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Renatech, a network of large facilities in micro & nanotechnology for French research Michel de Labachelerie French national network of large academic technology facilities
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Page 1: Michel de Labachelerie - retd-insu-2011.obs.ujf-grenoble.frretd-insu-2011.obs.ujf-grenoble.fr/Presentations/... · French national network of large academic technology facilities

French national network of large academic technology facilities

INSU A&A R&T workshop, May 10. 2011

Renatech, a network of large facilities in micro & nanotechnology

for French research

Michel de Labachelerie

French national network of large academic technology facilities

Page 2: Michel de Labachelerie - retd-insu-2011.obs.ujf-grenoble.frretd-insu-2011.obs.ujf-grenoble.fr/Presentations/... · French national network of large academic technology facilities

French national network of large academic technology facilities

INSU A&A R&T workshop, May 10. 2011

Page 3: Michel de Labachelerie - retd-insu-2011.obs.ujf-grenoble.frretd-insu-2011.obs.ujf-grenoble.fr/Presentations/... · French national network of large academic technology facilities

French national network of large academic technology facilities

INSU A&A R&T workshop, May 10. 2011

History: the BTR programme

Origin !   2000: low equipment level in French nanotechnology !   Following a US expertise of French level in nanotechnologies

!   A national initiative to upgrade French technology centres was needed. !   2003: the BTR equipment upgrade program

!   A Ministry of Research program : ”National network of large facilities & Basic Technological Research (BTR) in micro and nanotechnologies“

!   National program led by CEA and CNRS BTR programme players CEA : 1 centre (LETI) at Grenoble

!   Very large infrastructure (200 and 300 mm wafer size) !   A mission of ‘innovation creation’ and ‘transfer to industry’

CNRS : 6 large French facilities grouped in the RENATECH network !   Medium size infrastructures (500-1500 m2 clean rooms) !   Academic type research !   Industrial collaboration on new concepts feasibility

Page 4: Michel de Labachelerie - retd-insu-2011.obs.ujf-grenoble.frretd-insu-2011.obs.ujf-grenoble.fr/Presentations/... · French national network of large academic technology facilities

French national network of large academic technology facilities

INSU A&A R&T workshop, May 10. 2011

National map of BTR network

  RENATECH (6 academic

laboratories)   FEMTO

(Besançon),   FMNT-INAC

(Grenoble),   IEF (Orsay)   IEMN (Lille),   LAAS

(Toulouse),   LPN

(Marcoussis)

  LETI / CEA (Grenoble)

Besançon

Grenoble

Lille

Toulouse

Orsay, Marcoussis

++ Nanophotonics III-V et Si ++ Devices and circuits for spintronics + optoelectronic devices

++ Si nanoelectronics + Spintronic devices

++ System integration (Energy, RF & Photonics) + Micro and Nanosystems for biology health & environment

++ Micro-nano-opto-electronics III-V + MEMS-NEMS RF

++ Micro-Nano Acoustics + Micro-Nano Optics

CEA-LETI ++ Above IC ++ Microelectronics ++ Photonic systems + Biochips

Page 5: Michel de Labachelerie - retd-insu-2011.obs.ujf-grenoble.frretd-insu-2011.obs.ujf-grenoble.fr/Presentations/... · French national network of large academic technology facilities

French national network of large academic technology facilities

INSU A&A R&T workshop, May 10. 2011

5

Complementary objectives of the BTR programme

–  To enhance the level of equipment •  A few selected middle to large size clean-rooms in

France (so-called large technological facilities) •  A network, open to the needs of the academic scientific

community and of industrial research projects.

–  To focus a scientific program on few priority areas •  Micro- and Nanoelectronics, Spintronics, Photonics and

optoelectronics, Micro-, Nano- and Biosystems

–  To enhance the use of joint vision and exploitation of research results

•  Setting up a unit, in charge of the scientific survey in the field of Micro &Nanotechnologies.

•  Promoting patenting and researcher mobility.

Page 6: Michel de Labachelerie - retd-insu-2011.obs.ujf-grenoble.frretd-insu-2011.obs.ujf-grenoble.fr/Presentations/... · French national network of large academic technology facilities

French national network of large academic technology facilities

INSU A&A R&T workshop, May 10. 2011

Page 7: Michel de Labachelerie - retd-insu-2011.obs.ujf-grenoble.frretd-insu-2011.obs.ujf-grenoble.fr/Presentations/... · French national network of large academic technology facilities

French national network of large academic technology facilities

INSU A&A R&T workshop, May 10. 2011

Procedures and tools for the processing of exogenous projects in the facilities

•  Renatech procedure for external projects: –  A technical team receives the proposed projects: assessment of

technological feasibility, cost evaluation and time schedule –  Cost agreement between the user and the technical facility –  Definition of user training program

