Installation Elements Valves - Compass Experiment in...

Valves

www.pfeiffer-vacuum.net

Installation

Elements Valves

Ventile_E.indd 2 19.08.2008 8:16:29 Uhr

www.pfeiffer-vacuum.netPage 674

Fussleiste Englisch.indd 674 14.08.2008 12:46:53 Uhr


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Valv

es

Page

Valves

Selection aid

Innovative Valves

Angle valves Manually actuated, AVC, EVB Electropneumatically AVC, EVB

Pneumatically, AVC, EVB

Electropneumatically, AVC

Solenoid actuated, AVC, EVC

Inline valves

Manually actuated, DVC Electropneumatically, DVC Pneumatically, DVC

Electropneumatically, DVC

Gate Valves Manually actuated, SVV Electropneumatically, SVV

Bellows-sealed gate valves Manually actuated, SVV Electropneumatically, SVV

Mini angle valves Manually actuated, EVI Solenoid actuated, EVI

Electropneumatically, EVI

Mini inline valves

Solenoid actuated

Special Valves

All-metal angle valves, UVH

Venting valve, manually actuated, FVB

Pressure relief valve, AVA

Coarse gas dosing valve, EVD Gas dosing/shut-off valve, EVN

Overview gas dosing systems

Regulating valve, EVR 116 Regulating valve, RME 005 A Gas dosing system control unit, RVC 300 Gas dosing system interface, IF 200

All-metal gas dosing valve

All-metal regulating valve, UDV

Control unit, RVG 050 C


www.pfeiffer-vacuum.net Page 675



Valves

Selection aid

Available

DN

5 - M

ini

DN

10

DN

16

DN

25

DN

40

DN

63

DN

100

DN

160

DN

200

DN

250

DN

63

DN

100

DN

160

DN

200

DN

250

DN

16

DN

40

DN

63

DN

100

DN

160

DN

200

DN

250

EVI 005 S AVC...SA/SXEVB...SA/SXUVH 016 - UVH 063 VI /CUDVC...SXSVV...HA SVV...HA SVV...HM/HF

EVI 005 /105 P AVC...PA AVC...PX EVB...PA EVB...PXDVC...PXSVV...PA SVV...PA SVV...PM/PF

EVI 005 M EVC 110 M AVC...MA/MX

DVI 005 /205 M

FVB 010 HA/HXAVA 016 X EVD 010 H EVN 116 UDV 040 /046 /146EVR 116 + RME 005 A

Designation NominaldiameterISO-KF

NominaldiameterISO-K

NominaldiameterCF

Type of actuation, Type

Manual

Angle, with bellows feedthrough

Angle, all metal

Inline, with bellows feedthroughGate valve

Bellows-sealed gate valveElectropneumatic

Angle, with bellows feedthrough

Inline, with bellows feedthrough Gate valve

Bellows-sealed gate valve Electromagnetic

Angle, without vacuum feedthrough

Angle, with bellows feedthroughInline,without vacuum feedthroughSpecial valves

Venting valve, manually operatedPressure relief valve Rough gas and dosing valve Gas dosing/shut-off valveAll metal regulating valveGas dosing system regulating valve

NominaldiameterISO-F

Installation

Elements




Innovative Valves

Series at a glance

The Pfeiffer Vacuum product portfolio includes various types of valves in a wide variety of versions, e.g. manually, electropneumatically or electromagnetically actuated, for shut-off, venting and dosing applications.


Electromagnetically, electropneumatically and

manually actuated!

Valv

es





The following series are available: Angle valves Inline valves Gate valves Mini-valves Special valves

Advantages at a glance for angle and inline valves

All in one: Pilot valve and position indicator in one and the same housing, without any additional attachments Drives: Electromagnetically, electropneumatically and manually actuated 1 for 1 replacement for existing Pfeiffer Vacuum valves Robust, insensitive to contamination and suitable for industrial applications Simple maintenance: Only 4 screws need to be removed for cleaning and seal replacement Compressed air connection with standardized components Improved conductivities, differential pressure resistance and cycle times

Model designations

AVC = Angle valveDVC = Inline valve

016–040 = Connection flange 016–040, DN ISO-KF

S = Manually actuatedP = Electropneumatically actuatedM = Electromagnetically actuated

A = Aluminum housingX = Stainless steel housing

Coating Leak detection systems

Installation

Elements Valves




Gas dosing valves

Special Icons in the Dimensions


Manually

Automatic

10 -10 10 - 9 10 - 8 10 -7 10 - 6 10 - 5 10 - 4 10 - 3 10 - 2 10 -1 10 0 101 10 2 103

40 - 1,7005 . 10 - 6 - 1,00010 -10 - 600

5 . 10 - 6 - 1,25010 - 3 - 8510 -10 - 600

Type

EVD 010 HEVN 116UDV 040 / 046

EVR 116 + RVC 300RME 005 A + RVC 300UDV 146 + RVG 050 C

Gas fl ow at an inlet pressure of 1 bar (mbar l / s)

Position sensor connection

Electrical connection

Compressed air connection

Required height

Position indicator

Leak detection bore

Rotatable

Valve seat side

Direction of flow

For mounting

Valv

es




Installation

Valves

Page 680 www.pfeiffer-vacuum.net

elements

Angle

valves

Manually actuated

Flange sizes from

DN 16 ISO-KF to DN 40 ISO-KF

Angle valves

Dimensions

DN

E

A

B

E

D

C

AVC 016 SA AVC 025 SA AVC 040 SA

A 141.3 mm 145.3 mm 186.2 mmB 149.5 mm 155.7 mm 201.4 mmC 39.6 mm 39.6 mm 50 mmD 45 mm 54 mm 69 mmE 40 mm 50 mm 65 mm

AVC 016 SX AVC 025 SX AVC 040 SX

A 143.9 mm 148.7 mm 189.2 mmB 152.1 mm 159.1 mm 204.4 mmC 39.6 mm 39.6 mm 50 mmD 45 mm 54 mm 69 mmE 40 mm 50 mm 65 mm

Manually actuated angle valve

With visual indication of open and closed

positions

Housing material: Aluminum

Service life: 10000 operating cycles

AVC = Angle valve with bellows feedthroughSA = Manually actuated, aluminum housing SX = Manually actuated, stainless steel housing

OBJ_DOKU-1147-001.fm Seite 680 Mittwoch, 13. August 2008 8:29 08



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Technical data AVC 016 SA

AVC 016 SX

AVC 025 SA

AVC 025 SX

AVC 040 SA

AVC 040 SX

Flange (in) DN 16 ISO-KF DN 25 ISO-KF DN 40 ISO-KFFlange (out) DN 16 ISO-KF DN 25 ISO-KF DN 40 ISO-KFActuator Rotary knob Rotary knob Rotary knobBakeout temperature: actuator 50 °C 50 °C 50 °CTightness 1·10-9 mbar l/s 1·10-9 mbar l/s 1·10-9 mbar l/sSeal FPM FPM FPMDifferential pressure in opening direction 2 bar 2 bar 1.5 barDifferential pressure in closing direction 4 bar 4 bar 2 barPressure max. 2 bar 2 bar 1.5 barPressure min. 1·10-8 mbar 1·10-8 mbar 1·10-8 mbarFeedthrough Bellows,

stainless steelBellows, stainless steel

Bellows, stainless steel

Conductance for molecular flow 5 l/s 14 l/s 45 l/sService life 10000 cycles 10000 cycles 10000 cycles

AVC 016 SA AVC 025 SA AVC 040 SA

Bakeout temperature: housing 80 °C 80 °C 80 °CHousing Aluminum Aluminum AluminumWeight 0.31 kg 0.42 kg 0.85 kgOrder number PF A31 003 PF A41 003 PF A51 003

AVC 016 SX AVC 025 SX AVC 040 SX

Bakeout temperature: housing 150 °C 150 °C 150 °CHousing Stainless steel Stainless steel Stainless steelWeight 0.34 kg 0.49 kg 0.96 kgOrder number PF A31 033 PF A41 033 PF A51 033




Installation

Valves


elements

Angle

valves

Manually actuated

Flange sizes from

DN 63 ISO-K to DN 100 ISO-K

Angle valves

Dimensions

EVB 063 SA EVB 100 SA

A 266 mm 320 mmB 124 mm 164 mmC 150 mm 190 mmD 88 mm 108 mmE 20 mm 25 mm

EVB 063 SX EVB 100 SX


Spindle drive with handwheel

Continuous opening

Housing material: Aluminum


EVB = Angle valve with bellows feedthroughSA = Manually actuated, aluminum housing SX = Manually actuated, stainless steel housing




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Technical data EVB 063 SA

EVB 063 SX

EVB 100 SA

EVB 100 SX

Flange (in) DN 63 ISO-K DN 100 ISO-KFlange (out) DN 63 ISO-K DN 100 ISO-KActuator Spindle SpindleBakeout temperature: actuator 60 °C 60 °CBakeout temperature: housing 150 °C 150 °CTightness 1·10-9 mbar l/s 1·10-9 mbar l/sSeal FPM FPMDifferential pressure in opening direction 1.5 bar 1.5 barDifferential pressure in closing direction 1.5 bar 1.5 barPressure max. 1.5 bar 1.5 barPressure min. 1·10-8 mbar 1·10-8 mbarFeedthrough Bellows,


Conductance for molecular flow 140 l/s 330 l/sCan be opened to a pressure difference of 1.5 bar 1.5 barService life 10000 cycles 10000 cycles

EVB 063 SA EVB 100 SA

Housing Aluminum AluminumWeight 3.6 kg 6.1 kgOrder number PF B12 001 PF B22 001

EVB 063 SX EVB 100 SX

Housing Stainless steel Stainless steelWeight 6.5 kg 11.1 kgOrder number PF B12 031 PF B22 031




Installation

Valves


elements

Angle

valves

Electropneumatically actuated, with

position indicator (PI), with pilot valve (PV)

Flange sizes from


Angle valves

Dimensions

DN

DN

¯4

A B C

G

G

FD E

AVC 016 PA AVC 025 PA AVC 040 PA

A 142 mm 146.9 mm 188.8 mmB 112.9 mm 117.8 mm 159.7 mmC 75.1 mm 79 mm 114.9 mmD 55 mm 64.3 mm 81.3 mmE 51.4 mm 60.1 mm 75.7 mmF 93.2 mm 97.8 mm 105.3 mmG 40 mm 50 mm 65 mm

