Instruction Manual Vapor Delivery Module · Bronkhorst® 9.17.079E Instruction Manual Vapor...

Doc. no.: 9.17.079 rev. E Date: 04-07-2019

ATTENTIONPlease read this document carefully before installing and operating the product.

Not following the guidelines could result in personal injury and/or damage to the equipment.

Vapor Delivery Module

Instruction Manual

Bronkhorst®

Instruction Manual Vapor Delivery Module 9.17.079E2

Copyright

© 2019 Bronkhorst High-Tech B.V.All rights reserved. No part of this publication may be reproduced, distributed, or transmitted in any form or by any means,without the prior written permission of the publisher.

Disclaimer

This document has been reviewed and is believed to be accurate. Bronkhorst High-Tech B.V. does not assume liability forerrors, inaccuracies or absence of information. The material in this document merely serves information and illustrationpurposes; no rights can be derived from its contents.

Bronkhorst High-Tech B.V. reserves the right to modify or improve its products and documentation without informinganyone. The information contained in this document is subject to change without notice. Device specifications and thecontents of the package may deviate from what is stated in this document.

Symbols in this document

Important information. Disregarding this information could increase the risk of damage to the equipment, or the risk ofpersonal injuries.

Helpful information. This information will facilitate the use of the instrument and/or contribute to its optimalperformance.

Additional information available on the internet or from your Bronkhorst representative.

Receipt of equipment

Check the outside packaging box for damage incurred during shipment. If the box is damaged, then the local carrier mustbe notified at once regarding his liability, if so required. At the same time a report should be submitted to your Bronkhorstrepresentative.

Carefully remove the equipment from the box. Verify that the contents of the package was not damaged during shipment.Should the equipment be damaged, then the local carrier must be notified at once regarding his liability, if so required. Atthe same time a report should be submitted to your Bronkhorst representative.

· Check the packing list to ensure that you received all of the items included in the scope of delivery· Do not discard spare or replacement parts with the packaging material

Refer to Removal and return instructions about return shipment procedures.

Equipment storage

The equipment should be stored in its original package in a cupboard warehouse or similar. Care should be taken not tosubject the equipment to excessive temperatures or humidity.

Bronkhorst®

Instruction Manual Vapor Delivery Module9.17.079E 3

Warranty

Bronkhorst® products are warranted against defects in material and workmanship for a period of three years from the dateof shipment, provided they are used in accordance with the ordering specifications and not subject to abuse or physicaldamage. Products that do not operate properly during this period may be repaired or replaced at no charge. Repairs arenormally warranted for one year or the balance of the original warranty, whichever is the longer.

See also section 9 (Guarantee) of the Conditions of sales:www.bronkhorst.com/about/conditions-of-sales/

The warranty includes all initial and latent defects, random failures, and indeterminable internal causes.

It excludes failures and damage caused by the customer, such as contamination, improper electrical hook-up, physical shocketc.

Re-conditioning of products primarily returned for warranty service that is partly or wholly judged non-warranty may becharged for.

Bronkhorst High-Tech B.V. or affiliated company prepays outgoing freight charges when any part of the service isperformed under warranty, unless otherwise agreed upon beforehand, however, if the product has been returned collect toour factory or service center, these costs are added to the repair invoice. Import and/or export charges, foreign shippingmethods/carriers are paid by the customer.

General safety precautions

This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safetyprecautions required to avoid possible injury. Read the operating information carefully before using the product.

Before operating, make sure the line cord is connected to a properly grounded power receptacle. Inspect the connectingcables for cracks or breaks before each use.

The equipment and accessories must be used in accordance with their specifications and operating instructions, otherwisethe safety of the equipment may be impaired.

If required, replace fuses with the same type and rating for continued protection against fire hazard.

Opening the equipment is not allowed. There are no user serviceable parts inside. In case of a defect please return theequipment to Bronkhorst High-Tech B.V.

