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Request for Proposal for Laser Scanning Confocal Microscope System

The Space Applications Centre (SAC), a part of Indian Space Research Organization (ISRO) requests to submit proposals to supply Laser

Scanning Confocal Microscope System as per description in this document.

The document is divided in two section:

Section-A: General Idea about SAC/ISRO and intended use of the microscope system.

Section-B: Detailed Technical requirement of the Confocal Laser Scanning Microscope System

Section-A

Space Applications Centre, Ahmedabad is centre of excellence engaged in payload development and Advances Research & Development

activities in space technology. To carry out these activities, advanced Equipments and systems are used. The indented Confocal Laser Scanning

Microscope System is required for high-resolution 3D measurements, based on UV laser confocal system for non-contact, non-destructive

measurement, inspection and analysis of surface of metals and non-metals during its various stages of processing. Speed and reproducibility

are also needed during scanning. The microscope system shall scan and measure miniaturised dimensions of plated layers, flat surfaces and

also peaks and valleys of base material. The microscope shall be supplied with associated hardware, software etc. as mentioned in detail below.

The detailed technical details and general terms for procurement are mentioned in next section.

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Section-B:

1. System Technical Specification: The detailed technical requirement for the proposed system is as follows:

1. BASIC SYSTEM CONFIGURATION:

SR No.

Parameters/ Specification

Description compliance Proposed value and comments (to be provided by supplier)

1 Basic System configuration

(a) A fully integrated confocal optical system with laser and white LED system shall consist of

Measurement module Scanning Module Laser & Light Source Objective lenses Analysis / Application Software The detailed specifications of individual modules shall comply with following requirements.

(b) System shall be capable of Precise non-destructive measurement, inspection, and analysis for different structures viz. helical, cylindrical, parts surface finish etc

2. MEASUREMENT MODULE:

SR No.

Parameters/ Specification

Description compliance Proposed value and comments

2.1 Critical job material & dimensions

1.Alumina, LTCC, Aluminium, CFRP, gold, silver, metallic and non-metallic composites. 2.Stage size around 150 X 150 mm with stage movement 100X100 mm, thickness upto 20 mm. 3. typical jobs Micro-Integrated chips with line width in XY plane minimum-20 microns and maximum 400 microns, height 1-1000 microns.

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2.2 Measurement technique

(a) Absolute, non-contact & non-destructive. (b) Data to be derived directly from photo multiplier tube or suitable

sensor. (Screen based measurement are not acceptable)

2.2 Measurement Resolution

X & Y: 0.15 micron or better Z : 50nm or better

2.3 Measurement Range

X & Y: 0.15 microns to 500microns or better Z : 50 nm to 10 mm with 0.8 nm resolution.

2.4 Measurement repeatability (3 sigma)

(a) <0.1 micron at minimum magnification,

(b) <0.02 microns at maximum Magnification

(c) Required parametric and environmental conditions shall be specified for achieving these specifications.

2.5 Accuracy Within ±2% of measured value 2.6 Vibration

isolation Shall have inbuilt arrangement for meeting all functional specifications. Exact details for isolation arrangement shall be provided by vendor in the technical-bid.

2.7 Measurement / Examination analysis Features

Shall be inclusive. Either in basic controller or preinstalled in external controller. Backup copies in hard format is essential.

2.8 Comparison Measurements

Shall be capable of compare measurements on-line as well as with stored results.

2.9 Image assembly / stitching

Required in order to acquire area larger than applicable field of view. (manual and automatic mode desirable)

2.10 Edge detection & measurement

(a) Auto edge detection/measurement capability shall be provided.

(b) Averaging/ Peak detection shall be available for precise measurement and analysis of coarsely defined element edges.

2.11 Particle measurement/ analysis

(a) Particle measurement/analysis capability shall be provided.

(b) Suitable enhancements shall be available to identify and analyse particles / contaminations etc. is essential. Inbuilt pseudo lighting arrangement is preferred.

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2.12 Multiple analysis Shall be capable of multiple analysis of results for online measurements as well as for stored data.

