to bake; to achieve 10-5 Pa or higher

vacuum degrees needs only to bake the vacuum system itself; to achieve the extra high vacuum degreeneeds to bake the vacuum system and molecular pump simultaneously. Measure system should becompletely baked, otherwise it would influence the measured data accuracy because of the measuresystem itself out gassing.5. Operation

Regarding Starting and Stopping the pump, please refer to the power supply section of this manual.

5.1. Some patterns that could be used in the vacuum pipe of the molecular pumps

There are some differences between the degassing pipe design of the molecular pump and that of

the diffusion pump, the following is some typical examples of molecular pump applied in the vacuum

system:

It is strictly prohibited to move the pump and charge big volume air while themolecular pump is in normal operation.


The simple design of the molecular pump applied in vacuum system gas pipe

(right figure):

This is generally used to test the molecular pump performance or a varieties of scientific testing

equipment, the feature is that the inside facilities of its vacuum chamber and the materials kept

unchanged relatively, and unnecessary to open the vacuum chamber to operate in the inside. If the

backing pump is a sliding vane rotary mechanical pump using oil as its media, a backing break valve

should be set between the backing pump and molecular pump. The backing break valve must be

working with the backing pump together so that the oil vapor or oil could not be pumped into the

molecular pump. Some vane rotary mechanical pumps have out gassing break valve with it to avoid the

backing pipe to be contaminated by the oil liquid after a long time usage.

The design of molecular pump vacuum pipe with pre-pumping

function (center figure):

This is generally used for the vacuum system which its vacuum chamber is often opened. The

molecular pump should be avoided to restart repeatedly during the operation. To restart the molecular

pump repeatedly would cause the pump to pass the resonance range repeatedly, this would accelerate

The design of the molecularpump vacuum system pipewith a constant pressurecontroller

The design of molecular pumpvacuum pipe withpre-pumping function

The simple design of themolecular pump appliedin vacuum system gaspipe


the wear and tear of the pump bearing, and waste time as well. Therefore, when vacuum chamber is

open, the gate valve and the two break valves can be closed, and then get the charging valve to charge

air, after the pressure recovery, the vacuum chamber can be opened for operation, at this time, the

molecular pump and backing pump are in normal operation state. When re-pumping the vacuum

chamber, the pre-pumping break valve should be opened first to directly degas the vacuum chamber

with the backing pump, when the vacuum degree is achieved by the backing pump ultimate and the

molecular pump is working with normal pressure, the pre-pumping break valve should be off, at the

same time, the gate valve and the break valves should be opened. Till then the re-degassing process of

high vacuum is finished.

The design of the molecular pump vacuum system pipe with aconstant pressure controller (left figure)：

This is used in the plants that the vacuum chambers need air charging and constant pressure,

these plants need to charge the art air into the vacuum chamber, and to keep constant lower pressure.

At this time the gate valve can be off, and the constant pressure air pipe is opened in order to adjust

regulating valve reducing the degassing speed. Using constant pressure break valve can avoid

frequently opening and closing the regulating valve, after adjusting the regulating valve, the break valve

is the key switch to control the constant pressure air pipe.

Note for valve selection and mounting:the different vacuum valves have different sealing directions, when mounting the vacuum valve, a

special attention should be given to the sealing direction, otherwise it would cause the gradual leaking,

what is more, it could not achieve the normal vacuum target:

● the sealing of the gate valve and break valve should be on the side of molecular pump, this could

prevent the valves against exploding under the strong air pressure gap when the pressure gap between

the molecular pump and its vacuum chamber is very large (prior to and after the pre-pumping process).

● the sealing of the side pumping valve should be on the side of backing pump, this could prevent

the side pumping valve against exploding under the high air pressure when the high air pressure is

recovered in the vacuum chamber.


● the sealing of the obstructive air charging valve should be on the side along with the break valve

and pre-pumping valve (the outlet is on the side of backing pump).

6. Maintenance and Clearing6.1 Cleaning

The backing pump sucks oil, the molecular pump should be cleaned, even if its vacuum system does

not leaks, the ratio of sorption and desorption keeps unchanged and even long time baking could not

recover its vacuum performance.

