11

High sensitivity imaging by using secondary electrons in a VP-mode

Environmental Secondary Electron Detector II, ESED II (Option)

The ESED II detects a signal that is the result of thesecondary electrons interacting with the gas in thechamber. The resultant image has all the characteris-tics and topographical information of a traditional sec-ondary electron image.

A comparison of the ESED II and BSE images in VP-mode

A complemental use of the ESED II with the standard BSE detector allows a comparison of two images. BSEimages show sample compositions while ESED II images show surface topography of a sample closely.

Typical applications of the ESED II detector

BSE image ESED II imageSample: LLP (Long-Lasting Phosphor)

Sample: Rubber roller Sample: IC on a printed circuit board

A general view of the ESED II mounted on the S-3700N

The same field of view

12

For observation of wet samples for a long time

Cooling stage (Option)

Cooling stage can be used to image hydrated samples such as biological material, plants, food products and emul-sions as the vaporization of water content can be minimized by keeping the sample between 0 to –20°C. It allowsobservation and analysis of water-containing samples for a few tens of minutes to a couple of hours without causingdeformation of samples. This is recommended to observe beam sensitive samples as well.

Typical applications of a cooling stage

Sample shrinkage is seen after 10 minutes. Sample shrinkage is not seen after 10 minutes.Sample: Plum petal

A general view of a cooling stage

A relation of water and its vapor pressure

Pressure (Pa)

Tem

pera

ture

(°C

)

Variable pressure range of the S-3700N

A cooling stage

A water (ice) vapor pressure curve

Evaporation

Freezing

Freezing

At an ambient temperature At –20°C (A cooling stage was used.)

30

0

–606 10 102 103 104

13

For convenient and comfortable operations

Operation guide

This software helps the operator select the optimumoperating conditions applicable to the user’s application.By simply following the instructions the S-3700N will beset to the proper operating conditions.

Customizing the GUI

The S-3700N allows the operator to customize the GUI to suite their applications, samples or their personal prefer-ence.

Operation panel

The S-3700N can be controlled either by mouse andsoftware or by rotary controls on a separate opera-tion panel which is equipped as standard. The lay-out of rotary controls is common with many otherHitachi SEM’s such as S-5500, S-4800 and S-3400N.

14

Image data management (SEM data manager)

The SEM data manager is an original soft-ware of Hitachi PC-SEMs. It allows auto-matic registration of stored images in thedatabase by the user name. It allows usersto select any one of registered images bydate, operating conditions, size of images,keywords, folders, etc. It also allows grayscale controls, image processing, free-lay-out and print out images.

Free-layout printing

Selected images or thumbnail images can be sorted and pasted into print layout image. The pasted images can bemanipulated prior to saving as an HTML, transferring to MS Word* or printing.

* Microsoft Word

Transfer toMicrosoft® Word.

Microsoft® Word is a registered trademark of Microsoft Corp., U. S. A.

15

Simple maintenance

3D animated maintenance guide

Auto Beam Setting

After the installation of a new filament, it is necessary to adjust the filament current, electron beam alignment,focus brightness and contrast. This can all be achieved automatically with the click of a single button.

Pre-centered cartridge filament

There is no need for the operator to perform complicated and deli-cate alignment procedures. The filaments for the S-3700N are pre-aligned at the factory so there is no need to perform centering inthe field.

Condenser lens apertures (Column liner design)

The condenser lens fixed apertures are all located within the linertube and can be simply removed through the gun chamber. It isnot necessary to disassemble the column to gain access to theaperture assembly. 3D animated maintenance guide providesusers with step by step instructions on how to replace the aper-tures.

The S-3700N has a 3D animated maintenance guide that shows the procedure for routine tasks such as to replace afilament.

16

Optional software for extended data analyses

3D View software (Option)

Using the BSE detector equipped as standard the 3D software generates surface roughness measurements and aninteractive 3D model display of the sample.

Critical Dimension measurement function (Option)

The critical dimension measurement function allows measurements of dimensions and angles of a specific point of inter-est on an SEM image. This function includes manual/auto-measurements, sequential measurements and simultaneousmeasurements of width and pitch. Users may select any one of these measurements to suite their specific purposes.

A result of angle measurements

A result of simultaneous width and pitch (2µm)measurements

A 3D-model and a sectional profile

17

Sample holders

Multi sample holders (Option)

Special holders (Option)

Here are sample holders prepared for some specific purposes.

Wafer holders (Option)

Here are sample holders for wafers of 2 to 8 inches (SEMI compatible). These holders allow loading/unloading wafers at one touch.

Multi sample holders for 14 and 33 (15mm stubs) samples are available. All of the stubs are indexed in software andby selecting the required stub on the holder layout the stage can be driven to the center of that stub.

