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•Ken Gilleo PhD•ET-Trends LLC

1 Introduction & Overview

“What are the possibilities of small but movable machines?” - R. Feynman 1959

Feynman described MEMS and “Nano”

“What are the possibilities of small but movable machines?” - R. Feynman 1959

Feynman described MEMS and “Nano”

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SectionsSections1. MEMS/MOEMS Introduction/overview

2. Nanotechnology Overview

3. MEMS Fabrication

4. MEMS Mechanisms & Operation

5. Introduction to Packaging

6. MEMS Special Packaging Requirements

7. Nano Packaging

8. MEMS Packaging

9. Commercial Packages for MEMS

10. Summary & Future

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OutlineOutline

• What’s MEMS?

• MEMS/MOEMS Fundamentals

• Features & Attributes

• Mechanics & Motion

• Applications

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MEMSMEMS•Micro: small scale; similar to IC feature size*

•Electro: electrical power & electronics

•Mechanical: adds mechanical motion

•System: integrated; can be a System-on-Chip

Retains electronic features while adding mechanical structures

Retains electronic features while adding mechanical structures

Mechanical MOTION must be involved

Mechanical MOTION must be involved

* Micro – not yet Nano -- NEMS

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MEMS; Electro vs. Electronic

MEMS; Electro vs. Electronic

• All MEMS must have “electro” feature

• Electro: power, control, sense and compute

• MEMS devices can have on-chip electronics

• Electronic circuitry for MEMS Control, amplification, conditioning, etc.

• Electronics Locations

1. Integrated CMOS; iMEMS;

2. Wafer-level connected

3. Separate chips

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ADI Gyroscope

Accelero

meter

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The Center of ConvergenceThe Center of Convergence

MEMSEle

ctro

nics

Optics

Mechanics

OE OM

Biotech

Chemistry

Physics

Medicine

MOEMS

Nano-technology

Telecom

Where all Sciences & Technologies will Converge

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• Convergence of electronics, mechanics, & (optics)

• Leverages semiconductor industry

• Mass-production in existing fabs

• Extreme “density”, highly scalability

• Extraordinary versatility and richness sensors energy devices logic functions motion control micro-manufacturing systems

Key AttributesKey Attributes

HearTalk FeelMove WalkGrabThinkSeeSense beyondControlEnergizeExtract energyManufactureCut-pierce-etc.More…

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•Hear

•Talk

•Feel

•Move

•Fly

•Walk

•Grab

•Think

•Sense

•See

•Control

•Pump

•Synthesize

•Align

•Cut

•More

MEMS Can:MEMS Can:

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MEMS StructuresMEMS Structures

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Best MEMS FeaturesBest MEMS Features• Massively parallel manufacturing

• Can use Semi fabs; even older, smaller fabs

• Highly scalable; smaller = faster (less mass)

• Integrate everything; or bond wafers together

• Extraordinary functionality

• Ideal size for: optical, biological, chemical and

human interaction

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MEMS AdvantagesMEMS Advantages

• Taps the “mega” semiconductors infrastructure

• Merges motion & electronics & energy

• Can combine MEMS + CMOS logic on one chip

• Multifunctional; separate or combinations Sense; movement, energy, molecules, microbes

Compute; electronic logic, memory

Move; motion to solids, liquids, gases, and MEMS devices

Control; energy, signals, matter, motion

Produce; reagents, drugs, life forms

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Major ProductsMajor Products• Sensors (largest class; ~ 70%)

Motion detection; vehicles, machines, life forms

Position; gyroscopes, accelerometers Force/pressure: gases, fluids, solids Molecules; chemical, biological (emerging) Energy; heat, light, mechanical

• Control Energy; light, electrical, RF, sound, mechanical Fluids; pumps for machines, biomedical, other

Gases; even MEMS rockets have been built

Reactions; for synthesis & analysis (incl. pharma)

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MEMS Motion (actuation)

MEMS Motion (actuation)

• Deformable; cantilevers, beams - “no wear out”

• Sliding; linear

• Rotating; partial, full, multi-plane

• Rotating Inter-contact; gears, wheels

• Hinges

• Ejectors; fluids, gas, solids

• CombinationsMore on

ACTUATIONLater

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MEMS SensorsMEMS Sensors

Motion Dongle

Motion sensor - Moto

2-axis sensor - ADIEarthquake – warn, power, fuel shutoff

Earthquake – warn, power, fuel shutoff

Precise pedometers

Precise pedometers

SecuritySecurity

Air Bag sensor - ADI

Game and computer input

Game and computer input

JPL Micro-gyro

Military – US Gov’t.

Vehicle; crash, roll-over, ride, mechanical wellness

Vehicle; crash, roll-over, ride, mechanical wellnessRobots;

movement

Robots; movement

Military; vehicle, ordnance monitor

Military; vehicle, ordnance monitor

MEMS enabled iPhone

Motion-interactive

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MEMS DemoMEMS DemoSandia National Laboratories presents…

Sandia Sequel

Can the Government solve the overload problem?

BUG still wins!

Video may not run unless file is downloaded

Video may not run unless file is downloaded

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Complex MEMS DemoComplex MEMS Demo

Sandia National Laboratory

Video may not run unless file is downloaded

Video may not run unless file is downloaded