2.13 Examination and Measurement tool

Shall be dedicated and integrated tool / software providing all results in chart as well numerical formats

2.14 Operation Suitable for Continuous use. Operation in Auto/Semi-auto mode shall have Full function manual override..

2.15 Image Resolution 4096 x 4096 / 1024 x 1024

2.16 Display Resolution

.002 microns or better

2.17 Calibration On site, operator friendly, procedure to be detailed in manual

3. SCANNING MODULE:

SR No.

Parameters/Specification Description compliance Proposed value and comments

3.1 Magnification Maximum: ≥ 17000 X Minimum: ≤ 150 X (Variable using different objective lenses and optical zoom)

3.2 Optical zoom 1X to 8X minimum (excluding digital Zoom)

3.3 Optical system Laser Confocal optical system Detailed description Supported with literature / application notes is desired.

3.4 Objective lens system Minimum 5 lenses shall be mountable on a single turret with quick motorized or manual change

3.5 Working distance More than 0.2 mm at highest magnification. Value against each offered magnification is to be specified by the vendor

3.6 Field of view >15 microns’ length at highest magnification. >2mm at lowest Magnification (Each value against offered objectives is to be specified by the supplier)

3.7 Focus Auto with manual override

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3.8 Specimen stage (a) Motorized XY Stage with minimum 100mm X 100mm travel range & size.

(Exact stage movement mechanism & steps in X, Y, Z direction & other features shall be clearly mentioned in the technical bid.) (b) Other options available to be specified

4. LASER & LIGHT SOURCES:

4.1 LASER source Minimum 1 laser source of 400-420 nm Semiconductor Laser light source Class II. other options may be presented separately. (Exact details & specification of Laser is to be specified in the offer. Supplier Shall Specify clearly make of Laser and safety standard in offer )

4.2 Illumination & source (a) Bright field. White light for real colour in addition to suitable lower wave length source required by measurement tool

(b) Dark Field & Differential Interference Contrast (DIC) to be quoted as optional.

(c) Exact wave length usable for measurement purpose shall be specified

5. OBJECTIVES LENS TYPES:

5.1 Objective Lens type Primary configuration shall consist high Numerical Aperture (Apochromatic for 20X and above). (Other available type including large working distance shall be quoted as option.)

5.2 Objective lens magnification

Minimum 5 lenses shall be mountable on a single turret having magnification 5X,10X,20X,50X,100X. The objective lenses quoted shall be compatible with the LASER source. (Other magnification lenses are to be quoted as option)

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6. ANALYSIS /APPLICATION SOFTWARES

SR No.

Parameters/ Specification

Description compliance Proposed value and comments

6.1 Software (a) All software shall be provided pre-installed as required for Laser Scanning Microscope system control & operation with perpetual licence.

(b) Analysis software shall be capable for following measurement mode: Profile, step, angle, area/volume, surface area, radius, roughness, film thickness, geometric etc. measurement.

(c) Supplier Shall provide software up gradation support as and when applicable.

(d) Exact detail regarding data types & format shall be specified. The measurement data generated by the software should be in the format compatible for direct export to spreadsheet like MS excel.

6.2 Observation support functions

Macro Map Function, Auto Gain, Auto focus, brightness correction between objective lenses, objective lens optical axis displacement correction, Automatic Z retract when change of objectives

6.3 Data Acquisition

Data Acquisition Image and Numerical, Live screen snap shot, 3D shot, long distance roughness measurement (please specify maximum field of view for roughness with accuracy of .05 microns)

6.4 Help function to ease operations for novice operator

7. COMPUTER:

7.1 Computer and printer A branded desktop PC (HP/Dell/Lenovo) Shall be provided for all control & operations of the Laser Scanning Microscope system with minimum configuration:

Intel make i5, 3.5GHz or higher processor Compatible chipset

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DVD-RW drive facility 1TB HDD 8GB DDR4 RAM 24’’ LED Monitor USB English Keyboard USB Optical scroll mouse Power cord compatible with Indian power supply Any other hardware needed for complete operation of

the Laser Scanning microscope Licensed Windows operating system (OS) (Windows 7 or

higher). The vendor shall upgrade the OS and software (both OS and Laser Scanning Microscope software in the scope of upgradation by supplier) at SAC site to the latest version, if any, during warranty period (standard & extended warranty).

