MRAM Dev. Day 2018
New Approaches to Reducing Energy Consumption of MRAM write cycles,
Ultra-high efficient writing(Voltage-Control) Spintronics Memory (VoCSM)
Hiroaki Yoda
Supported by The ImPACT Program of the Councilfor Science, Technology and Innovation
(Cabinet Office, Government of Japan).
Corporate Research & Development Center,Toshiba Corporation
MRAM Dev. Day 2018
1. Motivation of this study, to solve Historical Dilemma
2. Challenge by New approachSpin-Hall, VoCSM
3. How far can we go?
4. Proposal of new architectures
5. Future work
Outline
MRAM Dev. Day 2018
Non
Frequent refresh
Leakage current
Non
Save energy consumption
Motivation
NVM
MRAM Dev. Day 2018
All Volatile
Pow
er
Active CacheStandby
PowerGating
The historical dilemma of non-volatile as working memories
Pow
er
CacheStandby
LLC=NV
Active PowerGating
As a total, wasted more energy
Non-volatility
Busy applications
Qw=Iw x twALU
SRAMSRAM
SRAM
ALU
SRAMSRAM
NV
ReRAM
MRAM
FeRAM＋＋＋＋＋－－－－－ ＋＋＋＋＋
- - - - -
PCRAMAmorphouscrystal
MRAM Dev. Day 2018
1E+7
1E+6
1E+5
1E+4
1E+3
1E+2
1E+1
1E+0
2000 2005 2010 2015 2020
Swit
chin
g e
ner
gy
per
bit
(fJ
/bit
)
Year
Fieldwriting
STTwriting
Reduction Trend of Switching Energy per bit
SRAM & DRAM
1
2
tp
MRAM Dev. Day 2018
A big concern of endurance
Iw
TEM image of a tunnel-barrier
MRAM Dev. Day 2018
0102030405060708090
100
0 5 10
Ic (
uA)
Writing pulse-width (nsec.)
H.YODA, et al., SPIE2014 H.Sukegawa, et al., APL to be published
We have been working on to solve.
MRAM Dev. Day 2018
1. Motivation of this study, to solve Historical Dilemma
2. Challenge by New approachSpin-Hall, VoCSM
3. How far can we go?
4. Proposal of new architectures
5. Future work
Outline
MRAM Dev. Day 2018
Voltage-Control Spintronics Memory Element
2. Spin-Hall effect
Bottom-electrode(Ta)
MTJ
1. VCMA-effect
:Voltage-control magnetic anisotropy
L. Liu, et al., Cornell Univ., 2012 H.Yoda, et al., Toshiba, 2016
TEM of the VoCSM Element
Storage-Layer
Tunnel-Barrier
Spin-Hall Electrode
Reference-Layer
5nm
20nm
In addition to TMR-effect
Icsw(VoCSM) = 4eα*eff / ħθSH ∙ {△Er +△Edmag} ∙ tn / w
Wasted huge energy
MRAM Dev. Day 2018
The 1nd Spintronics, Spin Hall-effect
(Write) Current
5d transition metal :Ta, W, , ,
Current flow can polarize spins as we will at the surfaces
Electrode
5d transition metal :Ta, W, , ,
Electrode
x
yz
MRAM Dev. Day 2018
The 2nd Spintronics, VCMA-effect(Voltage-Control Magnetic Anisotropy)
V= 0 V= Va V= Vda
＋
ー ＋
ー
Precession grows Precession decays
Electrode
Electrode
e-
