Date post: | 03-Jun-2018 |
Category: |
Documents |
Upload: | andrew-holmes |
View: | 214 times |
Download: | 0 times |
of 78
8/12/2019 Nikon Industrial Instruments and Application
1/78
Instruments Company
Nikon Industrial Instruments and Applications
CONFIDENTIAL
Nikon Corporation Instruments Company
November 2013
8/12/2019 Nikon Industrial Instruments and Application
2/78
2
NIKON CORPORATION
Instruments CompanyPrologue(1)
CONFIDENTIAL
8/12/2019 Nikon Industrial Instruments and Application
3/78
3
NIKON CORPORATION
Instruments Company
CONFIDENTIAL
Camera is not the whole product of Nikon
Prologue(2)
8/12/2019 Nikon Industrial Instruments and Application
4/78
4
NIKON CORPORATION
Instruments Company
CONFIDENTIAL
Nikon contributes to the advancement of society
on the basis ofOptical and Precise Technology
Prologue(3)
8/12/2019 Nikon Industrial Instruments and Application
5/78
5
NIKON CORPORATION
Instruments Company
Nikon Industrial Instruments and applications
1. Introduction of Nikon Corporation
2. Industrial Instruments business
3. Microscope lineup for the industrial field and
application
4. Measuring Instruments lineup and application
CONFIDENTIAL
Contents
8/12/2019 Nikon Industrial Instruments and Application
6/78
Instruments Company
1. Introduction of Nikon Corporation
CONFIDENTIAL
8/12/2019 Nikon Industrial Instruments and Application
7/78
7
NIKON CORPORATION
Instruments Company
CONFIDENTIAL
Nikon contributes to the advancement of society
on the basis ofOptical and Precise Technology
Introduction of Nikon Corporation(1)
8/12/2019 Nikon Industrial Instruments and Application
8/78
8
NIKON CORPORATION
Instruments Company
CONFIDENTIAL
Optical and PreciseTechnology
Imaging business
Instruments
business
Precision Equipment
business
Introduction of Nikon Corporation(2)
8/12/2019 Nikon Industrial Instruments and Application
9/78
9
NIKON CORPORATION
Instruments Company
CONFIDENTIAL
Optical and PreciseTechnology
Imaging business
Instruments
Company
Precision Equipment
Company
Digital CameraFilm Camera
Interchangeable lens
SpeedlightFilm Scanner
Photographic accessories
Software
Introduction of Nikon Corporation(3)
8/12/2019 Nikon Industrial Instruments and Application
10/78
10
NIKON CORPORATION
Instruments Company
CONFIDENTIAL
Optical and PreciseTechnology
Imaging Company
Instruments
Company
Precision Equipment
business
IC Stepper and Scanner
LCD Stepper and Scanner
Introduction of Nikon Corporation(4)
8/12/2019 Nikon Industrial Instruments and Application
11/78
11
NIKON CORPORATION
Instruments Company
CONFIDENTIAL
Optical and PreciseTechnology
Imaging business
Instruments
businessPrecision Equipmentbusiness
Industrial MicroscopeStereoscopic Microscope
Digital Microscope
Measuring Instruments3D Metrology Solution
SEMI Inspection Equipment
Biological Microscope
Introduction of Nikon Corporation(5)
8/12/2019 Nikon Industrial Instruments and Application
12/78
12
NIKON CORPORATION
Instruments Company
Others
CONFIDENTIAL
Introduction of Nikon Corporation(6)
Binoculars Surveying Instruments Glasses
Photonics materials Customized telescopes
8/12/2019 Nikon Industrial Instruments and Application
13/78
Instruments Company
2. Industrial Instruments business
CONFIDENTIAL
8/12/2019 Nikon Industrial Instruments and Application
14/78
14
NIKON CORPORATION
Instruments Company
CONFIDENTIAL
Industrial Instruments
Microscopes
(for Inspection / Analysis)
Measuring Instruments
for Measurement
Stereoscopic Microscope
- SMZ series
Industrial Microscope
-L/LV series
-MA series
Digital Microscope
-ShuttlePix P-400R
Profile Projector
-V-24B, V-20B, V-12B series
Measuring Microscope-MM series
CNC Video Measuring System
-VMA, VMR series, VMZ series
Digimicro
Autocollimator
Industrial Instruments business(1)
CONFIDENTIAL
8/12/2019 Nikon Industrial Instruments and Application
15/78
15
NIKON CORPORATION
Instruments Company
CONFIDENTIAL
Industrial Instruments
Microscopes
(for Inspection / Analysis)
Measuring Instruments
for Measurement
Stereoscopic Microscope