Multiple sample holder with samples of 15mm dia. × 14 pcs Multiple sample holder with samples of 15mm dia. × 33 pcs

Sample holder for resin embedded samples

Wafer holders for 4, 6, and 8 inch wafers

Sample holder for EBSP work Sample holder for square samples

18

Specifications

Items

Resolution SE

BSE

Magnification

Accelerating voltage

Low vacuum range

Image shift

Maximum specimen size

Specimen stage

X

Y

Z

R

T

Observable area

Maximum height

Stage control

Electron optics

Electron gun

Objective aperture

Gun bias

Detectors

Analytical position

Display

Controls

Monitor

Auto alignment

Auto image adjustment

Image data saving

Filing format

Image display mode

Evacuation system

Operation

Turbo molecular pump

Rotary pump

Protection

Auxiliary functions

Description

3.0nm at 30kV (High vacuum mode)

10nm at 3kV (High vacuum mode)

4.0nm at 30kV (Low vacuum mode)

×5 – ×300,000

0.3 – 30kV

6 – 270Pa through graphic menu

±50µm (WD= 10mm)

300mm in diameter

150mm

110mm

5 – 65mm

360°

–20° – 90°

203mm in diameter (with rotation)

110mm (WD= 10mm)

Computer eucentric 5-axis motorization

Precentered cartridge filament

5-position, click stop objective aperture

Quad bias with variable bias control

Everhart thornley secondary electron detector

High sensitivity semiconductor BSE detector, five segments, fully selectable

WD = 10mm, TOA = 35°

Joystick, keyboard and rotary knob set

19.1 LCD flat panel monitor (subject to change without notice)

Auto beam setting, auto axial alignment,

Auto focus, auto stigmator/focus, Auto brightness & contrast

640 × 480 pixels, 1,280 × 960 pixels

2,560 × 1,920 pixels, 5,120 × 3,840 pixels

BMP,TIFF,JPEG

Full screen display: 1,280 × 960 pixels

Small screen display: 640 × 480 pixels

Dual image display: 640 × 480 pixels × 2

Signal Mixing

Full automatic sequence

210L/sec. × 1

135L/min. (162L/min. with 60Hz) × 1

Power failure and vacuum failure

Raster rotation, dynamic stigma-monitor

Dynamic focus/tilt compensation

Free layout print function, alphanumeric function

3D animation maintenance guide

Navigation, Easy measurement, Oblique image

Specifications Optional accssoriesDetector and analytical tool

Environmental secondary electron detector(ESED-II)

Energy dispersive X-ray spectrometer (EDS) made by third party vender

Wavelength dispersive X-ray spectrometer (WDS) made by third party vender

Electron backscattered diffraction analyzer (EBSD) made by third party vender

Cathode luminescence spectrometer (CL) made by third party vender

Specimen stage and holder

Multiple specimen holder

Plastic embedded specimen holder

Wafer holders (for 3", 4", 5", 6" and 8")

Special specimen holder for EBSD

Specimen exchange device

Cool stage made by third party vender

Software

CD measurement

Hi-mouse (One keyboard, one mouse)

Consecutiveimage recording function (Zigzag capture function)

Stitch

3D View Software

Interface

External communication interface

SCSI

DBC

Others

Chamberscope made by third party vender

Dimensions & weightItems Dimension/weight

Colum unit 780(W) × 850(D) × 1,600(H) mm, 550kg

Display unit 850(W) × 800(D) × 1,200(H) mm, 120kg

Rotary pump 526(W) × 225(D) × 306(H) mm, 28kg

Air compressor 400(W) × 230(D) × 550(H) mm, 18kg

Weight 200(W) × 180(D) × 160(H) mm, 40kg

Installation requirements

Typical installation room layout

Items Description

Room temperature 15 – 30°C

Humidity 70% RH or less

Power supply Single phase AC 110, 115, 200, 220 or 240V(±10%), 2.0kVA

Power cable 10meters long with M5 crimp-type terminal

Grounding 100Ω or better

Unit: mm

850

526400

850

800

225

230

780

1,630

Doorway 850 or greater

400 or greater500 or greater

2,600 or greater

2,25

0 or

gre

ater

Weight

Air compressor

Rotary pump

Display unit

500

or g

reat

er

Column unit

NOTICE: For proper operation, follow the instruction manual when using the instrument.

Specifications in this catalog are subject to change with or without notice, as Hitachi High-Technologies Corporation continues to develop the latest technologies and products for our customers.

Tokyo, Japanhttp://www.hitachi-hitec.com/em/world/24-14 Nishi-Shimbashi 1-chome, Minato-ku, Tokyo, 105-8717, Japan

Printed in Japan (H) HTD-E134P 2010.4