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Mechanically joined sputtering target

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Coating Apparatus U.S. Patent 5,529,627. June 25, 1996 B. Ocker and M. Saunders, assignors to Leybold AG, Hanau, Germany A coating apparatus comprising a sput- tering cathode bearing a set of magnets and disposed within a coating chamber, Ultrasonic Cleaning of Interior Surfaces U.S. Patent 5,529,635. June 25, 1996 D.M.C. Odell, assignor to The United States of America as represented by the United States Department of Energy, Washington A method for cleaning an interior sur- face of a tube having a first end and an opposing second end comprising coupling an ultrasonic wave generator to the first end of the tube; coupling a sound reflector to the second end of the tube, said sound reflector and ultrasonic wave generator be- ing spaced a distance apart; filling the tube with a fluid; generating an ultrasonic stand- ing wave in the fluid causing cavitation at the nodes; and moving the nodes with re- spect to the tube by varying the distance between the ultrasonic wave generator and the sound reflector. Mechanically Joined Sputtering Target U.S. Patent 5,529,673. June 25, 1996 D.P. Strauss et al., assignors to Sony Corp., Tokyo and Materials Research Corp., Orangeburg, N.Y. A target assembly removably mountable in an opening in a wall of a vacuum cham- ber for processing a substrate by causing sputtering material to be ejected from the target assembly onto the substrate. Platinum Electroforming U,S. Patent 5,529,680. June 25, 1996 K. Kitada and S. Yarita, assignors to Electroplating Engineers of Japan Ltd., Japan A method for preparing a hollow plati- num product comprising electroforming a layer of platinum material onto a mandrel in a platinum electrolyte bath, wherein the platinum electrolyte bath comprises at least one compound selected from the group consisting of chloroplatinic acid, chloro- platinates of alkali metals, hydrogen hexahydroxyplatinate, and hexahydroxy- platinates of alkali metals, 2-1000 g/L as platinum; and a hydroxylated alkali metal, 20-100 g/L, and a soluble carboxylate; and releasing the layer of platinum material from the mandrel; said layer throughout a thickness range of 1.64-150 pm shows no crack under microscopic examination. Removing Oil From Cleaning Solution U.S. Patent 5,529,702. June 25, 1996 T.J. Segrave and W.D, White, assignors to American Coating TechnologiesInc., Greenville, N.C. A method of continuously removing oil from a large metal parts cleaning tank and a cleaning solution contained therein. Hot-Dip Zinc Plating Method U.S. Patent 5,529,810. June 25, 1996 N. Sugawara, assignor to Nippon Mining & Metals Co. Ltd., Tokyo A hot-dip zinc plating method, compris- ing subjecting a rimmed steel to plating in a first zinc bath at a temperature of 460 to 490°C and for a dipping time of from 1 to 1.5 min, said first zinc bath being selected from the group consisting of a zinc bath consisting essentially of zinc having a pu- rity of at least 99.7% by weight and a zinc bath consisting essentially of zinc and 0.05% by weight or less of aluminum; and subjecting to plating in a second zinc bath at a temperature of 400 to 430°C and for a echo supply 1026 Hanson Court MJpitas, CA 95035 Order Line: 800-878-6924 4O8-945-O325 Fax 408-945-0336 5375 W. 86th St. Indianapolis, IN 46268 Order Line: 800-783-2461 317-876-8848 Fax: 317-875-0035 Circle 025 on reader information card vvrrvvlvp, w, ,?'V?'IVlVlVlVlV V Electro-Steam Corp. (800)634-8177 Circle 028 on reader information card .q# METAL FINISHING ° MARCH 1997
Transcript
Page 1: Mechanically joined sputtering target

Coating Apparatus U.S. Patent 5,529,627. June 25, 1996 B. Ocker and M. Saunders, assignors to Leybold AG, Hanau, Germany

A coating apparatus comprising a sput- tering cathode bearing a set of magnets and disposed within a coating chamber,

Ultrasonic Cleaning of Interior Surfaces U.S. Patent 5,529,635. June 25, 1996 D.M.C. Odell, assignor to The United States of America as represented by the United States Department of Energy, Washington

A method for cleaning an interior sur- face of a tube having a first end and an opposing second end comprising coupling an ultrasonic wave generator to the first end of the tube; coupling a sound reflector to the second end of the tube, said sound reflector and ultrasonic wave generator be- ing spaced a distance apart; filling the tube with a fluid; generating an ultrasonic stand- ing wave in the fluid causing cavitation at the nodes; and moving the nodes with re- spect to the tube by varying the distance between the ultrasonic wave generator and the sound reflector.

Mechanically Joined Sputtering Target U.S. Patent 5,529,673. June 25, 1996 D.P. Strauss et al., assignors to Sony Corp., Tokyo and Materials Research Corp., Orangeburg, N.Y.

A target assembly removably mountable in an opening in a wall of a vacuum cham- ber for processing a substrate by causing sputtering material to be ejected from the target assembly onto the substrate.

Platinum Electroforming U,S. Patent 5,529,680. June 25, 1996 K. Kitada and S. Yarita, assignors to Electroplating Engineers of Japan Ltd., Japan

A method for preparing a hollow plati- num product comprising electroforming a layer of platinum material onto a mandrel in a platinum electrolyte bath, wherein the platinum electrolyte bath comprises at least one compound selected from the group consisting of chloroplatinic acid, chloro- platinates of alkali metals, hydrogen hexahydroxyplatinate, and hexahydroxy- platinates of alkali metals, 2-1000 g/L as platinum; and a hydroxylated alkali metal, 20-100 g/L, and a soluble carboxylate; and releasing the layer of platinum material from the mandrel; said layer throughout a

thickness range of 1.64-150 pm shows no crack under microscopic examination.

Removing Oil From Cleaning Solution U.S. Patent 5,529,702. June 25, 1996 T.J. Segrave and W.D, White, assignors to American Coating Technologies Inc., Greenville, N.C.

A method of continuously removing oil from a large metal parts cleaning tank and a cleaning solution contained therein.

Hot-Dip Zinc Plating Method U.S. Patent 5,529,810. June 25, 1996 N. Sugawara, assignor to Nippon Mining & Metals Co. Ltd., Tokyo

A hot-dip zinc plating method, compris- ing subjecting a rimmed steel to plating in a first zinc bath at a temperature of 460 to 490°C and for a dipping time of from 1 to 1.5 min, said first zinc bath being selected from the group consisting of a zinc bath consisting essentially of zinc having a pu- rity of at least 99.7% by weight and a zinc bath consisting essentially o f zinc and 0.05% by weight or less of aluminum; and subjecting to plating in a second zinc bath at a temperature of 400 to 430°C and for a

e c h o s u p p l y

1026 Hanson Court MJpitas, CA 95035

Order Line: 800-878-6924 4O8-945-O325

Fax 408-945-0336

5375 W. 86th St. Indianapolis, IN 46268

Order Line: 800-783-2461 317-876-8848

Fax: 317-875-0035

Circle 025 on reader information card

v v r r v v l v p , w, , ? ' V ? ' I V l V l V l V l V

V • • • • • • •

Electro-Steam Corp. (800)634-8177 Circle 028 on reader information card

.q# M E T A L F IN ISHING ° M A R C H 1997

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