One-box design - All in one: Pilot valve (PV)

and position indicator (PI) in one and the

same housing

Drive: Electropneumatically actuated

Pilot valves from 24 V to 230 V

With integral position indicator

Service life: 10 million operating cycles

Robust, suitable for industrial use and

insensitive to contamination

Simple maintenance

AVC = Angle valve with bellows feedthroughPA = Electropneumatically actuated, aluminum housingPX = Electropneumatically actuated, stainless steel housingAC = Alternating current




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Technical data AVC 016 PA AVC 025 PA AVC 040 PA

Flange (in) DN 16 ISO-KF DN 25 ISO-KF DN 40 ISO-KFFlange (out) DN 16 ISO-KF DN 25 ISO-KF DN 40 ISO-KFBakeout temperature: actuator, pilot valve 50 °C 50 °C 50 °CBakeout temperature: housing 80 °C 80 °C 80 °COperating pressure max. 2 bar 2 bar 2 barOperating pressure min. 1·10-8 mbar 1·10-8 mbar 1·10-8 mbarTightness 1·10-9 mbar l/s 1·10-9 mbar l/s 1·10-9 mbar l/sSeal FPM FPM FPMDifferential pressure in opening direction 2 bar 2 bar 2 barDifferential pressure in closing direction 5 bar 5 bar 5 barCompressed air (overpressure) max. 8 bar 8 bar 8 barCompressed air (overpressure) min. 4 bar 4 bar 4 barCompressed air volume 4 cm3 11 cm3 35 cm3

Feedthrough Bellows, stainless steel



Housing Aluminum Aluminum AluminumWeight 0.49 kg 0.68 kg 1.21 kgConductance for molecular flow 5 l/s 14 l/s 45 l/sPower pilot valve 4.8/3.6 VA 4.8/3.6 VA 4.8/3.6 VAOpening time 100 ms 120 ms 260 msClosing time 100 ms 160 ms 540 msService life 10000000 cycles 10000000 cycles 10000000 cyclesElectrical position indicator included included includedElectrical position indicator: Rating 250 V AC /25 VA/

0.1 A; 50 V DC/12.5 W/ 0.25 A

250 V AC /25 VA/ 0.1 A; 50 V DC/12.5 W/ 0.25 A

250 V AC /25 VA/ 0.1 A; 50 V DC/12.5 W/ 0.25 A

Control valve included included included


Supply 24 VAC 24 VAC 24 VACOrder number PF A38 103 PF A48 103 PF A58 103

Supply 24 VDC 24 VDC 24 VDCOrder number PF A38 204 PF A48 204 PF A58 204

Supply 100...115 VAC 100...115 VAC 100...115 VACOrder number PF A38 403 PF A48 403 PF A58 403





Installation

Valves


elements

Angle

valves



Flange sizes from


Angle valves

Dimensions

DN

DN

A

FE

G

B C

G

¯4

AVC 016 PX AVC 025 PX AVC 040 PX

A 144.5 mm 150.3 mm 191.8 mmB 115.4 mm 121.2 mm 162.7 mmC 77.6 mm 82.5 mm 117.9 mmD 55 mm 64.3 mm 81.3 mmE 51.4 mm 60.1 mm 75.7 mmF 93.2 mm 97.8 mm 105.3 mmG 40 mm 50 mm 65 mm



same housing







Simple maintenance

AVC = Angle valve with bellows feedthroughPA = Electropneumatically actuated, aluminum housingPX = Electropneumatically actuated, stainless steel housingAC = Alternating current




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Technical data AVC 016 PX AVC 025 PX AVC 040 PX





Housing Stainless steel Stainless steel Stainless steelWeight 0.52 kg 0.75 kg 1.33 kgConductance for molecular flow 5 l/s 14 l/s 45 l/sPower pilot valve 4.8/3.6 VA 4.8/3.6 VA 4.8/3.6 VAOpening time 100 ms 120 ms 260 msClosing time 100 ms 160 ms 540 msService life 10000000 cycles 10000000 cycles 10000000 cyclesElectrical position indicator included included includedElectrical position indicator: Rating 250 V AC /25 VA/

0.1 A; 50 V DC/12.5 W/ 0.25 A

250 V AC /25 VA/ 0.1 A; 50 V DC/12.5 W/ 0.25 A

250 V AC /25 VA/ 0.1 A; 50 V DC/12.5 W/ 0.25 A



Supply 24 VAC 24 VAC 24 VACOrder number PF A38 133 PF A48 133 PF A58 133

Supply 24 VDC 24 VDC 24 VDCOrder number PF A38 234 PF A48 234 PF A58 234






Installation

Valves


elements

Angle

valves



Flange sizes from DN 63 to DN 160 ISO-K

Angle valves

Dimensions

EVB 063 PA EVB 100 PA EVB 160 PA

A 250 mm 281.5 mm 366 mmB 124 mm 164 mm 215 mmC 168 mm 198 mm 264 mmD 88 mm 108 mm 138 mmE 14 mm 14 mm 14 mm

EVB 063 PX EVB 100 PX




same housing






EVB = Angle valve with bellows feedthroughPA = Electropneumatically actuated, aluminum housingPX = Electropneumatically actuated, stainless steel housing AC = Alternating current




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General technical data EVB 063 PA

EVB 063 PX

EVB 100 PA

EVB 100 PX

EVB 160 PA

Flange (in) DN 63 ISO-K DN 100 ISO-K DN 160 ISO-KFlange (out) DN 63 ISO-K DN 100 ISO-K DN 160 ISO-KBakeout temperature: actuator, pilot valve 60 °C 60 °C 60 °CTightness 1·10-9 mbar l/s 1·10-9 mbar l/s 1·10-9 mbar l/sSeal FPM FPM FPMDifferential pressure in opening direction 1.5 bar 1.5 bar 1.5 barDifferential pressure in closing direction 1.5 bar 1.5 bar 1.5 barPressure max. 4 bar 4 bar 4 barPressure min. 1·10-8 mbar 1·10-8 mbar 1·10-8 mbarCompressed air (overpressure) max. 8 bar 8 bar 8 barCompressed air (overpressure) min. 4 bar 4 bar 4 barCompressed air volume 75 cm3 195 cm3 570 cm3




Housing Aluminum Aluminum AluminumPosition feedback: Load capacity 250 V AC /

0.125 A; 50 V DC / 0.25 A

250 V AC / 0.125 A; 50 V DC / 0.25 A

250 V AC / 0.125 A; 50 V DC / 0.25 A

Conductance for molecular flow 140 l/s 330 l/s 800 l/sPower pilot valve 3.1/2.2 VA 3.1/2.2 VA 3.1/2.2 VACan be opened to a pressure difference of 1.5 bar 1.5 bar 1.5 barOpening time 300 ms 400 ms 600 msClosing time 300 ms 400 ms 650 msService life 1500000 cycles 1500000 cycles 1500000 cyclesElectrical position indicator included included includedControl valve included included included

Technical data EVB 063 PA EVB 100 PA EVB 160 PA

Bakeout temperature: housing 80 °C 80 °C 80 °CWeight 4 kg 6.7 kg 11.4 kg


Supply 24 V AC 24 V AC 24 V ACOrder number PF B18 101 PF B28 101 PF B38 101

Supply 24 V DC 24 V DC 24 V DCOrder number PF B18 201 PF B28 201 PF B38 201

Supply 100-115 V AC 100-115 V AC 100-115 V ACOrder number PF B18 401 PF B28 401 PF B38 401

Supply 200-240 V AC 200-240 V AC 200-240 V ACOrder number PF B18 501 PF B28 501 PF B38 501

Technical data EVB 063 PX EVB 100 PX

Bakeout temperature: housing 150 °C 150 °CWeight 6.8 kg 11.7 kg


Supply 24 V AC 24 V ACOrder number PF B18 131 PF B28 131

Supply 24 V DC 24 V DCOrder number PF B18 231 PF B28 231

Supply 100-115 V AC 100-115 V ACOrder number PF B18 431 PF B28 431

Supply 200-240 V AC 200-240 V ACOrder number PF B18 531 PF B28 531




Installation

Valves


elements

Angle

valves

Pneumatically actuated, with position

indicator (PI), without pilot valve (PV)

Flange sizes from


Angle valves

Dimensions

DN

DN

A

FE

G

B C

G

¯4


A 142 mm 146.9 mm 188.8 mmB 112.9 mm 117.8 mm 159.7 mmC 75.1 mm 79 mm 114.9 mmD 55 mm 64.3 mm 81.3 mmE 51.4 mm 60,1 mm 75.7 mmF 93.2 mm 97.8 mm 105.3 mmG 40 mm 50 mm 65 mm


A 144.5 mm 150.3 mm 191.8 mmB 115.4 mm 121.2 mm 162.2 mmC 77.6 mm 82.5 mm 117.9 mmD 55 mm 64.3 mm 81.3 mmE 51.4 mm 60,1 mm 75.7 mmF 93.2 mm 97.8 mm 105.3 mmG 40 mm 50 mm 65 mm

One-box design - All in one: With position

indicator in one and the same housing

Drive: Pneumatically actuated

Without pilot valve





Simple maintenance

AVC = Angle valve with bellows feedthroughPA = Pneumatically actuated, aluminum housingPX= Pneumatically actuated, stainless steel housing




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Technical data AVC 016 PA

AVC 016 PX

AVC 025 PA

AVC 025 PX

AVC 040 PA

AVC 040 PX

Flange (in) DN 16 ISO-KF DN 25 ISO-KF DN 40 ISO-KFFlange (out) DN 16 ISO-KF DN 25 ISO-KF DN 40 ISO-KFBakeout temperature: actuator, pilot valve 50 °C 50 °C 50 °COperating pressure max. 2 bar 2 bar 2 barOperating pressure min. 1·10-8 mbar 1·10-8 mbar 1·10-8 mbarTightness 1·10-9 mbar l/s 1·10-9 mbar l/s 1·10-9 mbar l/sSeal FPM FPM FPMDifferential pressure in opening direction 2 bar 2 bar 2 barDifferential pressure in closing direction 5 bar 5 bar 5 barCompressed air (overpressure) max. 8 bar 8 bar 8 barCompressed air (overpressure) min. 4 bar 4 bar 4 barCompressed air volume 4 cm3 11 cm3 35 cm3




Conductance for molecular flow 5 l/s 14 l/s 45 l/sOpening time 100 ms 120 ms 260 msClosing time 100 ms 160 ms 540 msService life 10000000 cycles 10000000 cycles 10000000 cyclesElectrical position indicator included included includedElectrical position indicator: Rating 250 V AC /25 VA/