Storage-layer Electrode
Electrode
e-
Storage-layer
x
y
z
Easy axis
MTJ
Electrode
Icsw(VoCSM) = 4eα*eff / ħθSH ∙ {△Er +△Edmag} ∙ tn / wWasted huge energy
MRAM Dev. Day 2018
V= Vda
(write) current
＋
ーR
I
R
I
R
I
(VCMA-effect ×spin-Hall effect)
-0.5ICsw
-1.5ICsw
-ICsw
How VoCSM works
V= 0
(write) current
(write) current
＋
ー
V= Va
MRAM Dev. Day 2018
Fundamental Property of VoCSM elements
Voltage(V)J C
sw(M
A/c
m2 )
MgO(～1.4nm)/CoFeB(1.1nm)/Ta(10nm)VCMA coefficient: 60fJ/(V/m)/m2
JCsw
>2.0JCsw
0JCsw
H.Yoda,et al., IEDM2016
Iw
Lower the Iw Speed up the writing Select the bit to write Calculation(Logic)
MRAM Dev. Day 2018
Efficient writing of VoCSM(theory)
MTJ
STT-writing VoCSM writing with 0V applied
tn
wf
If the polarization & damping are the same, VoCSM with 0V applied has wf/tn times higher efficiency
We can expect much better efficiency
V=0V
MRAM Dev. Day 2018
Experimental Proof of the efficiencyIw(STT)
Iw(Spin-Hall)
RA=100Ωμm2
Spin-Hall（V=0）: about 3-4 times higher (compared with STT)（VoCSM(V=Va) : can be 6 times higher）
Size:50-60nm with AR of 3
H
RI=0 I=Iw
VoCSM with V=0 & θSH=0.1-0.18
H.Yoda,et al., E-NVM2017
STT with MR=150%
Self-Aligned structure
S.Shirotori et al., Intermag2017
MRAM Dev. Day 2018
0
50
100
150
200
0 2000 4000 6000 8000
I SW[μA]
MTJ area-S [nm2]
＊in house data
p-STT MTJs *VoCSM
Proof of the high-efficiency of VoCSM
The latest data
30nmΦ
Self-Aligned structure
tp=20ns.
MRAM Dev. Day 2018
0.0E+0
1.0E+5
2.0E+5
1.0E+0 1.0E+3 1.0E+6 1.0E+91.0E+12
MT
J R
esis
ance
(Ohm
)
Pulse cycle
Write pulsewidth: 5nsec.
Data“1”
Data“0”
Endurance ≧ 1E+13
Endurance of VoCSM
Ir
Iw
Ta,W,,(High melting temp.)
VoCSM, 3 terminals
The issue of STT, endurance
at short pulse-width
MRAM Dev. Day 2018
N.Shimomura, et al.,
1E+50
MRAM Dev. Day 2018
1. Motivation of this study, to solve Historical Dilemma
2. Challenge by New approachSpin-Hall, VoCSM
3. How far can we go?
4. Proposal of new architectures
5. Future work
Outline
MRAM Dev. Day 2018
1000 2000 3000 4000
500
400
300
200
100
△Esw (kBT)
I sw a
t 20
nsec
. wit
h V
=0 (μA
)
θSH=0.09tDL=0.12
θSH=0.18tDL=0
Experimental results of Isw
Icsw(VoCSM) = 4eα*eff / ħθSH ∙ △Esw(0V) ∙ tn / wf
θSH=0.14tDL=0
Self-Aligned structure
tp=20ns.
MRAM Dev. Day 2018
100 200 300 400
50
40
30
20
10
△Esw (kBT)
I sw a
t 20
nsec
. (μA
)
Prospect of Icsw
Icsw(VoCSM) = 4eα*eff / ħθSH ∙ △Esw(0V) ∙ tn / w
Icsw(VoCSM) = 4eα*eff / ħθSH ∙ △Esw(-0.5V) ∙ tn / w
= 1.5μA Qcsw=30fC
θSH=0.55tDL=0
Good possibility to have
3μA
Self-Aligned structure
tp=20ns.