- SMZ series
Industrial Microscope
-L/LV series
-MA series
Digital Microscope
-ShuttlePix P-400R
Profile Projector
-V-24B, V-20B, V-12B series
Measuring Microscope-MM series
CNC Video Measuring System
-VMA, VMR series
Digimicro
Autocollimator
Industrial Instruments business(1)
CONFIDENTIAL
8/12/2019 Nikon Industrial Instruments and Application
16/78
Instruments Company
3.Microscopes lineup and applications
CONFIDENTIAL
8/12/2019 Nikon Industrial Instruments and Application
17/78
17
NIKON CORPORATION
Instruments Company
20,000X
10X
15,000X
10,000X
1,000X
100X
Industrial
Microscope
L/LV series
MA seriesStereoscopicMicroscope
SMZ series
Magnification
Microscopes lineup and Applications
Digital
MicroscopeSuttlePixP-400R
CONFIDENTIAL
8/12/2019 Nikon Industrial Instruments and Application
18/78
18
NIKON CORPORATION
Instruments Company
20,000X
10X
15,000X
10,000X
1,000X
100X
Industrial
Microscope
L/LV series
MA series
Magnification
Stereoscopic Microscope(1)
Digital
MicroscopeSuttlePixP-400R
StereoscopicMicroscope
SMZ series
CONFIDENTIAL
8/12/2019 Nikon Industrial Instruments and Application
19/78
19
NIKON CORPORATION
Instruments Company
SMZ series Stereoscopic Microscope
Stereoscopic Optical Image
Long Working Distance Wide Field of View
Working
Distance
Good Operability
Stereoscopic Microscope(2)
CONFIDENTIAL
8/12/2019 Nikon Industrial Instruments and Application
20/78
20
NIKON CORPORATION
Instruments Company
Wide field of View
Stereoscopic Optical Image
Image by SMZ800
(Zoom: 1X)
Image by LV150
(Obj Mag: 5X)
Image by SMZ800(Zoom: 1X)
Stereoscopic Microscope(3)
Image by LV150(Obj Mag: 5X)
Sample: PCB
CONFIDENTIAL
8/12/2019 Nikon Industrial Instruments and Application
21/78
21
NIKON CORPORATION
Instruments Company
Long Working Distance
Watch Assembly
Soldering
Stereoscopic Microscope(4)
Working
Distance
CONFIDENTIAL
8/12/2019 Nikon Industrial Instruments and Application
22/78
22
NIKON CORPORATION
Instruments Company
Wire Bonding System
PCB Inspection Equipment
Embedded Use
Stereoscopic Microscope(5)
CONFIDENTIAL
8/12/2019 Nikon Industrial Instruments and Application
23/78
23
NIKON CORPORATION
Instruments Company
Application Appearance Check / Inspection
Electronic Components, Precision Mold, PCB,Metallic Components, Printing condition Very wide range!!
Stereoscopic Microscope(6)
CONFIDENTIAL
8/12/2019 Nikon Industrial Instruments and Application
24/78
24
NIKON CORPORATION
Instruments CompanyStereoscopic Microscope(7)
Working Distance (mm)
Zoom magnification
0.63x15.75x
1.06.3X
0.88.0X
0.675.0X
0.675.0X
0.83.5X
0.73.0X
0 5.0X 10.0X
0.84.0X
SMZ800
SMZ1000
SMZ445/460
SMZ-2
SMZ745 SMZ745T
115
100
78
77.5
70
60SMZ18/25
25.0XCONFIDENTIAL
8/12/2019 Nikon Industrial Instruments and Application
25/78
25
NIKON CORPORATION
Instruments Company
20,000X
10X
15,000X
10,000X
1,000X
100X
Magnification
Industrial Microscope(1)
Digital
MicroscopeSuttlePixP-400R
Stereoscopic
Microscope
SMZ series
Industrial
Microscope
L/LV seriesMA series
CONFIDENTIAL
8/12/2019 Nikon Industrial Instruments and Application
26/78
26
NIKON CORPORATION
Instruments Company
L / LV series Upright Industrial Microscope
MA seriesInverted Industrial Microscope
Various Observation Method Color Image in High Magnification
Extend your vision
Industrial Microscope(2)
CONFIDENTIAL
8/12/2019 Nikon Industrial Instruments and Application
27/78
27
NIKON CORPORATION
Instruments Company
Bright Field
Dark Field
Simple POL
DIC
Fluorescence
Various Observation Methods
Industrial Microscope(3)
CONFIDENTIAL
8/12/2019 Nikon Industrial Instruments and Application
28/78
28
NIKON CORPORATION
Instruments Company
Bright FieldThe most standard observation method
The difference of the reflection indices and/or
colors of the lighted object as contrast
Industrial Microscope(4)
Circuit Pattern ChipCONFIDENTIAL
8/12/2019 Nikon Industrial Instruments and Application
29/78
29
NIKON CORPORATION
Instruments Company
Bright field Dark field
Dark FieldEnable to detect small particles, scratches, and etc.
