Mechanical booster pumps (a.k.a. "Roots Blowers") can be used on the inlet of primary roughing pumps, such as oil-sealed

rotary vane pumps, dry pumps, scroll pumps or water ring backing pumps to improve the pumping speed in the 75 Torr to 0.75m

Torr pressure range, where pumping speeds of roughing pumps often falls off dramatically.

The PRC-A Roots type pump series is designed for general purpose, semiconductor and liquid crystal display processes which

require extreme cleanliness of the pump, both inside and out.

The PMB-040C & 060C models are well suited for the large volume evacuation required by vacuum heating and vacuum

melting furnaces, and other large volume pumpdown work such as space simulation chambers.

Mechanical Booster Pump [PRC-A/PMB-C(M) Series]

Oil-free by Design These pumps use no oil in the pumping chamber resulting in stable

performance even when evacuating water vapor or solvent vapors.

Special Surface Coating The pumping lobes and chamber walls are coated with a special

surface coating made of strong, lightweight aluminum alloy which provides excellent corrosion resistance and surface protection inside the pump.

Abrasion and corrosion (wear and tear) inside the pump is greatly reduced.

Shorter Evacuation Time The PRC-A (atmospheric pressure operation type) and PRC-CM

series are switched on at the same time as the roughing pump starts. Starting these pumps simultaneously at atmospheric pressure shortens evacuation time considerably.

Vertical or Horizontal Exhaust can be Configured (PMB-024C(M), 040C, 060C)

The exhaust port location on the pump can be changed from the vertical to the horizontal direction if required.

This feature enhances design flexibility and makes very compact system layouts possible.

Features

Evaporation, sputtering, ion plating

Vacuum drying, freeze drying and outgassing

Scientific instrumentation, leak test systems

Gas exchange, gas filling and vacuum insulation

Vacuum heating furnace, vacuum melting furnace

Large process systems and space simulation chambers

Appl icat ions

PRC-006A

PMB-003C

Low Vacuum Pump

Low Vacuum

Pump

PMB-001C (M) PRC-012A (Atmospher ic Pressure Operat ion Type)

PMB-024C (M) Ver t ica l Exhaust Model

PMB-024C (M) Hor izonta l Exhaust Model

PMB-003C (M)

PRC-003A (Atmospheric Pressure Operation Type)

PRC-006A (Atmospheric Pressure Operation Type)

Dimensions

Flange to �ange

dia.

150

30

8 80 9077 90 18

0

217271

117

173

79

429580

153113

25

208104 104

(Separate Exhaust Port for Bearing Lubrication ChamberG3/8 Optional)

Totally-Enclosed Fan-CooledFlange induction Motor

3 Phase 0.4kW 2PAC200V/50Hz，60Hz AC220V/60Hz

Oil Drain Cap for Mechanical Seal

Outlet FlangeVF504-M8 Tap，Central diameter φ100

Oil DrainCap

OilCap

Oil Cap for Mechanical Seal

Oil LevelGauge

Inlet Flange VG504-M8 Tap, Central diameter φ100

485

400 175

212

81

218

275

359 .

5

dia.

273

357

(152)

360 140540759

124 .5＊

(20) 406203 203188

112

113

4 -dia.15

140 140170

320

4293 118

155

155

185 34

0

Oil supplyport plug

Oil drainport plug

Cooling Water Outlet Rc 3/8Cooling Water InletRc 3/8

Inlet FlangeJIS B 2290 VG100

＊1 Motorcontrol device

Outlet FlangeJIS B 2290 VF80

（対面）

328615 215

208245

534

235 195215

510(540)

210

4021

0

288 328

817 367

480

420

1184

145

55

155

270 264

143

138

(14 )

880

75 75

185 185

4-dia.18.5

dia.

250 90

288280

Outlet FlangeJIS B2290 VF200

Oil Level Gauge

Inlet FlangeJIS B2290 VG200

Oil Drain Cap forMechanical Seal

Moter 7.5kW, 2P

Cooling Water Inlet

Cooling Water OutletRc 1/2

Oil Cap

Oil Cap forMechanical Seal

Separate Exhaust Port for BearingLubrication ChamberG3/8 Optional

Oil Drain Cap

280215615

155

460

367

380

20

817

1184

dia.

