MF/s Series MEMS Mass Flow Meters - IDENTIC - · PDF file · 2014-06-18the pipe...

© 2014 Siargo Ltd.

MEMS Mass Flow MetersSIARGO MEMS FLOW SENSING PRODUCTS

User Manual (VA.0)

MF/s-Series

MEMS Mass Flow Meters

MF/s Series

User Manual Document No. 04-2014-2 EN

Issue date: 2014.04

Revision: A.0

Siargo Ltd. 2041 Mission College BoulevardSuite 250

Santa Clara, California 95054 USA

Tel: +1(408)969.0368

Email: [email protected]

© Copyright 2014 by Siargo Ltd.

Siargo Ltd. and its subsidiaries reserve the rights to change the specifications and/or

descriptions without prior notice. For further information and updates, please visit:

www.Siargo.com

1

Safety

This product is designed for measurement and/or monitor of flow rate for city natural gas applications. The product safety rating is Ex ia II C T4. All standard explosive gas handling procedures must be observed for safety during installation and meter usage.

This product is powered with lithium ion battery as a standalone unit. When connecting the RS485 communication port with external power, electrical wire and installation with the intrinsic device safety procedure must be observed.

The operational ranges of the product are described by its specifications in this manual. Please make sure each of the specifications is fully understood, and acquire the full knowledge of the field where the product will be installed. Please consult the manufacturer before applying it in other working conditions, otherwise the product may not function properly or would be damaged or cause other irreversible consequences with personnel endangered.

Before full operation, leakage test must be performed after installation for safety.

All local regulatory requests should be observed and verified for additional safety precautions.

The product performance requires pre-calibration that would best be applied to the required conditions. Use of the product in other conditions may lead to unexpected results or even to unrecoverable damage.

Operation, installation, storage, and maintenance of the product must strictly follow the instructions of this user manual. It is highly recommended that the maintenance should be performed by skilled personnel or trained operators. Unpredicted consequences may otherwise be caused. All the installation, storage, and maintenance of the product must be handled by qualified operators. This user manual should be placed near the product for easy access.

Before using the product, the user should read this user manual carefully and completely.

It is recommended that the product should be re-calibrated and maintained in every two years or at a time period if deemed necessary.

MF/s Series MEMS Mass Flow Meter User Manual

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Cautions

1. Do not apply this products to any gas medium that contains excessive liquid or solid debris, that may lead to malfunction or unrecoverable damage of the product.

2. Do not change any software and hardware of the product. All software and hardware of the product have been certified at the time of manufacture.

3. Do not use any unit of the product if suspect of malfunction.

4. Do not use this product in any excessive radiation or vibration environment.

5. Only qualified or accredited personnel by Siargo can perform repair services. Siargo shall not be liable to any products that have be altered or damaged before shipping for product verification and services.

6. When communicating with the meter via the communication port, such as download the historical data from the meter, it is highly recommended that a Siargo handheld accessory is used to avoid direct unsafe electrical connection.

7. The product body is made of aluminum alloy, do not hammer or use sharp tooling during installation.

8. The meter connection are threaded with NPT standard, please make sure the pipe connectors have the same thread. Force connection would cause unpredicted damage and/or irrecoverable malfunction.

9. The battery pack should not be combined with any lithium ion battery on market. Consult manufacturer for battery requirements or obtain the replacement from manufacturer.

10. Read the manual carefully before processing of any maintenance or troubleshooting.


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Table of Content

Usage 1Cautions 2Introduction 4Working principle 4Description 5Dimensions 5Product selection 6Package description 6Installation 6Specifications 9Meter function 10Safety 14Maintenance 14Troubleshooting 15Storage 15Customer support 15Warranty 16

The MF/s series MEMS mass flow meters are designed for industrial gas process metering, control and management. The products directly meter the gas mass flowrate and data safety and process. They also are readily for remote data management via RS485 Modbus or 4~20mA protocol. the products can be selected for pipe diameter from 25 to 80 mm with standard accuracy of ±(2.0+0.5FS)%.

The products are manufactured with reference to Q/77453766-1·1-2012 and ISO-14511.

