Lee Koong Leng - camLine · 26.08.2016 · LineWorks STARGATE Version 3.0.0 ... tions. Exciting new...

© camLine GmbH • forum 201612 - 1

LineWorks STARGATE Version 3.0.0

You will learn how GLOBALFOUNDRIES has been using LineWorks STARGATE for the past decade and how it has become a critical system in running their day to day opera-tions. Exciting new features and improvements made in Version 3.0.0 will be also be intro-duced.

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© camLine GmbH • forum 2016 12 - 2

Lee Koong LengDeputy Director Quality Systems EngineeringGLOBALFOUNDRIES Inc., Singapore

Working Experiences Background

Deputy Director – GLOBALFOUNDRIES. (Quality System Engineering)

More than 25 years of experience in implementing, maintaining & improving quality systems such as FMEA, Control Plan, MSA, SPC, MRB, Process Change, Corrective Action Request systems, Problem Solving methodologies (eg : 8D, KT methods, . . ) and etc

Expert in applied statistics (SPC, Hypothesis Testing, DOE, Taguchi, Regression . . .) & quality tools (8D, KT, 3x5 Whys, FMEA, Fault Tree Analysis, . . etc) applications in semiconductor environments

Constantly provide quality tool training such as SPC, DOE, 8D, FMEA, . . etc in GLOBALFOUNDRIES for last 20 years

As an industrial supervisor to the project team who consist of students from local university in Singapore (NUS) on several projects with GLOBALFOUNDRIES (Refer to below few examples of the projects)

Cpk Calculation on Highly Correlated Data (https://www.ise.nus.edu.sg/beng_students/posters/sdp1314/docs/Group12.pdf)

Wafer Profile Indicator (https://www.ise.nus.edu.sg/beng_students/posters/sdp1213/docs/Group11.pdf)

Certified as Six Sigma Black Belt since 1999

Education Background

Master's Degree in Quality and Reliability Engineering from Industrial & Engineering department of NUS (Singapore) since 1998

Bachelor degree in Statistics & Operational Research from Statistics & Operational Research department of University Science of Malaysia since 1990

https://www.ise.nus.edu.sg/beng_students/posters/sdp1314/docs/Group12.pdf

https://www.ise.nus.edu.sg/beng_students/posters/sdp1213/docs/Group11.pdf


Stargate Reporting System in

GLOBALFOUNDRIES

Contents

GLOBALFOUNDRIES Confidential 2

GLOBALFOUNDRIES Overview GLOBALFOUNDRIES Stargate & SPACE Major Milestones GLOBALFOUNDRIES Stargate Evolution Stargate 2 vs Stargate 3 GLOBALFOUNDRIES Stargate Reporting System

• Overview• SPC Management• SPC Engineering, Tool Matching, Summary Statistics• Proper Chart • SPC Maturity• Other key features

Stargate 3 Key Features Stargate 3 Demo


GLOBALFOUNDRIES Overview

REVENUE

Company Highlights


East Fishkill

Singapore

DresdenMalta

Burlington

300mm

200KWafers/Month

200mm

133KWafers/Month

MORE THAN

FAB LOCATIONS FAB CAPACITY

~6B* 25,000Patents &

Applications

2ndLargestFoundry

TrustedFoundry

*Based upon analysts’ estimates

250

Customers

18,000

Employees


Acquires Chartered Semiconductor

The GLOBALFOUNDRIES Story


Creating an Industry Leader

• New York fab delivers initial silicon first time right

• 100% ownership by Mubadala

• Dresden fab ships 250,000th 32nm HKMG wafer

Launches 14nm FinFET Technology

• Collaborates with Samsung on global 14nm manufacturing

• AMD spins out fab operations

• Mubadala (ATIC) acquires majority stake

• GLOBALFOUNDRIES created

• Construction begins on New York fab

2012 2013 2014

Over $15B invested in CAPEX to date

Largest privately held semiconductor company

~8X capacity increase since 2009

• Acquires IBMMicroelectronics business

• Launches 22nm FD-SOITechnology

20152009 2010 2011

Manufacturing Capacity

TECHNOLOGY NODES

90–22nm 28, ≤ 14nm 350–90nm 45–22nm 180–40nm

CAPACITY (WAFERS / MONTH)

14,000(300mm)

Up to 60,000(300mm)

40,000(200mm)

60,000(300mm)

68,000 (300mm)93,000 (200mm)

