+ All Categories
Home > Documents > How does AFM works

How does AFM works

Date post: 02-Apr-2015
Category:
Upload: mehmetpolat2009
View: 207 times
Download: 0 times
Share this document with a friend
36
General concept and defining characteristics of AFM Scanned-proximity probe microscopes provide very high resolution images of various sample properties The atomic force microscope is one of about two dozen types of scanned- proximity probe microscopes. All of these microscopes work by measuring a local property - such as height, optical absorption, or magnetism - with a probe or "tip" placed very close to the sample. The small probe-sample separation (on the order of the instrument's resolution) makes it possible to take measurements over a small area. To acquire an image the microscope raster-scans the probe over the sample while measuring the local property in question. The resulting image resembles an image on a television screen in that both consist of many rows or lines of information placed one above the other. Unlike traditional microscopes, scanned-probe systems do not use lenses, so the size of the probe rather than diffraction effects generally limit their resolution. The atomic force microscope measures topography with a force probe Figure 1. Concept of AFM and the optical lever: (left) a cantilever touching a sample; (right) the optical lever. Scale drawing; the tube scanner measures 24 mm in diameter, while the cantilever is 100 µm long.
Transcript
Page 1: How does AFM works

General concept and defining characteristics of AFM

Scanned-proximity probe microscopes provide very high resolution images of various sample properties

The atomic force microscope is one of about two dozen types of scanned-proximity probe microscopes. All of these microscopes work by measuring a local property - such as height, optical absorption, or magnetism - with a probe or "tip" placed very close to the sample. The small probe-sample separation (on the order of the instrument's resolution) makes it possible to take measurements over a small area. To acquire an image the microscope raster-scans the probe over the sample while measuring the local property in question. The resulting image resembles an image on a television screen in that both consist of many rows or lines of information placed one above the other.

Unlike traditional microscopes, scanned-probe systems do not use lenses, so the size of the probe rather than diffraction effects generally limit their resolution.

The atomic force microscope measures topography with a force probe

Figure 1. Concept of AFM and the optical lever: (left) a cantilever touching a sample; (right) the optical lever. Scale drawing; the tube scanner measures 24 mm in diameter, while the cantilever is 100 µm long.

AFM (figure 1) operates by measuring attractive or repulsive forces between a tip and the sample (Binnig et al., 1986). In its repulsive "contact" mode, the instrument lightly touches a tip at the end of a leaf spring or "cantilever" to the sample. As a raster-scan drags the tip over the sample, some sort of detection apparatus measures the vertical deflection of the cantilever, which indicates the local sample height. Thus, in contact mode the AFM measures hard-sphere repulsion forces between the tip and sample.

Page 2: How does AFM works

In noncontact mode, the AFM derives topographic images from measurements of attractive forces; the tip does not touch the sample (Albrecht et al., 1991). Because it does not allow the imaging of samples under water, I have not used the attractive mode.

AFMs can achieve a resolution of 10 pm, and unlike electron microscopes, can image samples in air and under liquids.

In principle, AFM resembles the record player as well as the stylus profilometer. However, AFM incorporates a number of refinements that enable it to achieve atomic-scale resolution:

Sensitive detection Flexible cantilevers Sharp tips High-resolution tip-sample positioning Force feedback

I describe these refinements below.

Laser beam deflection offers a convenient and sensitive method of measuring cantilever deflection

AFMs can generally measure the vertical deflection of the cantilever with picometer resolution. To achieve this most AFMs today use the optical lever, a device that achieves resolution comparable to an interferometer while remaining inexpensive and easy to use (Meyer et al., 1988; Alexander et al., 1989).

The optical lever (figure 1) operates by reflecting a laser beam off the cantilever. Angular deflection of the cantilever causes a twofold larger angular deflection of the laser beam. The reflected laser beam strikes a position-sensitive photodetector consisting of two side-by-side photodiodes. The difference between the two photodiode signals indicates the position of the laser spot on the detector and thus the angular deflection of the cantilever.

Because the cantilever-to-detector distance generally measures thousands of times the length of the cantilever, the optical lever greatly magnifies motions of the tip. Because of this ~2000-fold magnification optical lever detection can theoretically obtain a noise level of 10-14 m/Hz1/2 Putman et al., 1992). For measuring cantilever deflection, to date only the relatively cumbersome techniques of interferometry and tunneling detection have approached this value.