(complete configuration of the branded PC being offered shall be mentioned compulsorily) The solution shall consist of all necessary interfaces, hardwares and softwares for complete control & operation of the system. A colour laser printer shall be provided for graphic work and for generation of hard copy reports.

8. OPERATIONAL REQUIREMENTS

8.1 Mains power Supply 230 V ± 10 % single phase, 50Hz (Exact electric load and heat dissipation for full operation to be specified)

8.2 Environmental conditions & site requirements

The quoted system shall be fully compatible to work in AC room with 22+/-2˚ C environmental condition. (Exact details for operating conditions, safe operating temperature ranges and detailed site requirements are to be specified.)

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2. GENERAL TERMS AND CONDITIONS

SR No.

Item Description compliance Proposed value and comments

1. Tender Mode The tender shall be two-part tender: 1. Part-1: Technical Bid

All technical details along with applicable datasheets, delivery schedule, up-priced replica of the price-bid including all applicable taxes, commercial and payment terms, warranty details etc.

2. Part-2: Price-Bid All break-up prices along with commercial terms and conditions. Note: (i) Part-2 should be submitted separately as per the EGPS guidelines. This requirement should be strictly followed.

(ii) The supplier shall prepare detailed price break up for

important work/supply elements like source measurement

unit, ground unit and installation and commissioning cost.

Supplier shall provide as far as possible detailed cost break

up on per item basis and work basis to enable SAC to evaluate

their offer.

2. Technical information and compliance statement

1. The Supplier shall prepare detailed and point-by-point compliance statement with reference to all the specifications/conditions/sub-points of this tender document clearly indicating the quantitative values offered wherever applicable. It shall also clearly indicate “C” for total compliance and “NC” for non-compliance. Supplier shall also highlight compliance with better or superior specifications wherever offered giving detailed merit and description.

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2. Technical catalogues, literature and detailed datasheets of all items offered by the supplier in support of their offer shall be enclosed. Lack of information or ambiguous presentation of technical information shall weaken the merit of their offer. Plain compliances without adequate supporting documents/description are liable to be rejected.

3. Supplier shall read total tender document and submit a signed copy indicating that all parts of the tender has been read and understood and shall be submitted along with their offer.

4. It is necessary for the supplier to furnish complete information as required in various sections of this RFP for proper evaluation, assessment and consideration of the proposal.

5. The supplier shall attach additional information such as applications developed, papers published, copyrights and patents, application notes, if any, which may provide more insight on quoted system.

3. Supplier Status 1. Only those suppliers who have adequate exposure and experience in the manufacturing/maintenance/support of such system need to quote. At the time of submission of technical bid, supplier shall provide necessary documentations explaining heritage of the quoted system wherein they should bring out since when the quoted system is in the market. The supplier shall provide a list of existing customer base (with full contact details such as Name, telephone number, fax and email etc) for similar systems supplied, installed and operational in past 10 years along with the technical bid. SAC reserves the right to reject any offer having inadequate or ambiguous information provided for this requirement.

2. To assess the capabilities of the quoted system, SAC reserves the right to request the supplier to characterize SAC specified sample. The participating suppliers must comply with this point.

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3. If the bid has been made by an Agent (other than the manufacturer), an valid authorization certificate must be submitted along with the technical bid.

4. Equipment Status The offered systems shall be completely new benchtop model. Refurbished or old systems/parts are not acceptable.

5. Calibration (a) Shall be operator friendly and shall be possible on site. Exact procedure to be specified.

(b) Standards set with appropriate traceability detail for line width measurement may be quoted as optional

6 Traceability Obtained result shall comply with standards certified and traceable by reputed international organization.

