© 2010 ANSYS, Inc. All rights reserved. 1 ANSYS, Inc. Proprietary© 2010 ANSYS, Inc. All rights reserved. 1 ANSYS, Inc. Proprietary
HFSS for ECAD:
Package Modeling,
MMIC and on-die
extraction
Alain Michel
Technical Director, Europe
© 2010 ANSYS, Inc. All rights reserved. 2 ANSYS, Inc. Proprietary
• Introduction
• HFSS integrated Solver on Demand (SoD) in
Detail
– Create a project from A to Z
– Project examples
• MMIC application with UMS PH15 design kit
– Design Kit with HFSS SOD
– Package Simulation
• Conclusion
Agenda
© 2010 ANSYS, Inc. All rights reserved. 3 ANSYS, Inc. Proprietary© 2010 ANSYS, Inc. All rights reserved. 3 ANSYS, Inc. Proprietary
Introduction
© 2010 ANSYS, Inc. All rights reserved. 4 ANSYS, Inc. Proprietary
• MCAD (Mechanical Computer-Aided Design) vs.
ECAD (Electronic Computer-Aided Design)
– HFSS application can be mostly split into two families:
• Application originally designed with MCAD: Antennas,
Connector, Wave Guide, filters …
• Application originally designed with ECAD: PCB, RFIC,
MMIC, Planar Antenna, Package …
• HFSS original GUI perfectly address MCAD
application needs
• HFSS SoD provides a new interface for ECAD
application
Why HFSS in Ansoft Designer?
© 2010 ANSYS, Inc. All rights reserved. 5 ANSYS, Inc. Proprietary
• Available with Ansoft Designer 6.0
• 2D layout design entry
– Import from APD, ODB++
– Full custom layout
• Layers stackup definition
• Easy of Use with setup automation
• Easily toggle between FEM and MOM solvers
• Support scripted footprint
• HFSS technology for reliable and accurate models
– Adaptative meshing
– 3D Objects: wirebonds, arbitrary shaped vias…
– Finite dielectric
– Support for multimoded wave ports and gap sources
HFSS SoD Overview
© 2010 ANSYS, Inc. All rights reserved. 6 ANSYS, Inc. Proprietary© 2010 ANSYS, Inc. All rights reserved. 6 ANSYS, Inc. Proprietary
HFSS SoD in Detail
© 2010 ANSYS, Inc. All rights reserved. 7 ANSYS, Inc. Proprietary
• Standard HFSS design entry uses 3D Object
• HFSS in Designer combine 2D drawing with stackup
definition
Stackup Definition
Port1
Port2
Port3 Port4
+=
© 2010 ANSYS, Inc. All rights reserved. 8 ANSYS, Inc. Proprietary
• Define port by selecting edge
• Solver specific properties
• HFSS gap or wave port available
Easy and Automated Port Setup
© 2010 ANSYS, Inc. All rights reserved. 9 ANSYS, Inc. Proprietary
• Size setup
• Deembeding available
• PEC launch allows wave port inside air box
Wave Port Setup
© 2010 ANSYS, Inc. All rights reserved. 10 ANSYS, Inc. Proprietary
• Radiation Boundary for air box
• Dielectric size setup
• Air box size setup
Boundaries Setup
© 2010 ANSYS, Inc. All rights reserved. 11 ANSYS, Inc. Proprietary
• Solution Frequency
• Adaptive solution
• Mixed order elements and
iterative solver available
HFSS Solution Setup
© 2010 ANSYS, Inc. All rights reserved. 12 ANSYS, Inc. Proprietary
• Rectangular, smith chart … plots
• Current, far and near field display
• Meshing
Post-Processing
2.00 4.50 7.00 9.50 12.00 14.50 17.00 19.50F [GHz]