The products have the following features,

Proprietary low power MEMS mass flow sensing technology

Direct mass flow metering without additional temperature and pressure compensation

Easy Installation

Stainless steel enclosure readily for various gases

In meter data storage for data safety and downloadable for further process

RS485 Modbus or 4~20mA remote data protocol

Large dynamic measurement range

本系列产品分详细的型号如下:


Introduction

Working principle

Flow direction

Free stream

Laminar

Turbulent

Sensor

Time-averaged velocity profile boundary layer

The MEMS flow sensor senses flow by the calorimetric thermal mass flow measurement principle. A micro-heater is placed in the middle of the two temperature thermistors symmetrically at the up-

stream and down-stream, respectively. The cavity below the micro-heater and sensors plays the role of thermal isolation and pressure balance as it is filled with the gas to be measured. When the gas flow

passes through the micro-heater, heat will be carried away by the flow medium. The temperature

differences measured by the up- and down-stream temperature thermistors are directly proportional to the mass flow of the flow medium. By calibration at the predefined or reference standard conditions, the flow data at the MEMS flow sensor can be properly registered. Compared to the traditional thermal mass flow sensing configuration, the MEMS mass flow sensor can be packaged into a plate as indicated by the above graph. The MEMS sensor assembly is then placed into the flow channel and the plate assembly serves as the additional flow conditioning due to the boundary layer configuration resulting in a laminar flow. This package also enables the possibility of gas conversion for various type of gases.

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Description

The meter parts are show in the following graph. The MEMS mass flow sensor are enclosed inside the merter head and a flow conditioner is also placed inside the flow channel of the meter body. The meter displays instant and accumulated mass flowrate.

Display and meter head

Threaded or flanged

Flow direction

User interface connector

Meter body

Dimensions

BSPT threaded meter dimensions

Models L1 L2

MF25 248

DN

MF32 250

25

32

CANSIB1.20.1NPT flange standardRef.

MF50 254 32050

H1 H2

118.5 95

H3 H4

80 158.5

H5

154.5

W

80

D d K n-L

115 85 4 -φ14

140 100 4 -φ18

25

32

165 125 4 -φ1850

312

316

70

70

90.5

98.5

67

75

52

60

110.5 117.5

132.5

C

NPT 2

NPT 1

NPT 1¹/₄

H6

154.5

94.0

Flanged meter dimensions

134.0 109.0

Note: For other models, please contact manufacturer.

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n-L

ΦD

ΦK

L2

H3

H4

H5

56

Φd

H6

128

Total

Flow

L1

128 56

W

H1

H2

H3

C

Φd

Total

Flow


Product selection

-MF e/s

Gas ( A - Air; N - Nitrogen; O - Oxygen; R - Argon; C - Carbon dioxide. For other gases, please contact manufacturer)

Output interface (N - null; A - 4 ~2 0 mA; B - RS485 . A and B can be selected together)

Connections (N - NPT; B - BSPT or F - flanged)

-

Pipe diameter, DN (25, 32, 40, 50, 65 or 80 mm)

The selection of the products must observe the following rules,

Package description

Upon unpacking the product, the followings should be intact from the shipping container:

1) This product 2) Cable 3) User Manual 4) QC document or product certificate the product physical integrity should be inspected to ensure no visual damage can be observed. If any items as listed above are missing or any physical damages are observed.

Please contact the manufacturer and/or the shipping agents to place a return/exchange or to identify the cause during the transit. If you are uncertain of the installation or have any questions about the shipment, please also contact the manufacturer or the shipping agents before further process.

Installation

Cautions1. The meter can be either installed horizontally or perpendicularly. A horizontal installation is recommended

for easier meter reading.2. After the installation pipe is prepared, make sure there is no any metal particles or other harmful debris

present inside the flow channel. Avoid strong vibration sources, fire sources, direct expose to rain, or sun, or other sources that may lead to safety issues.

3. Ensure the product is free of visible damages. And check the status of meter power, make sure there is no abnormal in display or other indications.

4. Engage the meter with the prepared installation pipe, make sure the thread or flange can properly seal. Check the meter position and make sure there is no twists or other mechanical faults.

5. The flow measurement direction marked on the meter should be aligned with the flow direction in the flow channel.

6. It is recommended that a high efficient filter should be installed before the meter. 7. To ensure the proper operation of the meter, make sure that there is no presence of foreign gases other than

the designated ones. 8. The meter should be installed avoiding valves, sharp turns and other obstacles close to the meter.

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Recommended installation steps:

(1) Check the meter and make sure there is no physical damages;

(2) Connect the meter with the clean pipelines. Use the pipe gas to clean up the debris or other foreign materials. Ensure the pipeline is clean before installation. Note: (a) a high efficiency filter should be installed upstream to avoid direct particle impact; (b) at least 10XDN straight pipeline should be kept in front of the meter and 5XDN straight pipeline should be installed at the exit of the meter.