7 Result Save, recall and report

Essential. Preferably images as well as chart /numerical format

8 Enclosure Suitable environmental enclosure may be quoted as optional, if needed to meet the specification. It shall be considered for price-bid evaluation.

9 Accessories/options (a) To achieve all combination of specification with desired accuracy, any additional tooling, sample preparation aid or pre-alignment aid recommended by vendor shall be compulsorily quoted as option. (individual options quoted to meet tender specifications, if any, shall be considered during price-bid evaluation)

(b) Motorized XY stage with 300mmx300mm or more travel range & size to be quoted as optional.

10 Foot print and weight

The system shall be compact designed with lowest possible foot print. However, the configurations must be equally maintenance friendly. (Details to be provided for overall dimension and weight in the technical bid)

11 Operation and troubleshooting manuals along with electric/mechanical schematics

The system should have 2 sets of troubleshooting manuals, each in English in hard copy format. This manual should contain detailed Electrical /mechanical Schematic diagrams. However, the same shall be provided in CDs/USB drive etc. Detailed ray diagrams shall be provided.

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Safety System design shall take care of all safety aspects like equipment, human and applications safety. Supplier should provide full details.

12 Onsite Warranty and Extended Warranty

Vendor shall provide three years’ warranty compulsorily. If standard warranty is less than three years, remaining period of warranty shall be quoted as extended warranty separately. The extended warranty shall commence only after completion of standard warranty. The standard warranty period shall start only after successful commissioning of the equipment at SAC. Supplier shall note that the extended warranty shall be on post-payment basis. Supplier to state clearly a detailed schedule of preventive and break down visits included as a parts of warranty. The maintenance and break-down service shall be provided either by OEM or qualified personals trained by OEM with valid certificates, available in India. Supporting documents for this shall be provided with technical bid. The vendor shall respond to the break-down service/equipment problem related request, if any, within a period of 48hrs from the written intimation (email, fax etc) from SAC during warranty and extended warranty period. This requirement shall be agreed by bidder in technical bid.

13 System heritage (a) The complete system or parts like LASER sources, Objective lenses, power supplies, detectors etc shall be from reputed manufacturer/supplier and have a proven heritage and necessary details shall be submitted in support of this.

(b) Prototype, developmental or refurbished system shall not be quoted.

14 Spares/ Consumables support

Manufacturer to guarantee spares/consumables support for a period of not less than 10 years.

15 Pre-dispatch Inspection and acceptance (Factory acceptance test-FAT)

SAC reserves the right to have pre-dispatch inspection at manufacturer’s site and may request to produce test samples/test results to ensure at least following system performance checks for its acceptance:

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Minimum and maximum capability of system for X-Y and Z measurement to be demonstrated.

Accuracy and repeatability values of X, Y and Z measurement to be demonstrated.

Functionality of all mode of operation Sample testing using proposed system should be done. The test

samples will be provided by SAC. In case of pre dispatch inspection and acceptance (FAT) desired by SAC, supplier has to communicate readiness of the system with six to eight weeks’ notice time. The decision for pre-dispatch inspection shall be taken during technical evaluation of the bid and communicated at the time of PO.

16 Installation & demonstration of performance at SAC

System shall be installed at SAC by manufacturers or their qualified representatives and performance shall be demonstrated at SAC as per specifications/ Purchase order and FAT. Calibration of the installed system shall be carried out prior to commissioning.

17 Training at SAC Supplier shall provide necessary operational/maintenance training to minimum 3 SAC engineers/technicians for a period of 2 days minimum. Vendor to agree to this requirement in technical bid.

18 Delivery Schedule 1. The complete system shall be ready for FAT (if desired by SAC) or delivered (in case no FAT is asked) within 20 weeks from date of P.O.

2. Supplier shall ship the complete system within 2 weeks of clearance of FAT results by SAC, if opted for FAT.

3. The installation, testing, commissioning & training shall begin within 2 weeks of material arrival at SAC and intimated through contact email.