One or more warning signs may be present on different parts of the product. These signs have the following meaning:

Consult the instruction manual for handling instructions

Surface may get hot during operation

Shock hazard; electrical parts inside

To maintain protection from electric shock and fire, replacement components must be obtained from Bronkhorst. Standardfuses, with applicable national safety approvals, may be used if the rating and type are the same. Other components that arenot safety related may be obtained from other suppliers, as long as they are equivalent to the original component. Selectedparts should be obtained only through Bronkhorst, to maintain accuracy and functionality of the product. If you are unsureabout the relevance of a replacement component, contact your Bronkhorst representative for information.

https://http://www.bronkhorst.com/about/conditions-of-sales/

Bronkhorst®


Bronkhorst®


Table of contents

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7Introduction 1. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71.1 Scope of this manual

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71.2 Intended use

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71.3 Other documents

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9Starting up 2. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92.1 Functional properties

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92.2 Rated pressure test inspection

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92.3 Install module

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92.4 Model key

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10Technical specifications 3. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103.1 Physical dimensions

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103.2 Ambient conditions

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103.3 Ingress protection class

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103.4 Fluid connections

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10Flow ranges of used components 3.4.1

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. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 113.5 Piping

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 113.6 Electrical connections

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11Mains 3.6.1

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11Tracing 3.6.2

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12Pt100 tracing sensor 3.6.3

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12Communication 3.6.4

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12RS232 / ProPar 3.6.4.1

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12FLOW-BUS 3.6.4.2

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12PROFIBUS 3.6.4.3

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12PROFINET 3.6.4.4

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 133.7 Connectors (hook-up diagram)

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15Installation 4. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 154.1 Mounting

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 154.2 Fluid connections

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 154.3 Supply pressure

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 154.4 Leak check

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 154.5 Seals

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 164.6 Purging and filling

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16Starting up without using vacuum 4.6.1

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. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17Starting process 4.6.1.2

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17Stopping process 4.6.1.3

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17Leaving system overnight 4.6.1.4

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. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18Starting up using vacuum 4.6.2

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18Filling system 4.6.2.1

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18Starting process 4.6.2.2

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Bronkhorst®


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. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 205.2 User interface

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20Buttons 5.2.1

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20Display 5.2.2

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21Select instrument 5.2.3

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22Temperature and flow setpoints 5.2.4

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. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23Operation example 5.3.1

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24Vapor pressure of water 5.3.2

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25Troubleshooting and service 6. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 256.1 Common issues

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 266.2 Maintenance

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 266.3 Service

. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27Removal and return instructions 7

Bronkhorst®


1 Introduction

1.1 Scope of this manualThis manual contains general product information, installation and operating instructions and troubleshooting tips for the Vapor Delivery Module (VDM).

1.2 Intended useThe VDM is a compact integrated system to realize mass flow control of a vapor. The VDM is intended to generate apredefined vapor flow, accruing from an accurately controlled liquid mass flow injected into an accurately controlled carriergas flow with subsequent evaporation inside a temperature controlled chamber.

The wetted materials incorporated in the VDM are compatible with media and conditions (e.g. pressure, temperature) asspecified at ordering time. If you are planning to use the product (including any third party components supplied byBronkhorst, such as pumps or valves) with other media and/or other conditions, always check the wetted materials(including seals) for compatibility. See the technical specifications of the product and consult third party documentation (ifapplicable) to check the incorporated materials.

Responsibility for the use of the equipment with regard to suitability, intended use, cleaning and corrosion resistance of theapplied materials against the processed media lies solely with the end user.

Where appropriate, this document recommends or prescribes safety measures to be taken with respect to media usage orworking with the described equipment under the specified conditions. The end user is responsible for taking the necessarysafety precautions and proper use of appropriate (personal) protective equipment, even if such is not explicitlyrecommended or required in this document.

The end user is considered to be familiar with the necessary safety precautions, and to comply with the appropriateprotective measures as described in the Material Safety Data Sheets of the media to be used in the system (if applicable).

Bronkhorst High-Tech B.V. cannot be held liable for any damage resulting from improper or unsafe use, use for other thanthe intended purpose or use with other media and/or under other conditions than specified on the purchase order.

1.3 Other documentsManuals and guides for digital instruments are modular. General instructions give information about the functioning andinstallation of instruments. Operational instructions explain the use of the digital instruments features and parameters.Fieldbus specific information explains the installation and use of the fieldbus installed on the instrument.