θSH=0.14tDL=0
MRAM Dev. Day 2018
1E+7
1E+6
1E+5
1E+4
1E+3
1E+2
1E+1
1E+0
2000 2005 2010 2015 2020
Swit
chin
g e
ner
gy
per
bit
(fJ
/bit
)
Year
Fieldwriting
STTwriting SOT & VoCSM
Reduction Trend of Switching Energy per bit
SRAM & DRAM
1S.A.VoCSM
S.Shirotori,et al., MMM/Intermag2016
H.Yoda,et al., IEDM2016
VoCSM
MRAM Dev. Day 2018
1. Motivation of this study, to solve Historical Dilemma
2. Challenge by New approachSpin-Hall, VoCSM
3. How far can we go?
4. Proposal of new architectures
5. Future work
Outline
MRAM Dev. Day 2018
Proposed Architectures of Spintronics Memory
ALU
L1 CacheL2 Cache
L3 Cache
Working Memory
～12F2
(1)
～20F2
(2)
4F2-8F2
(3)
Spin-Hall orVoCSM
Spin-Hall ( or VoCSM) VoCSM
Lower the Iw Speed up the writing
Select the bit to write
MRAM Dev. Day 2018
Demonstrated Fundamental Features
H.Yoda, et. al. IEDM 2016
H.Yoda, et. al. IMW 2017
Lower the Iw Speed up the writing
Select the bit to write
MRAM Dev. Day 2018
1. Motivation of this study, to solve Historical Dilemma
2. Challenge by New approachSpin-Hall, VoCSM
3. How far can we go?
4. Proposal of new architectures
5. Future work
Outline
MRAM Dev. Day 2018
Fundamental Property of VoCSM elements
Voltage(V)
J Csw
(MA
/cm
2 )MgO(～1.4nm)/CoFeB(1.1nm)/Ta(10nm)VCMA coefficient: 60fJ/(V/m)/m2
JCsw
>2.0JCsw
0JCsw
H.Yoda,et al., IEDM2016
Lower the Iw Speed up the writing Select the bit to write Calculation (Logic)
Another possibility of VoCSM
VoCSL(Voltage-Control Spintronics Logic)
Data “A”
Data “B”
OR ANDA B A'
0 0 00 1 11 0 11 1 1
A B A'
0 0 00 1 01 0 01 1 1
Data “B”
Data “A”
Memory array
Conventional Logic
Memory array
Data “A”
Data “B”
Stor
e
(OR, AND,,,)
Sheet1
ABA'
000
011
101
111
Sheet1
ABA'ABA'
000000
011010
101100
111111
MRAM Dev. Day 2018
Digests of 62nd IEDM, session 27.6, San Francisco, CA, 3–7, December, 2016 Proceedings of IMW 2017, p. 165, Monterey, CA, 14 – 17 May, 2017IEEE Transactions on Magnetics, vol. 53, p. 3401104, 2017More than 10 invited talks and other 20 conference talks.
Japanese patent P6270934, USP 9,881,660: High-density VoCSM (writing 8data with 2 write-pulses)Japanese patent P6280195: High-Speed VoCSM (Complementary writing)Other 21 patents registered and other 27 patents pending
Non-volatile Memory with Ultra-low Power, High-speed, and Unlimited Endurance
“VoCSM”(Voltage-Control )
Spintronics Memory
Unlimited endurance
Patent Publication
Ultra-low Power writing
MRAM Dev. Day 2018
H. Yoda
Supported by The ImPACT Program of the Councilfor Science, Technology and Innovation
(Cabinet Office, Government of Japan).
Corporate Research & Development Center, Toshiba Corporation
New Approaches to Reducing Energy Consumption of MRAM write cycles,
Ultra-high efficient(Voltage-Control) Spintronics Memory (VoCSM)
MRAM Dev. Day 2018
Summary
1. VoCSM writing is very powful to reduce the writing current to the order of spintronics limitation.
2. High-speed writing and unlimited endurance seem to co-exist for VoCSM.
3. The historical dilemma might be solved.4. High-speed & high-density architectures were
proposed and demonstrated the unique writing schemes.