-37.50
-25.00
-12.50
0.00
Y1
Ansoft LLC spir2_20S11_12_dB ANSOFT
Curve Info
S12_3D_HFSSSetup HFSS_gap : Sw eep 1
S11_3D_HFSSSetup HFSS_gap : Sw eep 1
5.002.001.000.500.200.00
5.00
-5.00
2.00
-2.00
1.00
-1.00
0.50
-0.50
0.20
-0.20
0.000
10
20
30
40
50
6070
8090100110
120
130
140
150
160
170
180
-170
-160
-150
-140
-130
-120-110
-100 -90 -80-70
-60
-50
-40
-30
-20
-10
spir2_20Smith Chart 1 ANSOFTCurve Info
S(Port1,Port1)Setup HFSS_gap : Sw eep 1
© 2010 ANSYS, Inc. All rights reserved. 13 ANSYS, Inc. Proprietary
• From 2D to 3D
– Finite dielectric definition in stackup
– Use Bondwire type primitive
• Quick and easy port setup
• Display current
Package example
© 2010 ANSYS, Inc. All rights reserved. 14 ANSYS, Inc. Proprietary
• Current distribution
Package example
© 2010 ANSYS, Inc. All rights reserved. 15 ANSYS, Inc. Proprietary
Imported Package Example
• Import from APD/Allegro
• .mcm, .sip, .brd, .anx
• Import stackup and bondwire profile
• Setup solderball profile
• Automatically port setup for pin
• Cutout sub-design
© 2010 ANSYS, Inc. All rights reserved. 16 ANSYS, Inc. Proprietary
2.00 4.00 6.00 8.00 10.00 12.00 14.00 16.00 18.00 20.00F [GHz]
-45.00
-40.00
-35.00
-30.00
-25.00
-20.00
-15.00
-10.00
-5.00
0.00
Y1
Ansoft LLC spir2_20S11_12_dB ANSOFT
Curve Info
S11_3D_MoMSetup 3D MoM edge : Sw eep 1
S12_3D_MoMSetup 3D MoM edge : Sw eep 1
S12_3D_HFSSSetup HFSS_gap : Sw eep 1
S11_3D_HFSSSetup HFSS_gap : Sw eep 1
Spirale example
• 1 project 2 setup
© 2010 ANSYS, Inc. All rights reserved. 17 ANSYS, Inc. Proprietary© 2010 ANSYS, Inc. All rights reserved. 17 ANSYS, Inc. Proprietary
MMIC application
with UMS PH15
design kit
© 2010 ANSYS, Inc. All rights reserved. 18 ANSYS, Inc. Proprietary
• Provide UMS PH15 Design Kit with passive
component simulable with HFSS
• Includes parameterized footprint for
– MIM capacitor
– Spirale inductor
– Tan and TiWSi Resistors
– Vias
• Footprint are both valid for GDS export and
HFSS simulation
UMS Partnership
wint_um=50
lint_um=60.5
CapOnGrid_pF=0.998pF
Port1 Port2
© 2010 ANSYS, Inc. All rights reserved. 19 ANSYS, Inc. Proprietary
• Technology file loads design kit components,
layer definition and stackup
• Stackup is defined with regards to process
technology definition given by foundry
What is a Design Kit?
© 2010 ANSYS, Inc. All rights reserved. 20 ANSYS, Inc. Proprietary
• Components include Symbol, footprint and model
What is a Design Kit?
(Continued)
© 2010 ANSYS, Inc. All rights reserved. 21 ANSYS, Inc. Proprietary
• Use parameters C, W, L …
– To set equivalent circuit model parameter values
– Automatically draw DRC safe layout
Component example
MIM capacitor
PHCAPN1
C=0.264pF
W=28um
Source UMS PH15 design guide
wint_um=28
lint_um=28.5
CapOnGrid_pF=0.263pF
© 2010 ANSYS, Inc. All rights reserved. 22 ANSYS, Inc. Proprietary
• Create parameterized footprint
– With respect to design rules defined
for manufacturing
– With respect to physical design
used for HFSS simulation
• Layer deposition
• Air bridges
• ….