6.2 Bearing replacing

The users are not allowed to replace the bearing themselves because the molecular pump needs

to re-equilibrate entirely.

6.3 Preventing collisionThe molecular pump is a kind of machine rotated with high speed, the gap between its dynamic plate

and its static plate is very narrow, it could not resist big collision, so the velocity and acceleration of itsmoving vehicle attached it should be controlled. In addition, the molecular pump could also be damagedseriously by sudden big volume air collision and a hard thing falling into it while the pump is in normaloperation.6.4 Isolating vibration

Generally speaking, after the strict inspection, the molecular pump has a very little vibration ratio, it

can directly be connected with the object system. To reduce the vibration to the utmost, the damper is

recommended to be used for the high precision instrument (such as electronic microscope).6.5 Shielding strong magnetic field

The rotary rotor is producing turboelectric current in the magnetic field, and heating up the rotor,the heat could weaken the intensity of the aluminum material, it is for this reason that the molecularpump should be limited to use in the magnetic field.

6.6 Electromagnetic interference

If the molecular pump needs to be repaired and

cleaned, that must be done by the technician,

otherwise those who demount it illegally would take

the responsibility.


Some of the high frequency instrument (such as molecular pump and frequency transformer) mightcreate electromagnetic field to interfere the environment around it. But this molecular pump would not beforbidden to use because it has conformed to the international standard. And the relevant certificationcan be given if it required.

6.7 Radiation limit

Most of the materials would possibly change their properties with the influence of the strong

radiation, especially the organic materials (such as molecular pump lubricant, sealing washer) and

semiconductor components. The anti–radiation degree of this molecular pump is 105 rad. The

anti-radiation strength could be increased by selecting the anti radiation materials and using the motor

driven power supply. All the sealing washers used in the molecular pump must be metallic materials in

order to prevent the radiation element tritium from emitting into the air while in pumping tritium.

6.8 Backing pump

On the top end of the high intensity of pressure of the molecular pump performance curve, the inlet

pressure intensity is from 200 Pa to 10-1 Pa, covering three quantity step: as the molecular mean free

path becomes narrow, the pumping function also becomes worse at the same time, so in the transition

period, the bigger the backing pump is, the faster the pumping speed of the molecular pump will be.


Part Ⅱ: Power part

A、Power Supply of B-300、650、1300、2000 Molecular Pumps

Parameter and function1.1 Overview

B series molecular pump power is the digital control plug based on IGBT power devices combining

with a high speed programmable device. Its functional mode is persistent and stable, its parameters is

accurate. The power supply part of the pump has the protection functions to prevent it from the over

strong current, over strong power operation, over big of power deceleration speed, over heat of the

power plug, over heat of the molecular pump, and also it has the function of tracing frequency from

upper to lower.

The power of the series molecular pump is installed internally with a high efficiency output

matching transformer which has the extra overload capacity and a very low exothermic function. It is

very suitable for a long time persistent operation. A complete function of external controlled interface is

convenient to constitute multimode auto-degassing system of vacuum devices.

FB300 power installation dimensions


1.2.1 Installation Size for FB300 power

Front panelWidth 280mm x height 95mm(thickness 2.5mm)

The minimum reserved space fromfront panel to front door of themachine cabinet

13mm

Rear panelWidth 238mm x height 88mm The minimum reserved space from

rear panel to machine cabinet150mm

CaseDepth305mm x width 238mm xheight 88mm

The minimum reserved space fromthe two side of the case to machinecabinet

50mm

1.2.2 Installation Size for FB650/1300/2000 power

Front panelWidth 480mm x height 177mm(thickness 2.5mm)

The minimum reserved space fromfront panel to front door of themachine cabinet

13mm

Rear panelWidth 440mm x height 170mm The minimum reserved space from

rear panel to machine cabinet150mm

CaseDepth300mm x width 440mm xheight 170mm

The minimum reserved space fromthe two side of the case to machinecabinet

50mm

1.3.1 Electricity current specification FB300


Output(overloadcapacities)

Output power 750W (overload capacity 1000W).the power in normal operating

is less than 120W,start/ accelerating are less than 300W；

Output voltage 0 ~ 55VOutput frequency 0 （10）— 550Hz

Accelerating time fromzero

5 minutes

400 Hz decelerating time 5 minutes

Input voltage Single phase AC 180V—240V, 50 –60 HzRunning condition Ambient temperature 0-40℃, relevant humidity is less than 80%