Page 3: How does AFM works

AFM cantilevers have high flexibility

Figure 2. Schematic illustration of the meaning of "spring constant" as applied to cantilevers. Visualizing the cantilever as a coil spring, its spring constant k directly affects the downward force exerted on the sample.

A high flexibility stylus exerts lower downward forces on the sample, resulting in less distortion and damage while scanning. For this reason AFM cantilevers generally have spring constants of about 0.1 N/m (figure 2). As Paul Hansma points out, a Slinky is about ten times stiffer (1 N/m).

It would take a very long time to image a surface by dragging a Slinky over it (in the configuration of figure 2), because a Slinky cannot respond quickly as it passes over features. That is, a Slinky has a low resonant frequency, but an AFM cantilever should have a high resonant frequency.

The equation for the resonant frequency of a spring:

shows that a cantilever can have both low spring constant and high resonant frequency if it has a small mass. Therefore AFM cantilevers tend to be very small. Commercial vendors manufacture almost all AFM cantilevers by microlithography processes similar to those used to make computer chips. The Park Scientific Instruments cantilevers in figure 3 measure 100 µm in length and consist of silicon oxynitride with a thin coating of gold for reflectivity.

Page 4: How does AFM works

Micromachining techniques produce inexpensive, reasonably sharp tips

Figure 3. Electron micrograph of two 100 µm long V-shaped cantilevers (by Jean-Paul Revel, Caltech; cantilevers from Park Scientific Instruments, Sunnyvale, CA).

a b c

Figure 4. Three common types of AFM tip. (a) normal tip (3 µm tall); (b) supertip; (c) Ultralever (also 3 µm tall). Electron micrographs by Jean-Paul Revel, Caltech. Tips from Park Scientific Instruments; supertip made by Jean-Paul Revel.

Most users purchase AFM cantilevers with their attached tips from commercial vendors, who manufacture the tips with a variety of microlithographic techniques.

A close enough inspection of any AFM tip reveals that it is rounded off. Therefore force microscopists generally evaluate tips by determining their "end radius." In combination with tip-sample interaction effects, this end radius generally limits the resolution of AFM. As such, the development of sharper tips is currently a major concern.

Force microscopists generally use one of three types of tip. The "normal tip" (figure 4a; Albrecht et al., 1990) is a 3 µm tall pyramid with ~30 nm end radius. The electron-beam-deposited (EBD) tip or "supertip" (figure 4b; Keller and Chih-Chung, 1992) improves on this with an electron-beam-induced deposit of carbonaceous material made by pointing a normal tip straight into the electron beam of a scanning electron microscope. Especially if the user first contaminates the cantilever with paraffin oil, a supertip will form upon stopping the raster of the electron beam at the apex of the tip for several minutes. The supertip offers a higher aspect ratio (it is long and thin, good for probing pits and crevices) and sometimes a better end radius than the normal tip. Finally, Park Scientific Instruments offers the "Ultralever" (figure 4c), based on an improved microlithography process. Ultralevers offers a moderately high aspect ratio and on occasion a ~10 nm end radius.

Page 5: How does AFM works

Tube piezoceramics position the tip or sample with high resolution

Figure 5. Exploded view of a tube scanner. Applying a voltage to one of the four outer quadrants causes that quadrant to expand and the scanner to tilt away from it (XY movement). A corresponding negative voltage applied to the opposite quadrant doubles the XY range while preventing vertical motion. Applying a voltage to the inner electrode causes the entire tube to expand or contract (Z movement).

Piezoelectric ceramics are a class of materials that expand or contract when in the presence of a voltage gradient or, conversely, create a voltage gradient when forced to expand or contract (Gallego-Juárez, 1989). Piezoceramics make it possible to create three-dimensional positioning devices of arbitrarily high precision. Most scanned-probe microscopes use tube-shaped piezoceramics because they combine a simple one-piece construction with high stability and large scan range. Four electrodes cover the outer surface of the tube, while a single electrode covers the inner surface. Application of voltages to one or more of the electrodes causes the tube to bend or stretch, moving the sample in three dimensions (figure 5).

AFMs use feedback to regulate the force on the sample

Figure 6. The AFM feedback loop. A compensation network (which in my AFM is a computer program) monitors the cantilever deflection and keeps it constant by adjusting the height of the sample (or cantilever).