East Fishkill, New York Malta, New York Burlington, Vermont Dresden, Germany Singapore

~7,000,000 Wafers / Year200mm equivalents 6


INTERNET OF THINGS

INDUSTRIAL

COMMUNICATIONS & DATA CENTERS

Key Markets Driving Growth

MOBILITY

AEROSPACE & DEFENSEAUTOMOTIVE

• Factory automation• Machine-type communications

• Safety systems• Body and powertrain control• Infotainment

• Commercial & governmentapplications

• Next-generation / 5G mobile• 5G infrastructure / small cells• DAS / FAS• Hyper-scale data centers

• Connected home • Building management• Consumer medical

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GLOBALFOUNDRIES Stargate & SPACE Major Milestones


Year Stargate & SPACE Systems Major Milestones (Chartered Semiconductor Manufacturing)

2003 Corporate Stargate (Joint development) Offline SPACE (Transfer inline SPC data to offline SPACE for SPC reporting) 200mm Fabs ET SPACE

2004 300mm (Fab7) Inline & ET SPACE & Stargate

2005 200mm (Fab6) Inline & Equipment Input (eSPC) SPACE & Stargate Supplier Quality Management (SQM)

2006 200mm (Fab3 & 5) Inline & Equipment Input (eSPC) SPACE & Stargate

2007 300mm (Fab7) Equipment Input SPACE

2008 200mm (Fab2) Inline & Equipment Input (eSPC) SPACE & Stargate Facilities SPACE for SGP site & Stargate

2009 GLOBALFOUNDRIES (acquisition of Chartered Semiconductor Manufacturing)

2010 300mm (Fab1) ET SPACE & Stargate

2011 GLOBALFOUNDRIES-CamLine SPACE Partnership 300mm (Fab1) Inline SPACE & Stargate

2012

300mm (Fab1) Inline & ET eCAP 300mm (Fab8) Inline, ET SPACE, eCAP & Stargate 300mm (Fab7) Defect SPACE with defect map & Stargate 200mm (Fab3E) Inline, ET, Defect, Equipment Input (eSPC) SPACE & Stargate SQM extension to Fab1 & Fab8 & SQM eCAP

Major Milestones of Stargate & SPACE in GLOBALFOUNDRIES

August 26, 2016 9Confidential

GLOBALFOUNDRIES Stargate Evolution



STARGATE Evolution in GLOBALFOUNDRIES

Time1987 -2003 2003 – 2016 (Fab1,2,3,5,6,7,8,SQM,Facilities) Beyond 2016

Human errors Inefficiencies &

ineffective Limited coverage

Eliminate human errors Improve efficiencies & effectiveness Improve SPC reporting coverage Improve SPC analysis capabilities

Eliminate human errors Report generation

performance improve Flexible & robust reporting

systems

Manual reporting generation (Limited reports)

Different mechanism for report generation

Generalized data, difficult to access

Accessibility unfriendly

Pre STARGATE Era Automated report (OOC, Cpk, SPC

Maturity, Matching, . .etc)

Same mechanism for report generation

Easy to access

Require maintenance to include/exclude channel/CKC from reporting system

Report generation performance challenges

STARGATE 1 & 2 Era

Report generation performance improve

Significantly reduce the maintenance of include/ exclude channel/CKC from reporting system

More flexible & Configurable features

STARGATE 3 Era

Stargate 2 vs Stargate 3



STARGATE 2 vs 3 Reporting System

StarGate Reporting 2.X, AS-IS constraint

StarGate Reporting 3.0, TO-BE improvement

Usage constraint

Huge effort to maintain the report Query.

Difficulty in managing Report Cycle

Report generation process failure due to bottleneck.

System constraint

Report Servers is directly connected to Inline SPACE production database.

Report Servers is loading directly into Stargate production database.

Complication system configuration

Usage improvement Report setup flexibility. Offline Analysis with

Raw data. (eg: TtTM design ride-on) Easier maintenance of report Query Improve web interface query speed (2 to 3x

faster).