0.1 A; 50 V DC/12.5 W/ 0.25 A

250 V AC /25 VA/ 0.1 A; 50 V DC/12.5 W/ 0.25 A

250 V AC /25 VA/ 0.1 A; 50 V DC/12.5 W/ 0.25 A

Control valve without without without








Installation

Valves


elements

Angle

valves



Flange sizes from

DN 63 ISO-K to DN 160 ISO-K

Angle valves

Dimensions


A 250 mm 282 mm 366 mmB 124 mm 164 mm 215 mmC 168 mm 208 mm 264 mmD 88 mm 108 mm 138 mmE 14 mm 14 mm 14 mm









EVB = Angle valve with bellows feedthroughPA = Pneumatically actuated, aluminum housingPX = Pneumatically actuated, stainless steel housing




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Technical data EVB 063 PA

EVB 063 PX

EVB 100 PA

EVB 100 PX

EVB 160 PA

Flange (in) DN 63 ISO-K DN 100 ISO-K DN 160 ISO-KFlange (out) DN 63 ISO-K DN 100 ISO-K DN 160 ISO-KBakeout temperature: actuator, pilot valve 60 °C 60 °C 60 °CTightness 1·10-9 mbar l/s 1·10-9 mbar l/s 1·10-9 mbar l/sSeal FPM FPM seal FPMDifferential pressure in opening direction 1.5 bar 1.5 bar 1.5 barDifferential pressure in closing direction 1.5 bar 1.5 bar 1.5 barPressure max. 4 bar 4 bar 4 barPressure min. 1·10-8 mbar 1·10-8 mbar 1·10-8 mbarCompressed air (overpressure) max. 8 bar 8 bar 8 barCompressed air (overpressure) min. 4 bar 4 bar 4 barCompressed air volume 75 cm3 195 cm3 570 cm3




Position feedback: Load capacity 250 V AC / 0.125 A; 50 V DC / 0.25 A

250 V AC / 0.125 A; 50 V DC / 0.25 A

250 V AC / 0.125 A; 50 V DC / 0.25 A

Conductance for molecular flow 140 l/s 330 l/s 800 l/sCan be opened to a pressure difference of 1.5 bar 1.5 bar 1.5 barOpening time 300 ms 400 ms 600 msClosing time 300 ms 400 ms 650 msService life 1500000 cycles 1500000 cycles 1500000 cyclesElectrical position indicator included included includedControl valve - - -Supply - - -


Bakeout temperature: housing 80 °C 80 °C 150 °CHousing Aluminum Aluminum AluminumWeight 4 kg 6.7 kg 11.4 kgOrder number PF B16 002 PF B26 002 PF B36 002


Bakeout temperature: housing 150 °C 150 °CHousing Stainless steel Stainless steelWeight 6.8 kg 11.7 kgOrder number PF B16 032 PF B26 032




Installation

Valves


elements

Angle

valves

Pneumatically actuated, without position


Flange sizes from


Angle valves

Dimensions

DN

DN

beigelegtenclosed

ø4


A 100.5 mm 108.5 mm 150.5 mmB 95.7 mm 102.6 mm 144.7 mmC 75.6 mm 80.6 mm 116.6 mmD 40 mm 50 mm 65 mmE 45 mm 54 mm 69 mm


A 103 mm 112 mm 153.5 mmB 98.2 mm 106 mm 147.7 mmC 78.1 mm 84 mm 119.6 mmD 40 mm 50 mm 65 mmE 45 mm 54 mm 69 mm

Drive: pneumatically actuated


Without position indicator (PI)

Without pilot valve (PV)



Simple maintenance

AVC = Angle valve with bellows feedthroughPA = Pneumatically actuated, aluminum housingPX = Pneumatically actuated, stainless steel housing




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AVC 016 PX

AVC 025 PA

AVC 025 PX

AVC 040 PA

AVC 040 PX





Conductance for molecular flow 5 l/s 14 l/s 45 l/sOpening time 100 ms 120 ms 260 msClosing time 100 ms 160 ms 540 msService life 10000000 cycles 10000000 cycles 10000000 cyclesElectrical position indicator - - -Control valve - - -








Installation

Valves


elements

Angle

valves


position indicator (PI), with pilot valve (PV),

normally open

Flange sizes from


Angle valves

Dimensions

DN

DN

A

FE

G

B C

G

¯4


A 142 mm 146.9 mm 188.8 mmB 112.9 mm 117.8 mm 159.7 mmC 75.1 mm 79 mm 114.9 mmD 55 mm 64.3 mm 81.3 mmE 51.4 mm 60.1 mm 75.7 mmF 93.2 mm 97.8 mm 105.3 mmG 40 mm 50 mm 65 mm


A 144.5 mm 150.3 mm 191.8 mmB 115.4 mm 121.2 mm 162.7 mmC 77.6 mm 82.5 mm 117.9 mmD 55 mm 64.3 mm 81.3 mmE 51.4 mm 60.1 mm 75.7 mmF 93.2 mm 97.8 mm 105.3 mmG 40 mm 50 mm 65 mm

Drive: electropneumatically actuated


With position indicator (PI)

With pilot valve (PV)

Normally open (N/O)



Simple maintenance

AVC = Angle valve with bellows feedthroughPA = Electropneumatically actuated, aluminum housingPX = Electropneumatically actuated, stainless steel housing DC = Direct current




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AVC 016 PX

AVC 025 PA

AVC 025 PX

AVC 040 PA

AVC 040 PX





Power pilot valve 2.5 W 2.5 W 2.5 WConductance for molecular flow 5 l/s 14 l/s 45 l/sOpening time 100 ms 120 ms 260 msClosing time 100 ms 160 ms 540 msService life 10000000 cycles 10000000 cycles 10000000 cyclesElectrical position indicator included included includedElectrical position indicator: Rating 250 V AC /25 VA/

0.1 A; 50 V DC/12.5 W/ 0.25 A

250 V AC /25 VA/ 0.1 A; 50 V DC/12.5 W/ 0.25 A

250 V AC /25 VA/ 0.1 A; 50 V DC/12.5 W/ 0.25 A

Control valve included included includedSupply 24 VDC 24 VDC 24 VDC








Installation

Valves


elements

Angle

valves

Solenoid actuated

Flange sizes from


Angle valves

Dimensions

DNA

B C

DN

CD

G

E F

AVC 016 MA AVC 025 MA AVC 040 MA

A 170.9 mm 193 mm 246 mmB 51.4 mm 64.9 mm 92.9 mmC 40 mm 50 mm 65 mmD 96 mm 112,7 mm 139 mmE 86 mm 97.3 mm 119,5 mmF 59 mm 70 mm 90 mmG 10 mm 15.4 mm 19.5 mm

AVC 016 MX AVC 025 MX AVC 040 MX

A 172.9 mm 196,4 mm 249 mmB 53.4 mm 68.3 mm 95.9 mmC 40 mm 50 mm 65 mmD 96 mm 112,7 mm 139 mmE 86 mm 97.3 mm 119,5 mmF 59 mm 70 mm 90 mmG 10 mm 15.4 mm 19.5 mm

Drive: Solenoid actuated

Service life: > 1.5 million operating cycles


insensitive to contaminatio

AVC = Angle valve with bellows feedthrough MA = Solenoid actuated, aluminum housingMX = Solenoid actuated, stainless steel housing




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Technical data AVC 016 MA

AVC 016 MX

AVC 025 MA

AVC 025 MX

AVC 040 MA

AVC 040 MX

Flange (in) DN 16 ISO-KF DN 25 ISO-KF DN 40 ISO-KFFlange (out) DN 16 ISO-KF DN 25 ISO-KF DN 40 ISO-KFPickup/holding power 405 / 8.1 W 416 / 8.3 W 367 / 7,5 WTightness 1·10-9 mbar l/s 1·10-9 mbar l/s 1·10-9 mbar l/sSeal FPM FPM FPMDifferential pressure in opening direction 1.3 bar 1.3 bar 1.3 barDifferential pressure in closing direction 1.3 bar 1.3 bar 1.3 barPressure max. 1.3 bar 1.3 bar 1.3 barPressure min. 1·10-8 mbar 1·10-8 mbar 1·10-8 mbarFeedthrough Bellows,



Mounting orientation any any anyPosition feedback: Load capacity 30 VDC / 0.1 A 30 VDC / 0.1 A 30 VDC / 0.1 AConductance for molecular flow 4 l/s 13 l/s 35 l/sCan be opened to a pressure difference of 1.3 bar 1.3 bar 1.3 barOpening time 100 ms 120 ms 230 msSwitching frequency at 40°C 30 1/min 30 1/min 30 1/minSwitching frequency at 50°C 20 1/min 20 1/min 20 1/minClosing time 220 ms 230 ms 650 msService life 2000000 cycles 2000000 cycles 2000000 cyclesElectrical position indicator included included includedControl voltage 15 - 30 VDC 15 - 30 VDC 15 - 30 VDCControl current 3 - 5 mA 3 - 5 mA 3 - 5 mAAmbient temperature 0...50 °C 0...50 °C 0...50 °CSupply 90...264 V,

47...63 Hz90...264 V, 47...63 Hz

90...264 V, 47...63 Hz

AVC 016 MA AVC 025 MA AVC 040 MA

Housing Aluminum Aluminum AluminumWeight 1.1 kg 1.9 kg 4.3 kgOrder number PF A34 506 PF A44 506 PF A54 506

AVC 016 MX AVC 025 MX AVC 040 MX

Housing Stainless steel Stainless steel Stainless steelWeight 1.2 kg 2 kg 4.4 kgOrder number PF A34 536 PF A44 536 PF A54 536




Installation

Valves


elements

Angle

valves

Solenoid actuated

Flanschgröße DN 10 ISO-KF

Angle valves

Dimensions

30

30

105

60

DN 10 ISO-KF

DN

10

ISO

-KF

42

Drive: Solenoid actuated

Service life: > 1.5 million operating cycles


insensitive to contaminatio

EVC = Angle valve without vacuum feedthrough




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Technical data EVC 110 M

Flange (in) DN 10 ISO-KFFlange (out) DN 10 ISO-KFPickup/holding power 35/15 VABakeout temperature: actuator 80 °CBakeout temperature: housing 150 °CTightness 1·10-9 mbar l/sSeal FPMDifferential pressure in opening direction 1 barDifferential pressure in closing direction 10 barPressure max. 10 barPressure min. 1·10-8 mbarFeedthrough -Housing AluminumWeight 0.46 kgConductance for molecular flow 1 l/sCan be opened to a pressure difference of 2 barOpening time 45 msSwitching frequency 50 rpmClosing time 60 msService life 1500000 cyclesElectrical position indicator -