The presence of a feedback loop is one of the subtler differences between AFMs and older stylus-based instruments such as record players and stylus profilometers. The AFM not only measures the force on the sample but also regulates it, allowing acquisition of images at very low forces.

The feedback loop (figure 6) consists of the tube scanner that controls the height of the entire sample; the cantilever and optical lever, which measures the local height of the sample; and a feedback circuit that attempts to keep the cantilever deflection constant by adjusting the voltage applied to the scanner.

Page 6: How does AFM works

One point of interest: the faster the feedback loop can correct deviations of the cantilever deflection, the faster the AFM can acquire images; therefore, a well-constructed feedback loop is essential to microscope performance. AFM feedback loops tend to have a bandwidth of about 10 kHz, resulting in image acquisition times of about one minute.

Alternative imaging modes

AFMs have two standard imaging modes

Almost all AFMs can measure sample topography in two ways: by recording the feedback output ("Z") or the cantilever deflection ("error"; see figure 6). The sum of these two signals always yields the actual topography, but given a well-adjusted feedback loop, the error signal should be negligible. As described below, AFMs may have alternative imaging modes in addition to these standard modes.

Optical lever AFMs can measure the friction between tip and sample

Figure 7. While topographic imaging uses the up-and-down deflection of the cantilever, friction imaging uses torsional deflection.

Figure 8. 2.5 x 2.5 nm simultaneous topographic and friction image of highly oriented pyrolytic graphic (HOPG). The bumps represent the topographic atomic corrugation, while the coloring reflects the lateral forces on the tip. The scan direction was right to left.

Page 7: How does AFM works

Figure 9. Cross-sectional profile of friction data from above image showing stick-slip behavior.

If the scanner moves the sample perpendicular to the long axis of the cantilever (figure 7), friction between the tip and sample causes the cantilever to twist. A photodetector position-sensitive in two dimensions can distinguish the resulting left-and-right motion of the reflected laser beam from the up-and-down motion caused by topographic variations (Meyer and Amer, 1990).

Therefore, AFMs can measure tip-sample friction while imaging sample topography. Besides serving as an indicator of sample properties, friction (or "lateral force," or "lateral deflection") measurements provide valuable information about the tip-sample interaction.

Figure 8 shows a simultaneous friction and topography image of graphite atoms in which I have plotted the topography image as a three-dimensional projection colored by the friction data. Each bump represents one carbon atom. As the tip moves from right to left, it bumps into an atom and gets stuck behind it. The scanner continues to move and lateral force builds up until the tip slips past the atom and sticks behind the next one. This "stick-slip" behavior creates a characteristic sawtooth waveform in the friction image (figure 9).

AFMs can measure sample elasticity

Figure 10. AFMs can image sample elasticity by pressing the tip into the sample and measuring the resulting cantilever deflection.

Figure 11. 1 x 1 µm simultaneous topography (left) and elasticity (right) images of bovine serum albumen on silicon (sample prepared by Sie-Ting Wong of Abbott Laboratories).

Page 8: How does AFM works

AFM can also image the softness of a sample by pressing the cantilever into it at each point in a scan. The scanner raises the sample or lowers the cantilever by a preset amount, the "modulation amplitude" (usually 1-10 nm). In response, the cantilever deflects an amount dependent on the softness of the sample: the harder the sample, the more the cantilever deflects (figure 10).

Figure 11 shows an image of bovine serum albumen (BSA) on silicon. A number of bumps appear in the topography image, each presumably corresponding to a single BSA molecule. The elasticity image reveals that each of the bumps is soft relative to the silicon substrate, a reasonable result for protein molecules.

AFM and biology

Dull tips and tip-sample interaction forces prevent high-resolution imaging of biological structures

Figure 12. Images 1, 50, and 100 of small collagen fibrils from a sequence of 100 images. Repetitive scanning of the same area progressively detaches the fibrils from the glass substrate, causing distortion in the direction of scanning, left-to-right and top-to-bottom.

The ability of AFM to image at atomic resolution, combined with its ability to image a wide variety of samples under a wide variety of conditions, has created a great deal of interest in applying it to the study of biological structures. Images have appeared in the literature showing DNA, single proteins, structures such as gap junctions, and living cells (for a review see Hoh and Hansma, 1992).

