High-throughput laser processing using Direct Laser
Interference Patterning
High-throughput laser processing using DLIP
MW – IF – LMO / Nikolai Schröder
Almelo // October 10th, 2019
Slide 2
The CAMP - Center for Advanced Micro-Photonics
Dresden, Saxony, Germany
From basic research to industrial applications
High-throughput laser processing using DLIP
MW – IF – LMO / Nikolai Schröder
Almelo // October 10th, 2019
Slide 3
Nature is inspiring us!
3 µm
Pla
nt
lea
fB
utt
erf
lyB
ug
50 µm
Wa
ter
rep
ell
en
t
Se
lf-c
lean
ing
De
co
rati
ve
fin
ish
An
tib
ac
teri
al
Nature ApplicationSurface
https://www.ecnmag.com/news/2015/08/solar-
cell-research-funded-us-department-energy
Z. Schnepp, Butterfly wings, https://schneppgroup.wordpress.com
Hensel et al., NPG Asia Materials, 5, e37, 2013
Ensikat et al., Beilstein, 2011
10 µm
http://www.muc-con.org/sticker-
maker-online-customize.htm
https://foot<age.framepool.com/de/
editorial/medicine/
High-throughput laser processing using DLIP
MW – IF – LMO / Nikolai Schröder
Almelo // October 10th, 2019
Slide 4
The technologies at the CAMP
Direct Laser Writing (DLW) Direct Laser Interference Patterning (DLIP)
5 – 30 µm 150 nm – 30 µm
Faster micro
fabrication speedSlower micro
fabrication speedEnergy distribution Energy distribution
High-throughput laser processing using DLIP
MW – IF – LMO / Nikolai Schröder
Almelo // October 10th, 2019
Slide 5
How many interference patterns?
Thousands of patterns are possible!
S. Indrišiūnas, B. Voisiat, M. Gedvilas, G. Račiukaitis, Journal of Laser Applications, 29(1), 11501 (2017).
C. Zwahr, B. Voisiat, A. Welle, D. Günther, A.F. Lasagni, Adv. Eng. Mater., 20, 1800160 (2018)
B. Voisiat, C. Zwahr, A. Rank, S. Alamri, A.F. Lasagni, Appl. Surf. Sci., 471 1065–1071 (2019)
Number of
laser beamsPolarization
High-throughput laser processing using DLIP
MW – IF – LMO / Nikolai Schröder
Almelo // October 10th, 2019
Slide 6
Our milestones for customers
Adhesion of cells
Colorful finishing
Self-cleaning1
2
3
4
5
Antibacterial
surfaces
Water repellence
https://blog.marvelapp.com/wp-
content/uploads/2016/09/Design-
is-brand-Car-4.png
http://dreamicus.com/aircraft.html#photo_6
http://www.thestickerprinting.c
om/printing/security-hologram/
https://www.dentistry.co.uk/2018/05/17
/techniques-treatment-first-dental-
implant-procedure/
https://foot<age.framepool.com/de/
editorial/medicine/
…and even more!
High-throughput laser processing using DLIP
MW – IF – LMO / Nikolai Schröder
Almelo // October 10th, 2019
Slide 7
Superhydrophobic properties: water repellence
10 µm
3 µm
High-throughput laser processing using DLIP
MW – IF – LMO / Nikolai Schröder
Almelo // October 10th, 2019
Slide 8
Superhydrophobic properties: self-cleaning
Test of water drops bouncing off the
Fraunhofer IWS treated area prior to
installation on an aircraft
Structured samples bonded and
sealed around the leading edge of
the slat
High-throughput laser processing using DLIP
MW – IF – LMO / Nikolai Schröder
Almelo // October 10th, 2019
Slide 9
Colorful individual finishing
Target image:
High-throughput laser processing using DLIP
MW – IF – LMO / Nikolai Schröder
Almelo // October 10th, 2019
Slide 10
Colorful individual finishing
…and more colorful applications:
© Erich Utsch AG © Erich Utsch AG
High-throughput laser processing using DLIP
MW – IF – LMO / Nikolai Schröder
Almelo // October 10th, 2019
Slide 11
Bio-functional surfaces
Adhesion of cells
DLIP implant State-of-the-art implant
Fluorescence microscopic image after 7 days
10 µm
Implant in jawbone
Anti-bacterial surfaces
Reference 0.5 µm 1.0 µm 5.0 µm
Interference patterns on photo resist (SU-8) with Staphylococcus Epidermidis (Ø 1 µm)
human
cell
culturehttp://www.cae-
wiki.info/wikiplus/images/e
/e7/Infoplaner2010-2-
Seite18-19-Medical-
Dentaurum.pdf
High-throughput laser processing using DLIP
MW – IF – LMO / Nikolai Schröder
Almelo // October 10th, 2019
Slide 12
From lab to fab: DLIP for production
DLIP-High-Speed
▪ High-Speed structuring of large areas
▪ Fixed structure geometry and size
▪ Processing speeds up to 0.36 m²/min (metals) and
0.90 m²/min (polymers)
DLIP-High-flexibility
▪ Individualized surface functionalization
▪ Variable structure geometry and size
▪ Processing speeds up to 1.5 cm²/min (with
translational stages) and 12 cm²/min (with scanner)
IWS, patented
IWS, patented
High-throughput laser processing using DLIP
MW – IF – LMO / Nikolai Schröder
Almelo // October 10th, 2019
Slide 13
Structuring of DC04 steel (frontal and lateral views, real time)
Spatial period: ~ 10 µm
Material: Steel DC04
Wavelength: 1064 nm
Laser power: 180 W
Rep. Rate.: 5 KHz
Stage speed: 0.5 – 1 m/s
Beam shaping: ~ 180 µm x 13 mm
Elongated interference patterning area
IWS, Patented
Throughput: 0.36 – 0.90 m²/min already achieved
From lab to fab: DLIP-High-Speed
High-throughput laser processing using DLIP
MW – IF – LMO / Nikolai Schröder
Almelo // October 10th, 2019
Slide 14
Module DLIP-Head standard
UV, ns, ps
Module DLIP-Head Scanner
UV, ns, ps
Target image:
10 mm
12
mm
From lab to fab: DLIP-High-flexibility
Material: PET
Pulse energy: 10 µJ
Wavelength: 263 nm
Rep. Rate: 1 kHz
Power: < 0.1 W
Spatial period: ~ 2 µm
High-throughput laser processing using DLIP
MW – IF – LMO / Nikolai Schröder
Almelo // October 10th, 2019
Slide 15
Can we be faster?With LAMpAS
High-throughput laser processing using DLIP
MW – IF – LMO / Nikolai Schröder
Almelo // October 10th, 2019
Slide 16
From lab to fab: The European project “LAMpAS”
“Multi-beam high-speed processing” with interference
patterns on large spots delivered to the material surface by
polygon scanners!