Industrial Microscope(5)
CONFIDENTIAL
8/12/2019 Nikon Industrial Instruments and Application
30/78
30
NIKON CORPORATION
Instruments Company
Bright field POL observation POL observation
plate
Observing rocks
Simple POL Changing the specimens color depending on itspolarization characteristic
Industrial Microscope(6)
CONFIDENTIAL
I d i l Mi (7)
8/12/2019 Nikon Industrial Instruments and Application
31/78
31
NIKON CORPORATION
Instruments Company
Bright field DIC
DICPossible to observe the slightly gapped surfacenot to detect by bright field
Industrial Microscope(7)
CONFIDENTIAL
I d t i l Mi (8)
8/12/2019 Nikon Industrial Instruments and Application
32/78
32
NIKON CORPORATION
Instruments Company
Bright field
Through hole of a print circuit board
Fluorescence (B-2A)
FluorescencePossible to detect the defects or colors depending on thefluorescence characteristics of the samples.
Industrial Microscope(8)
CONFIDENTIAL
I d t i l Mi (9)
8/12/2019 Nikon Industrial Instruments and Application
33/78
33
NIKON CORPORATION
Instruments Company
Bright field Fluorescence (BV-2A)
Possible to recognize the color (RGB) by fluorescence
OLED
Industrial Microscope(9)
CONFIDENTIAL
NIKON CORPORATIONI d t i l Mi (10)
8/12/2019 Nikon Industrial Instruments and Application
34/78
34
NIKON CORPORATION
Instruments Company
Color Image in High Magnification
Obj Mag: 5X Obj Mag: 10X Obj Mag: 20X
Obj Mag: 50X Obj Mag: 100X
Industrial Microscope(10)
CONFIDENTIAL
NIKON CORPORATIONIndustrial Microscope(11)
8/12/2019 Nikon Industrial Instruments and Application
35/78
35
NIKON CORPORATION
Instruments Company
Application Appearance Inspection / Defects Analysis
Electronic Components, Semiconductor, FPD, PCB.
Metallic Components, Rocks, Mold, Ceramic
Industrial Microscope(11)
CONFIDENTIAL
NIKON CORPORATIONIndustrial Microscope(11)
8/12/2019 Nikon Industrial Instruments and Application
36/78
36
NIKON CORPORATION
Instruments Company
BF,
Simple POLEPI170x230mmInvertedCFI60-2MA100
BF, DF, DIC,Simple POL
EPI50x50mmInvertedCFI60-2MA200
BF, DF, DIC,
Simple POL, FLEPI & DIA150x100mmUprightCFI60-2LV100ND
BF, DF, DIC,
Simple POL, FLEPI150x150mmUprightCFI60-2LV150N(A)
BF, DF, DIC,
Simple POL, FLEPI & DIA200x200mmUprightCFI60-2L200ND
BF, DF, DIC,
Simple POLEPI200x200mmUprightCFI60-2L200N
BF, DF, DIC,
Simple POLEPI & DIA300x300mmUprightCFI60-2L300D
BF, DF, DIC,
Simple POLEPI300x300mmUprightCFI60-2L300
ObservationMethod
IlluminationStage size(Max)
Upright /Inverted
ObjectiveLens
Industrial Microscope(11)
CONFIDENTIAL
NIKON CORPORATIONDigital Sight series
8/12/2019 Nikon Industrial Instruments and Application
37/78
37
NIKON CORPORATION
Instruments CompanyDigital Sight series
Color Camera Head DS-Vi1 Color Camera Head DS-Fi2
Control Unit DS-U3 Control Unit DS-L3CONFIDENTIAL
NIKON CORPORATIONDigital Microscope Shuttlepix (1)
8/12/2019 Nikon Industrial Instruments and Application
38/78
38
Instruments Company
20,000X
10X
15,000X
10,000X
1,000X
100X
Industrial
Microscope
L/LV series
MA series
Stereoscopic
Microscope
SMZ series
Magnification
Digital Microscope Shuttlepix (1)
Digital
Microscope
SuttlePixP-400R
CONFIDENTIAL
NIKON CORPORATIONDigital Microscope Shuttlepix (2)
8/12/2019 Nikon Industrial Instruments and Application
39/78
39
Instruments Company
Shuttlepix P-400R Digital Microscope
Portability (Anytime, Anywhere)