Challenge
Source UMS PH15 design guide
© 2010 ANSYS, Inc. All rights reserved. 23 ANSYS, Inc. Proprietary
• Shape of the same layer is drawn twice
– User type for manufacturing (GDSII export)
– Signal, dielectric or ground for HFSS simulation
• Stackup definition validated with UMS
• Automatically loaded with the technology file
Layer Definition
© 2010 ANSYS, Inc. All rights reserved. 24 ANSYS, Inc. Proprietary
0.00 5.00 10.00 15.00 20.00 25.00 30.00 35.00 40.00F [GHz]
0.00
0.20
0.40
0.60
0.80
1.00
Y1
Cap_0_26pF_merge_nitrideCap_value ANSOFT
m4m5
m7
m6
Curve Info
cap_pf
cap_pf_UMS_Model
Name X Y
m4 7.5000 0.2929
m5 7.5000 0.2699
m6 30.0000 0.5092
m7 30.0000 0.4319
Name Delta(Y)
d(m4,m5) -0.0230
d(m6,m7) -0.0773
• Good agreement with UMS model
Simulation results:
MIM capacitor 0.26pf
wint_um=28
lint_um=28.5
CapOnGrid_pF=0.263pF
Port1 Port2
© 2010 ANSYS, Inc. All rights reserved. 25 ANSYS, Inc. Proprietary
Spiral Inductor 1.91nh
Ldrawn=1.902nH
Ndrawn=4
Longdrawn=1760um
Port1
Port2
1.00 6.00 11.00 16.00 20.00F [GHz]
1.00
1.50
2.00
2.50
3.00
Y1
Ansoft LLC Self_1_91nhInd_Value_zoom ANSOFT
Curve Info
ind_nh_HFSS
ind_nh_UMS_Model
© 2010 ANSYS, Inc. All rights reserved. 26 ANSYS, Inc. Proprietary
0.00 10.00 20.00 30.00 40.00 50.00 60.00F [GHz]
-45.00
-40.00
-35.00
-30.00
-25.00
-20.00
-15.00
-10.00
-5.00
0.00
Y1
LPFS Parameters ANSOFT
Curve Info
dB(S(Port1,Port1))
dB(S(Port2,Port1))
• Coupling between components
• No need of internal port
Simple LPF
© 2010 ANSYS, Inc. All rights reserved. 27 ANSYS, Inc. Proprietary© 2010 ANSYS, Inc. All rights reserved. 27 ANSYS, Inc. Proprietary
PA simulation
including Package
effect
© 2010 ANSYS, Inc. All rights reserved. 28 ANSYS, Inc. Proprietary
Where do we start?
• Power Amplifier MMIC
– UMS HBT20 process
– CHA5012 from UMS
– Simulated in Ansoft Designer with
UMS PDK developed in
conjunction with UMS
– Device models include
Temperature modification
• Needs high volume packaging
for large-scale production 0 0 0
00
0
IZ=0ohm
PNUM=1
RZ=50ohm
IZ=0ohm
PNUM=2
RZ=50ohm
Port3
U3
CHA5014
U4
External_Biasing_Ctrl2
1uF
C8
87
100nH
L888
0.02
R889
5nH
L893 0.01
R894
10nF
C8
97
1nH
L901
0.8nH
L904
120pF
C9
07
0.01
R911
5nH
L912
1nH
L916
0.8nH
L917
120pF C9
21
10nF C9
22
V925
DC=Vcontrol
UMS HB20P V3.2
A
Name=I_Alim
V
Name=Vtot
© 2010 ANSYS, Inc. All rights reserved. 29 ANSYS, Inc. Proprietary
8.80 9.00 9.20 9.40 9.60 9.80 10.00 10.20 10.40 10.60 10.80 11.00F [GHz]
10.00
12.00
14.00
16.00
18.00
20.00
22.00
24.00
26.00
dB
(GP
)
Sweeptemp ANSOFT
m1
Curve Info
temperaC='-40'
temperaC='25'
temperaC='80'
Name X Y
m1 10.0000 21.4571
8.00 8.50 9.00 9.50 10.00 10.50 11.00 11.50 12.00F [GHz]
-50.00
-40.00
-30.00
-20.00
-10.00
0.00
10.00
20.00
30.00
Y1
Ansoft LLC CHA5012_Ext_biasingS21_Narrow ANSOFT
MX1: 10.0000
Curve Info
S21
S11
S12
s22
-41.9647
-20.6034-18.4431
21.4192
PA Die Properties
9.00 9.20 9.40 9.60 9.80 10.00 10.20 10.40 10.60 10.80 11.00freq_in [GHz]
18.00
20.00
22.00
24.00
26.00
28.00
30.00
32.00
34.00
36.00
m1
m2
m3
Name X Y
m1 10.0000 28.5197
m2 10.0000 34.7013
m3 10.0000 21.4184
Curve Info
PAE (%) @3dBc
Pout (dBm) @3dBc
Linear gain in dB
0
RZ=50ohm
IZ=0ohm
PNUM=1
IZ=0ohm
PNUM=2
