MSD

XPS/UPS plus LEED optics (the current refined scheme for SEY measurements used by Slade Jokela

Planned Addition of the second (smaller) load-lock chamber (work in progress) so that the existing larger chamber can be populated with more diagnostics The 2nd chamber will be equipped with

o one electron gun and one ion guno quadrupole MS

o a new RGA - for now (to buy), later can be used on the main chamber of the XPS/UPS apparatuso high resolution / efficiency VG (resurrected) MS analyzer – in the future

MSDPlanned experiments on aging of MCPs

irradiation of flat ALD-functionalized MCP materials with electron beam in the larger load-lock chamber (controlled fluences and controlled electron impact energy)

measuring mass spectra of electron stimulated desorption

heating these samples in the larger load-lock chamber (halogen lamp)

measuring mass spectra of thermal desorption moving samples into XPS/UPS main chamber to check

surface composition with XPS SEY

moving samples back into larger load-lock chamber to get more electron fluences

No way to look at changes in surface morphology and to probe small spots.

Go to CNM for this.

CNM Variable-temperature, ultra-high-vacuum, atomic force microscope/scanning tunneling microscope

Omicron VT-AFM XA (N. Guisinger, Electronic & Magnetic Materials & Devices Group)

Measurement modes include:Contact and non-contact AFMMagnetic force microscopy (MFM)Scanning tunneling spectroscopy

Preparation tools include:Resistive sample heatingDirect current heatingE-beam heatingSputter ion etchingGas dosingE-beam evaporation

An analysis chamber contains combined four-grid LEED/Auger optics

Heavily booked instrument

CNMScanning probe/scanning electron

microscopy: Omicron UHV Nanoprobe (N. Guisinger, Electronic & Magnetic Materials & Devices Group)

Local, nondestructive four-point contact measurements and function testing of nanodevices within complex structures; accurate probe positioning and safe approach of fragile probe tips having diameters in the range of a few tens of

nanometers or less.

Four independent STM probe tips with simultaneous SEM imaging enables a large field of view for coarse positioning as well as fine positioning of nanometer-sized

structures with the SEM's high-resolution capabilities.

UHV Gemini column for chemical mapping by scanning auger microscopy and magnetic imaging by SEM with polarization analysis (SEMPA). This yields

complementary information on sample conductance, topography, chemistry, and magnetism.

An instrument with just a few users – available for most of the time

• Omicron UHV Nanoprobe– Nanoprobes for device testing

• Scanning Tunneling Microscope

– Scanning Electron Microscopy– Low Energy Electron Diffraction

(LEED)– UHV Gemini Column

• Auger Electron Spectroscopy (Chemical Mapping)

• Magnetic Imaging by SEM polarization analysis (SEMPA)

– Sample preparation• Resistive Sample Heating