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Costas P. Grigoropoulos

Laser Thermal Laboratory Department of Mechanical Engineering

University of California, Berkeley

Laser-Enabled Directed

Nanomanufacturing

U.S.-Korea Nanotechnology Forum October 15, 2013



Topics • Laser nano/micromanufacturing

– Laser Chemical Vapor Deposition – Directed growth of nanomaterials

• Laser-assisted electronic materials processing and device fabrication

– Flexible electronics • Laser interactions with biological materials

– Surface patterning for cell growth – Fibrous material scaffolding



14 nm


11 nm

Nanomachined patterns by femtosecond laser coupled to apertureless near field scanning

optical microscope (NSOM)

Chimmalgi et al., Appl. Phys. Lett., (2003)

J. Appl. Phys., (2005)

Hwang et al., Appl. Phys. A, (2009)



Nano-crystallization by apertureless NSOM


Chimmalgi, Nano Lett. (2005)


In-situ TEM Imaging and NSOM Processing


NSOM Probe

a-Si pillar



Transformation of an a-Si dot to a single Si nanocrystal on a

non-participating substrate

Superposed laser beams CW + pulsed

Xiang et al., Nano Lett. (2012)


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(a) (b) (c) (d)

(e) (f) (g) (h)

amorphous Poly-crystal Poly-crystal

single-

crystal

Poly-crystal Poly-crystal single-crystal

single-crystal

Alternating Crystal Structure



Laser In-situ TEM Diagnostics & Processing

Libra TEM

Raman spectroscope



Raman probe assy. Laser exciter & sample assy.

Libra TEM sample holder

Libra TEM column


Fiber coupled signal delivery



VLS (Vapor-Liquid-Solid) Si nanowire growth

metal nanoparticle catalyzed silicon nanowire growth under VLS mechanism

Laser-based Selective Nanowire growth

Laser Illumination

Localized heating of catalysts & NW growth within laser spot

Laser-assisted localized Si nanowire growth setup

SiH4 gas

100nm

Au Catalyst




Temperature and time dependent growth of GeNWs This image cannot currently be displayed.



On-demand Vertical GeNW Integration on Si(111) On-demand Vertical GeNW Integration on Si(111)

Location/shape controlled GeNW on a single Si(111) in vertical integration architecture



D0 = 65 nm (fixed)

D (varied)

Plane wave

Ryu et al., ACS Nano (2013)


Defect Free Epitaxial Growth of GeNWs on Si (111) Defect Free Epitaxial Growth of GeNWs on Si (111)

Cross sectional HRTEM images of the vertically oriented GeNW on Si (111)



Laser hydrothermal Growth of ZnO nanowires


In et al., Small (2013)


Growth visualization and control




Graphene patterning and transferring This image cannot currently be displayed.

Yoo et al, Small (2013)


Graphene devices This image cannot currently be displayed.




Vertically Aligned Carbon Nanotube Transfer on Flexible Substrates

Si

Glass Glass PC PC

Pressure Laser

Si

VACNTs

Si Si

Separation

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PC CNT

200 µm


In et al., ACS Nano (2012)


Beyond graphene Laser annealed MoS2 transistors on plastic


Choi, Kwon et al. IMID (2013)



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5nm


Nanopaticle processing for flexible electronics

Flexible Electronics

Low Temperature

Direct patterning Laser Tech

Nano Tech Nanomaterial synthesis & characterization


This image cannot currently be displayed.- Low melting temperature - Solution processible

- Direct patterning (lithography free, maskless) - No vacuum deposition, no etching, low T - Single step process - Solution processible, additive process


Nanoimprinting This image cannot currently be displayed.

Inkjet Printing

LIFT This image cannot currently be displayed.


- Resolution enhancement


Digital Direct Metal Patterning (DDMP) Process on a Flexible Substrate


Yeo et al., PLOS ONE, (2012)


Laser Sintering Examples 532nm wavelength, 70mW, CW laser, 4” wafer size, 2 m/s scanning speed



16,000 OFETs on a PI substrate, 3 layered structures (PI substrate/ gate electrode / PVP / source & drain

electrodes) ( total processing time: ~ 10 mins)

High resolution metal features ( total processing time: ~ 7 mins)

(down to several microns)

Room temperature, ambient pressure, Non-vacuum process, maskless process


Laser Enabled Wafer scale ZnO Nanoimprinting on Flexible Substrates


Master mold PDMS stamp

ZnO mesh

ZnO on polycarbonate

Low N.A. objective High N.A. objective

Fiber scaffold fabrication via 2PP (two-photon polymerization)



Fiber scaffold fabrication

Jeon et al., Biomed. Microdev. (2011)


Jeon et al., 2011, submitted Jeon et al., JACS 133 (2011)



2D pitch gradient pattern



2D pitch gradient pattern


3D 2PP nanofabrication examples



25 layer photonic crystal – periodicity of 400nm

Multi-scale biomimetic structure


Acknowledgment LTL Sanghoon Ahn Anant Chimmalgi Taeyul Choi Hirofumi Hidai Kuniaki Hiromatsu Nico Hotz David J. Hwang Jung Bin In Hojeong Jeon Eunpa Kim Moosung Kim Jaden Kwon Seung-Hwan Ko Daeho Lee Ming-Tsang Lee Julian Marschewski Nipun Misra Heng Pan Jongbok Park Patrick Rohner Matt Rogers Ioanna Sakellari Bin Xiang Jae-Hyuck Yoo

Funding DARPA/MTO, DOE, USAF, NSF, NIH,

KAUST, industry Collaborators Oscar D. Dubon, Andrew M. Minor, Kevin E. Healy, Junqiao Wu (UCB) Dimos Poulikakos (ETH) Seung-Hwan Ko (KAIST) Maria Farsari (IESL/FORTH, Greece) Sunkook Kim (Kyung Hee U.) Woong Choi (Kookmin U.) Dieter Bäuerle (JKU, Austria)

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Laser-Enabled Directed Nanomanufacturing › nanotechnology-forum › Forum_10... · Laser-Enabled...

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