Supply 24 V, 50/60 HzOrder number PF A23 101

Supply 24 V DCOrder number PF A23 201



Accessories

Centering ring, FPM/ aluminum, DN 10 ISO-KF PF 110 110-T




Installation

Valves


elements

Inline

valves

Manually actuated

Flange sizes from


Inline valves

Dimensions

DN

C

E

F

A

B

DVC 016 SX DVC 025 SX DVC 040 SX

A 125.4 mm 132 mm 166.5 mmB 133.6 mm 142.4 mm 181.7 mmC 39.6 mm 39.6 mm 50 mmD 45 mm 54 mm 69 mmE 80 mm 100 mm 139 mmF 20 mm 31.8 mm 40.8 mm

Manually actuated inline valves

With visual indication of open and closed

positions

Housing material: Stainless steel


DVC = Inline valve with bellows feedthroughSX = Manually actuated, stainless steel housing




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Technical data DVC 016 SX DVC 025 SX DVC 040 SX

Flange (in) DN 16 ISO-KF DN 25 ISO-KF DN 40 ISO-KFFlange (out) DN 16 ISO-KF DN 25 ISO-KF DN 40 ISO-KFActuator Rotary knob Rotary knob Rotary knobBakeout temperature: actuator 50 °C 50 °C 50 °CBakeout temperature: housing 150 °C 150 °C 150 °CTightness 1·10-9 mbar l/s 1·10-9 mbar l/s 1·10-9 mbar l/sSeal FPM FPM FPMDifferential pressure in opening direction 2 bar 2 bar 1.5 barDifferential pressure in closing direction 4 bar 4 bar 2 barPressure max. 2 bar 2 bar 1.5 barPressure min. 1·10-8 mbar 1·10-8 mbar 1·10-8 mbarFeedthrough Bellows,



Housing Stainless steel Stainless steel Stainless steelWeight 0.71 kg 1.09 kg 1.83 kgConductance for molecular flow 2.5 l/s 7 l/s 20 l/sService life 10000 cycles 10000 cycles 10000 cycles

Order number

Inline valves PF D31 033 PF D41 033 PF D51 033




Installation

Valves


elements

Inline

valves



Flange sizes from


Inline valves

Dimensions

DN

A

H

E

F G

B C D

DN

¯4

DVC 016 PX DVC 025 PX DVC 040 PX

A 126.1 mm 133.6 mm 169.1 mmB 97 mm 104.5 mm 140 mmC 59.2 mm 65.7 mm 95.2 mmD 20 mm 31.8 mm 40.8 mmE 80 mm 100 mm 130 mmF 55 mm 64.3 mm 81.3 mmG 51.4 mm 60.1 mm 75.7 mmH 93.2 mm 97.8 mm 105.3 mm



same housing







Simple maintenance

DVC = Inline valve with bellows feedthroughPX = Electropneumatically actuated, stainless steel housingAC = Alternating currentDC = Direct current




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Technical data DVC 016 PX DVC 025 PX DVC 040 PX





Housing Stainless steel Stainless steel Stainless steelWeight 0.89 kg 1.35 kg 2.2 kgConductance for molecular flow 2.5 l/s 7 l/s 20 l/sOpening time 100 ms 120 ms 260 msClosing time 100 ms 160 ms 540 msService life 10000000 cycles 10000000 cycles 10000000 cyclesElectrical position indicator included included includedElectrical position indicator: Rating 250 V AC /25 VA/

0.1 A; 50 V DC/12.5 W/ 0.25 A

250 V AC /25 VA/ 0.1 A; 50 V DC/12.5 W/ 0.25 A

250 V AC /25 VA/ 0.1 A; 50 V DC/12.5 W/ 0.25 A



Supply 24 VAC 24 VAC 24 VACPower pilot valve 4,8/3,6 VA 4,8/3,6 VA 4,8/3,6 VAOrder number PF D38 133 PF D48 133 PF D58 133

Supply 24 VAC 24 VDC 24 VDCPower pilot valve 2.5 W 2.5 W 2.5 WOrder number PF D38 234 PF D48 234 PF D58 234

Supply 100...115 VAC 100...115 VAC 100...115 VACPower pilot valve 4,8/3,6 VA 4,8/3,6 VA 4,8/3,6 VAOrder number PF D38 433 PF D48 433 PF D58 433

Supply 200...230 VAC 200...230 VAC 200...230 VACPower pilot valve 4,8/3,6 VA 4,8/3,6 VA 4,8/3,6 VAOrder number PF D38 533 PF D48 533 PF D58 533




Installation

Valves


elements

Inline

valves



Flange sizes from


Inline valves

Dimensions

DN

A

H

E

F G

B C D

DN

¯4






24 V DC pilot valve included





Simple maintenance

DVC = Inline valve with bellows feedthroughPX = Pneumatically actuated, stainless steel housing




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Housing Stainless steel Stainless steel Stainless steelWeight 0.89 kg 1.35 kg 2.2 kgConductance for molecular flow 2.5 l/s 7 l/s 20 l/sOpening time 100 ms 120 ms 260 msClosing time 100 ms 160 ms 540 msService life 10000000 cycles 10000000 cycles 10000000 cyclesElectrical position indicator included included includedElectrical position indicator: Rating 250 V AC /25 VA/

0.1 A; 50 V DC/12.5 W/ 0.25 A

250 V AC /25 VA/ 0.1 A; 50 V DC/12.5 W/ 0.25 A

250 V AC /25 VA/ 0.1 A; 50 V DC/12.5 W/ 0.25 A

Control valve - - -

Order number





Installation

Valves


elements

Inline

valves


position indicator (PI), with pilot valve (PV),

normally open

Flange sizes from


Inline valves

Dimensions

DN

A

H

E

F G

B C D

DN

¯4






24 V DC pilot valve included





Simple maintenance

DVC = Inline valve with bellows feedthroughPX = Pneumatically actuated, stainless steel housing




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Housing Stainless steel Stainless steel Stainless steelWeight 0.89 kg 1.35 kg 2.2 kgPower pilot valve 2.5 W 2.5 W 2.5 WConductance for molecular flow 2.5 l/s 7 l/s 20 l/sOpening time 100 ms 120 ms 260 msClosing time 100 ms 160 ms 540 msService life 10000000 cycles 10000000 cycles 10000000 cyclesElectrical position indicator included included includedElectrical position indicator: Rating 250 V AC /25 VA/

0.1 A; 50 V DC/12.5 W/ 0.25 A

250 V AC /25 VA/ 0.1 A; 50 V DC/12.5 W/ 0.25 A

250 V AC /25 VA/ 0.1 A; 50 V DC/12.5 W/ 0.25 A

Control valve included included includedSupply 24 VAC 24 VDC 24 VDC

Order number





Installation

Valves


elements

Gate

valves

Manually actuated

Flange sizes from


Gate valves

Dimensions

SVV 016 HA SVV 025 HA SVV 040 HA

2530

30

3

25

40

17.2

1530

25

3739

100

15

DN 16

3230

44

3

32

50

26.2

2440

35

5059

139

22

DN 25

4050

65

3

31

51

41.2

3955

55

8593

208

32.5

DN 40

Compact installation dimensions

A very maintenance-friendly gate valve for

industrial applications

Seal: Linear feedthrough

SVV = Gate valveHA = Manually actuated, aluminum housing




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Technical data SVV 016 HA SVV 025 HA SVV 040 HA

Flange (in) DN 16 ISO-KF DN 25 ISO-KF DN 40 ISO-KFFlange (out) DN 16 ISO-KF DN 25 ISO-KF DN 40 ISO-KFActuator Toggle lever Toggle lever Toggle leverBakeout temperature: actuator 80 °C 80 °C 80 °CBakeout temperature: housing 100 °C 100 °C 100 °CTightness 1·10-9 mbar l/s 1·10-9 mbar l/s 1·10-9 mbar l/sSeal FPM FPM FPMPressure max. 2 bar 2 bar 2 barPressure min. 1·10-7 mbar 1·10-7 mbar 1·10-7 mbarFeedthrough Shaft feedthrough Shaft feedthrough Shaft feedthroughHousing Aluminum Aluminum AluminumWeight 0.4 kg 0.4 kg 0.7 kgConductance for molecular flow 10 l/s 34 l/s 140 l/sCan be opened to a pressure difference of 3·101 mbar 3·101 mbar 3·101 mbarService life 50000 cycles 50000 cycles 50000 cyclesValve plate Stainless steel Stainless steel Stainless steel

Order number

Gate valves PF D31 000 PF D41 000 PF D51 000




Installation

Valves


elements

Gate

valves

Manually actuated

Flange sizes from

DN 63 ISO-F to DN 160 ISO-F

Gate valves

Dimensions

SVV 063 HA SVV 100 HA SVV 160 HA

38

60

77 114

112

136

100

9027

7

DN 63

3

60

4xM8

65130

70

12

65.5

131

110

38

60

77 114

150

191

116

125

365

DN 100

3

60

8xM8

100

165

102

12

83

166

145

65 122

95

70 19258

280

267

547

60

DN 160

5

70

8xM10

150

235

153

16

117.

5237

200





SVV = Gate valveHA = Manually actuated, aluminum housing




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Technical data SVV 063 HA SVV 100 HA SVV 160 HA

Flange (in) DN 63 ISO-F DN 100 ISO-F DN 160 ISO-FFlange (out) DN 63 ISO-F DN 100 ISO-F DN 160 ISO-FActuator Toggle lever Toggle lever Connecting rodBakeout temperature: actuator 80 °C 80 °C 80 °CBakeout temperature: housing 120 °C 120 °C 120 °CTightness 1·10-9 mbar l/s 1·10-9 mbar l/s 1·10-9 mbar l/sSeal FPM FPM FPMPressure max. 1.6 bar 1.6 bar 1.6 barPressure min. 1·10-7 mbar 1·10-7 mbar 1·10-7 mbarFeedthrough Shaft feedthrough Shaft feedthrough Shaft feedthroughHousing Aluminum Aluminum AluminumWeight 3 kg 4.5 kg 9 kgConductance for molecular flow 550 l/s 2000 l/s 6000 l/sCan be opened to a pressure difference of 3·101 mbar 3·101 mbar 3·101 mbarService life 200000 cycles 200000 cycles 100000 cyclesValve plate Stainless steel Stainless steel Stainless steel

Order number

Gate valves PF E11 001 PF E21 001 PF E31 001




Installation

Valves


elements

Gate

valves

Electropneumatically actuated

Flange sizes from


Gate valves

Dimensions

SVV 016 PA SVV 025 PA SVV 040 PA

17.2

15

1539

105

25

30

50

56

30

55

R1/8”

M525

25

40

3

DN 1626

.2

24

2256

136

35

40

50

61

44

60

R1/8"

M532

32

50

3

DN 25

41.2

39

32.5

88

196

55

55

50

65

65

61

R1/8”

