A PRESENTATION BY:-Soumya Panda Anand Ku.Singh P.DevendraRoll:1304082 Roll:1304083 Roll: 1204039Branch:ECE Branch:ECE Branch:ECE

GROUP NUMBER : 18

TOPIC NAME:

MEMS AND NEMS

( MICRO AND NANO ELECTRICAL AND MECHANICAL SYSTEMS)

What is MEMS?• MEMS or Micro-Electro Mechanical System

is a technique of combining Electrical and mechanical components together on a chip, to produce a system of miniature dimensions.

• MEMS is the integration of a number of micro-components on a single chip which allows the micro-system to both sense and control the environment.

• The components are integrated on a single chip using micro fabrication technologies.

Basic process of fabrication• Deposition– Deposition that happen because of a chemical reaction or

physical reaction.• Patterning– The pattern is transfer to a photosensitive material by

selective exposure to a radiation source such as light. If the resist is placed in a developer solution after selective exposure to a light source, it will etch away.

• Etching– Etching is the process of using strong acid to cut into the

unprotected parts of a metal surface to create a design in.There are two classes of etching processes: • Wet Etching Dry Etching.

APPLICATION of MEMS• Micro engines:- highly compact energy source.• Inertial sensors:- Accelerometer, gyroscopic sensor. Etc.• Pressure Sensor:- to measure blood pressure of fluid

pressure.• Optical MEMS:- sensing or manipulating optical signals on a

very small size scale using integrated mechanical, optical, and electrical systems .

• Fluid MEMS:- technology that enables precise, automated manipulation of tiny volumes of fluid mainly used in therapeutics(e.g. drug delivery)

MEMS IN MOBILE DEVICES:

NEMS

• Nano-Electro-Mechanical system (NEMS) is the integration of mechanical elements, sensors, actuators and electronics on a common silicon substrate.

•The Nano mechanical components are fabricated using compatible “micromachining” process.

•NEMS is the enabling technology allowing the development of smart products.

• Quantum dots• Nano wires• Quantum films

9

Quantum Dots.

NEMS AND NANOTECHNOLOGY

APPLICATIONS of NEMS• Accelerometer:-measures the tilting of and orientation of

mobile phones.• Nano nozzles:- direct the ink in inkjet printers.• Miniature robots:- NANO robots, self assembly robots.• Thermal actuators:- these are able to deliver large force with

large displacement to the overall device for small amount of thermal expansion in one part.

• Medicine:- it is the largest market for NEMS(eg. pressure sensors to measure blood pressure.)

• Bio technology:-lithographic methods to assemble inorganic and metallic materials to layered devices.

NANO-SCALE RESEARCH

ADVANTAGES

• Cost effectiveness.

• System integration.

• High Precision.

• Small size.

• High sensitivity

REFERENCES1. Ioan Raicu “Micro Electro Mechanical Systems -MEMS Technology

Overview and Limitations”(Class :CSC8800)01-09-(2004).

2. START Micro Electro Mechanical Systems (Volume 8, Number 1); Micromachined Devices, European Study Sees MEMS Market, May 1997, p.1

3. Jeremy A. Walraven “Introduction Applications and Industries for Micro electro mechanical Systems (MEMS)” (Sandia National Laboratories. Albuquerque, NM USA).

4. Jack Shandle. “MEMS: The Applications Triage”.5. M. Mehregany and S. Roy (Chapter 1: Introduction to MEMS)- Henry

Helvajian, editor “Microengineering Aerospace Systems”.6. L. S. Fan, Y. C. Tai, and R. S. Muller, IEEE Transactions on Electron Devices

ED-35, 1988,724-730.

• THANK YOU