Easy to use
Digital Microscope Shuttlepix (2)
Motorized stand set Handheld set
CONFIDENTIAL
8/12/2019 Nikon Industrial Instruments and Application
40/78
NIKON CORPORATION
Instruments CompanySummary of Microscope(2)
8/12/2019 Nikon Industrial Instruments and Application
41/78
41
Instruments Company
20,000X
10X
15,000X
10,000X
1,000X
100X
Industrial
Microscope
L/LV series
MA series
Stereoscopic
Microscope
SMZ series
Magnification
Summary of Microscope(2)
Digital
Microscope
SuttlePixP-400R
We can provide instruments to meet
your demands for inspection and analysis
CONFIDENTIAL
8/12/2019 Nikon Industrial Instruments and Application
42/78
Instruments Company
4. Measuring Instruments lineup
and applications
CONFIDENTIAL
NIKON CORPORATION
Instruments CompanyMeasuring Instruments and Applications(1)
8/12/2019 Nikon Industrial Instruments and Application
43/78
43
Instruments Company
CONFIDENTIAL
Industrial Instruments
Industrial Microscopes(for Inspection / Analysis)
Measuring Instrumentsfor Measurement
Stereoscopic Microscope
- SMZ series
Industrial Microscope
-L/LV series
-MA series
Profile Projector
-V24B, V20B, V12B series
Measuring Microscope-MM series
CNC Video Measuring System
-VMA, VMR series
Digimicro
Autocollimator
Measuring Instruments and Applications(1)
NIKON CORPORATION
Instruments Company
Measuring Instruments and Applications(2)
8/12/2019 Nikon Industrial Instruments and Application
44/78
44
p y
CONFIDENTIAL
Industrial Instruments
Industrial Microscopes(for Inspection / Analysis)
Measuring Instrumentsfor Measurement
Stereoscopic Microscope
- SMZ series
Industrial Microscope
-L/LV series
-MA series
Table Top SEM
-Neoscope
Profile Projector
-V24B, V20B, V12B series
Measuring Microscope-MM series
CNC Video Measuring System
-VMA, VMR series
Digimicro
Autocollimator
DP-E1
E-MAX
Data Processing System
Measuring Instruments and Applications(2)
NIKON CORPORATION
Instruments CompanyMeasuring Instruments and Applications(3)
8/12/2019 Nikon Industrial Instruments and Application
45/78
45
Use for
Length / angle measurement
Tolerance judgment
Manufacturer for
Electronics, Automotive, Machinery, Metal,Fiber, Steel, Mold
Gear Connector
Measuring Instruments and Applications(3)
CONFIDENTIAL
NIKON CORPORATION
Instruments CompanyMeasuring Instruments and Applications(4)
8/12/2019 Nikon Industrial Instruments and Application
46/78
46
Flexible PCB IC lead frame
Mold
Precision MoldMold
easu g st u e ts a d pp cat o s( )
CONFIDENTIAL
NIKON CORPORATION
Instruments CompanyMeasuring Instruments and Applications(5)
8/12/2019 Nikon Industrial Instruments and Application
47/78
47
Accuracy
Dimension
1um
10um
100um
1D 2D 3D
CaliperMicro Meter
Profile Projector
Video
Measuring
System
DigimicroDigimicro
MeasuringMicroscope
g pp ( )
CONFIDENTIAL
NIKON CORPORATION
Instruments CompanyMeasuring Instruments and Applications(6)
8/12/2019 Nikon Industrial Instruments and Application
48/78
48
Accuracy
Dimension
1um
10um
100um
1D 2D 3D
CaliperMicro Meter
Profile Projector
Video
Measuring
System
DigimicroDigimicro
MeasuringMicroscope
Manual Auto
g pp ( )
CONFIDENTIAL
NIKON CORPORATION
Instruments CompanyDigimicro(1)
8/12/2019 Nikon Industrial Instruments and Application
49/78
49
Accuracy
Dimension
1um
10um
100um
1D 2D 3D
CaliperMicro Meter
Profile Projector
Video
Measuring
System
DigimicroDigimicro