Rear pipeFront pipe Meter

Direction

10DN 5DN

Filter

Direction

Direction

(a) 90 degree or T - pipe

(e) Two 90 degree pipes on different plane

(b) From large to small pipe

(d) From small to large pipes

(f) After the valves

Direction40DN 10DN

Direction20DN 10DN

Direction15DN 10DN

40DN 10DN Direction40DN 5DN

30DN 10DN

15DN 5DN

In the following field cases, the straight pipelines before and after the meter should be extended as shown below:

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(4) If the remote data cable needs to be connected, make sure the user interface wire instructions are read before start the wiring.

(5) Before open the valves connected to the pipes, check the meter. If the meter is measuring a trace flow, check the leakage of the pipeline including the possibility of the valve leakage.

(6) After completed the installation, open the valves at up and down stream. The meter should start the reading.

(1) The electrical wielding of the pipelines with the meter installed is prohibited;

(2) The pipeline must be ensured to be clean before installation of the meter(s);(3) The sealing gasket must not be intruded into the flow channel; The alignment must be properly

done before engagement of the meter;(4) A high efficient particle filter (<50 µ) is strongly recommended at the upstream of the meter;(5) After the installation, the pipeline should be free of stress;(6) It should avoid the presence of strong magnetic or vibrational field.(7) It should avoid the abruptly open or close the valve that may create strong pulse flow causing the

instability of the system.

(3) Engage the meter to the pipeline and start the installation.

(a) It is recommended to start the connection of the upstream of the meter (b) The seal gasket should not intrude into the flow channel. The size of the gasket should not be

smaller than the inner diameter of the flow channel. Avoid liquid penetration into the channel. (c) The inner diameter of the meter pipe should be identical to that of the pipeline. (d) Graphs below are referred to ISO14511 installation guidance.

1 2 21


Additional cautions

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(1) The automatic data storage keeps up to 1000 data entries.

(2) The data storage can be programmed to save the data every 3 to 240 minutes. Each data entry includes time (mm/hh/date), instant flowrate and totalized flowrate. Maximum 2000 data entries can be stored.

(3) 1000 alarm entries can be stored simultaneously including the power failure, sensor errors and other meter errors.

(4) The data can be generated into graphic format.

Model

MF25Be/s, MF25Fe/s 25 100 2

DN(mm) 3Max. flow (Nm /h)3Min. flow(Nm /h)

MF32Be/s, MF32Fe/s 32 160 3

MF40Be/s, MF40Fe/s 40 250 5

MF50Be/s, MF50Fe/s 50 400 10

MF65Be/s, MF65Fe/s 65 650 15

MF80Be/s, MF80Fe/s 80 1000 20

o-20 ~ +60 C o-10 ~ +55 C

10~90%RH (no condensation)

12~24Vdc

4 digits for instant flow; 8 digits for totalization

RS485，4~20mA

Time, instant flow, totalization; 2000 entries

Aluminum alloy or stainless steel

Aluminum alloy

BSPT or FlangedoAir (20 C and 101.325kPa)

1.0MPa

50:1

±(2.0+0.5FS)%

IP65


Specifications

Accuracy

Turn-down ratio

Max. pressure

Temperature

Gas Temperature

Humidity

Power supply

LED display

Output

Data safety

Wetted materials

Meter head

Connection

Calibration

Protection rating

Additional notes for data safety

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Operation of the function keys

Definition of the function keys

(1) At normal operation, the user interface is shown below

(2) Password interface

(3) Function selections

Warning: improperly change the parameters may cause the malfunction of the meter!

At this interface, the password can be changed at the upper line (totalization). The flashed digit shall

be the one that can be changed. press to select the desired number, then press to confirm.

Repeat the process until the password is fully input. If the 5 digits are corrected input, the interface

shall proceed to the next page otherwise it will return to the beginning.

(The default password is 11111)

Press to select other functions, and press to confirm.

Password interface User interface

A.

Default selection, i.e. “qUIT”. Press to confirm.

B.

i.e. “CLr ACC” reset totalization (accumulated flow). Press , it will appear “nO” or “yES”

options. nO indicates keeping the original and yES will reset the value. Press to select

and press to confirm:

C.

i.e. “OFFSET”. It can change the offset. Press , the “nO” or “yES” options will appear. Press to select and press to confirm. Note: when reset the offset, there must not have any flow in the flow channel.


Meter Functions

Function selection/confirmation

Page down

Page up

Press , the interface will change into the password page:

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Total

Flow

Total

Flow

D.

i.e., “SET PASS”. or set password. One can then set the password. Press , the first digit shall start to flash. Press to change the number and then press to change the next digit. Press to complete after all digits are set. Note: the default password is 11111. Please keep the password in a proper place.

在此菜单下,按键后第一位开始闪烁，按改变数字，按进入下一位，5位密

码全部设置好后，按完成。注意：默认密码为11111，请牢记更改后的密码）。设置过程显示如下:


G.