Unfortunately, AFM cannot image all samples at atomic resolution. The end radii of available tips confines atomic resolution to flat, periodic samples such as graphite. In addition, because biological structures are soft, the tip-sample interaction tends to distort or destroy them. Figure 12, for example, shows how forces exerted on small collagen fibrils tend to detach them from the substrate over a period of time, resulting in progressively greater distortion.

A number of companies are attempting to develop sharper tips, primarily by improved microfabrication processes. I have concentrated on investigating the tip-sample interaction with alternative imaging modes.

Page 9: How does AFM works

The meniscus force is the most important influence on the tip-sample interaction force when imaging in air

Figure 13. Force curve taken in air. At Z=0 nm the cantilever pushes down on the tip, and tip and sample are in contact. As Z increases, the cantilever exerts less force and then begins to pull up on the tip (negative force). Eventually the cantilever exerts enough force to pull the tip free of the meniscus (2 nN in this case, an unusually low figure). After this point, only attractive forces affect the cantilever deflection.

When imaging in air, a layer of water condensation and other contamination covers both the tip and sample, forming a meniscus that pulls the two together (Weisenhorn et al., 1989).

"Force curves" showing cantilever deflection as the scanner lowers the sample reveal the attractive meniscus force (figure 13): the cantilever has to exert an upward force to pull the tip free of the meniscus. This force equals the attractive force of the meniscus, usually 10-100 nN.

The great strength of the meniscus makes it the most important influence on the tip-sample interaction. Force microscopists often eliminate the meniscus by completely immersing both tip and sample in water.

Page 10: How does AFM works

References

Albrecht, T.R., Akamine, S., Carver, T.E., and Quate, C.F. (1990) Microfabrication of cantilever styli for the atomic force microscope. J. Vac. Sci. Technol. A 8(4), 3386-3396

Albrecht, T.R., Grütter, P., Horne, D., and Rugar, D. (1991) Frequency modulation detection using high-Q cantilevers for enhanced force microscope sensitivity. J. Appl. Phys. 69(2), 668-673

Alexander, S., Hellemans, L., Marti, O., Schneir, J., Elings, V., Hansma, P.K., Longmiro, M., and Gurley, J. (1989) An atomic-resolution atomic-force microscope implemented using an optical lever. J. Appl. Phys. 65(1), 164-167

Binnig, G., Quate, C.F., and Gerber, Ch. (1986) Atomic force microscope. Phys. Rev. Lett. 56(9), 930-933

Gallego-Juárez, J.A. (1989) Piezoelectric ceramics and ultrasonic transducers. J. Phys. E: Sci. Instrum. 22, 804-816

Hoh, J.H. and Hansma, P.K. (1992) Atomic force microscopy for high-resolution imaging in cell biology. Trends Cell Bio. 2, 208-213

Keller, D.J. and Chih-Chung, C. (1992) Imaging steep, high structures by scanning force microscopy with electron beam deposited tips. Surf. Sci. 268, 333-339

Meyer, G. and Amer, N.M. (1988) Novel optical approach to atomic force microscopy. Appl. Phys. Lett. 53(12), 1045-1047

Meyer, G. and Amer, N.M. (1990) Simultaneous measurement of lateral and normal forces with an optical-beam-deflection atomic force microscope. Appl. Phys. Lett. 57(20), 2089-2091

Putman, C.A.J., De Grooth, B.G., Van Hulst, N.F., and Greve, J. (1992) A detailed analysis of the optical beam deflection technique for use in atomic force microscopy. J. App. Phys. 72(1), 6-12

Weisenhorn, A.L., Hansma, P.K., Albrecht, T.R., and Quate, C.F. (1989) Forces in atomic force microscopy in air and water. Appl. Phys. Lett. 54(26), 2651-2653

The content of this page is reproduced from "The tip-sample interaction in atomic force microscopy and its implications for biological applications ", Ph.D. thesis by David Baselt, California Institute of Technology, Copyright © 1993 by David Baselt.

Page 11: How does AFM works

The Atomic Force Microscope (AFM)

A rich variety of forces can be sensed by atomic force microscopy. In the non-contact mode (of distances greater than 10Å between the tip and the sample surface), Van der Waals, electrostatic, magnetic or capillary forces produce images of topography, whereas in the contact mode, ionic repulsion forces take the leading role. Because its operation does not require a current between the sample surface and the tip, the AFM can move into potential regions inaccessible to the Scanning Tunnelling Microscope (STM) or image fragile samples which would be damaged irreparably by the STM tunnelling current. Insulators, organic materials, biological macromolecules, polymers, ceramics and glasses are some of the many materials which can be imaged in different environments, such as liquids, vacuum, and low temperatures.