1.3.2 Electricity current specification FB650/1300



is 200W-250W, start/ accelerating are less than 200W-400w；



5 minutes

400 Hz decelerating time 7.5 minutes


1.3.3 Electricity current specification FB2000



is 200W-250W, start/ accelerating are less than 200W-400w；



6 minutes

400 Hz decelerating time 9minutes


1.4 Front panel key and its interface function


Front panel schematic

300/650/1300/2000

The introduction of

front panel power switch and key

press function Parameter setting panel

(valid operation press key) instruction

Power supply switch Can connect or cut AC220V two wires (L,N) circuitInternal & external

control transfer switchDeciding “external control terminal” 1, 2 point is efficient or not, to press downis the external control (remote control) mode 1, 2 point efficient.

Start keyAfter pressing down, the pump is into accelerating mode (300、650、1300 and2000 :frequency tracing down from 400Hz;3600:frequency tracing down from

225Hz), till to achieve the maximum frequency.

Stop keyAfter press down, the pump is into decelerating mode, till to minimumfrequency, the power stop output.

Parameter setting panel (valid operation press key) instructionUnder the normal mode ( non program mode)Power is in stopping or starting, repeatedly pressing this key can check themaximum set frequency, actual running frequency, the magnitude of current(intern 220V side three phase output is about equal 220V input current).

Note: parameter change, positive /negative rotating, JOG and RUN, STOP function key are the specialkey used by the manufacturer for adjustment. They are already locked after leaving factory. Invalid forusers.

Shanghai EVP Vacuum Technology. Co. LTDThe introduction of front panel power switch and key press function:1.5 Rear panel and its function

1.5.1 FB300/650/1300/2000 “Molecular pump” interface (plug side) line numbers and functiontable

FB650/1300/2000

B-300


1.5.2 FB-300/650/1300/2000“Power” rear panel output interface (plug) function table

1.5.3 External control interface function table and explanation

Interface Function Note & parameter

1, 2 pump start, stop of external control interface,connect—start, cut--stop “2” is signal ground line

3, 4 free

5, 6power and pump’s malfunction alarm signal, relaykeeping closed normally; opening whenmalfunction.

AC 100V/1A,DC24V/1A

7, 8 Output achieves 400Hz signal, full speedoperation; relay keeping open; closed when in full

AC240V/1A,DC100V/1A

Line

No.Function

1,2,3 the first phase line U4 the second phase line V5 the third phase line W6 temperature switcher 1 line

7 ground line (connecting pumpcase)

8 temperature switcher 2 line

Line No. Function

1 (8),2(9), 3(10)three phase line U, V, W output.1,2,3 short connecting with 8,9,10separately

4,11 free

5 (12),6 (13) temperature switcher: 5 ,6 shortconnecting with 12 ,13 separately

7, 14 ground line (connecting pumpcase), 7 short connecting 14

Shanghai EVP Vacuum Technology. Co. LTDspeed.

9, 10

Optional function. DC 0-10V output, correspondwith 0-400Hz output frequency; also cancorrespond with 0 to 6A power supply workingcurrent. (this port function can be ordered only byusers’ request)

9 +, 10 -: 10 is notequal to signal groundusage, but can beconnected with signalground

11, 12 10V output frequency synchronous pulse 11 +, 12 -: “12” is signalground line

13, 14 485 serial interface 13 is 485+, 14 is485 -

Note: 485 serial interface is a special function designed only for manufacturer’sadjustment, is not recommended for users’ pump operation, referring the following partregarding the usage of this port.

B、Assembly routine and trial operation with electricity current

2.1 Power supply and the points for attentionDiagram Note & Explanation

220V power cord, including power cord of power system, 1mm²to1.5mm² lead should be used. 6A fast fuse is used within the power.

Shanghai EVP Vacuum Technology. Co. LTDMolecular pump driven cable. For safety sake, less than 25 meterslong is recommended. Extra long cable can be ordered to themanufacturer. When the distance between the molecular pump andcontrol system is over 10 meters, the power is suggested to beinstalled nearby it, remote control is used to control the pump.