MeasuringMicroscope
g ( )
CONFIDENTIAL
NIKON CORPORATION
Instruments CompanyDigimicro(2)
8/12/2019 Nikon Industrial Instruments and Application
50/78
50
MF-1001, MF-501, MH-15M Digimicro
1 Dimension
Height / Depth of Samples Higher Accuracy
g ( )
CONFIDENTIAL
NIKON CORPORATION
Instruments CompanyDigimicro(3)
8/12/2019 Nikon Industrial Instruments and Application
51/78
51
Digimicro
1 Dimension Height / Depth of the Samples Higher Accuracy
Measure
the Height
CONFIDENTIAL
NIKON CORPORATION
Instruments CompanyProfile Projector(1)
8/12/2019 Nikon Industrial Instruments and Application
52/78
52
CaliperMicro Meter
Profile Projector
Video
Measuring
System
DigimicroDigimicro
Measuring
Microscope
Accuracy
Dimension
1um
10um
100um
1D 2D 3D
CONFIDENTIAL
NIKON CORPORATION
Instruments CompanyProfile Projector(2)
8/12/2019 Nikon Industrial Instruments and Application
53/78
53
V-24B, V-20B, V-12B seriesProfile Projector
2 Dimension (X. Y), Angle Wide field of viewAccurate Magnification
Stage ReadingChart Comparison
CONFIDENTIAL
NIKON CORPORATION
Instruments CompanyProfile Projector(3)
8/12/2019 Nikon Industrial Instruments and Application
54/78
54
Wide Field of ViewAccurate Magnification
Image on the Screen
Try to measure
the distance between
one line and another linePut on the stage
CONFIDENTIAL
NIKON CORPORATION
Instruments CompanyProfile Projector(4)
8/12/2019 Nikon Industrial Instruments and Application
55/78
55
X-axis movement
Y-axis movement
Accurate Measurement is possible
Stage reading
CONFIDENTIAL
NIKON CORPORATION
Instruments CompanyProfile Projector(5)
8/12/2019 Nikon Industrial Instruments and Application
56/78
56
Image on the Screen
Measure the Angle
Try to measure the angle
Put on the stage
CONFIDENTIAL
NIKON CORPORATION
Instruments CompanyProfile Projector(6)
8/12/2019 Nikon Industrial Instruments and Application
57/78
57
Chart Comparison
Image on
the Screen
Chart Image
Chart Image w/ Tolerance
CONFIDENTIAL
NIKON CORPORATION
Instruments CompanyProfile Projector(7)
8/12/2019 Nikon Industrial Instruments and Application
58/78
58
external counter
attachable12inchVVVV----12BS12BS12BS12BS
12inchVVVV----12BSC12BSC12BSC12BSC
external counter
attachable12inchVVVV----12BD12BD12BD12BD
5X, 10X, 20X, 25X,
50X, 100X, 200X
12inchVVVV----2BDC2BDC2BDC2BDC
10x6,8x6,
6x4,
4x4,2x2,
O3L
20inchVVVV----20B20B20B20B
5X, 10X, 20X,
50X, 100X
9V stageexternal counter
attachable24inchVVVV----24B24B24B24B
Projection lens
3 lens attachableStage
Built in
digital protractor
Built in
digital counter
Screen
Size
CONFIDENTIAL
NIKON CORPORATION
Instruments CompanyMeasuring Microscope(1)
8/12/2019 Nikon Industrial Instruments and Application
59/78
59
CaliperMicro Meter
Profile Projector
Video
Measuring
System
DigimicroDigimicro
MeasuringMicroscope
Accuracy
Dimension
1um
10um
100um
1D 2D 3D
CONFIDENTIAL
NIKON CORPORATION
Instruments CompanyMeasuring Microscope(2)
8/12/2019 Nikon Industrial Instruments and Application
60/78
60
MM-200, MM-400, MM-800Measuring Microscope
3 Dimension (X, Y, Z)Accurate Magnification + Stage Reading
System ExpandabilityConfigured with DSC
CONFIDENTIAL
NIKON CORPORATION
Instruments CompanyMeasuring Microscope(3)
8/12/2019 Nikon Industrial Instruments and Application
61/78
61
Accurate Magnification + Stage Reading
Image via Eyepieces
X-axis movement
Y-axis movement