The basic objective of the operation of the AFM is to measure the forces (at the atomic level) between a sharp probing tip (which is attached to a cantilever spring) and a sample surface. Images are taken by scanning the sample relative to the probing tip and measuring the deflection of the cantilever as a function of lateral position. Typical spring constants are between 0.001 to 100 N/m andmotions from microns to ~ 0.1Å are measured by the deflection sensor. Typical forces between tip and sample range from 10e-11 to 10e-6N. For comparison the interaction between two covalently bonded atoms is of the order of 10e-9N at separations of ~1Å.Therefore, non-destructive imaging is possible with these small forces [E. Meyer, Prog. Surf. Sci. 41, 3-49, (1992)]

The electromagnetic wavefield in solids and their surfaces plays an equal and complementary role to the electron wavefield, a role emphasised by recent experimental developments. Inverse photoemission observations from STM tips show detailed structure in the visible region of the spectrum having its origin in electromagnetic resonances between tip and the surface. In more conventional inverse photoemission (IPE) experiments, structure is dominated by surface electronic band structure. The same electromagnetic fields are responsible for forces acting at large distances between an AFM tip and the surface (in the non-contact mode). The electromagnetic field comes into its own in nanoscale structures. For atomic scale materials it remains firmly pinned to its origins in the electron charge but,

Page 12: How does AFM works

given more space, develops a dynamics of its own, more properly described by Maxwell's equations than by the Schrodinger equation.

The force can be thought to arise from changes in the zero-point energy of the electromagnetic (EM) wavefield, which are caused by bringing the tip close to the surface. When no observed surface is present, these waves are singly scattered from the tip and escape to infinity. At the proximity of the observed surface, however, the waves are multiply scattered between the tip and the surface, thus modifying the net field, which implies a change in the field energy i.e. a force (fig.2). To calculate it, we need to know the reflection coefficient of the tip and of the surface to incident electromagnetic waves. This is what our theory is set up to do.

We have within our grasp a general formulation of electromagnetic effects in nanostructures based on reflection coefficients. One central theme will be the calculation of dispersion forces (a class of Van der Waals forces), but we can also treat problems of resonance enhanced IPE experiments. Having developed our methods we plan to solve the following problems:

The force-distance law in the AFM, especially with application to lateral resolution as a function of distance. The theory can be formulated in exact parallel to our earlier STM theory with electron reflection coefficients replaced by photon reflection coefficients.

Forces in systems where resonance enhancement is extreme: for example metal tips on rough silver surfaces as in the giant Raman resonance experiment.

The influence of illumination by powerful laser beams on forces in the AFM, especially in highly resonant systems.

Page 13: How does AFM works

In fig.3, the AFM in biology: One rapidly evolving area in scanning force microscopy is the construction of tips to measure specific force interactions in cells. An exciting future development would be the construction of antibody modified tips that could measure or localise antigens on the surface of a cell (by vertical/lateral force detection) or relocate them in the plasma membrane. This would allow one to study the biophysics of molecular interactions and its role in important processes such as signal transduction, the process by which information flows throughout a biological system. Here, an AFM image of living neurons and glia from rat hippocampus [E. Henderson, Prog. Surf. Sci. 46, 1, 39-60 (1994)].

Page 14: How does AFM works

Atomic Force Microscopy

The atomic force microscope (AFM), or scanning force microscope (SFM) was invented in 1986 by Binnig, Quate and Gerber. Like all other scanning probe microscopes, the AFM utilises a sharp probe moving over the surface of a sample in a raster scan. In the case of the AFM, the probe is a tip on the end of a cantilever which bends in response to the force between the tip and the sample.

The first AFM used a scanning tunnelling microscope at the end of the cantilever to detect the bending of the lever, but now most AFMs employ an optical lever technique.

The diagram illustrates how this works; as the cantilever flexes, the light from the laser is reflected onto the split photo-diode. By measuring the difference signal (A-B), changes in the bending of the cantilever can be measured.

Since the Cantilever obeys Hooke's Law for small displacements, the interaction force between the tip and the sample can be found. The movement of the tip or sample is performed by an extremely precise positioning device made from piezo-electric ceramics, most often in the form of a tube scanner. The scanner is capable of sub-angstrom resolution in x-, y- and z-directions. The z-axis is conventionally perpendicular to the sample.