In this socket, the needle is fragile, and is easy to be deflected orsnapped off, the connecting direction angle of the plugmust be calibrated before inserting.Inserting and pulling with electricity is forbidden, after

confirming the power supply is totally cut off, that this cable could beinserted and pulled out.

2.2 Application of the remote interfaceGenerally, there are a number of molecular pumps on the equipment of large-scale

continual vacuum (liquid crystal and special glass etc.) production line, and the distancebetween the control table and the pump is far. A longer power driven line for the pumpwould increase the cost, be troubled with laying cable along the way, add more possibilityof interference for the ambient lines and consume more energy etc. The idea choice is touse remote control.

Because “degassing” and “stuffing” working are frequently happened for somevacuum equipment, these equipments are often designed with fully automatic controlledsystem. Therefore, the information must be exchanged between the control system and thepump when the equipment is in operation. B series power of the molecular pump just offersyou such supplementary function.

External controlling function application table:Line number &function name

discription

1,2 start/stop

When 1, 2 are connected, the running signal relay start working, power pressure is24V after connection, current is 15mA after connection. This interface can be directlycontrolled by PLC, please pay attention to the polarity (2 negative) if the PLC is outputby a transistor.

5,6 fault signal

5, 6 are the normal ON switch signal, Touch point parameter is AC100V/1A,DC24V/1A.This fault signal point would be cut off when the power malfunction happening, itkeeps closed while the power has no electricity supplied. Usually this signal can beused to control the safety switch-valve which is on the top of the pump,closing safetyswitch valve timely can guarantee the vacuum degree.

7,8 full speedsignal

7, 8 are normal OFF switch signal, On/off parameter is AC240V/1A, DC100V/1A.because the power start mode is from upper to lower trace mode, this switch is closedafter the power start, when it is lower than 380Hz, the switch Off, after the frequency

Shanghai EVP Vacuum Technology. Co. LTDtracking up, the power accelerates to 400Hz and then ON, that means the end ofaccelerating process, the pump is on full speed operation. (When using this function,the best way is to mount a 10 -20 seconds delaying relay on this point).When the power malfunction happens, the switch is in Off state (incomplete circuit),the full speed signal is more useful than fault signal. It is the only signal showing thenormal operation of the molecular pump. This signal can be used as the mark signal toshow the normal operation of the pump. 550Hz is FB300，400Hz is FB650、1300Z、

2000.

11,12synchronouspulse

11, 12 synchronous pulse signal of lead output and power output frequency (pulsestrength is 10V,) can be connected with common numerical frequency meter tomonitor power output frequency from a long distance. 9,10 points 0~10V simulationoutput also reflect 0~400 Hz frequency.

C、Normal Operation Procedure based on B -type power3.1 Normal operation procedure

Starting, accelerating to normal operation

1

Initialized withpower onIndicating

Switch on the power, LED digital shows actual output frequency ，the power is

normal.

Press the mode key repeatedly, LED digital indicator can alternately show , the

frequency set is 400Hz, if the number shown does not reach 400, then press the parameter

changing key △ to set 400 as the desired frequency, the parameter set ex-factory is 400, the

users are forbidden to change this parameter. is the actual output frequency (the

output frequency at present), is the actual output current(internal output side

three phase 220V current is about equal to power 220V/AC input current, the unit is ampere)

2

Disposing theabnormalityIndicating

When the power is abnormal, LED digital indicator could showthe relevant alarm code(see alarm code table), the number oftenshown is , that means the abnormal cable connection betweenthe power and the pump, the cable inside broken and the overheatingof the pump body. The disposal is to directly short circuit thetemperature control pole(the lower row from the left 5, 6 points) of thepower output interface with a screw driver, if the alarm stopped, thatmeans the normal power source, and then tighten the cableconnection and check the pump body temperature, if the temperatureof pump body is over 50 ℃, that means the cooling water flow is notenough. Check the water flow.

3

Checking thevacuumsystem andmolecularpump toconfirm thatthe molecular

Check the vacuum degree in the vacuum chamber and air pipe onthe top of the pump, to confirm it is below 30 Pa, this means thebacking pump is normal. The molecular pump vane is in rotating orstatic state. Press the green start button on the front power panel, themolecular pump power starts accelerating downward tracing from400 Hz, the frequency would increases until the speed catching upand then to 400 Hz for full speed operation.