In 2010 the basic hour rate has been defined for CNRS facilities: Basic access hour rate for academic users: 55 €/hour for industrial users: 200 €/hour Total cost = (basic hour rate x resources coefficient x nb. Hours + personnel involved

into the project (if necessary) + specific project consumables

•  Contact with Renatech –  RENATECH network web site: www.rtb.cnrs.fr –  Email alias for project dispatching and for referring to all the

technological facilities ([email protected]) –  Formal access rules (« Charte d’accueil »)

Page 8: Michel de Labachelerie - retd-insu-2011.obs.ujf-grenoble.frretd-insu-2011.obs.ujf-grenoble.fr/Presentations/... · French national network of large academic technology facilities

French national network of large academic technology facilities

INSU A&A R&T workshop, May 10. 2011

Exogenous projects survey of RENATECH facilities: 2009-2010

•  Origin of exogeneous projects: –  Academic projects in 2009: 24% –  Industrial projects in 2009: 12,4%

A tendency in 2009: 3% reduction of academic national projects and 3% increase of industrial projects

•  365 external projects handled by Renatech in 2009 (of which 71% requiring specific developments)

•  33 rejected for the lack of proper process tools

X 3 increase since beginning of BTR programme !

Page 9: Michel de Labachelerie - retd-insu-2011.obs.ujf-grenoble.frretd-insu-2011.obs.ujf-grenoble.fr/Presentations/... · French national network of large academic technology facilities

French national network of large academic technology facilities

INSU A&A R&T workshop, May 10. 2011

•  Thematic distribution of exogenous projects in 2009

Training & working of external researchers in the clean rooms has doubled in 3 years

•  Satisfaction inquiry

Exogenous projects survey of RENATECH facilities: 2009-2010

Page 10: Michel de Labachelerie - retd-insu-2011.obs.ujf-grenoble.frretd-insu-2011.obs.ujf-grenoble.fr/Presentations/... · French national network of large academic technology facilities

French national network of large academic technology facilities

INSU A&A R&T workshop, May 10. 2011

Dissemination & communication

•  RENATECH newsletter –  Was launched in Feb. 2010 –  Will be published 3 times a year –  Will follow up the evolution of the network, diffuse acute information concerning the specific technical tools, recent technological realisations, events and useful information concerning opening of the facilities.

•  Public –  CNRS scientific institutes –  Industrial companies

Page 11: Michel de Labachelerie - retd-insu-2011.obs.ujf-grenoble.frretd-insu-2011.obs.ujf-grenoble.fr/Presentations/... · French national network of large academic technology facilities

French national network of large academic technology facilities

INSU A&A R&T workshop, May 10. 2011

Page 12: Michel de Labachelerie - retd-insu-2011.obs.ujf-grenoble.frretd-insu-2011.obs.ujf-grenoble.fr/Presentations/... · French national network of large academic technology facilities

French national network of large academic technology facilities

INSU A&A R&T workshop, May 10. 2011

- 1D ballistic HEMT as switch for multiplexing specifications: -  Low capacitance CGS <1 fF -  Low open RDS resistance ~10 kΩ - Low IGS (shot noise) < 1pA - Low power consumption < nW Collaboration: CNRS/Institut Néel grant CNES: DCMB

HEMTs developed at LPN for high impedance very low temperature readout electronics

100 mK

100 mK

Circuit noise performance

- Cryogenic HEMTs with an input voltage noise below 1 nV/√Hz at 1 kHz for preamplifiers at or below 4.2 K Ongoing: CESAR project - FP7 - SPACE - 263455 Collaborations are welcome

1 nV/√Hz

1 kHz

Page 13: Michel de Labachelerie - retd-insu-2011.obs.ujf-grenoble.frretd-insu-2011.obs.ujf-grenoble.fr/Presentations/... · French national network of large academic technology facilities

French national network of large academic technology facilities

INSU A&A R&T workshop, May 10. 2011

Matrices haute impédance sur membranes structurées par gravure XeF2

Le  XeF2  se  présente  sous  la  forme  solide.  Il  passe  à  l’état  gazeux  à  environ  3,8  Torr  à  25  °  C.  Le  silicium  se  grave  de  façon  isotrope  très  sélecGve  jusqu’à  (1000:1)  vis-­‐à-­‐vis  de  la  résine  du  SiO2,  du  nitrure  de  silicium,  de  l’aluminium….  

Membranes  ajourées  suspendues  en  nitrure  de  silicium    3x3  mm  épaisseur  500  nm.  