We like to think that the AFM is like a record player, but maybe you don't.

Feedback operation

The AFM can be operated in two principal modes with feedback control without feedback control

If the electronic feedback is switched on, then the positioning piezo which is moving the sample (or tip) up and down can respond to any changes in force which are detected, and alter the tip-sample separation to restore the force to a pre-determined value. This mode of operation is known as constant force, and usually enables a fairly faithful topographical image to be obtained (hence the alternative name, height mode).

Page 15: How does AFM works

If the feedback electronics are switched off, then the microscope is said to be operating in constant height or deflection mode. This is particularly useful for imaging very flat samples at high resolution. Often it is best to have a small amount of feedback-loop gain, to avoid problems with thermal drift or the possibility of a rough sample damaging the tip and/or cantilever. Strictly, this should then be called error signal mode.

The error signal mode may also be displayed whilst feedback is switched on; this image will remove slow variations in topography but highlight the edges of features.

Tip-sample interaction

The way in which image contrast is obtained can be achieved in many ways. The three main classes of interaction are contact mode, tapping mode and non-contact mode. 

Contact mode is the most common method of operation of the AFM. As the name suggests, the tip and sample remain in close contact as the scanning proceeds. By "contact" we mean in the repulsive regime of the inter-molecular force curve (see figure).

The repulsive region of the curve lies above the x-axis.

One of the drawbacks of remaining in contact with the sample is that there exist large lateral forces on the sample as the drip is "dragged" over the specimen.

Tapping mode is the next most common mode used in AFM. When operated in air or other gases, the cantilever is oscillated at its resonant frequency (often hundreds of kilohertz) and positioned above the surface so that it only taps the surface for a very small fraction of its oscillation period. This is still contact with the sample in the sense defined earlier, but the very short time over which this contact occurs means that lateral forces are dramatically reduced as the tip scans over the surface. When imaging poorly immobilised or soft samples, tapping mode may be a far better choice than contact mode for imaging.

Other (more interesting) methods of obtaining image contrast are also possible with tapping mode. In constant force mode, the feedback loop adjusts so that the amplitude of the cantilever oscillation remains (nearly) constant. An image can be formed from this amplitude signal, as there will be small variations in this oscillation amplitude due to the control electronics not responding instantaneously to changes on the specimen surface.

More recently, there has been much interest in phase imaging. This works by measuring the phase difference between the oscillations of the cantilever driving piezo and the detected oscillations. It is thought that image contrast is derived from image properties such as stiffness and viscoelasticiy. Digital Instruments has an application note on this topic.

Page 16: How does AFM works

Non-contact operation is another method which may be employed when imaging by AFM. The cantilever must be oscillated above the surface of the sample at such a distance that we are no longer in the repulsive regime of the inter-molecular force curve. This is a very difficult mode to operate in ambient conditions with the AFM. The thin layer of water contamination which exists on the surface on the sample will invariably form a small capillary bridge between the tip and the sample and cause the tip to "jump-to-contact".

Even under liquids and in vacuum, jump-to-contact is extremely likely, and imaging is most probably occuring using tapping mode.

A different geometry is possible using the shear-force microscope (SHFM), and here true non-contact operation is possible.

Lift mode

Several techniques in AFM rely on removing topographical information from some other signal. Magnetic force imaging and Electostatic force imaging work by first determining the topography along a scan line, and then lifting a pre-determined distance above the surface to re-trace the line following the contour of the surface.

In this way, the tip-sample distance should be unaffected by topography, and an image can be built up by recording changes which occur due to longer range force interactions, such as magnetic forces.

Shown above are the height(left) and magnetic force(right) images of a 100 µm piece of floppy disc (T.J. McMaster et al.)

Click on either image to see a larger, more detailed version.

Image display

Height image data obtained by the AFM is three-dimensional. The usual method for displaying the data is to use a colour mapping for height, for example black for low features and white for high features. A popular choice of colour scheme is shown on the left.

Page 17: How does AFM works

Similar colour mappings can be used for non-topographical information such as phase or potential.