H.

i.e., “Interval”, or set response time. The default value is 125. Press to change values among 250, 500, 1000, 2000 or 4000 msec., Press to confirm.

i.e., “SET GCF”, or set gas conversion factor. The default value for air is 1000. The setting procedure is the same as for password settings, e.g.,

F.

i.e., “PrOTOCOL”, or set communication protocol. Press it will show any value among 000~255.

000 indicates a single meter communication while xxx for multiple meters. Press shall switch from one mode to another. Press to confirm, e.g.,

E.

i.e., “SET Addr”, or set the address for multiple meter communication. The address ranges are 001~255. The 000 address is reserved for single meter communication. The procedure is the saneas the password setting, e.g.,

Note: Switch between the communication protocols shall follow the following steps.

A. From single meter to multiple meter communications,

Following above procedure E, set the meter address, e.g., 006, then it shall change the address value of SET Addr to 006.

Then follow the instruction of F above, set the PrOTOCOL value to 006 (the same as that in SET Addr).

B. From multiple meter to single meter communication

Refer to the above procedure F, set the values for PrOTOCOL as well as SET Addr to be 000.

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Normal display

PasswordDefault: 11111

Correct?No

Yes

Quit

Clear Acc

Set Pass Set password

No Yes

Reset totaliza�on and exit

Set AddrSet communica�on

address

Protocol (Future app)

/Modbus (B)

Set GCFSet gas

conversion factor

Interval Response:125ms

/Response:250ms

/Response:500ms

/Response:1000ms

Response:2000ms

/

Response:4000ms

/

/Keep original

Offset No Yes

Resent offset and exit

/Keep original

Diagram for all settings

Press

Press

Press

PressPress

Press

Press Press

Press Press

Press

Press Press

Press Press

Press Press

Press Press

/Press

/Press

/Press

/Press

/Press

/Press

/Press

/Press

Press

Press

Press

Press Press

Press Press

Press


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Press

Press Press Press Press

Press

LED display

The RS485 communication is based on the standard Modbus protocol. The settings are as follows,

Baud rate 9600Data bits 8Stop bits 1Parity NoneFlow control None

The detailed descriptions can be found in a separate document upon request.

RS485 Communication

The load connection can be seen below. The external current load is dependent on the power supply voltage, see the diagram at below (right). The maximum load R (max)=850Ω for 24V supply.L

4~20mA output

In normal condition, the display is as shown in the right graph.The upper line is the totalization 3 3, m , in the range of 0.000~99999999m .

3The bottom line is the instant flowrate, m /h, in the range of 30.0~9999m /h.

Definition of user interface wire connection

Meter Settings

Red Power supply ( +12 ~ +24VDC)Black Power GND Green RS485ABrown RS485B Blue 4~20mA flow signal output Purple 4~20mA GND

4~20mA output +(LOOP+, blue)

4~20mA, ground (LOOP-, purple)

0

100

200

300

400

500

600

700

800

900

12 14 16 18 20 22 24

Loa

d(Ω

)

Power supply (V)

Applicable


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User Interface Cable(Model: IC8B-200, Length: 2.0m)

Total

Flow


Safety

Wetted materials and compatibility

The meter body is made of stainless steel and cast aluminum alloy. Sensors comprise of silicon, silicon nitride and silicon dioxide and the sensor surfaces are passivated with silicon nitride and silicon dioxide. The electronic sealing is provided by RTV (room temperature vulcanizing) silicone sealant WR-7 of HOCH3 (SiO) nCH3H.

Safety precautions

The product is designed for use with clean and dry gas mass flow applications. Although it may be able to apply for other gases, the product cannot be used for gas metrology of fluoride or fluoride containing gases. For updates of the product certification information, please contact manufacturer or visit www.Siargo.com.

Use for other gases such as extreme corrosive and toxic may cause the product malfunctioning or even severe damages. The product sealing is ensured to work under working pressure as indicated on the product tag. Although it has been undergone leakage proof before the shipment, cautions and further leakage test are extremely important at installation since any leakage could cause severe safety issue.

Attention: any alternation and/or improper use of the product without the permission of the manufacturer can cause unpredicted damages and even injuries or other severe situations. Siargo or any of its employees, subsidiaries shall not be hold and indemnified against such consequences due to such circumstances via improper use of the product.

Calibration

The meter at the time of shipping is fully calibrated at the conditions indicated on the product tag. Use of the product under other conditions will lead to unpredictable results. Please contact the manufacture before such applications.

To ensure the meter performance, the meter should be calibrated not over 24 months under normal operation conditions.

