New Method for Aligner Calculation Algorithm

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New calculation method on PC

Technical Report(検討書) 【 NO.

】

【Report's Title】 New calculation method on PC Approval Check Check

【 Department

】

TAZMO VIET NAM

【 Reporter 】 Tran Trung Nguyen

【 Report Date】

2011/06/16

【 AttachedNumber 】

0 【 ClassificationCode 】

［Purpose］

New method of aligner’s calculation algorithm on PC

［Content］

1.

Overview:

Figure1: WHS003 PC software overview

2.

Calculation algorithm:

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Input

Thetaencoder

Hardwaresetting

Edge Data

ORIFULA_ICHI_XORIFULA_ICHI_Y

T_mokuteki_plsL6_DATA

Output

Rising/falling edge if the notchCalculate the angle of the notchCalculate the average value of CCD

sensor dataCalculate the agari pulseSpecify the radius of the waferDraw the edge imageCalculate the wafer center by OpenCVlibrary (X, Y)Calculate the Theta value

Calculation




2.1 Rising/ falling edge detection:

The same way as

2.2 Calculate the angle of the notch

2.3 Calculate the average value of CCD sensor data:

While calculate the average value of CCD data, the CCD data of the notch are

removed

Heikin= (S1+S2)/(sample-origin_cnt)

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Figure5: The way to calculate average value of CCD data

2.4 Specify the radius of the wafer

The wafer size is estimated according to the go_y_pls, heikin, CCD_radius.

WK = - (go_y_pls - (heikin - CCD_radius)/Y_STEP)

WK mm = WK*0.002

In the special case, when the wafer’s center, CCD’s center and ORG point are on

the same line (Figure 6), the formula can be reduced like the bellow formula:

WK = - go_y_pls

Figure 6: The way to specify the radius of the wafer

For the large type, which is supported 6, 8, 12 inch wafers. The ORG_CCD is

150mm.

_ WK mm > -10 & WK mm < 10 => hankei =150 (12 inch wafer)

_ WK mm > 40 & WK mm < 60 => hankei =100 (8 inch wafer)

_ WK mm > 65 & WK mm < 85 => hankei =75 (6 inch wafer

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For the small type, which is supported 8, 6, 5, 4, 3 inch wafers. The ORG_CCD is

100mm.

_ WK mm > -10 & WK mm < 10 => hankei =100 (8 inch wafer)

_ WK mm > 15 & WK mm < 32 => hankei =75 (6 inch wafer)

_ WK mm ≥ 32=& WK mm < 44 => hankei =62.5 (6 inch wafer)

_ WK mm ≥ 44 & WK mm < 56 => hankei =50 (5 inch wafer)

_ WK mm ≥ 56 & WK mm < 70 => hankei =38.1 (4 inch wafer)

2.5 Shift the _encoder[] and CCD[] so that the rising point is the firstθ

element of the data array

_The y_work_tbl is calculated by the bellow formula:

y_work_tbl = hankei + (data_tbl – heikin)

Figure 7: Calculate the y_work_tbl from data_tbl

_The y_work_tbl and theta_encoder is shifted right, so that the rising point islocated at the first element

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Figure 8: shift the data so that the rising point is at the first element

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2.6 Calculate the agari pulse:

// Right position of orientation flat

data_agari = (y_wok_tbl[2] + y_wok_tbl[3] + y_wok_tbl[4]) / 3;

j = sampling - origin_cnt;

// Left position of orientation flat

data_sagari = (y_wok_tbl[j - 2] + y_wok_tbl[j - 3] + y_wok_tbl[j - 4]) / 3;

wok1 = (double)(data_agari - data_sagari) / origin_cnt;

ww = sampling - origin_cnt;

wok3 = wok4 = 0;

if(turn_wok_tbl[ww] > turn_wok_tbl[0]) {

for(i = 1; i < origin_cnt; i++) {

ww1 = ww + i;

if(turn_wok_tbl[ww1] < 25000 ) {

wok2 = (double)(turn_wok_tbl[ww1] + TURN_PLS);

wok3 = wok3 + (wok2 * (((double)data_sagari + (wok1 * i)) -y_wok_tbl[ww1]));

wok4 = wok4 + (((double)data_sagari + (wok1 * i)) - y_wok_tbl[ww1]);

} else {

wok3 = wok3 + ((double)turn_wok_tbl[ww1] * (( (double)data_sagari +

(wok1 * i)) - y_wok_tbl[ww1]));

wok4 = wok4 + (( (double)data_sagari + (wok1 * i)) - y_wok_tbl[ww1]);

}

}

} else {

for (i = 1; i < origin_cnt; i++) {

ww1 = ww + i;

wok3 = wok3 + ((double)turn_wok_tbl[ww1] * (((double)data_sagari +(wok1 * i)) - y_wok_tbl[ww1]));

wok4 = wok4 + (((double)data_sagari + (wok1 * i)) - y_wok_tbl[ww1]);

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}

}

pls_agari = (long)(wok3 / wok4) % TURN_PLS; // theta pulse count at

notch center position

where: work4 = S1 + S2

Figure 9: Calculate the agari_pulse

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2.7 Calculate the length of the notch:

Where:

Figure 10: Calculate the notch’s length and Origin kakudo

2.8 Calculate the X, Y, Theta value:

+ The X,Y, Theta data will be calculated 3 times, base on the offset coordinate.

The origin coordinate is turn 230, 280 and 330 to calculate.

+ How to calculate the X, Y value for each coordinate:

_

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Figure 11: Calculate X, Y and theta

+ ORIFULA_ICHI_X, ORIFULA_ICHI_Y is calculated 3 times. The average value of 2

nearest value is set as the result of the calculation.

+

(T_KAITEN = T_REVISION = 0)

［Consideration］

1. The methods may improve the precious of the aligner:

1.1

Change the way to calculate the CCD average value:

1.2

Another way to filter the CCD data (this method need check on real system):

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1.3

The kijun_kakudo is calculated 3 times on base on the offset coordinate (230, 280

and 330). The result value is the average of 2 nearest values also.

1.4Call the kaiten routine 3 times. After the calculation is finished, adjust the rough

CCD data then calculate again. If the condition of the film is too bad, this

method may have a good effect

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New Method for Aligner Calculation Algorithm

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