New Energy Technology Forum

New Energy Technology Forum(13:00 ~ 14:45, Monday 23rd April)


1aOA01No file submission


1aOA02No file submission


1aOA03


1aOA04

Three-dimensional ceramic molding

based on microstereolithography for the production

of piezoelectric micro power generation devices

Kensaku Monri and Shoji Maruo

Yokohama National University

79-5 Tokiwadai, Hodogaya, Yokohama, Kanagawa, Japan

email:[email protected]

Maruo laboratory , Yokohama National University

Research background Wireless Sensor Networks

Networks to collect information ubiquitously using wireless sensor nodes

PC

Various types of wireless sensor nodes are required.

industrial process monitoring and control, machine, health monitoring, etc. Industrial and consumer applications

Large size High power

Small size Low power

wireless sensor node


The wireless sensor nodes are often powered by conversional batteries

Battery Problems of Wireless Devices

The need either to replace or to recharge them periodically

Challenges

・Cost of battery replacement is high ・In some situations, the battery replacement is not possible

Energy harvesting is the promising alternative of the batteries Converting environment sources of energies into electrical energy

The size and weight of the batteries are relatively large

Thermal energy Light energy Wind energy

Vibrational energy is lightly affected by environmental changes.

Vibrational energy is suitable for energy harvesting devices

Vibrational energy


maruo lab , Yokohama National University

Piezoelectric Energy Harvesting

IEEE Pervasive Compt. 4 (1) (2005) 28

Microelectronics Journal 37 (2006) 1280

Vibration is limited to one or two directions

due to the 2-D shapes of piezoelectric elements.

Length : 9-25mm

Power : 375μW(120Hz) Length×Width : 2.0×0.6mm

Power : 2.16μW(609Hz)

Height : ～1μm Diameter : ～40nm

Science 312 (2006) , 242

Power : 0.5pW(10MHz)

Previous micro/nano devices for piezoelectric energy harveting

Development of 3-D piezoelectric elements

for high-performance energy harvesting devices



Microstereolithography

Single-photon stereolithography Two-photon stereolithography

Multi-scale fabrication of arbitrarily 3-D polymer molds

fs pulsed laser beam

two-photon absorption

Photopolymer

objective lens

UV laser beam

stage

0.5mm 1mm

XY Plane：20－100μm Depth(Z)：50－200μm

Resolution XY Plane：100－500nm Depth(Z)：500nm

Resolution

XY Plane：20×20mm Depth(Z)：No limitation

Size XY Plane：300×300μm Depth(Z)：～ 200μm

Size

5mm

Lasers & Photo. Rev. 2, 100 (2008).

Opt. Lett. 22, 132 (1997) Times Cited:668



3-D ceramic molding based on microstereolithography

Drying Thermal Decomposition Sintering Immersing

Polymer model Slurry

Gas

(～600℃) (～1400℃)

•Sophisticated 3-D ceramic microstructures (µm~mm scale)

•Wide variety of ceramics (Optoceramics, Bioceramics, Piezoceramics)

Jpn. J. Appl. Phys. 48, 06FK01 (2009)

1mm

SiO2 (3D channel)

Jpn. J. Appl. Phys. 50, 06GL15 (2011)

1mm

β-TCP (porous body)

10mm MNC 2010

SiO2 (Microchannel)

Microstereolithography + Floc casting of ceramics slurry



Fabrication of a spiral piezoelectric element

1mm

Fabrication of a polymer mold for making a herically-curved piezoceramic element by single-photon microstereolithography

CAD image of the device ・3-D deformation

Spiral structure like a coil spring

・Increase of deformation amount

The shell structure allows insertion of slurry by centrifugal casting

Shell thickness : 100-200μm

Inlet diameter : 200μm


・Increase of energy density of generation device


Ceramic Slurry

Ceramics Slurry A concentrated ceramic particulate suspension

(A mixture of ceramics powder, dispersant and ion exchange water)

BaTiO3 ceramics powder

The role of dispersant

Dispersant suppresses the aggregation of particles

High strength of a green body

High-concentration slurry

・Particle diameter : 150nm or 400nm

・Environmentally friendly material

1μm 1μm

Dispersant binds ceramic particles

KCM Corporation : BT-HP


In preparation of slurry

In dry process


Thermal Decomposition Process

Precise control of heating profile is required

to reduce the collapse of the green body

Rapid thermal decomposition places great stress on a green body

Collapse of the green body

0

10

20

30

40

50

60

70

80

90

1000

50

100

150

200

250

300

350

400

450

500

550

600

0 200 400 600 800 1000 1200 1400 1600 1800 2000

Wig

ht l

oss

rate

(f)

[wt%

]

Tem

per

atu

re[℃

]

Time[min]

Temperature

Weight loss rate1mm

1mm



Time [min.]