Maintenance

Attention: without prior permission of the manufacturer, please do not attempt to alter any parts of the product as it may cause unrecoverable damages. If there are questions or doubts, please contact manufacturer immediately before further actions. Please ensure the DC power is off before disassembling the meter.

For outdoor installation, proper protection case should apply.

All maintenance of the meters should be done by trained and certified personnel by Siargo Ltd.

Maintenance

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Errors Possible causes Actions

No display

Troubleshooting

1. Wrong wire connection2. LED malfunction

1. Follow user manual, reconnect the wires2. Check the LED connection, otherwise replace

Display nonzero while no gas flow in the pipe

1. Valve may not be closed completely2. Pipe leakage

1. Check valve and perform leak tests2. Check meter offset

No flow reading 1. Power supply error2. Sensor damaged

1. Check power source2. Check sensor error code, replace sensor

Flow rate drops1. Flow channel clogging2. Foreign materials deposit on sensor

1. Check and/or change pipe filter2. Clean or change sensor

Communication malfunction1. Wrong wire connection2. Wrong baud rate3. Pin contact error

1. Check wire connections 2. Check baud rate settings3. Check hardware connections/contacts

For other errors or additional information, please contact the manufacturer.

Storage

StorageThe products if not being installed upon receiving, should be stored in an area without the presence of strong chemicals, electromagnetic interference and vibration. The environments should be dry (<95%RH) and the temperature should be in the range of -25 to 80°C.

TransportationDuring transportation, the products should be properly packaged if not being placed in their original package containers. Such package should be able to resist vibration. Expose to rain or chemicals are strictly prohibited. Labels such as “handle with care”, “avoid collision” should be applied or otherwise clearly marked.


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Customer supports

Siargo is committed to support our customers with their full satisfactions. We will try to resolve any technical issues with the best knowledge we have. For any technical questions and other customer support issues, please contact,

Siargo Ltd., 2041 Mission College Boulevard, Suite 250, Santa Clara, California 95054 [email protected]: (408)969-0368


Warranty

(Effective September 2005)

Siargo warrants the products sold hereunder, properly used and properly installed under normal circumstances and service as described in the user's manual, shall be free from faulty materials or workmanship for 180 days for OEM products, and 365 days for non-OEM products from the date of shipment. This warranty period is inclusive of any statutory warranty. Any repair or replacement serviced product shall bear the same terms in this warranty.

Siargo makes no other warranty, expressed or implied and assumes no liability for any special or incidental damage or charges, including but not limited to any damages or charges due to installation, dismantling, reinstallation or any other consequential or indirect damages of any kind. To the extent permitted by Law, the exclusive remedy of the user or purchaser, and the limit of Siargo’s liability for any and all losses, injuries or damages concerning the products including claims based on contract, negligence, tort, strictly liability or otherwise shall be the return of products to Siargo, and upon verification by Siargo to prove to be defective, at its sole option, to refund, repair or replacement of the products. No Action, regardless of form, may be brought against Siargo more than 365 days after a cause of action has accrued. The products returned under warranty to Siargo shall be at user or purchaser's risk of loss, and will be returned, if at all, at Siargo’s risk of loss.

Purchasers or users are deemed to have accepted this limitation of warranty and liability, which contains the complete and exclusive limited warranty of Siargo, and it shall not be amended, modified or its terms waived except by Siargo’s sole action.

This warranty is subject to the following exclusions:

1. Products that have been altered, modified or have been subject to unusual physical or electrical circumstances indicated but not limited to those stated in the user’s manual or any other actions which cannot be deemed as proper use of the products

2. Siargo does not provide any warranty on finished goods manufactured by others. Only the original manufacturer's warranty applies.

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Siargo China Operations2158 Wanyuan Road, Hongyi Building 410Minhang, Shanghai 201103, ChinaTel.：(021)5426.5998Email：[email protected]

Celebrity Plaza B910, 101 Anli RoadChaoyang, Beijing 100101, ChinaTel.：(010)5829.6058Email：[email protected]

No.1, 2nd South Science Park Road, Building 4, Wuhou, Chengdu 610041, ChinaTel.：(028)8513.9315Email：[email protected]

Siargo Ltd.2041 Mission College Boulevard, Suite 250

Santa Clara, California 95054, USA

Tel:+1(408)969-0368

Email: [email protected]

www.Siargo.com

Yinjia Garden B2901, Golden Harvest RoadTianhe, Guangzhou 510623, ChinaTel.：(020)8523.6341Email：[email protected]

www.Siargo.com.cn

ISO 14001 GB/T 28001ISO 9001

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