Introduction of Plasma Indicator PLAZMARK®...Introduction of Plasma Indicator™"PLAZMARK®"...

Introduction of Plasma Indicator™ "PLAZMARK®"

Thursday, September 14, 2017Plasma Indicator Division

SEISAKU OHSHIRO

SEMICON TAIWAN 2017

1

© 2017 SAKURA COLOR PRODUCTS CORPORATION

Concept of Plasma Indicator™

An Evaluation tool made from functional colorants which react on active species (radicals or ions)

Color changes gradually per plasma intensity.

Plasma Intensity

Visualize “plasma treatment effect” handy

Before

PlasmaAfter

Plasma

2


Visualize The Plasma Process

The Conventional Method to Evaluate Plasma Processing

Etching Measurement Contact Angle Measurement

Before

Expensiveequipment

required

Time-consumingoperation required

Low accuracy, Time-consumingoperation required

Plasma ProcessAfter Before After

Plasma Process

3



Before After Plasma Process

Grayish Purple

DarkGreen

Green

By Using the Plasma Indicator™

You can judge by visual

inspection and easily

quantified by color meter

4



Spectrometer

Probe Measurement

2-D uniformity evaluation is difficult to be measure by the optical method, but

it can be easily evaluated by using

PLAZMARK®.

You can evaluate a larger area (entire surface of the wafer) than

the electrical probe measurement.Wafer

Card

The Plasma Process Uniformity Evaluation

Card

Type

Wafer

Type

5


Check of Plasma Equipment

Daily or Periodic Check

Check after Maintenance

Check of Same Type Equipment

Check of Manufacturing Sites Difference

…etc.

6

Green Deep Green Grayish

Green

Green Green

ParameterAdjustment

ParameterAdjustment


Other applications

7

Can be used for a difficult location to other measurement.

Can be used for 3-D works.

Can be used for a detection of abnormal discharge.


PLAZMARK® Line-up

8

For O2/Ar Cleaning Heat-Resistant

For Atmospheric Plasma Wafer Type


PLAZMARK® for O2 cleaning / Ar cleaning

• Best for mounting process and assembly process;

• It is applicable to UV or

UV Ozone cleaning.

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Surface treatment of wire/flip-chip bonding

Cleaning before under-filling

Cleaning before sealing of electronic components, such as LSIs, memories, MEMS, or LEDs

Before Plasma

AfterPlasma

Sheet

Label

Card


PLAZMARK® for atmospheric plasma

• By a newly developed organic colorant, radicals in atmospheric plasma can be checked.

• It is optimal for check of large area treatments of atmospheric (normal-pressure) plasma process, PCB industry, FPD Industry and surface modification of film.

• It is applicable to UV cleaning and UV Ozone cleaning.

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Electrode

Plasma

Indicator


PLAZMARK® Heat-resistant, Label type

It has low outgassing rates and high heat resistance (200℃) composed of newly developed inorganic colorants and polyimide substrates.

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Label type has a

flexibility and

adhesion, as a

result, you can

evaluate easily

plasma processing

effects.

Protection film

Polyimide film Separator film

Color change part



Color Changes by the Plasma of Various Gases

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H2、Ar

Cl2 、SF6

Initial


ICP(Ar) : 10Pa, 60-200W, 90sec

0

10

20

30

40

50

60

70

0.0E+00 5.0E+11 1.0E+12 1.5E+12 2.0E+12

Colo

r d

iffe

ren

ce ⊿

E*ab

Electron density (cm-3)

No.101

No.102


Correlation with the Electron Density by the Langmuir Probe Measurement

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PLAZMARK® Wafer Type

Ceramic Type (Φ4inch/6inch)

• Ceramic coat without organic materials enable heat resistivity up to 400℃, can be used in high temperature process.

• Clean product, good for

LED or MEMS manufacturing

process.

• Si and Sapphire Substrate

available.

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Example of color change by O2 plasma

UnderDevelopment


Application for uniformity check

• PLAZMARK® Wafer type ( ceramic type)

• The Uniformity can be

visually and numerically

evaluated easily.

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Example of Ar gas Plasma

Example of evaluation by automatic mapping system

-60 -40 -20 0 20 40 60

60

40

20

0

-20

-40

-60

Under DevelopmentUnderDevelopment


PLAZMARK® Wafer Type

Metal Free (Φ200mm/300mm)

• Eliminate metal ingredient to utmost level to achieve higher level of cleanness.

• good for clean process, such as Si semiconductor front end process.

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UnderDevelopment


Our Proposal to Electronic Industry

Visualize the Plasma Process

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Card

Wafer

Label

Design or Grade-up of Plasma Equipment

Development of Plasma Recipes

Trouble Shooting for Plasma System

Daily or Periodic check of Plasma Equipment

Quality Management of Products

…etc.


Contact

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PI Division [email protected]

Nami Tseng 曾碧珊

[email protected]

Or, Local Distributor in Taiwan


BOOTH# and location

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K Area

Entrance

１F

BOOTH #2044

Thank you for your attention

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Introduction of Plasma Indicator PLAZMARK®...Introduction of Plasma Indicator™"PLAZMARK®"...

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