Wei

ght

loss

rat

e (f

) [

wt%

]

Tem

per

atu

re

[ ℃]

0%

10%

20%

30%

40%

50%

60%

70%

80%

90%

100%0

50

100

150

200

250

300

350

400

450

500

0 500 1000 1500 2000

theoretical value measured value heating program

Master Decomposition Curve

(MDC) theory

Optimization of heating profile by MDC theory

Jpn. J. Appl. Phys. 48 (2009) 06FK01

Nonlinear heating profile derived from MDC theory

realized constant weight loss of a polymer mold (0.05wt%/min)

dt

RT

Qexpdf

f1mk

1 t

0n1n

00

f

f0

:f Weight loss rate

:Q Activation energy

:n Reaction order

:R Gas constant

:T Temperature

:n Reaction order

:0k Arrhenius pre-exponential constant

J. Am. Ceram. Soc. 88, 2722 (2005)


:0m Initial mass of the sample


Experimental Results

Green body

Sintering body

sintering temperature ： 1300℃

1mm

1mm

after thermal decomposition process derived by MDC theory

Attachment of silver electrodes and

Poling treatment under electric field of 1.5 kV/mm

1mm



Demonstration of Piezoelectric Property

Piezoelectric property of the spiral piezoelectric element

was confirmed by adding repetitive load.

-50

0

50

100

150

200

250

300

-150

-100

-50

0

50

100

150

0 5 10 15 20 25 30

Load

[gf]

V

olt

age[

mV

]

Time [sec.]

load cell



Conclusion


-- Making high-concentration ceramic slurry with BaTiO3 nanoparticles

-- Filling the slurry into a polymer mold at high density by centrifugal casting

-- Optimizing heating profile of thermal decomposition process by MDC theory

Demonstration of piezoelectric property of the 3-D generator

Evaluation of the performance of the 3-D micro power generator

Improvement of power generation efficiency by optimizing 3D shape

A spiral piezoelectric element was fabricated using a 3-D molding process based on microstereolithography

Future Works


1aOA05

Energy Harvesting System Using

Ferroelectric PVDF Film

Takashi Nakajima, Soichiro Okamura Department of Applied Physics, Faculty of Science Tokyo University of Science, JAPAN

Energy Harvesting

※Quartz, PZT, AlN, ZnO, PVDF etc…

Piezo* Electrical Energy

The power sources are human, animals and automobile and so on. Clean energy

Mechanical Energy

Applications sc

ale

Technology trends

EnOcean NEC/ Soundpower

Innowattech

JR East

Pavegen

Brother Industry

MicroGen

Bridgestone

Metasphere

ETSI

Michigan Univ.

Georgia Tech

Sainsbury's supermarket

Club Watt

※Electromagnetic or piezoelectric methods

Efficiency??

• Flexible • Large area • Less environmental burden

Piezoelectric Power Generation Using Polymer

Fluorine

Hydrogen

Symmetry:C2v 3 2

1

Drawing direction

k31 d31 1/s11 e33/e0(80kHz) k33 e33 c33

0.15 15 pC/N 10 GPa 9.0 0.27 -180mC/m2 10 GPa

0 0 00 0 0𝑑31 𝑑32 𝑑33

0 𝑑24 0

𝑑15 00 00 0

PVDF

Power generating systems using polymer

Trample

•Multilayer •Large stress by lever

Vibration

•Film is very flexible •Easy to attach

PVDF

LED

Tension

•Particular usage for polymer based energy harvesting

Power generation characteristics

• Theoretical estimation • Experimental results

Estimation of power generation

pressing

drawing

vending

𝑄 = 𝑑𝐹 𝑑 coefficient: C/N

𝑉 = ℎ∆𝑙 ℎ coefficient: V/m

𝑃 =1

2

1

2𝑄

1

2𝑉 𝑓 =

1

8𝑘2𝐹∆𝑙𝑓

Under impedance matching condition,

𝑄𝑉 = 𝑑𝐹 × ℎ∆𝑙 = 𝑑2 𝜀𝑠 𝐹∆𝑙 = 𝑘2𝐹∆𝑙

load 1/2Q, 1/2V

×𝑘2/8

Mechanical Energy 𝐹∆𝑙

Estimation of power generation

𝑃 =1

8𝑘2𝐹∆𝑙𝑓

l3

l2

l1

Strain Form ⇒ when large stress can be applied

Stress Form ⇒ when available stress is limited

𝑃 =1

8𝑘2𝑐33𝑙1𝑙2𝑙3

∆𝑙3𝑙3

2

𝑓

𝑃 =1

8𝑘2𝑠11

𝑙1𝑙2𝑙3

𝐹12𝑓

Multilayer is effective.

