HIGH SPEED PL MAPING SYSTEMModel : MAPLE-X208

Add.: No. 726, JhongShan S. Rd., YanMei, TaoYuan, 326, TaiwanTEL : 886-3-4852036FAX : 886-3-4852512Email : richard@mrnanotec.comWeb-site : http://opto-equipment.etrading.com.tw/M&R

M&R Nano Technology Co., Ltd.

1.Company Information Page A. Company Introduction 3

B. Executive Summary 4

C. Management Principles 5

D. Company History6

E. Company Details7

F. Organizational Structure 8

2. Principles of Photoluminescence 9

3. Photoluminescence Measurement 10

4. Introduction to Maple-X 208 11-17

5. Comparison 18

6. Scalability 19

7. Service Plan 20

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1-A. Company Introduction

DongWoo Optron is a technology company specialized in the field of spectroscopy.

DongWoo Optron was initially established as “DongWoo Trading” in 1989 mainly focusing on introducing high quality, high precision optical instruments to South Korean market. However, 9 years relentless research and development drove DongWoo to produce its first Monochromator(s) in its own manufacturing plant in 1998. As destined in its due course DongWoo Trading renamed to “DongWoo Optron Co., Ltd.” and naturally putting all its efforts in R&D and producing high quality, high precision spectroscopy instruments. Today DongWoo has built up its reputation world wide as a high-end spectroscopy system manufacturing company.

We are committed to build state-of-art optical products that customers really need. Making a perfect product takes two way communication. We will always listen to our customers’ voice whether the needs are for high-tech R&D or for high precision nano-scale production lines. Creating solutions that are tailored to best suit your developments and production requirements is our mission.

We are certain that whatever your needs are DongWoo will provide just the solution where you need it the most.

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Dear valuable customers,

DongWoo has strived in the field of spectroscopy to develop and supply best, high quality instruments to our loyal customers consistently supporting DongWoo Optron past 20 years. Thanks to our loyal customers DongWoo Optron has consolidated its position as a high-end spectroscopy instrument manufacturing company world wide today.

Many people often state that nothing much has changed past 40 years in the spectroscopy industry. But it is quite the opposite. Science and technology progresses with the time. So has the spectroscopy instruments. DongWoo Optron is always tuned to our customer’s wavelength to introduce products that are most up-to-dated. Complacence is a word that does not exist in our dictionary. Earnest and hard workings scientists and engineers are making relentless efforts to produce products that are recognized by our customers.

Taking this opportunity Dongwoo Optron would like to thank all its loyal customers and new customers.

C.E. O

Richard Lin

1-B. Executive Summary

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DongWoo was founded upon the following three principles;

1.Earnest Hard Work

2.Eagerness for New Challenges

3.Expectation for the Best

To become the Dongwoo Optron today there was one big secret behind our success and it is the Earnest Hard Work. If we were afraid of new challenges, we would have never achieved the goals we set out the first day. Regardless it is a rainy day or a bright sunny day Dongwoo Optron always prepared for tomorrow Expecting the Best. If we ever stopped what we did in the past and what we do today, we would have never achieved the things we have today. With Earnest Hard Work, Eagerness for New Changes, and the Expectation founded upon diligence, Dongwoo Optron will become the leading company in the field of spectroscopy.

All these fancy words and principles will be forgotten unless we constantly remind ourselves where we were and what we wanted to achieve in the first day like we often do with the first love.

C.E. O

Richard Lin

1-C. Management Principles

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Oct/01/1989: Established DongWoo Trading & MfgFeb/1998: Setup YongIn manufacturing plant & Optical System R&D Lab June/1998: First Monochromator development commenced Sep/1998: Joint OTDR development with KERI (2 Years)Nov/1998: Joint development of CCD Camera with Korea Astronomy Observatory Mar/1999: Company reformed to “DongWoo Optron” Limited CompanyJuly/1999: First Spectrometer developed (sold over 230 units domestic and worldwide)Apr/16/2001: Moved into DongWoo headquarter building - present June/2006: Nominated for “Future Export” awardSep/2006: Awarded “Industry & Energy” prize from the Ministry of Commerce Nov/2006: Awarded “President Prize” for excellence in technology Nov/2006: Acquired “Info-Biz” certificate from SMBCJan/2007: “Environmental Detection System” and “LIBD” development commenced July/2008: Environment Detection and LIBS systems launched

1-D. Company History

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M&R Nano Technology Co., Ltd.M&R Nano Technology Co., Ltd.