Interference
Patterning
Polygon
scanner
High-power
USP laser
Process
control
High resolution multi-
beam processing
High-speed beam
deflection
Ultra-short pulse
laser ablation
In-line monitoring
High-throughput laser processing using DLIP
MW – IF – LMO / Nikolai Schröder
Almelo // October 10th, 2019
Slide 17
How can we help you?
Nikolai Schröder
Technische Universität Dresden - Zeunerbau
George-Bähr-Str. 3c
01069 Dresden, Germany
Phone +49 351 463-34641
Fax +49 351 463-37755
E-Mail [email protected]
High-throughput laser processing using DLIP
MW – IF – LMO / Nikolai Schröder
Almelo // October 10th, 2019
Slide 18
What we can do for us?
Process
development
and integration
Problem definition
& surface function
Topography
design
Surface function
evaluation
High-throughput laser processing using DLIP
MW – IF – LMO / Nikolai Schröder
Almelo // October 10th, 2019
Slide 19
2-Beam Interference
pattern
3-Beam Interference
pattern
( )
sin3=p
( )
sin2=p
Characteristics:
▪ Interference patterns result
when coherent laser beams are
overlapped
▪ Material is locally modified at
interference maxima positions
▪ Spatial period depends on sub-
beam angle (θ) and laser
wavelength (λ)
Limitation:
only periodic structures
but…. (example for p = 1 µm)
1,000,000 individual spots/mm²
SIMULTANEOUSLY
Direct Laser Interference Patterning
High-throughput laser processing using DLIP
MW – IF – LMO / Nikolai Schröder
Almelo // October 10th, 2019
Slide 20
Unfair advantages
▪ Materials: polymers, metals,
ceramics, coatings
▪ Spatial periods: 150 nm to 20-30 µm
▪ Throughput: up to 0.9 m²/min
▪ Surface functions: friction,
antibacterial, biocompatibility
improvement, decoration/ product
protection, electrical resistance
reduction
▪ Treated areas: e.g. cylinders 0.28 m²
(300 mm diameter x 300 mm length)
▪ Complexity: full automatized control
of pattern geometry (2, 3 and 4
beams) and spatial period
Oxides (TCO)
Coatings (ta-C)
10 µm
Pulse durations: fs, ps,
ns laser sources
Wavelength: 266 –
1064 nm (10.6 µm)
Polymers (PS)
Metals (steel)
Metals (Al)
T. Roch, E. Beyer, A. Lasagni, Diamond and Related Materials 2010, Vol. 9, 1472-1477.
A.F. Lasagni, D. Langheinrich, S. Eckhardt, Plastic Research Online 2012, DOI 10.2417/spepro.004281.
J. Berger, T. Roch, S. Correia, J. Eberhardt, A.F. Lasagni, Thin Solid Films, 2016, 612, 342–349.
M. Duarte, A. Lasagni, R. Giovanelli, J. Narciso, E. Louis, F. Mücklich, Advanced Engineering
Materials, 2008, 10, 6, 554-558
S. Milles, B. Voisiat, M. Nitschke, A.F. Lasagni, J. of Mater. Process. Technol, 2019, 270, 142-151
High-throughput laser processing using DLIP
MW – IF – LMO / Nikolai Schröder
Almelo // October 10th, 2019
Slide 21
Superhydrophobic properties: anti-icing
The sampleLet’s freeze it!
-20 °CLet’s drop it!
Refe
rence
DLW
+ D
LIP
textured aluminum surface
21 seconds
9 seconds
High-throughput laser processing using DLIP
MW – IF – LMO / Nikolai Schröder
Almelo // October 10th, 2019
Slide 22
Λ(d) =𝑚𝜆
sin 𝜃𝑖 − sin )θobs2(𝑑
No-Rainbow color
RedOrangeGreenBlue
Variable spatial period
B. Voisiat, W. Wang, M. Holzhey, and A.F. Lasagni: Sci. Reports (accepted for publication).
New optical applications: decorative elements
High-throughput laser processing using DLIP
MW – IF – LMO / Nikolai Schröder
Almelo // October 10th, 2019
Slide 24
This presentation was presented at
EPIC Meeting on High Power Laser Systems 2019
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