The following documents contain information for basic and advanced operation, more detailed product information andtroubleshooting tips:

· Instruction manual FLOW-BUS interface (document nr. 9.17.024)· Instruction manual PROFIBUS-DP slave interface (document nr. 9.17.025)· Instruction manual RS232 interface with FLOW-BUS protocol (document nr. 9.17.027)· Instruction manual E-8000 Readout and Control System (document nr. 9.17.076)· Instruction manual PROFINET interface (document nr. 9.17.095)

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For RS232 or FLOW-BUS operation the following (free) Bronkhorst® software is available:

· FlowDDE Interface between digital instruments and Windows software· FlowView Operating Bronkhorst digital instruments· Flowfix Fieldbus connection of digital instruments· FlowPlot Monitoring and optimizing digital instrument parameters

Manuals and software tooling can be found at www.bronkhorst.com/downloads

Bronkhorst®


2 Starting up

2.1 Functional propertiesBefore installing the VDM, check if the functional properties match your requirements:

· Model key· Pressure rate· Temperature (ambient)· Power supply· Power consumption

2.2 Rated pressure test inspectionBronkhorst® instruments are pressure tested to at least 1.5 times the specified working processconditions and outboard leak tested to at least 2 * 10-9 mbar l/s Helium. The tested pressure is specifiedon the instrument with a red label.

· Before installation, make sure that the tested pressure is in accordance with the safety factor of your application.· If the pressure test label is missing or if the specified pressure is insufficient, the instrument must not be used and should

be returned to the factory.· The maximum operating pressure must never exceed the tested pressure.· Disassembling the instrument and/or replacing parts of it will invalidate the pressure test specification.

2.3 Install moduleSee section Installation for detailed installation instructions.Before switching on power, please check if all external electrical and communication (if necessary) connections are properlyconnected.

2.4 Model key

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3 Technical specifications

3.1 Physical dimensionsFor overall dimensions please consult supplied dimensional drawing 7.05.901. This document is available on www.bronkhorst.com/downloads or can be obtained by contacting our local sales & service representatives

3.2 Ambient conditions· Ambient temperature : 5°C - 40°C. · Relative humidity : Maximum relative humidity 80%, for temperatures up to 31°C decreasing linearly

to 50% relative humidity at 40°C.· Height altitude : Up to 2000 m.

3.3 Ingress protection classIP20, according IEC standard 60529.

3.4 Fluid connectionsThe VDM gas and liquid supply are equipped with compression type or face-seal-fittings. Normally these fittings are BSPparallel threads types which have to be used in combination with elastomeric O-rings to seal to the VDM. Occasionallyfittings are orbital welded to the VDM.

For leak tight installation of compression type fittings be sure that the tube is inserted to the shoulder in the fitting bodyand that no dirt or dust is present on tube, ferrules or fittings.

For exact information on the fitting, please contact Swagelok for further instructions or documentation.Always check your system for leaks, before applying fluid pressure. Especially if toxic, explosive or other dangerous fluids areused.

3.4.1 Flow ranges of used components

Model Heatermodel

Thermalpower

Max. capacity* Max temp.

SW-10n

W-100A 10 W 1…30 g/h liquid 0.05…4 ln/min gas 200°C

SW-20n

W-200A 100 W 10…120 g/h liquid 0.2…10 ln/min gas 200°C

*) Depending on liquid and process pressure; table based on water at 1 atmosphere. For other liquids or pressure conditions please consult the manufacturer or your local sales representative.

3.4.2 Capacity

Capacity SW-100 Vaporizer Capacity SW-200 Vaporizer

3.4.3 Pressure ratingThe maximum specified operating pressure is indicated on the VDM as described in section 2.2.

· To prevent liquid from flowing into the gas flow controller, make sure that the liquid pressure never exceedsthe gas pressure

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· Advised maximum pressure difference between inlet and outlet is 10 bar (d)

3.5 PipingFor optimal performance of the system it is recommend to have at least 10 pipe diameters distance between the angle andthe equipment inlets. The purge is rarely used in production environments, except for installation.