Financement  de  l’équipement  :  BQR  2008  Université  Paris-­‐sud-­‐11  et  projet  DCMB  

Contact  InsGtut  NEEL  :  Philippe  Camus  [email protected]  

RéalisaGon   des   premières   matrices   de  bolomètres   hautes   impédances   en   NbSi  sur   membranes   de   nitrure   structurées    (2009).  

Page 14: Michel de Labachelerie - retd-insu-2011.obs.ujf-grenoble.frretd-insu-2011.obs.ujf-grenoble.fr/Presentations/... · French national network of large academic technology facilities

French national network of large academic technology facilities

INSU A&A R&T workshop, May 10. 2011

Page 15: Michel de Labachelerie - retd-insu-2011.obs.ujf-grenoble.frretd-insu-2011.obs.ujf-grenoble.fr/Presentations/... · French national network of large academic technology facilities

French national network of large academic technology facilities

INSU A&A R&T workshop, May 10. 2011

•  Identify scientific challenges and useful investments for the requirements of future R&D work –  Purchase equipments according to the real requirements of the scientific

community ;

•  Organize the specificities of BTR facilities to reach strong and non-redundant know-how in specific fields ; –  Identify the contribution of each facility versus national roadmap ;

•  Stimulate coordinated actions : technological developments, information dissemination, to support scientific challenges ; –  Organize technological development projects gathering several facilities;

To organize the network in order to use efficiently the taxpayer’s money…

Requirements for network organization and networking activities

Page 16: Michel de Labachelerie - retd-insu-2011.obs.ujf-grenoble.frretd-insu-2011.obs.ujf-grenoble.fr/Presentations/... · French national network of large academic technology facilities

French national network of large academic technology facilities

INSU A&A R&T workshop, May 10. 2011

OMNT : a shared CEA & CNRS tool to collect information

•  Strategic survey of micro & nanotechnologies created in 2005 by CNRS & CEA

•  270 researchers from both organizations sharing their expertise to identify trends, breakthroughs, and teams working in this field, using available information.

•  Dissemination of various documents: –  Two-monthly + annual reports on technical-economical & scientific news –  Nanodigest concentrating top scientific news in nanotechnologies

•  Organisation of annual seminars & topical meetings.

A very useful tool for benchmarking in the BTR network

Page 17: Michel de Labachelerie - retd-insu-2011.obs.ujf-grenoble.frretd-insu-2011.obs.ujf-grenoble.fr/Presentations/... · French national network of large academic technology facilities

French national network of large academic technology facilities

INSU A&A R&T workshop, May 10. 2011

•  A limited number of challenges for each selected field –  2 wide scope « grand challenges » –  A clear impact on society stakes & basic

scientific challenges •  A shared collective interest

–  Maximizing potential interest of scientific community ;

A network organization for the identification of priorities

•  Selection of 6 scientific fields, followed by Renatech experts in each field.

•  Identification key technological processes •  Identification of required equipments to

support challenges •  30% of investment targeted on key

equipments

Technological fields Micro & nanoelectronics Spintronics Photonics MEMS & NEMS Micro & nanoacoustics BioMEMS Characterization & metrology Simulation

•  An already strong position of BTR network in each field (by benchmarking of remarkable results from BTR network)

Page 18: Michel de Labachelerie - retd-insu-2011.obs.ujf-grenoble.frretd-insu-2011.obs.ujf-grenoble.fr/Presentations/... · French national network of large academic technology facilities

French national network of large academic technology facilities

INSU A&A R&T workshop, May 10. 2011

■  SOCIETY STAKES : high performance electronics at low power : autonomous systems for TIC, health, environment, energy management and saving. Increase in integration density via 3D integration

■  Challenge 1 : Scaling driven nanoelectronics and beyond CMOS Description: Advanced MOSFETs, NW-FET. Materials for new memory devices. Low T processing. Graphene integration at wafer level Key technologies: Understand early stages of materials growth. Impact of 3D integration on device operation: new materials. LT processing, coupling effects. Alternative technologies (NWs, CNTs, graphene…) Examples of key equipments: Low temperature PECVD reactor with in- situ diagnosis tools. (XPS, ellipsometry, mass spectroscopy…) : LT growth of NWs: 3D integration of NW-FETs

■  Challenge 2 : Integration of heterogeneous system blocks Description: Integration on a CMOS platform of RF blocks : power devices, optical links, sensing devices, energy harvesting and storage… Key technologies: Power management efficiency. Flexible substrates: plastic substrates combined with Si-based nanoelectronics, interface of nanoelectronics to other fields (sensing…) Examples of key equipments: Seed layer CVD 3D integration TSV: conformal deposition of diffusion barriers in TSVs.