RZ=50ohm
V2
65
6
DC
=V
bia
s
AN
am
e=
Ibia
s
Port1 Port2
Port3
CHA5012_Ext_biasing2
0.3nH
L2670
0.3nH
L2673
© 2010 ANSYS, Inc. All rights reserved. 30 ANSYS, Inc. Proprietary
PA Design using HFSS SOD
• This package is a dummy package created for
this presentation
© 2010 ANSYS, Inc. All rights reserved. 31 ANSYS, Inc. Proprietary
Setup HFSS SOD simulation
© 2010 ANSYS, Inc. All rights reserved. 32 ANSYS, Inc. Proprietary
Package results
0.00 5.00 10.00 15.00 20.00F [GHz]
-2.50
-2.00
-1.50
-1.00
-0.50
0.00
Y1
finite_moldsizeXY Plot 1 ANSOFT
Curve Info
dB(S(Port4,Port3))HFSS Setup 1 : Sweep 1
dB(S(Port2,Port1))HFSS Setup 1 : Sweep 1
0.00 5.00 10.00 15.00 20.00F [GHz]
-62.50
-50.00
-37.50
-25.00
-12.50
0.00
Y1
finite_moldsizeXY Plot 2 ANSOFT
Curve Info
dB(S(Port1,Port1))HFSS Setup 1 : Sweep 1
dB(S(Port2,Port2))HFSS Setup 1 : Sweep 1
dB(S(Port3,Port3))HFSS Setup 1 : Sweep 1
dB(S(Port4,Port4))HFSS Setup 1 : Sweep 1
© 2010 ANSYS, Inc. All rights reserved. 33 ANSYS, Inc. Proprietary
PA/Package cosimulation
• Link this HFSS model with Designer to determine
packaged S-parameters
0 0 0
00
0
IZ=0ohm
PNUM=1
RZ=50ohm
IZ=0ohm
PNUM=2
RZ=50ohm
Port3
U3
CHA5014
U4
External_Biasing_Ctrl2
1uF
C8
87
100nH
L888
0.02
R889
5nH
L893 0.01
R894
10nF
C8
97
1nH
L901
0.8nH
L904
120pF
C9
07
0.01
R911
5nH
L912
1nH
L916
0.8nH
L917
120pF C9
21
10nF C9
22
V925
DC=Vcontrol
UMS HB20P V3.2
A
Name=I_Alim
V
Name=Vtot
© 2010 ANSYS, Inc. All rights reserved. 34 ANSYS, Inc. Proprietary
9.00 9.20 9.40 9.60 9.80 10.00 10.20 10.40 10.60 10.80 11.00freq_in [GHz]
17.50
20.00
22.50
25.00
27.50
30.00
32.50
35.00
Ansoft LLC PAE and Pout @P3dBc and Linear Gain ANSOFT
m1
m2
m3
Curve Info
PAE (%) @3dBc
Pout (dBm) @3dBc
Linear Gain
Name X Y
m1 10.0000 28.1190
m2 10.0000 32.4528
m3 10.0000 20.9518
8.00 8.50 9.00 9.50 10.00 10.50 11.00 11.50 12.00F [GHz]
-50.00
-40.00
-30.00
-20.00
-10.00
0.00
10.00
20.00
30.00
Y1
Ansoft LLC PA_nominal_packageS parameters ANSOFT
MX1: 10.0000
Curve Info
S21
S11
S12
s22
-38.1480
-11.4320 -11.0842
20.9526
Packaged Die Results @ 25 °C
• Die was designed to take advantage of bondwire
inductance
• Slightly lower gain and worse matching– Ideal inductance used to model package bondwire does not
correspond to dummy package use for this presentation.
© 2010 ANSYS, Inc. All rights reserved. 35 ANSYS, Inc. Proprietary
• Target ECAD application
• 2D layout design entry
– Import from APD, ODB++
– Full custom layout
• Easy and quick setup of an HFSS project
• HFSS technology for reliable and accurate models
– Adaptative meshing
– 3D Objects: wirebonds, arbitrary shaped vias…
– Finite dielectric
– Support for multimoded wave ports and gap sources
• Availability of scripted footprint
• For UMS Design Kit
– Parameterized footprints combine physical and DRC safe layout
– HFSS 3D accuracy using 2D layout and physical stackup definition
– Extend passive model range using HFSS integrated in Ansoft Designer
– Include comprehensive component coupling analysis
– Automatic port setup and de-embedding
Conclusion
© 2010 ANSYS, Inc. All rights reserved. 36 ANSYS, Inc. Proprietary© 2010 ANSYS, Inc. All rights reserved. 36 ANSYS, Inc. Proprietary
Thank you