M540

31

51

3

DN 40





SVV = Gate valvePA =Electropneumatically actuated, aluminum housing DC = Direct current




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Technical data SVV 016 PA SVV 025 PA SVV 040 PA

Flange (in) DN 16 ISO-KF DN 25 ISO-KF DN 40 ISO-KFFlange (out) DN 16 ISO-KF DN 25 ISO-KF DN 40 ISO-KFActuator Electropneumatic

ally actuatedElectropneumatically actuated


Bakeout temperature: actuator 50 °C 50 °C 50 °CBakeout temperature: housing 100 °C 100 °C 100 °CTightness 1·10-9 mbar l/s 1·10-9 mbar l/s 1·10-9 mbar l/sSeal FPM FPM FPMPressure max. 2 bar 2 bar 2 barPressure min. 1·10-7 mbar 1·10-7 mbar 1·10-7 mbarCompressed air (overpressure) max. 7 bar 7 bar 7 barCompressed air (overpressure) min. 4.5 bar 4.5 bar 4.5 barCompressed air volume 10 cm3 30 cm3 70 cm3

Feedthrough Shaft feedthrough Shaft feedthrough Shaft feedthroughHousing Aluminum Aluminum AluminumWeight 0.8 kg 0.8 kg 1.2 kgPosition feedback: Load capacity 50 V/0.5 A 50 V/0.5 A 50 V/0.5 APower consumption 6 VA 6 VA 6 VAConductance for molecular flow 10 l/s 34 l/s 140 l/sCan be opened to a pressure difference of 3·101 mbar 3·101 mbar 3·101 mbarClosing / opening time 0.5 s 0.8 s 1.1 sService life 50000 cycles 50000 cycles 50000 cyclesValve plate Stainless steel Stainless steel Stainless steel


Supply 24 V DC 24 V DC 24 V DCOrder number PF D38 200 PF D48 200 PF D58 200

Supply 24 V, 50 Hz 24 V, 50 Hz 24 V, 50 HzOrder number PF D38 100 PF D48 100 PF D58 100

Supply 230 V, 50 Hz 230 V, 50 Hz 230 V, 50 HzOrder number PF D38 500 PF D48 500 PF D58 500




Installation

Valves


elements

Gate

valves


Flange sizes from


Gate valve with linear feedthrough

Gate valves

Dimensions


SVV 200 PA SVV 250 PA

59 50

38

60

80

55

112

136

311

351

90

174

DN 63

3

60

4xM8

65130

70

12

65.5

131

110

R1/8”

59 50

38

60

80

55

150

191

366

443

125

211

DN 100

3

60

8xM8

100

165

102

12

83

166

145

R1/8”

R1/8“

65

70

58

57 71.5

192

280

267

547

60

DN 160

5

70

8xM10

150

235

153

16

117.

5

237

200

R1/8“

75

80

66

6276.5

240

363.

532

4.5

688

80

DN 200

5

80

12xM10

200

288

213

16

144

290

260

R1/8“

86

96

76

67 84.5

308

453

390

843

100

DN 250

100

12xM10

261

350

16

175

352

310





SVV = Gate valvePA =Electropneumatically actuated, aluminum housing DC = Direct current




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Technical data SVV 063 PA SVV 100 PA SVV 160 PA SVV 200 PA SVV 250 PA

Flange (in) DN 63 ISO-F DN 100 ISO-F DN 160 ISO-F DN 200 ISO-F DN 250 ISO-FFlange (out) DN 63 ISO-F DN 100 ISO-F DN 160 ISO-F DN 200 ISO-F DN 250 ISO-FActuator Electropneumatic

ally actuatedElectropneumatically actuated




Bakeout temperature: actuator 80 °C 80 °C 50 °C 50 °C 50 °CBakeout temperature: housing 120 °C 120 °C 120 °C 120 °C 120 °CTightness 1·10-9 mbar l/s 1·10-9 mbar l/s 1·10-9 mbar l/s 1·10-9 mbar l/s 1·10-9 mbar l/sSeal FPM FPM FPM FPM FPMPressure max. 1.6 bar 1.6 bar 1.6 bar 1.6 bar 1.2 barPressure min. 1·10-7 mbar 1·10-7 mbar 1·10-7 mbar 1·10-7 mbar 1·10-7 mbarCompressed air (overpressure) max. 7 bar 7 bar 7 bar 7 bar 7 barCompressed air (overpressure) min. 4 bar 4 bar 4 bar 4 bar 4 barCompressed air volume 160 cm3 220 cm3 500 cm3 900 cm3 1500 cm3

Feedthrough Shaft feedthrough Shaft feedthrough Shaft feedthrough Shaft feedthrough Shaft feedthroughHousing Aluminum Aluminum Aluminum Aluminum AluminumWeight 3 kg 4.5 kg 9 kg 18 kg 25 kgPosition feedback: Load capacity 250 V/2 A 250 V/2 A 250 V/5 A 250 V/5 A 250 V/5 APower consumption 5.4 VA 5.4 VA 6 VA 6 VA 6 VAConductance for molecular flow 550 l/s 2,000 l/s 6000 l/s 12000 l/s 22000 l/sCan be opened to a pressure difference of

3·101 mbar 3·101 mbar 3·101 mbar 3·101 mbar 3·101 mbar

Closing / opening time 1.5 s 2 s 2 s 3 s 5 sService life 200000 cycles 200000 cycles 100000 cycles 100000 cycles 100000 cyclesValve plate Stainless steel Stainless steel Stainless steel Stainless steel Stainless steel

SVV 063 PA SVV 100 PA SVV 160 PA SVV 200 PA SVV 250 PA

Supply 24 V DC 24 V DC 24 V DC 24 V DC 24 V DCOrder number PF E18 201 PF E28 201 PF E38 201 PF E48 201 PF E58 201

Supply 24 V, 50 Hz 24 V, 50 Hz 24 V, 50 Hz 24 V, 50 Hz 24 V, 50 HzOrder number PF E18 101 PF E28 101 PF E38 101 PF E48 101 PF E58 101

Supply 230 V, 50 Hz 230 V, 50 Hz 230 V, 50 Hz 230 V, 50 Hz 230 V, 50 HzOrder number PF E18 501 PF E28 501 PF E38 501 PF E48 501 PF E58 501




Installation

Valves


elements

Gate

valves


Flange sizes from


Gate valve with rotary feedthrough

Gate valves

Dimensions

SVV 201 PA SVV 251 PA

SVV 252 PA

158.7

97.7

36 100

8114

7ø

288

ø 2

40

ø 2

13

ø 2

00

50 77

55

27.4

80

sealing surface

100 190

13354

85

304

350

440.

5

40

Ø 3

6

274

148

12x M10, 16 deep

Pg 93pin

Pg 97pin

R 1/8“, 4-7 bar(1/8“ NPT for USA)

Ø 8

7

68

Ø 260

103

304.

4

201

134

36 138

116

98

8117

5

Ø 3

50

Ø 2

90

Ø 2

61

43

100

Sealing surface4x M12

500

150

50

450

570

182

10

356

Ø 1

22

Pg9

7 pin

R 1/8“, 4-7 bar(1/8“ NPT for USA)

752

Ø 310Ø

36

387

12x M10, 16 deep

Pg9

400

130 100 168

12854

201

134

138

98

116

36

8117

5

Ø 3

50

Ø 2

90

Ø 2

61

100

43Sealing surface

100 168

Pg9

7 pin

563

R 1/8“, 4-7 bar(1/8“ NPT for USA)

450

290

Ø 1

22

Ø 310

356

385.5

420

15

182

130

400

12854

50

500

387

150

Pg9

12x M10, 16 deep

4x M12

Ø 3

6

Compact gate valve for process systems,

offering long service life

Seal: Rotary feedthrough for long service

life and low particulate matter generation

SVV = Gate valvePA = Electropneumatically actuated, aluminium housing AC = Alternating currentDC = Direct current




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Technical data SVV 201 PA SVV 251 PA SVV 252 PA

Flange (in) DN 200 ISO-F DN 250 ISO-F DN 250 ISO-FFlange (out) DN 200 ISO-F DN 250 ISO-F DN 250 ISO-FBakeout temperature: actuator 50 °C 50 °C 50 °CBakeout temperature: housing 150 °C 150 °C 150 °CTightness 1·10-9 mbar l/s 1·10-9 mbar l/s 1·10-9 mbar l/sSeal FPM FPM FPMPressure max. 2 bar 1.2 bar 1.2 barPressure min. 1·10-8 mbar 1·10-8 mbar 1·10-8 mbarCompressed air (overpressure) max. 7 bar 7 bar 7 barCompressed air (overpressure) min. 4 bar 4 bar 4 barCompressed air volume 280 cm3 750 cm3 750 cm3

Feedthrough rotary feedthrough

rotary feedthrough

rotary feedthrough

Housing Stainless steel Stainless steel Stainless steel Weight 30 kg 60 kg 60 kgPosition feedback: Load capacity 250 V/5 A 250 V/5 A 250 V/5 APower consumption 3 VA 3 VA 3 VAConductance for molecular flow 12000 l/s 22000 l/s 22000 l/sCan be opened to a pressure difference of 30 mbar 30 mbar 30 mbarClosing / opening time 2.5 s 4 s 4 sService life 200000 cycles 200000 cycles 200000 cyclesValve plate Stainless steel Stainless steel Stainless steel


Supply 24 V DC 24 V DC 24 V DC Order number PF E48 240 PF E58 240 PF E58 250

Supply 24 V, 50 Hz 24 V, 50 Hz 24 V, 50 HzOrder number PF E48 140 PF E58 140 PF E58 150

Supply 230 V, 50 Hz 230 V, 50 Hz 230 V, 50 Hz Order number PF E48 540 PF E58 540 PF E58 550




Installation

Valves


elements

Bellows-

sealed gate

valves

Manually actuated - CF-F

Flange sizes from

DN 40 CF-F to DN 200 CF-F

Bellows-

sealed gate

valves

Dimensions

SVV 040 HM SVV 063 HF SVV 100 HF

SVV 160 HF SVV 200 HF

35 7 76

70

45

16

4072 58.7

6xM

6

8273

198

55

DN 40

42 48.3

5719

218

4

408

18070 77

70

27

83

115

11

112

DN 63

70

8xM8

92.111

3.5

70 77.4

82.5

13 (

„51”

)

7324

718

4

462

22070 77

70

27

83

145

9

142

DN 100

70

16xM8

130.

2

151.

610

0

115.

5

120.

6513

(„5

1”)

9933

618

4

552

29070 77

70

27

83

200

25

192

ø10

DN

160

/200

DN 160

70

20xM8

18120

2.4

150

166

171.