System improvement Reporting Servers decoupled from SPACE

boxes Improve performance to allow multiple

SPACE to load data to one StarGate. 3 to 5 times faster

Restructured to conventional data warehousing design

Current StarGate 2.X Reporting (AS-IS)

StarGate Reporting 2.x and 3.0 Architecture

StarGate DWH

SPACE instance network e-Biz network

Load

SPACE ServerStarGate Web

Apps 2.7Report

InstanceSPACEInstance

Extract

N e w S t a r G a t e 3 . 0 R e p o r t i n g ( T O – B E )

SPACE Server

SPACEInstance

New StarGate

Holding DB

New StarGate DWH 3.0

SPACE instance network e-Biz network

LoadStarGate Web

Apps 3.0Extract


GLOBALFOUNDRIES Stargate Reporting System

Report Type Description

Customer Reports

Specific customer report on SPC indices (eg : Cpk, %OOC). Typically used in monthly basis

Mea Plan Measurement Plan (similar to control plan) which indicates information of the chart setting (eg : Parameter Name, Chart filter keys, Spec limit, Control limit, OOC rules, Control limit strategy, . .etc)

SPC Mgmt SPC charts with %OOC<target & Cpk>Target reports. Typically is used by module or individual engineer to view what are the performance of stability & capability

SPC Eng SPC %OOC. Typically is used by module or individual engineer to view what are the charts OOC since yesterday morning until today morning.

SPC Maturity Evaluation of the health of SPC chart which cover number of min OOC rules turned on, control limit quality, stability (%OOC) & capability (Cpk) performance over time. Typically is used by module or management to view the overall status of the SPC health within a module or Fab

Proper Charts

Evaluation of the SPC chart control limit quality by checking latest performance of the control limits with control limits that set on the chart

Matching Rpt Assessment & evaluation of the tools (ckc) matched against the baseline or spec target

Limit Chg Tracking of the control limit changes over time for each SPC/ckc channel

StarGate Overview

Tree


StarGate Overview

Example3.1 Click on “SPC Management”3.2 Web Tree of SPC Management will be displayed at left

Web Tree (Most Common use)

Setup : All setup charts (non D0) indices

D0 : All D0 (Particle) charts indices

Inline Module : Inline product charts indices by module

Inline Product : Inline product charts indices by Technology

ET : ET charts indices

EQPT : All input parameters (eg : Temperature, pressure) indices

Tree

StarGate Overview – SPC Management

Criteria

Cpk & %OOC performance over time

Cpk & %OOC Categories

Drill down available to the detail page




%OOC performance over time

Cpk performance over time

1st level Pareto by module on # of charts with %OOC>10%

2nd level Pareto by Parameter on # of charts with %OOC>10%


StarGate Overview – SPC Engineering

Drill down available to the detail page

Used by engineers to view their daily OOC chart

StarGate Overview – SPC Engineering :Tool Matching Reports

Identify statistically different performing tools Evaluated for 2 tools: process tools and metrology tools ANOVA test is performed to detect chart with mismatched tool Identify mismatched tool comparing the delta median of individual tools and all tools.


StarGate Overview – SPC Engineering :Summary Statistics

Derive Statistics which available in Summary Statistics Report which cover below charts ;

Raw

xBar

Sigma

Range

MS

MA

EWMA(xBar)

EWMA(R)

EWMA(S) charts

StarGate Overview – Proper Chart Report

Detail report

Summary of Control Limit Quality check report over time


StarGate Overview – SPC Maturity

Detail report

Summary of SPC maturity performance over time

StarGate – Other Key Features

Stargate Dashboard which allow individual user design the reports that he/she would like to view in periodic basis. It is based on individual login

Allow multiple filtering & sort in detail reports

Allow to export to excel and xml format

Allow to add bookmark to report with fix date or current date


Stargate 3 Key Features

StarGate 3 – Key Features

Easy configuration to map different SPACE LDS based on extractor, data & customer fields keys across different SPACE instances.



1. Allow to configure different report generation for different Categories (tree)

2. Allow to configure report generation up to 3 levels grouping. (Current SPACE report definition only allow 1 level grouping)

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StarGate 3 – Key FeaturesAllow to configure different SPACE LDS with different SPC Maturity criteria

Available SPC Maturity Criteria

Assigned SPC Maturity Criteria

SPACE LDS


StarGate 3 – Key FeaturesFlexible filtering criteria. Allow Stargate administrator to add, remove and edit easily.


Allow to multi select the areas & display the indices


StarGate 3 – Key FeaturesAllow to calculate the control limit & apply it directly to SPACE chart

StarGate 3 – Sample commentAllows to append violation comment to SPACE.


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Lee Koong Leng - camLine · 26.08.2016 · LineWorks STARGATE Version 3.0.0 ... tions. Exciting new...

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