Try to measure
the distance between
one line and another line
Put on the stage
CONFIDENTIAL
NIKON CORPORATION
Instruments CompanyMeasuring Microscope(4)
8/12/2019 Nikon Industrial Instruments and Application
62/78
62
System Expandability / Configured with DSC
8-segment LED Ring Light w/ industrial microscope unit Foot switch
Color Camera Head DS-2Mv w/ PC unit (E-MAX installed)CONFIDENTIAL
NIKON CORPORATION
Instruments CompanyMeasuring Microscope(5)
8/12/2019 Nikon Industrial Instruments and Application
63/78
63
ManualNoYes2x2MMMMMMMM----200200200200
NoMMMMMMMM----400S400S400S400SManualNo
MMMMMMMM----400SL400SL400SL400SL
MotorizedMMMMMMMM----400LM400LM400LM400LM Yes
MMMMMMMM----400L400L400L400LManual
No
Yes
6x4, 4x4, 2x2
MMMMMMMM----400400400400
NoMMMMMMMM----800S800S800S800SManualNo
MMMMMMMM----800SL800SL800SL800SL
MotorizedMMMMMMMM----800LM800LM800LM800LM YesMMMMMMMM----800L800L800L800L
ManualNo
Yes
12x8, 10x6, 8x6
MMMMMMMM----800800800800
Motorized / ManualFocusing Mount
Z-axis ScaleMeasurementController
MountableStage Size
Main Body Type
CONFIDENTIAL
NIKON CORPORATION
Instruments Company
U t i t R t bilit d/ R d ibilit
Data Processing System(1)
8/12/2019 Nikon Industrial Instruments and Application
64/78
64
Uncertainty Repeatability and/or Reproducibility
Machine factor
error of indication
aberrationprobing error
non-synchronization error
self-sustained oscillation
Environment Factor
change in temperature
temperature inclinationfloor vibration
disturbance light
electromagnetism
Human factor
skill
attentiondistress
operation mistake
writing mistake
CONFIDENTIAL
8/12/2019 Nikon Industrial Instruments and Application
65/78
NIKON CORPORATION
Instruments CompanyData Processing System(3)
8/12/2019 Nikon Industrial Instruments and Application
66/78
66
DP-E1
Data Processor
E-MAXData Processing Software
CONFIDENTIAL
NIKON CORPORATION
Instruments CompanyData Processing System(4)
8/12/2019 Nikon Industrial Instruments and Application
67/78
67
DP-E1Data Processor
*Built-in Counter Display
*Automatic Calculation*Memorizing Teaching Steps
*Out put results by printer
Reduction of
-Calculation error
-Data difference from measurement proceduresamong operators
-Writing error of results
CONFIDENTIAL
NIKON CORPORATION
Instruments CompanyData Processing System(5)
8/12/2019 Nikon Industrial Instruments and Application
68/78
68
E-MAXData Processing Software
*Configured with DSC Unit + PC
*Sub-pixel Image Processing*Automated Edge Detection
*Automatic Calculation
*Memorizing Teaching Steps
*Storing of Results in PC
Reduction of
-Calculation error
Data difference from measurement proceduresamong operators
-Writing error of results
-Uncertainty due to different skills of operatorsCONFIDENTIAL
NIKON CORPORATION
Instruments Company
CNC Video Measuring System(1)
8/12/2019 Nikon Industrial Instruments and Application
69/78
69
Avoidance of Human
Factor
ManualVisual Observation
Focusing
Detecting Measuring Point
Match Edge Image withCross Line
Moving Stage
Selecting Magnification
Adjusting Illuminator
Reading and recordingresults
Calculating / Evaluating ofpass / fail
Statistical Control
AutomatedDigital Image (CCD)
Auto Focus
Auto Search
Edge Filter
CNC Drive
CNC Zoom
CNC Light Control
Application Software
(Ditto)
(Ditto)
Possibility of Human Factor
in Each ProcessCONFIDENTIAL
NIKON CORPORATION