Tuned to your wavelengthTuned to your wavelength

President: Mr. Richard Lin

Capital: US$700K

Turnover (2008): US$10M

Principle Place of Business:

611-5 Maesan-Ri, Opo-Eup,

GwangJu-Si, GyungGi-Do,

South Korea (464-893)

Total Employees: 48 persons

URL: http://www.dwoptron.com

Company Details

1-E. Company Details

77

PresidentPresident

Management Management

PlanningPlanning HRHR AccountingAccounting

Marketing & SalesMarketing & Sales

DomesticDomestic Overseas Overseas

R&DR&D

SystemSystem MechanicalMechanical ElectronicsElectronics SoftwareSoftwareImport & Import &

ExportExport

Optical & Optical &

Bio-Vision Bio-Vision

Systems Systems

Laser & StageLaser & Stage

Systems Systems

ProductionProduction

Production Production

Planning & Planning &

Management Management

Quality Quality

Control Control

/ Assurance / Assurance

Stock ControlStock Control

OverseasOverseas

LogisticsLogistics

ProcurementProcurement

DomesticDomestic

LogisticsLogistics

Total Number of Employees: 48 persons

Organization

1-F. Organizational Structure

88

2. Principles of Photoluminescence

Photoluminescence (abbreviated as PL) is a process in which a substance absorbs photons (electromagnetic radiation) and then re-radiates photons. Quantum mechanically, this can be described as an excitation to a higher energy state and then a return to a lower energy state accompanied by the emission of a photon. This is one of many forms of luminescence (light emission) and is distinguished by photoexcitation (excitation by photons). The period between absorption and emission is typically extremely short, in the order of 10 nanoseconds. Under special circumstances, however, this period can be extended into minutes or hours. which a photon of a particular wavelength is absorbed and an equivalent photon is immediately emitted. This process involves no significant internal energy transitions of the chemical substrate between absorption and emission and is extremely fast, of the order of 10 nanoseconds. Testing or measurement of Photoluminescence can be performed non-descructive and comparatively fast. It is useful in determining composition, contaminants, and chemical-electrical characteristics of a substance under test.

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3. Photoluminescence Measurement

Photoluminescence measurement is a most appropriate method in determining Epi-Wafer doping/coating quality just after MOCVD process in Epi-Wafer production line.

Maple-X 208 allows to rapidly check the quality of Epi-Wafers produced in the production line lot by lot providing all necessary lot based statistic data, and ultimately enables mangers to monitor and optimize MOCVD process effectively.

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Features

Fully Automated with a Robot Arm

Fastest PL mapping speed

Saleable Wafer Size: 2~8 inch

Safety Cautious Design

User-friendly Software and Support

Fully CE Complied & Certified

4. Introduction to Maple-X 208

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Wafer size : 2, 4, 6, 8 inch available 266, 325, 375, 405nm Laser Available Inside two excitation source & out side additional excitation source

available Mapping step resolution : 1.0/2.0/4.0 mm Mapping speed : <30min / 2 inch 24 cassette 2mm step resolution Real time laser power control and monitor Wafer auto loading & unloading by transport robot Thin film thickness measurement by white light source Thickness resolution : 0.25nm Wavelength range : 200~1100nm

4. Introduction to Maple-X 208

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Sample Stage

Rotary Vacuum

Unit

X-Stage

Excitation Laser

PL Signal

Wafer holding stageWafer holding stage Auto loader & alignerAuto loader & aligner

Aligner

Wafer Transfer

Robot

Cassette Loader

Cassette Unloader

Shutter

4. Introduction to Maple-X 208

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S/W Features S/W Features

Peak Lambda, Peak Intensity, FHHMPeak Lambda, Peak Intensity, FHHM

Integrated SignalIntegrated Signal

Coating thickness measurementCoating thickness measurement

Easy recipe controlEasy recipe control

Support of recipe file and recipe editorSupport of recipe file and recipe editor

Support of Susceptor viewer Support of Susceptor viewer

Line Profile and HistogramLine Profile and Histogram

Software for PL Mapping Data Software for PL Mapping Data

4. Introduction to Maple-X 208

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Fully control MOCVD Process

4. Introduction to Maple-X 208

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Quality control and report

4. Introduction to Maple-X 208

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2 Wafer cassette loader

Up to 48ea wafer 2~8 inch Wafer Loading Robot

4. Introduction to Maple-X 208

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5. Comparison

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Speed

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Automation Wafer lot number auto identification Wafer Magazine designed for Mass product Scanning cassette

Speed 2” 25ea 2mm resolution < 15min

Software Self test & diagnostic

6. Scalability

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Description Expected Action

Response Time 1. technical service by Domestic technical engineer 2. Visit to customer site within 24 hours after receipt of service call from Korea.

A/S Plan Stated service- Every 6 months: stated system checked based on a system checking list- Every 12months: precision stated system checked based on a checking list

Emergency service- Emergency defect troubleshoot request: visit to customer site within 24hours- Replacement/repair and calibration within a minute- Operator and Engineer’s vacancy: operation training for new person

Remarks - Maintenance parts control service (actual expense)- Software upgrade free of charge

7. Service Plan

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Thank you very much for your attention!Thank you very much for your attention!

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