Shanghai EVP Vacuum Technology. Co. LTDpump can bestarted safely,press the startbutton, thepump entersacceleratingprocedure

Upon the backing pump working, the molecular pump can startaccelerating, because the mechanical pump could depress thepressure of the vacuum chamber to less than 10Pa within 2 minutes,whereas the accelerating time of the molecular pump needs at least4.5 minutes, therefore, after the mechanical pump starts, the vacuumchamber is not leaking, the molecular pump could be started, theaccelerating molecular pump could be of some help to the backingpump to increase pumping speed.

4

Observingoutput currentflow, monitorthe operationload of thepump

If necessary, press the mode key repeatedly to observecurrent flow parameter. This parameter is 220 V output phase currentfrom the power source. When the vacuum chamber and backingpump are in normal state, the maximum accelerating current could beless than 3A, after full speed operation, the current could be keptunder 0.9A. during the accelerating operation, when the currentcontinues on 3A or above, check whether the backing pressure isover 100 Pa or not, this could cause the molecular pump overloaded,when the current load keeps high continuously, the power source ofthe molecular pump would stop to output, and give alarm signal ofover rotate moment .

If the molecular pump vane is in the high speed rotating statebecause it did not proceed decelerating during the last operation,then when starting the power supply, it would trace frequency fromupper to lower, after that, accelerate to the normal state. If theoperation speed is near to the pre-set rotating speed, the power ofthe pump would directly achieve 400 Hz for full speed operation.

Decelerating , stop, system charge and turn off the power source

1

Press theredstoppingbutton

Press the red stop button on the front panel, the molecular pumppower could use frequent decreasing mode to make the pump to stoprotating as soon as possible. This process needs about 7 minutes.

2

Chargingthe systemand poweroff

When the molecular pump power output frequency reaches ,the power can be switched off, after 5 minutes, the molecular pumpstops completely, the vacuum system can be charged nitrogen or dryair. Charging is forbidden while the pump has not completelystopped.

NOTE: if the power is cut while the pump still in decelerating, thepower would continue its supply because the pump motor feeds backenergy to the power source, therefore it maintains a certain of selfpreserved power during the brake process(indicator showingdeceleration). When the deceleration down to its half speed, thepower automatically cut off, this is normal phenomenon. But, thepower cable of the pump could not be pulled out at this time, because

Shanghai EVP Vacuum Technology. Co. LTDthe power is already cut, but the electriciJT energy exchangebetween the pump and power source still exist at this time. Pulling outthe cable at this time could cause the power source’s powerappliance to be damaged incidentally because of the load flow shakearisen from plug pulling.

3.2 Indicator’s indication explanation

3.3 Alarm code and their disposal methodAlarm

indication Explanation and disposal Alarmindication

Explanation anddisposal

Power output side is shortcircuit during the operation, thecable and pump motor windingshould be checked for shortcircuit.

Current is too big duringoperation, check theoutput cable normaliJT.

The DC bus voltage hasexceeded its maximumallowable voltage value, checkthe brake of the molecularpump and power supplyvoltage whether they are overspeed / overpressure.

The temperature of thepump is overheated or thedriving cable is notconnected well. Check thewater supply.

The temperature of powersupply is over heat, start the airconditioner, the ambienttemperature should be keptbelow 40 ℃

Wrong program of thepower, turn off the power,and restart

The power voltage is too low.Check the system powersupply (alarm is normal, whenstopping the pump)

Wrong program of thepower, turn off the power,and restart

The head letter is F, thefollowing data is presetfrequency

The head letter is A, the followingdata the actual output current ofthe converter.

The head letter is H, thefollowing data is actualoutput frequency.

Head letter is D, the powerparameter adjusting mode, thefollowing data is parameter value.

The program mode ofthe power work, thefollowing number s isfunction number.