Tip effects

One of the most important factors influencing the resolution which may be achieved with an AFM is the sharpness of the scanning tip. The first tips used by the inventors of the AFM were made by glueing diamond onto pieces of aluminium foil. Commercially fabricated probes are now universally used. The best tips may have a radius of curvature of only around 5nm. The need for sharp tips is normally explained in terms of tip convolution. This term is often used (slightly incorrectly) to group together any influence which the tip has on the image. The main influences are

broadening compression interaction forces aspect ratio

Tip broadening arises when the radius of curvature of the tip is comparable with, or greater than, the size of the feature trying to be imaged. The diagram illustrates this problem; as the tip scans over the specimen, the sides of the tip make contact before the apex, and the microscope begins to respond to the feature. This is what we may call tip convolution.

Compression occurs when the tip is over the feature trying to be imaged. It is difficult to determine in many cases how important this affect is, but studies on some soft biological polymers (such as DNA) have shown the apparent DNA width to be a function of imaging force. It should be born in mind that although the force between the tip and sample may only be nN, the pressure may be MPa.

Interaction forces between the tip and sample are the reason for image contrast with the AFM. However, some changes which may be perceived as being topographical, may be due to a change in force interaction. Forces due to the chemical nature of the tip are probably most important here, and selection of a particular tip for its material can be important. Chemical mapping using specially treated or modified tips is another important aspect of current research in SPM.

The aspect ratio (or cone angle) of a particular tip is crucial when imaging steep sloped features. Electron beam deposited tips have been used to image steep-walled features far more faithfully than can be achieved with the common pyramidal tips. This effect has been shown very clearly in experiments on the degradation of starch granules by enzymes in the AFM.

Lateral Force Microscopy

Page 18: How does AFM works

The earlier discussion of the way in which the bending of the cantilever is detected considered the use of a laser and a split photo-diode. Lateral force microscopy (LFM) uses a 4-segment (or quadrant) photo-diode to enable measurement of the torsion of the cantilever as well.

As the cantilever is scanned over the specimen surface (with the cantilever now scanning with its long axis perpendicular to the fast scan direction), variations in friction between the tip and sample will cause the tip to slick / slip during its scan, resulting in twisting of the cantilever.

Chemical force microscopy combines LFM with treatments to the tip to customise its interaction with the sample.

This site is maintained by Andy Round H.H. Wills Physics Laboratory, University of Bristol, Bristol, BS8 1TL, UK Site history

Page 19: How does AFM works

History & Development of SPM

1. History & Development of SPM (1)

1981: SPM developed

Dr. Gerd K. Binnig and Dr. Heinrich Rohrer of IBM Zurich Research Laboratory successfully conduct the

world's first STM (Scanning Tunneling Microscope) atomic image observation (Si 7x7 structure).

STM atomic image of Si (7 x 7)

1985: AFM developed

Developed by Dr. Binnig of IBM Zurich Research Lab and Dr. Calvin F. Quate of Stanford University

2. History & Development of SPM (2)

1986: Dr. Binnig and Dr. Rohrer awarded Nobel Physics Prize along with Ernst Ruska, who designed the

first electron microscope.

1986: First atomic image observation (NbSe2) conducted in Japan at the Electrotechnical Laboratory

(technical cooperation/researchers provided by Seiko Instruments Inc.)j

Atomic image of NbSe2

3. History of Seiko Instruments Inc. SPM

1985: Begins STM research and development under supervision of Electrotechnical Laboratory (EL).

1986: Successful atomic image observation (HOPG)

Page 20: How does AFM works

Atomic image of HOPG

1988: STM hits the market

1990: SPI3600 goes on the market

1991: AFM goes on the market

1993: SPI3700 goes on the market

1996: SPI3800 goes on the market

1998: SPI3800N goes on the market

4. SPI Observation Examples

Silicon single atom step

Direct observation of human red blood cell

Page 21: How does AFM works

5. SPM Features

• Simultaneous high-magnification observation of 3-dimensional shape and properties

• Measurements in various environments

• Evolving, cutting edge technology

6. Simultaneous High-Magnification Observation of 3-Dimensional Shape and Properties

Simultaneous observation of magneto-optical disk's 3-dimensional shape and magnetic image

STM atomic image of graphite (20 million fold magnification)

7. Measurements in Various Environments

In solution, vacuum, atmosphere, low temperature, high temperature, humid, electric field, magnetic

field

Page 22: How does AFM works

Observation of living cell in culture (Human lung cancer)

8. Evolving latest technology

•Observation equipment -> observation/analysis equipment -> observation/analysis/processing

equipment

• 3-dimensional shape observation AFM/STM

• Surface property analysis FFM/MFM/KFM/SNOAM

• Processing (Micro manipulation)

 AFM lithography by AFM anodic oxidation (vector scan)

Page 23: How does AFM works

Basic Principles

SPA-400 Multi-Function Unit

Name Multi-Function Unit

Type SPA-400

Overview

The SPA-400 comes standard

with AFM and MFM. Optional

KFM, VE-AFM STM and other

types of measurement can be

performed through easy

cantilever exchange.

