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Ion beam assisted deposition of thin films on solid and nonrigid substrates I.S.Tashlykov, S.M.Baraishuk Belarusian State Pedagogical University, 220050 Minsk Sovetskaya 18
Ion beam assisted deposition of thin films on solid and
nonrigid substrates
I.S.Tashlykov, S.M.BaraishukBelarusian State Pedagogical
University, 220050 Minsk Sovetskaya 18
Schematic representation of SIAD: 1—vacuum arc ion source, 2—ionized fraction, 3—neutral fraction, 4—target, 5—target holder, 6—modified surface, 7—current integrator, 8—high voltage power supply, 9—electric field.
. RBS spectra of the initial rubber (1) and a sample upon which the Mo coating was deposited and also irradiated with 3 keV Mo+ ions (2)
The depth distribution of indicated components in the rubber sample (a) and in the silicon sample (b) with Mo coatings.
RBS spectra of untreated Si – curve (1); and with deposited Ti-based thin film – curve (2).
Relative content of species in SIAD Ti-based thin film on Si (4 hours deposition).
H – content in SIAD Ti-based layer deposited on Si (2 hour deposition).
Cross-section high-resolution TEM micrograph of (100) Si sample with SIAD constructed Zr/Si structure (accelerated voltage of 5 keV). Image of the interface area of the Zr-based film and Si substrate (a), image of the central area of the film [9]. The Low scale Zr crystal inserts in the coating are shown in circuits.
AFM images of surface morphology and view profiles of topography of rubber: untreated surface (a), the surface after 3 hours of Mo-based coating deposition (b).
AFM images of surface morphology and view profiles of topography of silicon: untreated surface (a), the surface after 3 and a half hours titanium-based coating deposition (b).
Changes of average surface roughness (rave), the root mean square value of the surface roughness (means square) and (square area)/(projected area) (rho) of rubber and silicon surfaces, modified by means of SIAD of coatings.
SEM image of rubber surface modified by Cr. ECr+ = 10 keV.
Thicknesses of the coatings.
PPT-curves for SIAD Me-based coatings on rubber. R-pin fixed on virgin rubber.
Adhesion of Me SIAD coatings on rubber measured using the Pin Pull Test. ETi+ ,Mo+ ,W+ =20 keV, ECr+ ,Zr+ = 10 keV. R-Pin Pull Test on initial rubber.
Contact angle of water to Me-based SIAD coatings on rubber.