4513

(„5

1”)

125

430

200

660

35090 94

80

35

103

250

38.5

240

ø10

DN

160

/200

DN 200

80

24xM8

253.

220

0

217

222.

313

(„5

1”)

231.8

For UHV applications in industry

and research

Seal: Stainless steel bellows feedthrough

SVV = Gate valveHF/HM = Manually actuated




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Technical data SVV 040 HM SVV 063 HF SVV 100 HF

Flange (in) DN 40 CF-F DN 63 CF-F DN 100 CF-FFlange (out) DN 40 CF-F DN 63 CF-F DN 100 CF-FActuator Hand wheel Hand wheel Hand wheelBakeout temperature: Valve open, under vacuum 250 °C 250 °C 250 °CBakeout temperature: Valve closed 200 °C 200 °C 200 °CTightness: Housing 5·10-10 mbar l/s 5·10-10 mbar l/s 5·10-10 mbar l/sTightness: Valve seat 1·10-9 mbar l/s 1·10-9 mbar l/s 1·10-9 mbar l/sSeal: Housing Metal Metal MetalSeal: Valve seat FPM FPM FPMPressure max. 2 bar 1.6 bar 1.6 barPressure min. 1·10-10 mbar 1·10-10 mbar 1·10-10 mbarFeedthrough Bellows Bellows BellowsHousing Stainless steel Stainless steel Stainless steelWeight 1.5 kg 9 kg 12 kgConductance for molecular flow 220 l/s 600 l/s 1700 l/sCan be opened to a pressure difference of 3·101 mbar 3·101 mbar 3·101 mbarService life 50000 cycles 50000 cycles 50000 cyclesValve plate Stainless steel Stainless steel Stainless steel

Order number

Bellows-sealed gate valves PF F51 031 PF F61 031 PF F71 031

Technical data SVV 160 HF SVV 200 HF

Flange (in) DN 160 CF-F DN 200 CF-FFlange (out) DN 160 CF-F DN 200 CF-FActuator Hand wheel Hand wheelBakeout temperature: Valve open, under vacuum 250 °C 250 °CBakeout temperature: Valve closed 200 °C 200 °CTightness: Housing 5·10-10 mbar l/s 5·10-10 mbar l/sTightness: Valve seat 1·10-9 mbar l/s 1·10-9 mbar l/sSeal: Housing Metal MetalSeal: Valve seat FPM FPMPressure max. 1.6 bar 1.6 barPressure min. 1·10-10 mbar 1·10-10 mbarFeedthrough Bellows BellowsHousing Stainless steel Stainless steelWeight 18 kg 28 kgConductance for molecular flow 6000 l/s 12000 l/sCan be opened to a pressure difference of 3·101 mbar 3·101 mbarService life 50000 cycles 50000 cyclesValve plate Stainless steel Stainless steel

Order number

Bellows-sealed gate valves PF F81 031 PF F91 031




Installation

Valves


elements

Bellows-

sealed gate

valves


Flange sizes from

DN 40 CF-F to DN 250 CF-F

Bellows-

sealed gate

valves

Dimensions

SVV 040 PM SVV 063 PF SVV 100 PF

SVV 160 PF SVV 200 PF SVV 250 PF

closed

48 (1.89”)

R1/8”45

16

35 7 76

32.5

70

68 (2.68”)119 (4.59”)

4072 58.7

42 48.3

6xM

6

82

230

55

DN 40

R1/8”

3.5

(„14

”) D

N 6

3

5719

215

434

618

0

70 145 77

27 112

11

11570

83

DN 63

70

8xM8

92.111

3.5

70 77.4

82.5

13 (

„51”

)

R1/8”

3.5

(„14

”) D

N 1

00

7324

717

141

822

070 145 77

27 142

9

14570

83

DN 100

70

16xM8

130.

2

151.

610

0

115.

5

120.

6513

(„5

1”)

R1/8”

3.5

(„14

”) D

N 1

60

9933

618

752

329

070 145 77

27 192

25

20070

83

ø 1

0 D

N 1

60

DN 160

70

20xM8

18120

2.4

150

166

171.

4513

(„5

1”)

R1/8”

3.5

(„14

”) D

N 2

00

125

430

200

630

35090 155 87

35 240

38.5

25080

103

ø 1

0 D

N 2

00

DN 200

80

24xM8

253.

220

0

217

222.

313

(„5

1”)

231.8

R1/8”

10 (

39")

DN

250

161

560

800

450

240

3xM

10 D

N 2

50

90 155 87

34565

41 322

80

103R1/8“

4xM10

DN 250

100

32xM8

28435

025

4

267

273.

1513

(„5

1”)

For UHV applications in industry

and research

Seal: Stainless steel bellows feedthrough

SVV = Gate valvePM/PF = Electropneumatically actuated DC = Direct current




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General technical data

Actuator Electropneumatically actuated

Bakeout temperature: actuator 200 °CBakeout temperature: Valve open, under vacuum 250 °CBakeout temperature: Valve closed 200 °CTightness: Housing 5·10-10 mbar l/sTightness: Valve seat 1·10-9 mbar l/sSeal: Housing MetalSeal: Valve seat FPMPressure min. 1·10-10 mbarCompressed air (overpressure) max. 7 barFeedthrough BellowsHousing Stainless steelPosition feedback: Load capacity 250 V/5 APower consumption 6 VACan be opened to a pressure difference of 3·101 mbarService life 50000 cyclesValve plate Stainless steel

Technical data SVV 040 PM SVV 063 PF SVV 100 PF

Flange (in) DN 40 CF-F DN 63 CF-F DN 100 CF-FFlange (out) DN 40 CF-F DN 63 CF-F DN 100 CF-FPressure max. 2 bar 1.6 bar 1.6 barCompressed air (overpressure) min. 4.5 bar 4 bar 4 barCompressed air volume 60 cm3 80 cm3 110 cm3

Weight 1.8 kg 9 kg 12 kgConductance for molecular flow 220 l/s 600 l/s 1700 l/sClosing / opening time 0.7 s 1 s 1.2 s

SVV 040 PM SVV 063 PF SVV 100 PF

Supply 24 V DC 24 V DC 24 V DCOrder number PF F58 231 PF F68 231 PF F78 231

Supply 24 V, 50 Hz 24 V, 50 Hz 24 V, 50 HzOrder number PF F58 131 PF F68 131 PF F78 131


Technical data SVV 160 PF SVV 200 PF SVV 250 PF

Flange (in) DN 160 CF-F DN 200 CF-F DN 250 CF-FFlange (out) DN 160 CF-F DN 200 CF-F DN 250 CF-FPressure max. 1.6 bar 1.6 bar 1.2 barCompressed air (overpressure) min. 4 bar 4 bar 5 barCompressed air volume 140 cm3 250 cm3 350 cm3

Weight 18 kg 28 kg 42 kgConductance for molecular flow 6000 l/s 12000 l/s 26000 l/sClosing / opening time 1.5 s 2 s 4 s

SVV 160 PF SVV 200 PF SVV 250 PF

Supply 24 V DC 24 V DC 24 V DCOrder number PF F88 231 PF F98 231 PF F98 241






Installation

Valves


elements

Mini angle

valves

Manually actuated

Mini angle

valves

Dimensions

M14x1

21

8

16

M14

x1

6.5

8

6.5

35

Hu

b =

2

27.5

66.1

For industrial applications

Seal: Bellows

Compact design




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Technical data EVI 005 S

Flange (in) DN 5 mm M14x1Flange (out) DN 5 mm M14x1Bakeout temperature: actuator 70 °CBakeout temperature: housing 150 °CTightness 1·10-9 mbar l/sSeal FPMDifferential pressure in opening direction 4 barDifferential pressure in closing direction 4 barPressure max. 5 barPressure min. 1·10-8 mbarFeedthrough Bellows,

stainless steelHousing Stainless steelWeight 150 gConductance for laminar flow 4 l/sConductance for molecular flow 0.4 l/sCan be opened to a pressure difference of 4 barService life 1500000 cyclesAmbient temperature 5 - 70 ºCValve plate Stainless steel

Order number

Mini angle valves PF H12 031

Accessories

Connection, for ¼" tube O.D. PT 420 913-T

Connection, for 6 mm tube O.D. PT 420 914-T

Connection, DN 10 ISO-KF PT 420 912-T

Dimensions

Tube O.D. 1/4" Tube O.D. 6 mm DN 10 ISO-KF

14.5

OD 1/4"

14.5

OD 6 mm

DN 10 ISO-KF

18




Installation

Valves


elements

Mini angle

valves

Solenoid actuated

Mini angle

valves

Dimensions

M14 x 1

21

26 8

16

M14

x 1

76

300 32

8

0,38 mm2

(AWG 22)

Very long service life, 2 million cycles

Short opening time

Compact design





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Technical data EVI 005 M

Flange (in) DN 5 mm M14x1Flange (out) DN 5 mm M14x1Actuator Stainless steelVersion normally closedBakeout temperature: actuator 120 °CBakeout temperature: housing 150 °CTightness 1·10-9 mbar l/sSeal FPMDifferential pressure in opening direction 1.5 barDifferential pressure in closing direction 5 barPressure max. 10 barPressure min. 1·10-8 mbarFeedthrough -Housing Stainless steelWeight 300 gConductance for laminar flow 3 l/sConductance for molecular flow 0.3 l/sCan be opened to a pressure difference of 1 barSwitching frequency 5 1/sClosing / opening time 7/30 msProtection acc. to DIN 40050 IP 65Service life 2000000 cyclesElectrical position indicator -Ambient temperature 5 - 40 ºCSupply 24 V DCSupply: Power consumption max. 10 W

Order number

Mini angle valves PF H13 231

Accessories




Dimensions


14.5

OD 1/4"

14.5

OD 6 mm

DN 10 ISO-KF

18




Installation

Valves


elements

Mini angle

valves


Mini angle

valves

Dimensions

EVI 005 P EVI 105 P

4

21

8

16

M14

x 1

8

59.5

M14 x 1

20

29

30.5

29

4

21

816

M14

x 1

8

64

M14 x 1

29.5

10.3

0,18 mm2

AWG 24

3.5

29

32300


Short opening time

Compact design


EVI = Mini angle valve with bellows feedthroughP = Electropneumatically actuated




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Technical data EVI 005 P EVI 105 P

