Instrumentation and Metrology for Nanofabrication
Haris Doumanidis Mechanical & Manufacturing Engineering – University of Cyprus
Tel: (357) 22892265 - Fax: (357) 22892254 - [email protected]
The NSF Nanomanufacturing Program Portfolio
FIB, Laser, CNT Emission and OpticalSurface Technologies
*Nanofabrication using sub- wavelength near-field nano- optical laser processing (S. Das, Univ. of Michigan)
* Staggered probes for integrating nanomachining and metrology (R. Vallance, Univ. of Kentucky)
* Novel low-cost nanolithography technique using nanometric high- transmission optical antenna (X. Xu, Purdue Univ.)
* FIB micromachining and advanced characterization of carbon nanotube-metal junctions (K. Dovidenko,
SUNY Albany)
Actuators and Controls For Nanofabrication
* Motion control platform for accurate measurement and manufacturing of nanostructures (S. Smith, UNC)
* NanoXerography: the use of electrostatic forces to pattern nanoparticles (H. Jacobs, Univ. of Minnesota)
* Advanced control algorithms for active materials actuators used in nanoscale positioning (S. Seelecke - N.C. State Univ.)
* Nanorobotics (A. Requicha, Univ. of S. California)
Sensors and Actuatorsfor Nanofabrication
* Torque spectroscopy for nanosystem characterization and fabrication (D. Cole, Duke Univ.)
* Manipulation and 3D organization of nanoparticles by dielectrophoresis (P. Alexandridis, SUNY Buffalo)
* Spatially resolved characterization of nano-porous SiC layers (S. Ostapenko - Univ. of South Florida)
* Protein-based nanomotors and nanorobots (C. Mavroidis, Rutgers Univ.)
Nanofabrication Research Issues in Instrumentation and Metrology
* Lab-on-a-chip MEMS instruments* Positioning, registration, alignment* 2D surface mapping and 3D imaging real-time sensors & off-line metrology* Simultaneous fabrication & in-process sensing integrated into machine* Decoupling of transduced information* Model-based software observation
* Scanning probe, near-field microscopy* Electron (SEM, TEM), ion beam,* Laser tweezing, X-ray spectroscopy, NMR* Synchrotron, neutron, photon sources
Parallel probe arrays and scanned systems Improved resolution and bandwidth for control Multi-scale integration: macro-MEMS-NEMS Multi-energetic domain measurement
.
Research Fields for Metrology at Nanoscale
* Nanomaterials* Nanomechanics* Nanofluidics* Nanoenergetics* Nanoinformatics* Nanocognition* Nanocontrols
•Virtual nanoenvironments•Neuron on silicon, remote AP•Nanoscale transportation•Transcription, transduction•Designer molecular blocks•Quantum manipulation/sensing•In-situ hardware control
Bioinstrumentation at Nanoscale
•Learning from Nature -Biomimetic instruments -Bioinspired measurement
•Working with Nature -Hybrid bio/abiotic structures -Biological metrology* Material/structural diversity* Multi-functionality* Redundancy* Synergy, symbiosis* Autonomous sustainability* Adaptation to environs* Evolution and learning* Self-repair* Self-replication* End-of-life cycle
Nanoinstrumentation Education and Training of Workforce
* Nanotechnology highlights in K-12 education :Center visits, guest expert lectures, curriculum etc.
* Introductory nanotechnology preview minicourses* Renewed physical & biological science courses, integrated to
engineering and inspired by nanotechnology context* New and revised curriculum spanning across departments* Nanoscience/nanotechnology minors (future majors?)* Nanotechnology research experiences for undergraduates and teachers* Internships in nanotechnology industry and federal laboratories* Development of course modules and multimedia materials
* Orientation workshops for prospective graduate students* Interdisciplinary grad/postdoc fellowships/traineeships* Nanotechnology education combined to research* Integration to business and entrepreneurial leadership * Continuing and professional education courses in nanometrology, distance learning via internet.
National Nanotechnology InfrastructureNetwork (NNIN)
Nano-Technology
Research
Nano-Technology
Research
NNUNNNUNNSECNSEC
Building blocksCoatings and
surfaces
Consolidates and composites
BiochemicalDispersions &
structures
Processing and integration
System architectures Modeling tools instruments
Electronic-magneticsystems
Photonics-Optics
Biodevicesand systems
Environmental, energy,health & safety systems
MRSECs,STCs, ERCs,
IUCRCs
* From discovery to prototype* New instrumentation & machines* 3-D Manufacturing tools* System integration and scale-up* Metrology, sensors and control* Teleoperation and simulation* Geographical distribution* Integration with Education* Involvement of Social Sciences* Broadening participation of public* International collaborations
Nanofabrication Processes Microelectronics Optics and Optoelectronics Materials Science Solid State Physics Nanostructure Science Micromechanics Microfluidics Quantum Structures Biophysics Chemical Sensors Polymers
Penn StateStanford
U.C. Santa Barbara
Howard
Cornell