5. Logic application was introduced and for the long run, it may find applications
MRAM Dev. Day 2018
How to select the bit to write
Va Vda
Esw
Selected bits
Esw
unselected bits
Vda
unselected bits
VCMA
“0”
MRAM Dev. Day 2018
The issues
(i) Static interaction (ii) Resonance
20nm
Definitely needs to make stray-field small, Like using Ferrimagnets, ,
Interactions between neighbor bits are big problems
MRAM Dev. Day 2018
Write Error Rate Curves
Iw
Deterministic
Va
＋
Conventional spin-Hall writing
VoCSM writing
1E+0
1E-1
1E-2
1E-3
1E-4
1E-5
WE
R
JW(MA/cm2)0-10
MRAM Dev. Day 2018
SHE-ELMTJ
SIL
Under layer
ΔEr ～44kBT（80nm×80nm）
ΔEr improved by thikker film（1.5nm→2.5nm）
In-plane MTJ ( aspect ratio of =1 )
Graph1
498.611499.127
498.642498.96
498.666498.763
498.697498.541
498.753498.351
498.777498.153
498.746497.897
498.721497.651
498.659497.398
498.579497.121
498.458496.844
498.323496.536
498.181496.203
497.984495.84
497.762495.452
497.509495.001
497.263494.503
497.007494.038
496.667493.564
496.311493.065
495.978492.535
495.68491.981
495.341491.489
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494.478490.37
494.004489.781
493.536489.203
493.062488.614
492.563488.036
492.095487.447
491.586486.837
491.001486.193
490.391485.559
489.813484.853
489.258484.142
488.67483.446
488.06482.726
487.419481.974
486.719481.198
486.065480.357
485.389479.504
484.704478.673
483.973477.842
483.228476.914
482.442475.951
481.61474.974
480.814473.976
480.003472.979
479.172471.947
478.341470.894
477.444469.841
476.536468.753
475.584467.645
474.652466.536
473.734465.428
472.761464.319
471.728463.211
470.641462.068
469.532460.904
468.424459.775
467.284458.667
466.155457.527
465.012456.363
463.914455.165
462.795453.945
461.597452.692
460.409451.382
459.245450.052
458.081448.722
456.886447.361
455.632445.975
454.358444.524
453.048443.059
451.718441.618
450.322440.146
448.913438.618
447.527437.132
446.076435.66
444.579434.164
443.052432.636
441.531431.05
440.004429.408
438.518427.811
437.011426.194
435.459424.531
433.908422.869
432.356421.171
430.738419.453
429.11417.701
427.503415.896
425.896414.067
424.258412.304
422.595410.555
420.866408.681
419.159406.776
417.465404.892
415.712402.973
413.939401.099
412.166399.169
410.423397.24
408.674395.356
406.866393.472
405.068391.556
403.295389.582
401.521387.656
399.717385.737
397.853383.797
396.035381.823
394.196379.797
392.311377.847
390.427375.862
388.473373.811
386.513371.761
384.573369.676
382.599367.604
380.569365.554
378.55363.503
376.52361.387
374.438359.26
372.367357.119
370.282354.892
368.11352.689
365.962350.493
363.822348.207
361.595345.914
359.322343.607
357.085341.245
354.837338.862
352.634336.444
350.438334.072
348.186331.744
345.949329.382
343.732326.964
341.515324.56
339.298322.177
337.082319.759
334.865317.355
332.579314.972
330.251312.524
327.854310.099
325.416307.685
322.943305.212
320.449302.752
317.92300.279
315.336297.751
312.731295.201
310.092292.652
307.432290.033
304.806287.373
302.167284.779
299.541282.195
296.902279.521
294.276276.84
291.706274.18
289.157271.554
286.573268.884
283.968266.168
281.398263.452
278.849260.737
276.265257.987
273.66255.216
271.055252.41
268.451249.584
265.811246.757
263.116243.931
260.401241.038
257.72238.167
255.06235.375
252.334232.57
249.563229.743
246.826226.917
244.111224.056
241.329221.208
238.538218.382
235.767215.521
232.961212.604
230.135209.698
227.308206.817
224.482203.9
221.686200.997
218.881198.084
216.02195.182
213.138192.3
210.287189.383
207.426186.446
204.544183.544
201.662180.662
198.781177.78
195.899174.863
192.951171.926
189.993168.954
187.056165.993
184.153163.055
181.205160.087
178.213157.129
175.255154.16
172.317151.133
169.349148.085
166.356145.037
163.329141.989
160.312138.941
157.285135.927
154.271132.903
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148.175126.696
145.117123.582
141.978120.455
138.819117.351
135.726114.248