Example : « Micro-Nano Electronics » challenge

BTR players : FMNT, IEF, IEMN, LAAS, LETI, LPN,

SiP integration technologies and temperature/heat management

Graphene/SiC, AFM image showing monolayer steps

Page 19: Michel de Labachelerie - retd-insu-2011.obs.ujf-grenoble.frretd-insu-2011.obs.ujf-grenoble.fr/Presentations/... · French national network of large academic technology facilities

French national network of large academic technology facilities

INSU A&A R&T workshop, May 10. 2011

Elaborating a Renatech roadmap dedicated to INSU A&A activities ?

Page 20: Michel de Labachelerie - retd-insu-2011.obs.ujf-grenoble.frretd-insu-2011.obs.ujf-grenoble.fr/Presentations/... · French national network of large academic technology facilities

French national network of large academic technology facilities

INSU A&A R&T workshop, May 10. 2011

Thank you for your attention !

Page 21: Michel de Labachelerie - retd-insu-2011.obs.ujf-grenoble.frretd-insu-2011.obs.ujf-grenoble.fr/Presentations/... · French national network of large academic technology facilities

French national network of large academic technology facilities

INSU A&A R&T workshop, May 10. 2011

Matrice  de  bolomètres  haute  impédance  à  antennes  et  dissipateurs  :    antennes  à  orientaGons  et  géométries  variables  sur  membranes  pleines  

Contact  InsGtut  NEEL  :    Alessandro  Monfardini  [email protected]  

EvoluGon  vers  une  matrice  de  bolomètres  haute    impédance  mulG  antennes  avec  dissipateurs  sur    membranes    structurées  (2008):  

2  

1  3  

4-­‐6  

5  

1  mm  

1  2  

3  

4   5   6  

Réponse  des  différents  pixels  à  la  polarisaGon  en  foncGon  de  l’angle  d’un  polariseur  tournant  (2007)  

T  (mK)  

R   (MOhm

)  

0

0,5

1

1,5

2

2,5

3

3,5

4

100 200 300 400 500 600 700

R(T)1

R M4R N5R F3

R M4

T

Page 22: Michel de Labachelerie - retd-insu-2011.obs.ujf-grenoble.frretd-insu-2011.obs.ujf-grenoble.fr/Presentations/... · French national network of large academic technology facilities

French national network of large academic technology facilities

INSU A&A R&T workshop, May 10. 2011

Contact  IAS  :  François  Pajot  [email protected]­‐psud.fr  Contact  APC  :  Michel  Piat  [email protected]­‐paris7.fr  

Large  bolometer  arrays  with  superconducGngNbSi  sensors  for  future  space  experiments  F.  Pajot,  Y.  AGk,  C.  Evesque,  S.  Lefranc,  B.  Leriche,  J.-­‐P.  Torre,  B.  Belier,  N.  Marsot,  L.  Dumoulin,  L.  Berge,  M.  Piat,  E.  Breelle,  D.  Prêle,  C.  Hoffmann,  T.  Durand,  P.Camus,  D.  Santos,  Y.  Jin,  and  M.  Giard  Journal  of  Low  Temperature  Physics,  Vol.  151  1/2,  2008,  pp.  513-­‐517.  

R(T)  et    α  =  T/RxdR/dT  de  TES  en  NbSi  (15.18  %  de  Nb)  

CaractérisaGon  en  froid  de  la  transiGon  des  TES  NbSi  (2008)  

Matrice  de  bolomètres  supraconducteurs  de  type  TES    à  absorbeurs  sur  membranes  pleines  

Mesure  de  bruit  avec  chaine  de  lecture  à  SQUID  de  TES  sur  membranes  pleines  (   2011).   Bain   cryogénique   à   350  mK,   polarisaGon  du   TES   en   tension  qui   fixe  une  Tc  de  412  mK  

Page 23: Michel de Labachelerie - retd-insu-2011.obs.ujf-grenoble.frretd-insu-2011.obs.ujf-grenoble.fr/Presentations/... · French national network of large academic technology facilities

French national network of large academic technology facilities

INSU A&A R&T workshop, May 10. 2011

Contact  APC  :  Michel  Piat  [email protected]­‐paris7.fr  

OMT  (OrthoMode  Transducer)    diplexeur  de  polarisaGon  et  sa    structure  de  calibraGon  

Orthomode   transducer   (à   droite)   et   sa   structure   d’étalonnage     (à  gauche).   Mesure   de   la   transmission   sur   membranes   pleines    antennes   et   lignes   en   Nb   à   température   ambiante,   77K   et   4K   en  foncGon  de  la  fréquence.    (  2011).  


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