Be sure that piping is absolutely clean!CAUTION - DO NOT install small diameter piping on high flow rates.CAUTION - DO NOT mount abrupt angles directly to the inlet or outlet, especially for high flow rates.

3.6 Electrical connections

3.6.1 Mains

ModelPowersupply(Vac)

Maximum power(tracing included) Fuse primary heater

Fuse secondaryheater

Fusemain

SW-10n-n-50-a-nn-a

110 … 120 250VA 50-60 Hz T2A I2t >30ALittelfuse 0213002.MXP* T4A T2A

SW-10n-n-51-a-nn-a


SW-20n-n-50-a-nn-a


SW-20n-n-51-a-nn-a


SW-10n-n-30-a-nn-a


SW-10n-n-31-a-nn-a


SW-20n-n-30-a-nn-a


SW-20n-n-31-a-nn-a


* Littelfuse or equivalent

For mains connection, use appropriate cabling with IEC 60320-1/C19 connector:· Power cable with Euro Plug (EU) – Schurter #6051.2043 (art.nr.1.15.242)· Power cable with Switzerland Plug (CH) (art.nr.1.15.243)· Power cable with North America Plug (USA) – Schurter #6051.2041 (art.nr.1.15.244)· Power cable with United Kingdom Plug (UK) – Schurter #6051.2048 (art.nr.1.15.245)

3.6.2 TracingOptionally, the VDM can be provided with a trace temperature control. In this case, the VDM Series is equipped with atracing output IEC 60320-2-2 / C13 female connector. This connector is intended for connecting tracing tape, which is notsupplied. The voltage at this tracing output is equal to the supply voltage of the VDM.

For tracing connection, use appropriate cabling with IEC 60320-2-2/C14 plug (art.nr. 1.09.594). Make sure cabling is doubleisolated.

The table below shows the maximum tracing power and the fuse amperage for the various models.

Model Power supply (Vac) Maximum tracing power Fuse tracing heater

SW-10n-n-51-a-nn-a

110 … 120 300 VA 50-60 Hz T2,5A

Bronkhorst®


Model Power supply (Vac) Maximum tracing power Fuse tracing heater

SW-20n-n-51-a-nn-a

110 … 120 300 VA 50-60 Hz T2,5A

SW-10n-n-31-a-nn-a

220 … 240 300 VA 50-60 Hz T1,25A

SW-20n-n-31-a-nn-a

220 … 240 300 VA 50-60 Hz T1,25A

3.6.3 Pt100 tracing sensorOptionally, the VDM can be provided with a trace temperature control. In this case, the VDM Series is equipped with a Pt100inlet 4-pin M12 A-coded male connector. This connector is intended for connecting a two, three or four-wire Pt100.Measurement current through the sensor is 0,5 mA.

For Pt100 connection, use appropriate cabling with M12 4-pin female connector (art.nr. 1.09.593).

Make sure that the temperature sensor is properly mounted with the tracing wire, otherwise no temperature control ispossible and hazardous situations may occur.

3.6.4 Communication3.6.4.1 RS232 / ProPar

For further instructions about the RS232 interface see manual 9.17.027 'Manual RS232 interface with FLOW-BUS protocolfor digital instruments'. This manual is available at the download section of our website: www.bronkhorst.com/downloads

3.6.4.2 FLOW-BUS

For further instructions about the FLOW-BUS interface see manual 9.17.024 'Manual FLOW-BUS interface for digitalinstruments'. This manual is available at the download section of our website: www.bronkhorst.com/downloads

3.6.4.3 PROFIBUS

For further instructions about the PROFIBUS interface see manual 9.17.025 'Manual PROFIBUS-DP slave interface fordigital instruments'. This manual is available at the download section of our website: www.bronkhorst.com/downloads

3.6.4.4 PROFINET

For further instructions about the PROFINET interface see manual 9.17.095 'Manual PROFINET interface for digitalinstruments'. This manual is available at the download section of our website: www.bronkhorst.com/downloads

Bronkhorst®


3.7 Connectors (hook-up diagram)

Bronkhorst®


Bronkhorst®


4 Installation

4.1 MountingThe mounting position of the equipment is upright. Please take attention:· Avoid installation in close proximity of mechanic vibration and/or heat sources.· Avoid contact between hot surfaces of the enclosure with electrical cables and fluid hoses/pipes.· Ventilation requires a minimum distance of 100 mm space from each side to a wall.· Make use of the protective earth pin (see Connectors (hook-up diagram), connector 3) for grounding the connected

tubing. Use an appropriate cable.· Mount the equipment in such a way, that cables and mains switches can easily be reached and disconnected.