Flange (in) DN 5 mm M14x1 DN 5 mm M14x1Flange (out) DN 5 mm M14x1 DN 5 mm M14x1Bakeout temperature: actuator 80 °C 80 °CBakeout temperature: housing 150 °C 150 °CTightness 1·10-9 mbar l/s 1·10-9 mbar l/sSeal FPM FPMDifferential pressure in opening direction 3 bar 3 barDifferential pressure in closing direction 3 bar 3 barPressure max. 4 bar 4 barPressure min. 1·10-8 mbar 1·10-8 mbarCompressed air (overpressure) max. 8 bar 8 barCompressed air (overpressure) min. 4 bar 4 barFeedthrough Bellows,


Housing Stainless steel Stainless steelWeight 200 g 200 gConductance for laminar flow 4 l/s 4 l/sConductance for molecular flow 0.4 l/s 0.4 l/sCan be opened to a pressure difference of 3 bar 3 barSwitching frequency 150 rpm 150 rpmClosing / opening time 35/35 ms 35/35 msProtection acc. to DIN 40050 IP 65 IP 65Service life 5000000 cycles 5000000 cyclesElectrical position indicator - -Control valve - includedAmbient temperature 5 - 80 ºC 5 - 40 ºCSupply - 24 V DCSupply: Power consumption max. - 1 W

Order number

Mini angle valves PF H15 031 PF H17 231

Accessories

Connection, for ¼" tube O.D. PT 420 913-T PT 420 913-T

Connection, for 6 mm tube O.D. PT 420 914-T PT 420 914-T

Connection, DN 10 ISO-KF PT 420 912-T PT 420 912-T

Dimensions


14.5

OD 1/4"

14.5

OD 6 mm

DN 10 ISO-KF

18




Installation

Valves


elements

Mini inline

valves

Solenoid actuated

Mini inline

valves

Dimensions

DVI 005 M DVI 205 M

M14 x 1

25

82

300

8

32

8

M14 x 1

SW19

0,38 mm2

(AWG 22)

M14 x 1

25

82

300

8

32

8

M14 x 1

SW19

0,38 mm2

(AWG 22)


Short opening time

Compact design


DVI = Mini inline valve with bellows feedthroughM = Solenoid actuated




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Technical data DVI 005 M DVI 205 M

Flange (in) DN 5 mm M14x1 DN 5 mm M14x1Flange (out) DN 5 mm M14x1 DN 5 mm M14x1Actuator Stainless steel Stainless steelVersion normally closed normally openBakeout temperature: actuator 120 °C 120 °CBakeout temperature: housing 150 °C 150 °CTightness 1·10-9 mbar l/s 1·10-9 mbar l/sSeal FPM FPMDifferential pressure in opening direction 1.5 bar 2 barDifferential pressure in closing direction 5 bar 4 barPressure max. 10 bar 10 barPressure min. 1·10-8 mbar 1·10-8 mbarFeedthrough - -Housing Stainless steel Stainless steelWeight 300 g 300 gConductance for laminar flow 2 l/s 2 l/sConductance for molecular flow 0.2 l/s 0.2 l/sCan be opened to a pressure difference of 1 bar 4 barSwitching frequency 5 1/s 5 1/sClosing / opening time 7/30 ms 30/10 msProtection acc. to DIN 40050 IP 65 IP 65Service life 2000000 cycles 2000000 cyclesElectrical position indicator - -Ambient temperature 5 - 40 ºC 5 - 40 ºCSupply 24 V DC 24 V DCSupply: Power consumption max. 10 W 10 W

Order number

Mini inline valves PF H13 232 PF H13 233

Accessories

Connection, for ¼" tube O.D. PT 420 913-T PT 420 913-T

Connection, for 6 mm tube O.D. PT 420 914-T PT 420 914-T

Connection, DN 10 ISO-KF PT 420 912-T PT 420 912-T

Dimensions


14.5

OD 1/4"

14.5

OD 6 mm

DN 10 ISO-KF

18




Installation

Valves


elements

All-metal

angle

valvesAll-metal

angle valves

Dimensions

UVH 016 - VI UVH 016 - CU

UVH 016 - VI UVH 040 - VI UVH 063 - VI

A 104.2 mm 150.9 mm 231.2 mmB 38 mm 63 mm 105 mmC 15 mm 27 mm 36 mm

UVH 016 - CU UVH 040 - CU UVH 063 - CU

A 88 mm 140 mm 210 mmB 38 mm 63 mm 105 mmC 15 mm 27 mm 36 mm

For HV and UHV applications

Anti-magnetic materials

UVH = All-metal angle valve CU = Copper seal plate VI = FPM valve plate seal




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Technical data UVH 016 - VI UVH 040 - VI UVH 063 - VI

Flange (in) DN 16 CF-R DN 40 CF-R DN 63 CF-RFlange (out) DN 16 CF-R DN 40 CF-R DN 63 CF-RActuator Hand wheel Hand wheel Hand wheelBakeout temperature: with adjustment knob 80 °C 80 °C 80 °CBakeout temperature: without adjustment knob 180 °C 180 °C 180 °CTightness 1·10-10 mbar l/s 1·10-10 mbar l/s 1·10-10 mbar l/sSeal: Valve plate FPM FPM FPMPressure max. 4 bar 4 bar 4 barPressure min. 1·10-9 mbar 1·10-9 mbar 1·10-9 mbarFeedthrough Bellows,



Housing Stainless steel Stainless steel Stainless steelWeight 0.35 kg 1.8 kg 4.8 kgConductance for molecular flow 3 l/s 38 l/s 100 l/sService life 50000 cycles 50000 cycles 50000 cycles

Order number

All-metal angle valves PF C32 032 PF C52 032 PF C62 032

Technical data UVH 016 - CU UVH 040 - CU UVH 063 - CU

Flange (in) DN 16 CF-R DN 40 CF-R DN 63 CF-RFlange (out) DN 16 CF-R DN 40 CF-R DN 63 CF-RActuator Hand wheel /

Outer hexagonHand wheel / Outer hexagon

Hand wheel / Outer hexagon

Heat up and cool down speed 4 ºC/min 4 ºC/min 2 ºC/minBakeout temperature: with adjustment knob 80 °C 80 °C 80 °CBakeout temperature: without adjustment knob 350 °C 350 °C 350 °CTightness 1·10-12 mbar l/s 1·10-12 mbar l/s 1·10-12 mbar l/sSeal plate Copper Copper CopperPressure max. 4 bar 4 bar 4 barPressure min. 1·10-11 mbar 1·10-11 mbar 1·10-11 mbarFeedthrough Bellows,



Housing Stainless steel Stainless steel Stainless steelWeight 0.4 kg 2 kg 5 kgConductance for molecular flow 3 l/s 38 l/s 100 l/sService life 1000 cycles 1000 cycles 1000 cycles

Order number

All-metal angle valves PF K32 032 PF K52 032 PF K62 032




Installation

Valves


elements

Venting

valves

Manually actuated

Venting

valves

Dimensions

For manually venting small vacuum

chambers

Valve opens and closes easily by loosening/

tightening the screw cap

FVB = Venting valveHA = Manually actuated, aluminum housingHX = Manually actuated, stainless steel housing




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Technical data FVB 010 HA FVB 010 HX

Flange (in) DN 10 ISO-KF DN 10 ISO-KFBakeout temperature 80 °C 120 °CVenting time for 50 l volume 14 s 14 sTightness 1·10-9 mbar l/s 1·10-9 mbar l/sSeal FPM FPMPressure max. 1 bar 1 barPressure min. 1·10-8 mbar 1·10-8 mbarHousing Aluminum Stainless steelWeight 0.1 kg 0.15 kgScrew cap Brass BrassValve plate Aluminum Stainless steel

Order number

Venting valves PF I22 003 PF I22 031




Installation

Valves


elements

Pressure

relief

valves

Pressure relief valve

Pressure

relief valves

Dimensions

Pressure relief valve

Housing material: Stainless steel

Response pressure: 1.2 to 1.5 bar

AVA = Pressure relief valveX = Stainless steel housing




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Technical data AVA 016 X

Flange (in) DN 16 ISO-KFFlange (out) G 1/8"Tightness 1·10-9 mbar l/sSeal FPMDifferential pressure max. 0.5 barDifferential pressure min. 0.2 barFlow rate max. 6 l/minMaterial Housing,

stainless steel

Order number

Pressure relief valve PF I30 032




Installation

Valves


elements

Gas

dosing

valves

Coarse gas dosing valve

Gas dosing

valves

Dimensions

Characteristic

DN 10 ISO-KF

30

32

96

DN 10 ISO-KF

Hu

b 5

.5

30

50

40

Gasfluss [mbar l/s]

0

40

0200 400 600 800 1000 1200 1400 1600 1800

Skalenteile [1 Umdrehung = 12 Skalenteile ]

30

20

10

For slow, manual venting




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Technical data EVD 010 H

Flange (in) DN 10 ISO-KFFlange (out) DN 10 ISO-KFBakeout temperature 100 °CTightness 1·10-8 mbar l/sSeal FPMPressure max. 4 barGas flow max. controllable 1.7·103 mbar l/sGas flow min. controllable 40 mbar l/sHousing AluminumWeight 0.2 kg

Order number

Gas dosing valves PF I22 001




Installation

Valves


elements

Gas

dosing

valves

Gas dosing/shut-off valve

Gas dosing

valves

Dimensions

Characteristic

117.