Features

• High rigid mechanical design protects against

noise and vibration to achieve stable high-

resolution measurements.

• Module type optical microscope (optional)

simplifies all setup and sample positioning.

• Measurements can be performed easily even

by first time users by utilizing the one-touch

cantilever holder and position monitor for laser

adjustment.

• Various Measurement Modes

• Atomic Force Microscope (AFM)

• DFM Mode (Atmospheric, in liquid)

• Friction Force Microscope (FFM)

• Phase Mode

• Magnetic Force Microscope (MFM)

• Lateral Force Modulation FFM (LM-FFM)

• Electro-chemical Atomic Force Microscope (EC-

AFM)

• Visco-Elasticity Atomic Force Microscope(VE-

AFM)

• Scanning Tunnel Microscope (STM)

• Kelvin Probe Force Microscope (KFM)

• Others

Specifications

Detector System Laser Diode and Quadrant Photo-detecto

Resolution Horizontal 0.2nm, Vertical 0.01nm

Sample Size Maximum 35mmφ x 10mm

Sample Movement Mechanism X-Y Stage (±2.5mm)

Scan Range Standard 20µm, Maximum 150µm (option)

Z Coarse Stroke 10mm

1. STM (Scanning Tunneling Microscope)

Page 24: How does AFM works

Surface electron state/shape observation

2. STM Principle

STM Principle

3. AFM (Contact Mode)

Basic of form observation

4. AFM Principle

AFM Principle

5.DFM (Dynamic Force Mode)

Page 25: How does AFM works

Measurement mode suitable for various samples

6. DFM Principle.

Structure of equipment

Page 26: How does AFM works

1Multiple Function Principle & Applications

1. FFM & LM-FFM

Sample: oil film on polystyrene sheet

Topographyi5μmj� � FFM LM-FFM

2.Micro Viscoelasticity AFM (VE-AFM)

Sample: Oil film on polyethylene sheet

Topography (10μm) Hard(light area):

polystyrene

VE-AFM Soft (dark area): oil film

Page 27: How does AFM works
Page 28: How does AFM works

3. Surface Potential Measurement

•An SPM that capture the surface potential that does not appear in the surface shape to an image

• Measures the samplefs surface potential using the static electricity between the probe and the

sample.

Surface Potential Measurement

4. KFM Measurement Example (1)

Electric potential difference between area oxidized by electric-field enhancement and area naturally

oxidized on metallic thin film

5. Environment Control SPM (SPA-300HV)

1. Various environment control possible.

• Vacuum: up to 10-7Torr

• Program temperature -120 to +800 oC

• Gas exchange in chamber possible

2. Multi-Function Compatibility

• The same multi-function measurement as atmospheric units, such as micro viscoelasticity

and friction distribution are possible in various environments.

Page 29: How does AFM works

6. SPM in liquid /Electrochemical SPM

Block diagram of Electrochemical STM

Compared to atmospheric STM, STM in solution is covered with liquid that has ion conductivity. The

main distinction between them is the ion current from electrochemical reaction that flows while

voltage is impressed on the probe and the sample. Since it is necessary to conduct SPM observation

while independently controlling the probe and the sample, the device is formed with a four-electrode

system that utilizes a bipotentiostat.

Because the optical lever AFM operates in environments where the detection light filters through, it is

possible to observe samples in solution. High magnification electron microscopes cannot be used to

Page 30: How does AFM works

directly observe samples in solution, but with SPM in liquid, high magnification/on site observations of

raw/live organism samples and samples during reaction process in solution are enabled.

7. Features of Schale Submerged Cell

•Because of the open structure that does not place load on the PZT scanner, constant PZT sensitivity

can be maintained.

•Sample/solution exchange can be made easily.

•Since the cell is simply placed, measurement location can be moved up to maximum of about 10mm.

Structure of Shale cell

8. Optical Probe Microscope

Structure of SNOAM


Recommended