132.647111.144
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123.25101.626
120.05698.4216
116.87395.2627
113.67992.0691
110.53188.8547
107.46285.6403
104.38382.426
101.24579.2462
98.085676.0561
94.926772.8729
91.798969.714
88.695466.555
85.591963.3303
82.52360.1263
79.40956.9673
76.250153.8084
73.091150.6494
69.932247.4905
66.773244.2969
63.645541.0825
60.541937.8786
57.438434.6607
54.303731.4602
51.179428.3013
48.010125.1181
44.830321.9002
41.70618.6997
38.567815.5096
35.422312.2952
32.28339.08086
29.12655.89766
25.9522.69715
22.7597-0.513756
19.5808-3.71081
16.3738-6.894
13.1594-10.0633
10.0109-13.25
6.84154-16.4124
3.62717-19.5714
0.430552-22.6957
-2.74831-25.8304
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0.61196623.4827
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7.0580229.8037
10.30732.9297
13.545636.0467
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20.005642.2879
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26.482848.4811
29.690251.5743
32.908154.6535
36.129457.7571
39.329960.8952
42.509664.023
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48.879570.289
52.038473.3613
55.197476.5099
58.321779.7242
61.456482.9074
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70.877892.3843
74.036795.5432
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80.3546101.861
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102.668123.634
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109.01129.731
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210.097229.871
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218.857238.094
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263.362281.052
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W/ SIL
W/O SILr
Magnetic field (Oe)
Resistance (a.u.)
312.741
240.565
312.722
240.622
312.84
240.588
312.74
241.042
312.84
240.621
312.858
240.564
312.74
240.96
312.721
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312.721
240.644
312.72
240.984
312.72
240.726
313.131
240.984
313.012
241.065
313.112
241.065
312.719
241.04
312.601
240.667
312.701
240.724
312.719
240.667
312.6
240.724
312.173
240.642
313.111
240.69
312.482
240.537
312.563
240.828
312.463
240.747
312.563
240.747
312.172
241.063
312.581
240.77
312.7
240.804
312.751
241.004
312.312
240.827
312.382
241.038
312.998
240.664
312.168
240.769
312.765
241.142
313.163
241.085
312.823
241.118
313.321
241.003
313.118
241.118
313.106
240.615
313.69
240.873
313.181
240.639
313.571
241.318
313.572
241.117
313.571
241.002
313.689
240.824
313.471
240.719
313.671
240.638
313.706
240.661
313.706
240.742
313.706
241.034
313.824
241
313.487
240.823
313.668
241.057
313.823
240.741
313.486
240.717
313.668
240.951
313.704
240.975
313.703
240.741
313.703
241.032
313.585
240.659
313.566
241.056
313.684
241.056
314.112
240.763
314.112
240.797
313.702
240.658
313.82
240.739
313.72
241.054
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313.701
241.135
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241.006
313.582
240.891
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313.701
240.714
313.582
240.608
314.092
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313.699
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313.7
240.947
313.699
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313.58
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313.68
240.947
313.817
240.631
314.246
240.946
314.008
240.607
314.089
240.817
313.989
240.783
313.97
240.946
314.089
240.922
313.578
240.549
313.97
240.654
313.851
241.074
313.951
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313.97
240.969
313.558
241.002
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240.887
313.676
240.686
313.049
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313.657
240.709
313.576
240.944
313.676
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313.694
240.991
313.576
241.13
313.676