Instruments CompanyCNC Video Measuring System(2)
8/12/2019 Nikon Industrial Instruments and Application
70/78
70
Accuracy
Dimension
1um
10um
100um
1D 2D 3D
Caliper Micro Meter
Profile Projector
Video
Measuring
System
DigimicroDigimicro
MeasuringMicroscope
Manual Auto
CONFIDENTIAL
NIKON CORPORATION
Instruments CompanyCNC Video Measuring System(3)
8/12/2019 Nikon Industrial Instruments and Application
71/78
71
NEXIV VMA, VMZ-R(VMR) seriesCNC Video Measuring System
3 Dimension (X, Y, Z)Automatedteaching step, edge detection, focusing,
results output, light control
CONFIDENTIAL
NIKON CORPORATION
Instruments CompanyCNC Video Measuring System(4)
8/12/2019 Nikon Industrial Instruments and Application
72/78
72
NEXIV VMA, VMZ-R(VMR) seriesCNC Video Measuring System
3 Dimension (X, Y, Z)Automatedteaching step, edge detection, focusing,
results output, light control
Higher Accuracyand
Higher Productivity
CONFIDENTIAL
NIKON CORPORATION
Instruments Company
Zoom Optics Illuminator Main Body
CNC Video Measuring System(5)
8/12/2019 Nikon Industrial Instruments and Application
73/78
Type1
Type2
Type3
VMZ-R6555
py
VMZ-R3020
VMZ-R4540
LED episcopic and diascopic illuminators
with 50-degree incident angle
TypeTZ
TZ has LED episcopic, diascopic (for
higher magnification) and darkfield
illuminators
Type4
LED episcopic and diascopic illuminators
with three incident angles
LED episcopic and diascopic illuminators,
with LED 8-segment ring illuminator with
an 18-degree incident angleTypeA
CONFIDENTIAL
NIKON CORPORATION
Instruments Company
CNC Video Measuring System(6)
8/12/2019 Nikon Industrial Instruments and Application
74/78
74
iNEXIV VMA-2520
0.11NA
73.5 mmW.D.
RENISHAW (Option)Touch Probe
250 x 200 x 200 mmXYZ stroke
Size / Weight
FOV
Magnification
Max.
work piece weight
0.35 3.5 x
13.3 x 10 1.33 x 1 mm
15 kg
570 x 700 x 740 mm / 72kg
Long Working Distance, Wide field of View
Space savingCONFIDENTIAL
NIKON CORPORATION
Instruments Company
CNC Video Measuring System(6)
8/12/2019 Nikon Industrial Instruments and Application
75/78
75
iNEXIV VMA-2520
0.11NA
73.5 mmW.D.
RENISHAW (Option)Touch Probe
250 x 200 x 200 mmXYZ stroke
Size / Weight
FOV
Magnification
Max.
work piece weight
0.35 3.5 x
13.3 x 10 1.33 x 1 mm
15 kg
570 x 700 x 740 mm / 72kg
Long Working Distance, Wide field of View
Space saving
Components of Machinery, Mold,Automotive, Medical Device etc.
CONFIDENTIAL
NIKON CORPORATION
Instruments Company
Summary(1)
8/12/2019 Nikon Industrial Instruments and Application
76/78
76
Nikon Measuring InstrumentsNikon Measuring Instruments
Auto
Most
Highest
Operation
Accuracy
Function
Semi-AutoManual
LowestPrice
CNC Video Measuring SystemsCNC Video Measuring Systems
NEXIVNEXIVVMZVMZ--R3020R3020
VMZVMZ--R4540R4540
VMZVMZ--R6555R6555
CNC Video Measuring SystemCNC Video Measuring System
iNEXIViNEXIVVMAVMA--25202520
Measuring MicroscopesMeasuring Microscopes
MMMMMMMM--200200MMMM--400400
MMMM--800800
w Ew E--MAXMAX
w DPw DP--E1E1
Profile ProjectorProfile Projector
PPPPVV--24B24B
VV--20B20B
VV--12B12B
w Ew E--MAXMAX
w/ DPw/ DP
--E1E1
NIKON CORPORATION
Instruments CompanySummary(2)
8/12/2019 Nikon Industrial Instruments and Application
77/78
77
We provide our instruments
to meetyour needs for inspection and measurement
8/12/2019 Nikon Industrial Instruments and Application
78/78
Thank you !!