How to deform the film? ⇒Lever structure

Smaller cross-sectional area is better →drawing is effective

Calculations of power generation

10-6

10-5

10-4

10-3

10-2

10-1

100

101

102

103

UL (

J)

10-2

10-1

100

101

Strain (%)

PZT PVDF

Break-down limit

10%

strain

＝3.6J

Sample size

1cm3

The efficiency of PVDF Is smaller than PZT. However, the max power generation surpasses PZT owing to its large break down limit.

System design

Electromechanical coupling k

Output power

Frequency

Multilayer

Stress increase

Drawing

Power generating floor

Water flow

Rotational motion

Structure of energy generating system

Power generating floor Power generation from rotational motion

cam system ・Frequency upconversion

Large Stress Small Stress

50

40

30

20

10

0

UL (

J)

10 100 1000

CL (nF)

200 layers 100 layers 50 layers

Power generation characteristics of multilayer structure

10

8

6

4

2

0

Q (

C

)

1.21.00.80.60.40.20.0

F (kN)

200 layers 100 layers 50 layers

Generated Charge vs Stress Load capacitance dependence

※Stress=1 kN

Power generating floor

3.0

2.5

2.0

1.5

1.0

0.5

0.0

PL (m

W)

10 100 1000

CL (F)

50

40

30

20

10

0

UL (m

J)

25 s 20 s 15 s 10 s 5 s 1 s

Charging time

-200

-100

0

100

200

Ou

tpu

t vo

lta

ge

(V

)

20151050

t (s)

RL = 1 MΩ

Output voltage Charging characteristics

Rectification

Drawing type power generation

100

80

60

40

20

0

Q (

pC

)

1.21.00.80.60.40.20.0

Strain (%)

d31=15 pC/N

18 mm×6 mm×0.04 mmt

Power generation from rotational motion

Qp-p=0.75 C

P = 1/2Q2/Cf = 8 mW

-1.0

-0.5

0.0

0.5

1.0

Q (

C

)

100806040200

t (ms)

55 Hz

Power generation using water flow

• Irrigation water • Deep-sea • Water pipe Battery-less sensing system

Reynolds number: Re

Current velocity: U

Travelled length: d

Dynamic viscosity:

𝑅𝑒 =𝜌𝑈𝑑

𝜇

Re vortex

5 < Re < 45 Double spiral

45 < Re < 150 Karman vortex street

150 < Re Turbulent flow

Time (s)

Ou

tpu

t vo

ltag

e (V

)

80 nW

Summery

Backgrounds Applications

Energy harvesting technique using piezoelectric materials

Battery-less, wireless devices

Power generating floor Multilayered PVDF

Stress increase by a lever system

Drawing type Highly efficient

Frequency upconversion by cam

Vibrational type Easy to get energy

Water flow power generation

Piezoelectric Polymer

Robust (Output increase by lever system)

Easily formable

Various driving modes


1aOA06

Preparation on transparent flexible piezoelectric energy harvester based on PZT

Young Ho Do, Min Gyu Kang, Hyun Cheol Song, Won Hee Lee, Chong Yun Kang, and Seok Jin Yoon

Electronic Materials Center, Korea Institute of Science and Technology, Seoul, Korea

IWPMA 201223. Apr. 20121aOA06

1.

2.

3.

4.

5.