5

30

DN 16 ISO-KF

30

DN 16 ISO-KF

130

42

Very broad regulating range

Optimum characteristic

Digital position display

Excellent reproducibility

Extremely small dead volume

Integrated shut-off valve




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Technical data EVN 116

Flange (in) DN 16 ISO-KFFlange (out) DN 16 ISO-KFBakeout temperature: flanges 150 °CTightness 1·10-9 mbar l/sSeal FPMDifferential pressure 2.5 barDosing sleeve FluorplastomerGas flow max. controllable 1·103 mbar l/sGas flow min. controllable 5·10-6 mbar l/sHousing/needle/filter Stainless steelWeight 0.4 kgTemperature: Operating 80 ºCDead volume 0.032 cm3

Order number





Installation

Valves


elements

Notes




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Overview gas dosing systems

upstreamregulation

RVC 300

RME 005 A

EVR 116

RVC 300

or

or

IF 200

PC

PLC

CMR 362 PKR 251 TPR 280

process chamber

Example:

ActiveLine Gauges

downstreamregulation forlow gas flows

Regulation valve Control




Installation

Valves


elements

Gas

dosing

valves

Regulating valve EVR 116

Gas dosing

valves

Dimensions

Characteristic

DN 16 ISO-KF

60 60

152

90

30

35

10-6

10-5

10-4

10-3

10-2

10-1

1

10

100

1000

0 1 2 3 4 5 6 7 8 9 10USTG [V]

Gasflow [mbar l/s]

High gas throughput

Very broad regulating range

Resistant to corrosive gases - materials:

Stainless steel / FPM

With integrated motor control electronics




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Technical data EVR 116

Flange (in) DN 16 ISO-KFFlange (out) DN 16 ISO-KFControl RVC 300 or IF 200Bakeout temperature: actuator 60 °CBakeout temperature: housing 80 °CTightness 1·10-9 mbar l/sSeal FPMDosing sleeve FluorplastomerPressure max. 2.5 barPressure min. 1·10-8 mbarGas flow max. controllable 1.25·103 mbar l/sGas flow min. controllable 5·10-6 mbar l/sHousing/needle/filter Stainless steelWeight 0.5 kgControl voltage 0 - 10 V DCClosing / opening time < 3 / 4 sAmbient temperature 5 - 40 ºCSupply: Voltage 24 V DCSupply: Power consumption max. 12 VA

Order number


Accessories

RVC-EVR, connection cable, 3 m PT 583 115-T








Installation

Valves


elements

Gas

dosing

valves

Regulating valve RME 005 A

Gas dosing

valves

Dimensions

Characteristic

6.5

(17)8 8

33

M14

◊1

2.8◊0.5

49

17

AF 17

49

23.5

35

0

1000

2000

3000

4000

5000

6000

0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80

Current (solenoid coil) [mA]

Gas flow [sccm]

Control valve closed

Control valve open

Regulating range

from 0.0017 to 85 mbar l /s

Including connector

Drive: Solenoid

RME = Gas dosing system regulating valve




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Technical data RME 005 A

Flange (in) DN 5 mm M14x1Flange (out) DN 5 mm M14x1Response time < 30 msControl RVC 300Bakeout temperature: actuator, powerless 80 °CTightness 1·10-9 mbar l/sSeal FPMPressure max. 2 barPressure min. 1·10-8 mbarMounting orientation any, preferably

perpendicularDuty cycle (ED) 100 %Housing Stainless steelWeight 96 gControl voltage 0 - 24 V DCAmbient temperature 5 - 50 ºCSupply: Power consumption max. 2.5 W

RME 005 A

Gas flow max. controllable 85 mbar l/sGas flow min. controllable 0.85 mbar l/sOrder number PF I13 931

Gas flow max. controllable 17 mbar l/sGas flow min. controllable 0.17 mbar l/sOrder number PF I13 932

Gas flow max. controllable 8.5 mbar l/sGas flow min. controllable 0.085 mbar l/sOrder number PF I13 933


Gas flow max. controllable 0,8 mbar l/sGas flow min. controllable 0.008 mbar l/sOrder number PF I13 935


Accessories



RVC 300 - RME 005, connection cable, 3 m PT 250 003-T










Installation

Valves


elements

Gas

dosing

valves

RVC 300, gas dosing system control unit

Gas dosing

valves

Dimensions

228.5 3011

103

command edit

RVC 300

821

5.221

106

913.5

MGas

EVR 116control valve

Up-stream control

Vacuumsystem

Campactgauge

Vacuum pump

RVC 300controller

MEVR 116control valve

Down-stream control

Vacuumsystem

Campactgauge

Vacuum pump

RVC 300controller

RVC 300 as a complete solution, with

EVR 116 or RME 005 A regulating valves

Simple operation

Self-explanatory LCD display and function

keys

Analog/digital inputs/outputs and interfaces

Settable PID regulating algorithm

For system manufacturers, as a

supplement to their own control unit




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Technical data RVC 300

Output: Analog 4 channels: Pressure sensor signal/ valve signal (0 - 10 VDC)/ valve position EVR 116/ + 10 VDC reference voltage (10 mA)

Output: Digital 8 channels: Valve closed/ valve open/ valve in position/ valve error/ sensor error/ ready/ emission ON/ sensor status

Input: Analog 2 channels: Pressure setpoint (nominal value)/ flow setpoint (nominal value)

Input: Digital 8 channels: Flow decrease/ flow increase/ external CLOSE/ external OPEN/ flow mode/ pressure mode/ emission ON/ Degas ON

Weight 1.65 kgMains requirement: frequency (range) 50/60 HzMains requirement: power consumption 50 VAMains requirement: voltage (range) 90...250 VControl range APR 250/260: 1 - 1100 mbarControl range CMR 361/271: 1 - 1100 mbarControl range TPR 280: 5·10-4 - 1000 mbarControl range TPR 281: 5·10-4 - 1000 mbarControl range CMR 362/272: 0.1 - 110 mbarControl range CMR 363/273: 1·10-2 - 11 mbarControl range CMR 364/274: 1·10-3 - 1.1 mbarControl range CMR 275: 1·10-4 - 0.11 mbarControl range IKR 251/261: 2·10-9 - 1·10-2 mbarControl range IMR 265: 1·10-6 - 1000 mbarControl range PBR 260: 5·10-10 - 1000 mbarControl range PKR 251/261: 5·10-9 - 1000 mbarInterface: Baud rates 9600 BaudInterface: Type RS-232, RS-485Temperature: Operating 5...50 °CTemperature: Storage -40...60 °C

Order number


Accessories











RME 005 A, regulating range from 0.0017 to 0.17 mbar l/s

PF I13 936


PF I13 935


PF I13 934


PF I13 933

RME 005 A, regulating range from 0.17 to 17mbar l/s

PF I13 932

RME 005 A, regulating range from 0.85 to 85 mbar l/s

PF I13 931

EVR 116, regulating valve PF I39 931




Installation

Valves


elements

Gas

dosing

valves

IF 200, gas dosing system interface

Gas dosing

valves

Dimensions

62

54 18

MEVR 116control valve

Down-stream control

Vacuumsystem

Campactgauge

Vacuum pump

IF 200

PC

GasM

Gas

EVR 116control valve

Up-stream control

Vacuumsystem

Campactgauge

IF 200

PC

Vacuum pump

Simple, cost-effective integration into

systems

Pressure measurement signal must

be prepared by the customer´s system

control unit

For system manufacturers who use their

own control unit




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Technical data IF 200

Connection TerminalsFixation Mounting railWeight 40 gInterface RS-232-CSupply 0.5 ASupply: Voltage 24 V DC

Order number


Accessories

EVR 116, regulating valve PF I39 931




Installation

Valves


elements

All-metal

gas dosing

valves/

-systems

All-metal gas dosing valve

All-metal

gas dosing

valves/

-systems

Dimensions

32.5

85.5

M5

59

DN 40 CF-F

46

98.2

Cajon VCR 1/4"

Minimum dead volume

Operating temperature up to 200 °C

For mass spectrometer applications

Specific routing of gas stream when a

capillary (accessory) is used

UDV = All-metal regulating valve




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Technical data UDV 040 UDV 046

Flange (in) VCR 1/4" DN 16 CF-RFlange (out) DN 40 CF-F DN 40 CF-FActuator manual manualTightness 1·10-11 mbar l/s 1·10-11 mbar l/sPressure max. 30 bar 30 barPressure min. 1·10-11 mbar 1·10-11 mbarGas flow max. 6·102 mbar l/s 6·102 mbar l/sFlow rate min. for: air 1·10-9 mbar l/s 1·10-9 mbar l/sFlow rate min. for: pure gases 1·10-10 mbar l/s 1·10-10 mbar l/sHousing Stainless steel Stainless steelWeight 1.4 kg 1.4 kgConductance for laminar flow 0.7 l/s 0.7 l/sTemperature: Bakeout 450 °C 350 °CTemperature: Operating 200 ºC 200 ºCValve seat Copper CopperValve plate Sapphire Sapphire

Order number

All-metal gas dosing valve PF I52 031 PF I52 035

Accessories

Complete capillary, vacuum side, length 1 m PT 418 976-T PT 418 976-T

Complete capillary, inlet side, length 2 m PT 420 537-T PT 420 537-T

Heater, 200° C PT 420 376-T PT 420 376-T




Installation

Valves


elements

All-metal

gas dosing

valves/

-systems

All-metal regulating valve

All-metal

gas dosing

valves/

-systems

Dimensions

32.5

85.5

M5

50

DN 40 CF-F

46

98.2

DN 16 CF-R

Minimum dead volume

Operating temperature up to 200 °C

For mass spectrometer applications

Specific routing of gas stream when a

capillary (accessory) is used




Ste

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Va

lves

Technical data UDV 146

Flange (in) DN 16 CF-RFlange (out) DN 40 CF-FActuator manual/

thermomechanicTightness 1·10-11 mbar l/sPressure max. 30 barPressure min. 1·10-10 mbarGas flow max. 6·102 mbar l/sFlow rate min. for: air 1·10-9 mbar l/sFlow rate min. for: pure gases 1·10-10 mbar l/sHousing Stainless steelWeight 1.4 kgConductance for molecular flow 0.7 l/sTemperature: Bakeout 350 °CTemperature: Operating 200 ºCValve seat CopperValve plate Sapphire

Order number

All-metal gas dosing valve PF I52 034

Accessories

Complete capillary, vacuum side, length 1 m PT 418 976-T

Complete capillary, inlet side, length 2 m PT 420 537-T

Heater, 200° C PT 420 376-T

RVG 050 C, control unit all-metal gas dosing system, 115/230 V

PF I00 795




Installation

Valves


elements

All-metal

gas dosing

valves/

-systems

Control unit RVG 050 C for UDV 146

All-metal

gas dosing

valves/

-systems

Dimensions

Characteristic

163 3

260

20 20

5.011

100.4

0.50.7A0

91.4

106.3

5.221

5.821

6

16 5.5165.5

3.5

6

For creating a control section in conjunction

with UHV gas dosing valve UDV 146




Ste

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Va

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Technical data RVG 050 C

Output for valve heater: Voltage 20 V DCOutput for valve heater: Current 0.5 AWeight 2.3 kgActual value input: Analog voltage 10 V DCActual value input: Impedance 100 kOhmPower consumption 20 VAMains requirement: voltage (selectable) 115/230 V ACControl range for 1 bar N2, inlet side 1·10-9 -

100 mbar l/sControl characteristic (proportional-integral) PISet point input: External 10 V DCSet point input: Impedance 100 kOhmSet point input: Internal (scale division) 0 - 1000Ambient temperature 5-50 ºCTime contant, adjustable 2 - 30 s

Order number

All-metal gas dosing valve PF I00 795

Accessories

UDV 146, all-metal regulating valve, DN 16 CF-F PF I52 034

RVG-UDV, extension cable, 2 m, 200 ºC PT 519 953-T

RVG-UDV, connection cable, 3 m, 80 ºC PT 519 178-T

RVG-UDV, connection cable, 12 m, 80ºC PT 519 343-T




Date post:	07-Sep-2019
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