4.2 Fluid connectionsFor exact information on the fittings, please contact Swagelok for further instructions or documentation.

Please be aware when using Oxygen (O2) that the fittings mounted in the gas line should be absolutely oxygen clean.

4.3 Supply pressureDo not apply pressure until electrical connections are made. When applying pressure to the system, make sure that thepressure is increased gradually and avoid pressure shocks in the system.

4.4 Leak check

Check the fluid system for leaks before applying pressure, especially when using hazardous media (e.g. toxic or flammable).

4.5 SealsBronkhorst has gathered a material compatibility chart from a number of sources believed to be reliable. However, it is ageneral guide only. Operating conditions may substantially change the accuracy of this guide. Therefore there is no liabilityfor damages accruing from the use of this guide. The customer’s application will demand its own specific design or testevaluation for optimum reliability. So check order documentation if the used seals are correct for the process.

Bronkhorst®


4.6 Purging and filling

4.6.1 Starting up without using vacuum4.6.1.1 Filling system

Procedure Actions

A1 Purge all lines · Close V2, V3 and V7· Open V1, V4, V5 and V6· Give setpoint 100% to MFC· Give setpoint 0% to LFC· Purge for a long time.

A2 Setup carrier gas supply · Close V4· Open V3

A3 Fill the system with liquid. · Close V1· Open V2 briefly; allow mixing valve VDM to fill. · Wait until all gas bubbles left the system via Purge out

and V5, then close V5.

Make sure that the carrier gas is always flowing whenthe liquid flow is on. It is preferred to always have gasflowing in the carrier gas line when the system is filledwith liquid.

A4 The system is now ready for use.

Bronkhorst®


4.6.1.2 Starting process

Procedure Actions

B1 Set the heater at right temperature · Give set point to the heater; wait until thetemperature is stabilized

B2 Start gas flow · Give setpoint to MFC

Make sure that the carrier gas is always flowing whenthe liquid flow is on. Preferably, let always gas flow inthe carrier gas line when the system is filled with liquid.

B3 Start liquid flow · Give setpoint LFC, wait until stabilization

Close supply pressure of the liquid vessel during theprocess. The pressure controller of the inert gas supplycan influence the stability of the liquid flow controller.

B4 Connect process · Open V7, close V6

4.6.1.3 Stopping process

Procedure Actions

C1 Disconnect process · Open V6, close V7

C2 Stop liquid flow · Give setpoint = 0 to LFC

C3 Optional: Stop gas flow · Give setpoint = 0 to MFC


4.6.1.4 Leaving system overnight

Procedure Actions

D1 Relieve the supply pressure from the liquid- andcarrier gas lines

· Close V2 and V3

4.6.1.5 Emptying and purging system

Procedure (1,2) Actions

E1 Relieve the supply pressure from the liquid- andcarrier gas lines

· Close V2 and V3

E2 Purge liquid out of lines · Open V1 and V5

E3 Purge lines with inert gas · Open V4, V6· Close V7· Give setpoint to MFC

E4 Optional: purge with inert liquid Connect inert liquid to inert gas supply, proceed from E2

E5 Optional: alter E3 and E4 for a few times

(1) If the liquid is reactive or aggressive, be sure to remove air (and water vapor) carefully, before introducing liquid in thesystem.(2) If the liquid is reactive, aggressive, poisonous, toxic, or flammable, beware that the system is purged fully (preferably withinert liquid, E3, E4, E5) before opening the system.

· In case of non-pure liquids, place a filter upstream the liquid flow controller. · Mount the VDM upright.