250

288

880

185 185

208

245

215615

615

295

90

288 328

264

264

528

328 288

210 210420

215

190 190

145

75 75

55

Oil Cap forMechanical Seal

Inlet FlangeJIS B2290 VG200

Cooling Water InletRc 1/2

Separete Exhaust Port forBearing Lubrication Chamber(option)

Cooling WaterOutlet Rc 1/2

Oil Drain CapOil Drain Cap forMechanical Seal

4-dia. 18.5

Moter 7.5kW, 2P

Outlet FlangeJIS B2290 VF200

Oil Cap

Oil Level Gauge

45

152 151

dia.

163

185 115152 163

656

77(2

2 )(22 )

77

461 195

296

dia.135

330

119

120 12025

24 9430

115

115

90

230

290

(50)

(40) 4-dia.12

(Separate Exhaust Port for BearingLubrication ChamberG3/8 Optional) Oil

Cap

Oil Cap forMechanical SealTotally-Enclosed Fan-CooledFlange induction Motor 3 Phase 0.75kW 2P　

AC200V/50Hz，60Hz AC220V/60Hz 　　　　　　　

Oil Drain Cap

Oil LevelGauge

Oil Drain Cap for Mechanical Seal

Cooling Water InletG3/8（PF3/8） 　　　　

Cooling Water Outlet G3/8（PF3/8）

Inlet Flange VG804-M10 Tap, Central diameter φ135

Outlet Flange VF804-M10 Tap, Central diameter φ135

151163301

330

196369

185 115

(86) 575

155 141296

2477 94 115

145 26

0115

25

270120 120 4 - dia.12

97＊

Cooling Water InletRc 3/8 Cooling Water Inlet

Rc 3 / 8

＊1 Motor control device

Inlet FlangeJIS B 2290 VG80

（対面）

Oil supplyport plug

Oil drainport plug

Outlet FlangeJIS B 2290 VF80

618.5

97＊

(121)

145

145

120

32

(5.6)

4-dia.12

338 179166

406 212.5

250 110

356178 178

95

175 32

0

130 130300400

Cooling Water InletRc 3 / 8 Cooling Water Outlet

Rc 3 / 8

Inlet FlangeJIS B 2290 VG80

Oil drainport plug

（対面）

Oil supplyport plug

＊1 Motor control device

Outlet FlangeJIS B 2290 VF80

Unit: mm Unit: mm

Unit: mm

Unit: mm

Unit: mm

Unit: mm

Unit: mm

＊1 Motor controller is included in the atmospheric pressure operation type.

Mechanical Booster Pump [PRC-A/PMB-C(M) Series]

Oil supplyport plug A

900（50Hz）940（60Hz）

1608772

420

120

70

250 250580

70

18

680 64

8

370

235

32

475

205

352

Outlet Flange（A）VF200（JIS B2290）

Outlet Flange（B）VF200（JIS B2290）

Inlet FlangeVG300（JIS B2290）

Oil drain port(opposite side) A

Belt Cover

V-Belts5V-1120×2

Moter 18.5kW/4PWith slide base Motorized pulley50Hz φ300, 60Hz φ250

720

25

215

18

7

1452

3262

1000 732

170170

540555310

680

φ400

φ315

φ20

0

φ300

310

43 52

800

Oil drainport plug B

Cooling WaterInlet RC1/2

Cooling WaterOutlet RC1/2

Inlet flange filter

PCD370

4-φ28Hole

12-φ15Hole

Oil level gaugeOil levelgauge

Oil supplyport plug B

＊2 ＊2

Oil supplyport plug A

585

25

215

18

7

1182

2982

1000 597

120120405420195

440

φ350φ265

φ20

0

φ250

195

43 52

800

1570772

420120

70

250 250580

900（50Hz）940（60Hz）

70

18

680

648

370

210

32

510

170

352

Oil supplyport plug B

Outlet Flange（B）VF150（JIS B2290）

Outlet Flange（A）VF150（JIS B2290）

Inlet FlangeVG250（JIS B2290）

Oil drainport plug B

Oil drain port(opposite side) A

Belt Cover

V-Belts5V-1120×2

Moter 15kW/4PWith slide base Motorized pulley50Hz φ300, 60Hz φ250

Cooling Water InletRC1/2

Cooling WaterOutlet RC1/2

Inlet flange filter

PCD320

4-φ28Hole

12-φ15Hole

Oil level gaugeOil level gauge

＊2 ＊2

PMB-040C

PMB-060C

Pumping Speed Curve

Unit: mm

Unit: mm

600

500

400

300

200

100

00

10000

8000

6000

4000

2000

10 10210 103 104 1×105 Pa

1 1010-110-3 101 102 7.6×102 Torr

(Note : 1mbar=100Pa)