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241.106
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240.943
314.087
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313.968
241.047
314.324
240.707
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313.967
240.602
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240.545
313.711
240.602
313.574
240.568
313.673
240.707
313.691
240.941
314.339
240.625
314.138
240.625
314.219
240.916
314.65
240.859
314.119
240.6
314.513
240.858
314.512
240.672
314.631
241.078
314.118
240.833
314.218
240.926
314.53
240.716
314.512
240.964
314.512
241.14
314.511
241.269
314.511
241.259
314.63
241.354
314.529
241.799
314.217
241.402
314.529
241.402
314.217
241.402
314.648
241.426
314.529
241.483
314.099
241.402
314.51
241.45
314.63
241.565
314.41
241.087
315.024
241.402
314.648
241.425
314.409
241.482
314.491
241.401
314.628
241.4
314.115
241.4
314.509
241.375
314.096
241.318
314.388
241.739
314.076
241.82
314.625
241.843
314.524
241.584
314.212
241.794
314.111
241.396
313.974
241.396
314.485
241.444
314.503
241.85
314.796
241.337
314.071
241.523
314.09
241.556
314.502
241.709
314.09
241.441
313.97
241.872
314.07
241.416
314.088
241.497
314.5
241.497
314.262
241.544
313.932
241.635
313.951
241.414
313.95
241.495
314.187
241.811
314.397
241.471
314.067
241.413
313.967
241.47
314.067
241.389
313.967
241.388
313.947
241.388
314.476
241.411
314.375
241.469
314.063
241.411
314.493
241.784
314.374
241.386
314.594
241.386
314.511
241.41
313.961
241.491
314.766
241.467
314.06
241.386
314.489
241.409
314.37
241.466
314.883
241.701
314.488
241.748
314.607
241.571
314.506
241.806
314.487
241.465
314.605
241.699
314.504
241.723
314.485
241.781
314.485
241.699
315.017
241.722
314.383
241.779
314.227
241.382
314.327
242.015
314.345
241.698
314.463
242.014
314.124
241.697
314.424
241.697
313.949
241.722
314.754
241.803
314.46
241.803
314.771
241.487
314.34
242.12
314.339
241.803
314.752
241.779
314.752
241.697
314.22
241.721
314.202
242.096
314.732
241.744
314.219
242.176
314.732
241.719
314.218
241.8
314.731
242.093
314.749
241.742
314.749
242.223
314.748
241.881
314.748
241.823
314.747
241.928
314.746
241.986
314.508
241.88
314.709
241.798
314.746
241.846
314.214
242.303
314.727
242.197
314.332
241.798
314.332
242.116
314.45
241.823
314.761
241.88
314.741
241.774
314.209
241.74
315.135
242.197
315.033
241.798
314.72
241.822
314.618
241.88
314.599
241.798
314.718
241.798
314.735
242.092
314.734
241.693
314.734
241.717
314.733
241.775
314.732
241.693
314.969
241.693
314.647
241.717
314.591
242.116
315.123
242.092
314.848
242.034
314.865
241.798
314.865
242.091
314.864
242.033
314.744
242.091
314.313
241.716
314.725
242.116
314.605
242.092
314.706
242.01
314.843
241.693
314.741
242.082
314.722
242.328
315.134
242.304
314.601
242.175
314.702
242.353
314.72
242.141
315.014
241.857
314.82
242.035
314.737
241.776
315.131
242.059
315.251
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580.869
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241.977
313.247
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313.694
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313.263
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312.741
241.043
313.252
240.622
Sheet2
MRW147_2603674J25-1_35, C3MRW147_2622824J25-4_35, C3MRW147_2610226J25-2_35, C3HcdHcMPaMR
498.611312741312.741499.127240565240.565499.854275113275.113w/o Active Metal99.287
498.642312722312.722498.96240622240.622499.799274996274.996w/ Active Metal325.6226.4462.040816326594.7
498.666312840312.84498.763240588240.588499.743274637274.637w/Active Metal2406.5307.3627.142857142990.7
498.697312740312.74498.541241042241.042499.625274746274.746
498.753312840312.84498.351240621240.621499.49274521274.521↑λCFBが17ppmとした際の応力推定 サイオウリョクスイテイ
498.777312858312.858498.153240564240.564499.348275113275.113
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