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4.6.2 Starting up using vacuum4.6.2.1 Filling system

Procedure Actions

A1 Evacuate the lines “Vacuum” · Start pumps

A2 Evacuate all lines · Close: V1, V2, V3, V4, and V6· Make sure that “waste” and “process” are vacuum· Connect inert gas on carrier gas inle.· Open : V5 and V8· Give setpoint to gas and liquid control (the control

valves of the LFC and MFC open)· Pump for a long time· Remark: if the system is not completely dry follow

procedure of E3, E4, (E5)

A3 Purge line between inert gas source and valve V1 · Open valve V1 briefly for some seconds.

A4 Purge line between process gas source and gasMFC

· Give setpoint = 0 to LFM (mix valve closes)· Open valve V3 briefly for some seconds

A5 Pump down liquid supply · Open V2 for some time · Close V2

A6 Setup carrier gas · Close V8· Open V3

A7 Fill the system with liquid · Close V1· Open B2 briefly; allow mixing valve VDM to fill· Close V5


A8 Optional: degassing mixing valve · Open V5, a needle valve will be best, to avoid toomuch liquid be pumped away

A9 The system is now ready for use

4.6.2.2 Starting process

Procedure Actions

B1 Set the heater at right temperature · Give setpoint to the heater, wait until temperature isreached

B2 Start gas flow · Give setpoint to MFC


B3 Start liquid flow · Give setpoint LFC, wait until stabilization

Close supply pressure of the liquid vessel during theprocess. The pressure controller of the inert gas supplycan influence the stability of the liquid flow controller.

B4 Connect process · Open V7, close V6

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4.6.2.3 Stopping process

Procedure Actions

C1 Disconnect process · Open V6, close V7

C2 Stop liquid flow · Give setpoint = 0 to LFC

C3 Optional: Stop gas flow · Give setpoint = 0 to MFC


4.6.2.4 Leaving system overnight

Procedure Actions

D1 Relieve the supply pressure from the liquid- andcarrier gas lines

· Close V2· Open V8 for some seconds

4.6.2.5 Emptying and purging system

Procedure (1,2) Actions

E1 Relieve the supply pressure from the liquid- andcarrier gas lines

· Close V2 and V3

E2 Purge liquid out of lines · Open V1 and V4

E3 Purge lines with inert gas · Open V4 and V6· Close V7· Give setpoint to MFC

E4 Evacuate liquid lines (cont.) · Close V1· Open V8

E5 Optional: repeat last two steps for a few times

(1) If the liquid is reactive or aggressive, be sure to remove air (and water vapor) carefully, before introducing liquid in thesystem.(2) If the liquid is reactive, aggressive, poisonous, toxic, or flammable, beware that the system is purged fully (preferably withinert liquid, E3, E4, E5) before opening the system.

· In case of non-pure liquids, place a filter upstream the liquid flow controller. · Mount the VDM upright.

Bronkhorst®


5 Operation

5.1 Powering upBefore switching on the power, be sure that:· System is checked for leakage of gases and liquids· All connections have been made· Flow-set points are zero· No liquid has been spilled into the equipment

Switch on and then:· Allow 30 minutes (from switching on) to warm up (common for thermal flow controllers)· Wait until temperatures setpoints are reached. When the LED indicators turn blue, temperature

setpoints are reached.· Make sure that the carrier gas is always flowing before the liquid flow setpoint is applied.

5.2 User interface

5.2.1 Buttons

The buttons have the following functions:

- Enter selected menu- Enter edit mode- Confirm selection/changes

- Menu selection up- Select information field- Next character in edit mode- Up in table

- Menu selection down- Select information field- Previous character in edit mode- Down in table

- Return to previous screen- Undo, cancel and exit edit mode- Switch content in the 'Custom readout 2' field Top line Custom readout 1

Measure readout Custom readout 2

5.2.2 Display

The display is divided into 4 areas, ‘Measure readout’,‘Custom readout 1’, ‘Custom readout 2’ and the 'Top line'. The information in these areas can be configured by theuser. If an area contains a parameter which can be set or reset by the operator, you can press or to select thisparameter. Press to enter the edit mode or press to

return to the ‘Measure readout’ screen .