Medical

Personal electronics

“ Piezoelectric technologies could extend to all area ”“ Piezoelectric technologies could extend to all area ”Wireless sensors

Implantable devices

Robots

Nanosensors

MEMS

Mechanical energy sources

Wind

Wave

Body movements

Driving

Piezoelectric technologies

PiezoelectricPiezoelectric

MEMS & Nanodeivces

Flexible device technologies

Bendable

Light-weight

FoldableFlexible electronics

Flexible electronics

Most polymer substrates used in flexible devices applications have a low melting temperature( 200 ~ 300 °C) Low temperature process

Transfer process

M. C. McAlpine, Nano Lett. (2010)Rogers, SMALL (2011)

Flexible device technologies

Low Temperature Heat Treatment

Low Temperature Materials

Selective Heat Treatment

T. J. Marks, Nature Mat. (2011)

AdvantageHigh temp. for the crystallization → degrade of the under-layer structuresPrior to transfer onto a selected receiver substrateReceiver substrate is not heated to high temperatures

10

0

energy (eV)

Sapphire (Transparent)

KrF Laser (248 nm, 4.99 eV)

PZT (3.2 ~ 3.6 eV)Functional layer

Receiver substrate

Sapphire

ExcimerLaser

MeltingFunctional layer

Receiver substrate

Sapphire

Lift-off

Laser lift-off (LLO) processing, or laser transfer, has recently been presented as aviable alternative to direct deposition processes for integrating dissimilar materials.

hv (laser photon energy) - Eg (Energy band gap) < 0→ Transparent to laser radiation

hv (laser photon energy) - Eg (Energy band gap) > 0→ Absorption to laser radiation

Laser Lift-Off (LLO)

Sensors device that measures a physical quantity and converts it into a signal

Energy harvesting process by which energy is captured and stored

Piezo. sensor and energy harvester

MIM structure Planar structure

Sacrificial layerStamp

Advantage• Small size• Broad frequency (dynamic) range• Light weight• 2-wire operation (IEPE)• Ultra low noise• Simple signal conditioning• Cost effective implementation

KrF Excimer Laser(Wave Length = 248 nm)

Homogenizer

Dielectric MirrorFocus Lenz

Sample

Energy Density 400~500 mJ/cm2

Laser Frequency 10 Hz

Substrate Temp. R.T.

Excimer laser lift-off system

Experimental Procedure

Target PZT

Substrate Sapphire

Base pressure High ´ 10-7 Torr

Working pressure 5 mTorr

Ar / O2 gas 28.5 / 1.5 sccm

Substrate temperature 300 ℃

rf power 100 W

Post annealingRTA, 650 ℃,

PO2 10 Torr, 10 m

P Deposition condition of PZT thin films

Experimental Procedure

Fabrication of PZT thin films

Fabrication of Flexible samples

Laser Lift-Off and Flexible devices

Deposition of sacrificial PZT layer by rf sputter

Deposition transparent electrode by dc sputter

Deposition of functional PZT layer by rf sputter

Deposition of transparent electrode by dc sputter

Polymer substrate bondingLaser radiation and sacrificial PZT melting

Sapphire substrate removal

Flexible devices based on PZT

Current and Voltage output signal

0 10 20

-2.0x10-9

0.0

2.0x10-9

-0.05

0.00

0.05

Time (s)

Vol

tage

(V)

Cur

rent

(A)

Output Voltage

Output Current

Flexible piezo. sensor & energy harvester

Flexible Piezoelectric Energy Harvesting

Current and Voltage output – reversed polarity testing

0 10 20

-2.0x10-9

0.0

2.0x10-9

-0.05

0.00

0.05

Time (s)

Vol

tage

(V)

Cur

rent

(A)

Output Voltage

Output Current

0 10 20

-2.0x10-9

0.0

2.0x10-9

-0.05

0.00

0.05

Time (s)V

olta

ge (V

)C

urre

nt (A

)

Output Voltage

Output Current

P Forward connected: negative signal, Reverse connected: positive signal→ The measured signal was generated by the flexible samples

Forward connection Reversed connection

P The piezoelectric energy harvesting properties of transparent flexiblepiezoelectric energy harvester based on PZT thin films, which werefabricated by using laser lift-off process (LLO), were investigated.

P The transparent flexible piezoelectric energy harvester based on PZTthin films generated true signal (output current and voltage), atperiodically pressing motion.

P LLO could be useful in the possibility of using the flexible electronics.