L/min m3/h

Pum

ping

Spe

ed

Pressure

VD901VD601VD401

PMB-001C 50Hz

PMB-001C 60Hz

PMB-003C 50HzPRC-003A 50Hz

PMB-003C 60HzPRC-003A 60Hz

PRC-006A 50Hz

PRC-006A 60Hz

50000

40000

30000

20000

10000

3000

2500

2000

1500

1000

500

L/min m3/h

00

Pum

ping

Spe

ed

VS1501PKS-070

PRC-012A 50Hz

PRC-012A 60Hz

PMB-024C 50Hz

PMB-024C 60Hz

10 10210 103 104 1×105 Pa

1 1010-110-3 101 102 7.6×102 Torr

(Note : 1mbar=100Pa)Pressure

00

100000

80000

60000

40000

20000

6000

5000

4000

3000

2000

1000

L/min m3/h

Pum

ping

Spe

ed

10 10210 103 104 1×105 Pa

1 1010-110-3 101 102 7.6×102 Torr

(Note : 1mbar=100Pa)Pressure

PKS-070PKS-070×2

PMB-040B

PMB-060B

Type : PMB-001C, 003C, PRC-003A, 006AForepump : PMB-001C: VD401 PMB-003C, PRC-003A: VD601 PRC-006A: VD901Power : AC200V 50/60Hz 3φOil : ULVOIL R-4Gauge : Pirani : Capasitance Manometer

Pumping Speed(JIS B8316/1985)Type : PRC-012A, PMB-024CForepump : PRC-012A: VS1501 PMB-024C: PKS-070Power : AC200V 50/60Hz 3φOil : ULVOIL R-4Gauge : Pirani : Capasitance Manometer

Pumping Speed(JIS B8316/1985)Type : PMB-040C, 060CForepump : PMB-040C: PKS-070 PMB-060C: PKS-070×2Power : AC200V 50/60Hz 3φOil : ULVOIL R-7Gauge : Pirani : Capasitance Manometer

Pumping Speed(JIS B8316/1985) PMB-001C

PMB-003C

PRC-003A

PRC-006A

PRC-012A PMB-024C

PMB-040C PMB-060C

＊2 Minimun space necessary for maintenance.

ULVAC, Inc. Components Division www.ulvac.co.jp/eng

Overseas Sales in Japan TEL +81-467-89-2261

USA : ULVAC Technologies, Inc. TEL +1-978-686-7550 PHILIPPINES : ULVAC Singapore Philippines Branch TEL +63-2-828-7700GERMANY : ULVAC GmbH TEL +49-89-960909-0 VIETNAM : ULVAC Singapore Vietnam Representative Office TEL +84-8-62556762CHINA : ULVAC (SHANGHAI) Trading Co.,Ltd. TEL +86-21-6127-6618 THAILAND : ULVAC (THAILAND) LTD TEL +66-2-312-4447TAIWAN : ULVAC TAIWAN, Inc. TEL +886-3-579-5688 MALAYSIA : ULVAC MALAYSIA SDN. BHD. TEL +60-3-5121-4700KOREA : ULVAC KOREA, Ltd. TEL +82-31-683-2922 INDIA : ULVAC, Inc., India Branch TEL +91-40-27007006SINGAPORE : ULVAC SINGAPORE PTE LTD TEL +65-6542-2700

This catalog is subject to change without notice. This catalog is published in order to sell this product in overseas. Please see Japanese catalog when purchasing in Japan.