If ‘Custom readout 1’ is disabled, you can onlyswitch between ‘Measure readout’ and ‘Customreadout 2’.

Bronkhorst®


5.2.3 Select instrument

The Vapor Delivery Modules contains liquid and gas flowcontrollers. Also a temperature controller for evaporationand optional trace heating is provided. These integratedinstruments have unique node addresses. Factory defaultnode addresses are:

Node address Instrument

2 Readout and control (Display)

3 Temp. controlled evaporation device

4* Trace heating temperature control

5 Liquid flow supply

6 Carrier gas supply

7* Second carrier gas supply

8* Dilution gas supply

* = if applicable

To enter the 'instrument' mode, press the button untilthe red line appears above 'Custom readout 2' than press

to activate this field.

Security settings can be set to avoidunauthorised access to this option.

The number of displays that have the sameinstrument selected must not exceed 3.

The integrated Instruments will be indicated with theirnode addresses. Press or to search for aninstrument on the bus. While the message “search” isdisplayed, the VDM is searching for a valid node addressand it will not show any specific instrument info until anactive node is found.

When an active node address is found, the VDM will showthe corresponding USERTAG or Serial Number in the 'Topline'. It will also show the actual measure and, if applicable,the actual setpoint.

Press to select this instrument to be operated by theVDM or press to return to the previous selectedinstrument.

Bronkhorst®


5.2.4 Temperature and flow setpoints

Setpoint can only be edited when the setpoint parameteris displayed in 'Custom readout 1' or 'Custom readout 2'.

To edit the setpoint press to select the readout area inwhich this parameter is displayed. Press to enter theedit mode, the first digit will lighten.

Security settings can be set to avoidunauthorised access to the setpoint parameter.

Use or to change the digits, press to confirmand select the next digit.

You can change the setpoint edit mode into'step'. This enables you to change the setpointusing fixed steps. See section 'Customize displayinfo' in the E-8000 manual (9.17.076) for moredetailed information.

After the last digit is confirmed by pressing , thesetpoint will be sent to the instrument.

If the entered setpoint is ignored, checkcontroller mode. See section 'Controller mode' inthe E-8000 manual (9.17.076) for more detailedinformation.

The button can be used to exit the edit modeand cancel the changes.

This chapter explains the most important user interface options. For more information please check the E-8000 manual(document no 9.17.076) at www.bronkhorst.com/downloads

5.3 Operational settingsMake sure that the tracing and heating temperatures are well above the dew point of the desired vapor flow at the processconditions.

Especially for tracing, the temperature is only controlled at a single location, while inadequate insulation may introducecold-spots at which condensation may occur.

Be aware that both heater and tracing temperature depend on the location of the sensor. Therefore, it is advised to set theheater temperature approximately 20°C above the theoretical temperature.In addition, it is advised to set the tracing temperature another 10°C higher.

Bronkhorst®


5.3.1 Operation exampleApplicationThe VDM can be used for generating certain humidity in a gas stream. Carrier gas and liquid (water) are controlled toregulate the humidity. The water is mixed with the gas and consequently evaporated. The humidity at a certain temperaturecorresponds with a certain ratio of gas and water, this ratio can be set by the flow controllers which are part of the VDM.

Calculation example for setting of relative humidityAt atmospheric pressure, at 80°C, 2 ln/min Air has to be moistened. Which water flow is needed for a r.h. of 50%. The vaporpressure of water at 80°C is 473.3 mbar according to FLUIDAT®.

FLUIDAT® on the Net: Bronkhorst's interactive Flow Calculations and routines generating Physical Properties. Visit www.fluidat.com

Assumptions:· consider water vapor as an ideal gas· 1 mole of ideal gas at normal conditions = 22.4 l· 1 mole of water is 18 g and 1 hour is 60 min.· 1 atm. = 1013.25 mbar.