Shanghai EVP Vacuum Technology. Co. LTDThe power supply is overload.The molecular pump is inoverload operation.The vacuum degree of thebacking pump is too low, checkthe backing pump and backingvalve for normality. Check thepump vane, if it is clamped orbroken, bring it back to thefactory for repair

The power output leakage,bring it back to the factoryfor repairThe failure of power selfcheck, stop and restart thepower if still alarm, bringit back to the factory forrepairThe temporary output stop,internal line is abnormal,bring it back to the factoryfor repair

The current suddenly increasesduring acceleration. Except theabove disposal, check theoutput cable normality.

Power circuit is abnormal,bring it back to the factoryfor repair

Current is too big duringdeceleration. Check the outputcable normality

D、Troubleshooting and Its Removal4.1 Common trouble spots and their removal method

Trouble Analysis and disposal Trouble Analysis and disposal

Pumpdoes notstart

Power malfunction ( see thepower part of this manual),Cable connecting trouble(measure the cable with a circuittester and check the plug)Others (consulting themanufacturer)

Fail to achievethe preset

rotating speedor stop rotatingwithin normalstart time

Vacuum system leak(leakchecking and fix the leak, thebacking pump pressure shouldbe below 10 Pa)Bearing damaged (check therotor rotation to judge theblock, the bearing should bebrought back to themanufacturer for replace if it isdamaged)

BigVibrationand noisewhileoperation

The pump is operating within theresonance frequency range(change mounting position andconnection size to fix the movingpart or put rubber cushionabsorber under the pump.the dynamic equilibrium of thepump is damaged (trial testing

Lower vacuumdegree

Backing vacuum pipe leak(check the backing vacuumpipe and fix the leak)High vacuum pipe leak ( checkit and fix it)Over output air from the nudegauge (degas the negative poleof the nude gauge and bake

Shanghai EVP Vacuum Technology. Co. LTDthe rotation of the pumpseparately, if the vibration andnoise are abnormal, bring thepump back to the manufacturerfor repair)bearing damaged ( back to thefactory for replacement)

the nude gauge for 2 hours withthe temperature of 200 ℃)Backing pump work abnormally(check and fix it)

Theultimatevacuumtargetcan benotachievedafterbaking

The backing pressure is too high (the backing pressure should be below 10 Pa)The backing pump’s pumping speed is not enough (the pump speed should not bebelow the minimum target of the pump suggested in table -1)The pump and vacuum system are contaminated.(clean the vacuum system, bringthe pump to the factory for cleaning)

Part Ⅲ：Other

A、Apparatus storage, transportation and its attached appliance

List1.1 Storage

The molecular pump is a kind of mechanical product which requires very high cleanable ambient

for storage. The cleanness of the vane inside the pump directly influences its ultimate vacuum.

Therefore, during the storage, the pump’ inlet and outlet must be sealed tightly, at the same time, the

inside of the pump must be kept clean and dry, the pump could not be placed in the humid or dusty

ambient.1.2 Transportation

For the safety of the molecular pump during the transportation, the pump’s lubricant must be taken

out from the pump, and stored in the clean plastic bottle for transportation. During the transportation, the


collision, the horizontal placing, inverted placing must be forbidden, and also water must be prevented

from seeping into the pump. After receiving the cargo, the receiver must check the pump in time, and

contact the manufacturer in time if there is any problem.

1.3 Its attached appliance listPacking list

No. Name Quantity Note1 Compound molecular pump 1 set2 Power source for the molecular pump 1 set3 Organic glass cover 1piece 5m

4 Stainless steel heating belt 1piece

5 Power cable line 1piece6 The clamp and cover plate of backing flange 1set7 Lubricant of the pump 100 ml8 Copper washer 1 piece

B、Manufacturer’s guarantee

To the users who purchase the products of the FB series compound molecular pump

manufactured by this company, this company offers one year period guarantee for the products along

with the products maintenance form. For the users whose shop are located in the provinces other than

where the manufacturer is, the guarantee period is one more month plus. During the guarantee period,

the manufacturer will not charge maintenance fee. If the part of the pump needs to replace, the

manufacturer will charge with 50% discount, but if it happened within six- month from the delivery date, it

will be free of charge.No guarantee for the following cases:

1. The user’s dismantlement without manufacturer’s authorization.2. User’s improper storage and operation.3. Other damage caused by user’s improper operation.

Date post:	02-Oct-2020
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