Conclusion

Thank you for your attention


1aOA07

© M

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Energy Harvesters Using Multiple Bimorphs

for Increased Power and

Enhanced Frequency Response

9th IWPMA

23rd April 2012, Hirosaki, Japan

Waleed Al-Ashtari, Tobias Hemsel,

Matthias Hunstig and Walter Sextro

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Agenda

Piezoelectric energy / power harvesting

Design challenges & solution approaches

Proposed harvester setup

Operation scenarios & results

Conclusions

2 W. Al-Ashtari, T. Hemsel, M. Hunstig, W. Sextro / IWPMA 2012

© M

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Piezoelectric Energy / Power Harvesting


Task

Converting ambient

vibration energy into

electrical energy

Purpose

Powering arbitrary

low-power electronics

Examples

Wireless sensor networks, wearable devices,

and health monitoring sensors

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Design Challenges & Solution Approaches

4 W. Al-Ashtari, , T. Hemsel, M. Hunstig, W. Sextro / IWPMA 2012

Design Challenges

Maximum power is

generated at a certain

optimal frequency.

The optimal frequency

depends on harvester and

load characteristics.

Ambient vibration frequency

might be fluctuating and

does not fit the optimal

frequency.

Solution Approaches

Optimal frequency tuning

Bandwidth enhancement

0.9 0.95 1 1.05 1.1

0.1

0.2

0.3

0.4

0.5

0.6

0.7

0.8

0.9

1

Normalized Excitation Frequency

No

rma

lize

d L

oa

d P

ow

er

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Frequency Tuning

Based on using

attraction force of

two magnets

Attraction force

changes with

separation distance d

Attraction force acts as

an additional spring

2 4 6 8 10

180

200

220

240

260

280

300

Separation Distance d (mm)

Op

tim

al F

requ

en

cy (

Hz)

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[Shahruz 2006] [Xue et al. 2008]

Bandwidth Enhancement

Multiple cantilever

beams with different

length and proof

masses

Multiple multilayered

cantilever beams with

different width and

thickness

Outp

ut

Pow

er

(µW

)

| T

ip D

isp

lace

me

nt / A

pp

lied

Acce

lera

tio

n |

Frequency Frequency (Hz)

© M

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Proposed Harvester Setup


Magnet Pairs

Bimorphs

Base

Can be used for

frequency tuning

and bandwidth

enhancement

Easy to design

and insensitive to

manufacturing

tolerances

Multiple Multilayered Cantilever Beams with Magnetic Tuning

Plastic

© M

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Proposed Harvester Setup

Electrical Connection

8 W. Al-Ashtari, M. Hunstig, T. Hemsel, W. Sextro / IWPMA 2011

Parallel Connection Serial Connection

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Operation Scenarios & Results


All bimorphs are tuned

to one fixed frequency.

Series connection

achieves higher load

bandwidth, but less

maximum power

than parallel connection.

Frequency Tuning

0 50 100 150 200

50

100

150

200

250

300

350

Load Resistance (k)

Load P

ow

er

( µ

W )

Single Bimorph

Three Bimorphs ( Parallel connection )

Three Bimorphs ( Series connection )

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200 220 240 260 280

0.2

0.4

0.6

0.8

1

1.2

1.4

1.6

1.8

2

Normalized Frequency ( Hz )

Norm

aliz

ed L

oad P

ow

er

( -

)

First Bimorph

Second Bimorph

Third Bimorph

Three Bimorphs



The bimorphs are tuned

to different certain

frequencies

Example Load Case:

Operating

frequency

f = 220 − 250 Hz

Load Rl = 80 kΩ


(Theory)

235 𝐻𝑧

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(Direct Series Connection )

Different characteristics of the

bimorphs lead to interference and thus

impede improved power harvesting

200 220 240 260 280

20

40

60

80

100

120

140

160

180

Frequency ( Hz)

Load P

ow

er

( µ

W )

Single Bimorph

Three Bimorphs

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Minimum load power in desired frequency

range is increased by factor 10!


(Series Connection Using Rectifiers )

200 220 240 260 280

20

40

60

80

100

120

140

160

180

200

Frequency ( Hz )

Load P

ow

er

( µ

W )

Single Bimorph ( Without Rectifier )

Single Bimorph ( With Rectifier )Three Bimorphs ( With Rectifiers )

© M

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Conclusions


The proposed setup using multiple magnetic tuned bimorphs

can be used for frequency tuning and bandwidth enhancement.

The setup is easy to design and insensitive to manufacturing

tolerances.

Connecting bimorphs in parallel is better for powering small loads

and connecting in series is better for large loads.

Using rectifiers allows for a significant bandwidth enhancement.

© M

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Thank you very much

for your attention!

University of Paderborn

Mechatronics and Dynamics

Pohlweg 47-49

33098 Paderborn

Dr.-Ing. Tobias Hemsel

[email protected]

phone +49-5251/60-1805

fax +49-5251/60-1803

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