Speci f icat ions

1327E/2012062000UYO

＊1 Measurement value at 13Pa.＊2 When the optional large capacity motor is mounted, a greater inlet pressure and larger pressure differential is possible. (Only PMB-003C, PMB-024C)＊3 Measured with a Pirani gauge. (With standard backing pump and oil.)＊4 With the PMB-024CM, the repeated pumpdown time from atmospheric pressure to 5 Torr should not exceed 5 minutes. Also, allow a 5 minutes interval between successive pumpdowns.＊5 AC200V 50Hz/60Hz, 220V/60Hz, 3phase. Other voltage is available upon request.＊6 Other oil types are available, upon request.＊7 Oil capacities in ( ) are for models with the horizontal exhaust direction type.＊8 Weights in ( ) are for PMB-CM and PRC-A atmospheric pressure operation models.

Pressure/explosion proof and increased safety explosion motors are not available for the PRC-A series.

ModelPMB-001C,CM

PMB-003C,CM

PRC-003A PRC-006A PRC-012A PMB-024C,CM PMB-040C PMB-060C

Actual pumping

speed ＊1 50Hzm3/h 95 280 500 1000 2000 3800 6200L/min 1580 4670 8330 16700 33300 63300 103300CFM 56 165 294 590 1176 2235 3648

60Hzm3/h 115 330 600 1200 2400 3800 6200L/min 1920 5500 10000 20000 40000 63300 103300CFM 68 194 353 706 1413 2235 3648

Maximum suction

pressure ＊2 50HzPa 9.3×103 1.2×103 1.3×103 8.0×102

Torr 69 9 10 6mbar 93 12 13 8

60HzPa 6.2×103 9.3×102 1.1×103 6.7×102 8.0×102

Torr 46 7 8.2 5 6mbar 62 9.3 11 6.7 8

Maximum allowable

differential pressure ＊2 50HzPa 8.0×103 4.0×103 7.3×103 5.6×103

Torr 60 30 55 42mbar 80 40 73 56

60HzPa 5.6×103 3.3×103 6.0×103 4.7×103

Torr 42 25 45 35mbar 56 33 60 47

Ultimate pressure ＊3 Pa 4.0×10-1 6.7×10-1

Torr 3.0×10-3 5.0×10-3

mbar 4.0×10-3 6.7×10-3

Allowable drive pressure *4(with PRC-A atmospheric pressureoperation type and PMB-CM)

Pa to 1.0×105

Torr to 760 mbar to 1000

Motor ＊5 kw(number of poles) 0.4 (2) 0.75 (2) 2.2 (2) 3.7 (2) 7.5 (2) 15 (4) 18.5 (4)HP(number of poles) 0.54 (2) 1.0 (2) 2.95 (2) 4.96 (2) 10.0 (2) 20.1 (4) 24.8 (4)

Oil ＊6 ULVOIL R-4 ULVOIL R-7Oil capacity ＊7 L 0.35 0.7 1.5 1.9 4.0 (2.2) 8.0

Cooling water

Cooling method Air cooled Both air and water cooled Water cooled

Primary side pressureMPa 0.3 0.1 to 0.3psi 43.5 14.5 to 43.5

Inlet/outlet differential pressure

MPa 0.05 0.01 0.05psi 7.25 1.45 7.25

Cooling water volume L/min 2 3 10

Cooling water temperature°C 5 to 30°F 41 to 86

Inlet port diameter JIS B2290 Corresponds to VG50 Corresponds to VG80 Corresponds to VG100 Corresponds to VG200 Corresponds to VG250 Corresponds to VG300Outlet port diameter JIS B2290 Corresponds to VF50 Corresponds to VF80 Corresponds to VF200 Corresponds to VF150 Corresponds to VF200External dimensions W×D×H mm 271×580×180 290×656×260 296×565×260 356×619×320 406×759×340 540×1237×470 772×1182×680 772×1452×680Weight ＊8 kg 22 (23) 46 (48) 51 (54) 86 (90) 118 (123) 260 (272) 970 without motor 1110 without motorStandard backing pump VD401 VD601 VD901 VS1501 PKS-070 PKS-070ｘ2units

Options 1.5kw (2P) motor Atmospheric pressure operation type 11kw (2P) motor Separate exhaust port for bearing lubrication chamber

Mechanical Booster Pump [PRC-A/PMB-C(M) Series]