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MPW Design Introduction Course - Module 4

Process Process

DescriptionDescription

Part II

Tyre pressure sensor(SensoNor)

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Contents Process Description, Part IProcess Description, Part I Cross section overviewCross section overview Key process featuresKey process features MPW process step-by-stepMPW process step-by-step

Process Description, Part II Absolute design limitations Process control monitors Test data

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Absolute design limitations

To avoid breakage during fabrication

Maximum allowed stress 500 MPa under

the following conditions:

2000 g acceleration

1 bar (0.8 bar) pressure difference

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Process control monitors Test dies

electrical parameters mechanical dimensions

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Process control monitors

Product wafers Visual inspection Oxide thickness Diaphragm thickness

Test wafers Sheet resistivity Film thickness

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Test data Automated test data collection Measurement database Process monitoring / SPC

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SPC

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Test certificate

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Chapter 4:MPW Process Description

End of this chapter Questions or comments?