At 100% r.h., the (Mole)Ratio between gas and water is: The mole ratio:

So in a gas flow of 2 ln/min, the saturated vapor flow (100% r.h.) is:

and in [g/h]:

At 50% r.h., the (Mole)Ratio between gas and water is:

The mole ratio:

So in a gas flow of 2 ln/min, the saturated vapor flow (50% r.h.) is:

and in [g/h]:

Bronkhorst®


5.3.2 Vapor pressure of water

Bronkhorst®


6 Troubleshooting and service

6.1 Common issues

Symptom Possible cause Action

No heating of heater, everything elseworks (no ready heater LED after 10 minutes)

1. Mains switch turned off Turn on mains switch

2. Fuse may be blown Replace fuse (check mains and heater fuse)

3. Defective temperature sensor Return equipment

4. Heater defective Return equipment

No heating of tracing, everything elseworks(no ready heater LED after 30 minutes)

1. Fuse blown Replace fuse (check mains and tracing fuse)

2. Defective temperature sensor Replace sensor

3. Defective tracing Replace tracing

4. Inadequate insulation resulting in thermal power loss

Improve insulation

No Liquid flow 1. Wrong controller mode LFC Check controller mode LFC

2. No setpoint Give Setpoint

No Gas flow 1. Wrong controller mode MFC Check controller mode MFC

2. No Setpoint Give Setpoint

No vapor stream 1. No gas supply Check gas supply

2. No liquid supply Check liquid supply

Liquid in process chamber 1. Mixture saturated,condensation

1. Increase setpoint Heater2. Increase setpoint Tracing3. Increase carrier gas flow4. Decrease liquid flow5. Any combination of the actions 1 – 4

2. No proper insulation of the outlet piping

Improve insulation of piping

Irregular vapor stream Significant pressure variations on inlets

Reduce pressure variations by e.g.adding pressure regulators orbuffers

· In case of equipment malfunctioning, de-installation and returning of the equipment is recommended. See Removaland return instructions for relevant details.

· Do not open or disassemble the equipment.

Bronkhorst®


6.2 MaintenanceMaintenanceNo routine maintenance is required. In case of (other) maintenance which requires de-installation of the equipment, purgethe system first as specified in section Purging and filling

CleaningFor cleaning the exterior use a soft damp cloth.

6.3 ServiceFor current information on Bronkhorst® and service addresses, please visit our website:

www.bronkhorst.com

Do you have any questions about our products? Our Sales Department will gladly assist you selecting the right product foryour application. Contact sales by e-mail:

› [email protected]

For after-sales questions, our Customer Service Department is available with help and guidance.To contact CSD by e-mail:

› [email protected]

No matter the time zone, our experts within the Support Group are available to answer your request immediately or ensureappropriate further action. Our experts can be reached at:

+31 859 02 18 66

Bronkhorst High-Tech B.V.Nijverheidsstraat 1ANL-7261 AK RuurloThe Netherlands

https://www.bronkhorst.com

mailto:[email protected]

mailto:[email protected]

Bronkhorst®


7 Removal and return instructionsWhen returning materials, always clearly describe the problem, and, if possible, the work to be done, in a covering letter.

Instrument handling:1. Purge all fluid lines (if applicable)2. If toxic or dangerous fluids have been used, the instrument must be cleaned before shipping3. Disconnect all external cabling and tubing and remove the instrument from the process line4. If applicable, secure movable parts with appropriate transport safety materials, to prevent damage during

transportation5. The instrument must be at ambient temperature before packaging6. Insert the instrument into a plastic bag and seal the bag7. Place the bag in an appropriate shipping container; if possible, use the original packaging box

Add documentation:· Reason of return· Failure symptoms· Contaminated condition· Declaration on decontamination

It is absolutely required to notify the factory if toxic or dangerous fluids have been in contact with the device!This is to enable the factory to take sufficient precautionary measures to safeguard the staff in their repair department.

All instruments must be dispatched with a completely filled in 'Declaration on decontamination'. Instruments without thisdeclaration will not be accepted.

A safety information document containing a 'Declaration on decontamination' form (document no 9.17.032) can bedownloaded from the Service & Support section of the Bronkhorst website (www.bronkhorst.com).

Important:Clearly note, on top of the package, the customs clearance number of Bronkhorst High-Tech B.V.:

NL801989978B01

(only if applicable, otherwise contact your Bronkhorst representative for local arrangements.)

https://www.bronkhorst.com

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