Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]Prices subject to change without notice. - International product pricing will vary. VALVE-LIT 4/03 NEW PRODUCTS Manual Ball Valves Ball valves are a low cost, manually operated, straight through isolation device. Their simple, robust design provides high reliability in “dirty” applications. They are commonly used on MOCVD and CVD equipment downstream from the chamber or vacuum pump to isolate traps or abatement tools. A forged 316L stainless steel body and Teflon ® seat make these valves ideal for corrosive environments. Other applications include vacuum and other facilities requirements. A quarter-turn of the handle quickly switches the valve from open to close. Nor-Cal Ball Valves are available with NW-16 through 50 flanges as standards. Call for other flange configurations. IQ Series Intellisys Throttling Butterfly Valve with On-Valve Controller Nor-Cal Products’ IQ-Series Intellisys TM Throttling Butterfly Valve with on- valve control features the same patented closed loop motor control and proven adaptive pressure control algorithm found in Nor-Cal’s stand- alone pressure controller. The high performance controller/valve will rotate from fully open to closed in 1/8 second with over 100,000 steps of addressable control resolution. Wafer through-put increases of 5 to 15% with 2 to 10 fold reductions in wafer scrap are possible. The IQ valve’s footprint is smaller by over 90% than typical “buried box” controllers and by over 60% than competitive “integral controller” products. DeviceNET TM , RS-232 serial or RS-485 MODBUS communication. For more information refer to the separate Intellisys Adaptive Pressure Control brochure located in the Valves section of this binder.
Transcript
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. VALVE-LIT 4/03
NEW PRODUCTS
Manual Ball ValvesBall valves are a low cost, manually operated, straightthrough isolation device. Their simple, robust designprovides high reliability in “dirty” applications. Theyare commonly used on MOCVD and CVD equipmentdownstream from the chamber or vacuum pump toisolate traps or abatement tools. A forged 316Lstainless steel body and Teflon® seat make thesevalves ideal for corrosive environments. Otherapplications include vacuum and other facilitiesrequirements. A quarter-turn of the handle quicklyswitches the valve from open to close. Nor-Cal BallValves are available with NW-16 through 50 flangesas standards. Call for other flange configurations.
IQ Series Intellisys Throttling ButterflyValve with On-Valve ControllerNor-Cal Products’ IQ-Series IntellisysTM Throttling Butterfly Valve with on-valve control features the same patented closed loop motor control andproven adaptive pressure control algorithm found in Nor-Cal’s stand-alone pressure controller. The high performance controller/valve willrotate from fully open to closed in 1/8 second with over 100,000 steps ofaddressable control resolution. Wafer through-put increases of 5 to 15%with 2 to 10 fold reductions in wafer scrap are possible. The IQ valve’sfootprint is smaller by over 90% than typical “buried box” controllers andby over 60% than competitive “integral controller” products. DeviceNETTM,RS-232 serial or RS-485 MODBUS communication. For more informationrefer to the separate Intellisys Adaptive Pressure Control brochure locatedin the Valves section of this binder.
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. VALVE-LIT 9/02
GENERAL INFORMATION
BakeabilityStandard valves are bakeable to 204˚C forintermittent periods. However, the Viton®
O-rings begin to take a set at 150˚C. Hightemperature Kalrez® O-rings are available asan option and allow these valves to be bakedto 316˚C for intermittent periods and 280˚C forextended periods. Bakeable all-metal poppetvalves are offered for 400˚C bakeouts.Heater jackets are available for all valves.
Valve ActuationManually operated valves, available with portODs up to 3 inches, utilize Acme threads and aself-lubricating bronze nut for fewer turns andsmooth, trouble-free operation.Pneumatic valves are normally air-to-open,spring-to-close in port ODs through 2 inchesfor immediate closure in case of electricalor air failure. Larger valves are air-to-open,air-to close as are all valves as an option.Fail-Safe valves are air-to-open, spring-to-close and are available in 2.5, 3 and 4 inchsizes. Most sizes are available with air-toopen, air-to-close with spring assist as anoption. Operating air pressure for allpneumatic valves is 60 to 80 psig.
Poppet Valve Conductance Liters per second Angle or Tee Angle-In-Line In-Line Straight-Through
OD Viscous Molecular Viscous Molecular Viscous Molecular Viscous Molecular
ConstructionOur poppet valves are fully opening for highconductance and to prevent bellows andpoppet contamination in semiconductorapplications. Bodies are die-formed from304 stainless steel to eliminate sharp insidecorners and improve conductance. Thevalves are electropolished for faster pump-down, lower outgassing and better corrosionresistance. The welded bellows are madefrom AM-350 stainless steel to providecorrosion resistance and excellent flexibility.They are designed with additional segmentsto provide extended life. Nor-Cal valves canbe operated in any position and actuators canbe removed quickly for routine inspectionwithout disassembling the system.
ModelsNor-Cal’s poppet valves are available inmost port configurations from .38 to 4.0 inchODs with CF, NW, ISO or ASA flanges. Angle,Angle-In-Line, In-Line, Tee and Straight-Through valves through 3 inch OD's are allavailable with manual or pneumatic actuatorsand Viton® or copper seal bonnets. Sizes 4.0inches and larger are available with pneu-matic actuators only.Bakeable all-metal valves with right angleport configuration are manufactured with.75 to 2.5 inch OD ports and CF flanges.Gate valves are available with nominal IDs of1.5 to 12 inches with CF, NW, ISO and ASAflanges. Bonnets are either copper or Viton®
sealed with manual or pneumatic actuators.(See gate valve specifications on Page 27.)
Since we have been improving our designs and expanding our product line in order to offer the vacuum industry stainless steel valves foralmost every application. Our valves provide outstanding performance in the most demanding applications such as semiconductor and com-pound semiconductor processing.
Vacuum RangePoppet seals and welds have helium leakrates of 10-9 std. cc./sec. or less. Viton®
sealed valves can be used in the 10-9 Torrrange, while copper seal valves are suited foruse in the 10-10 range. Bakeable All-Metalvalves are vacuum rated to below 10-10 Torr.
The conductance values in the adjacenttable have been calculated for air at roomtemperature using the formulas for tubesand elbows presented in the third edition ofRoth's, Vacuum Technology: Cv=12(D4/L') for viscous flow or Cm=12(D3/L') for molecular flow L'=Laxial +1.33(0/180)D for elbowsPort lengths without flanges and inner diameters forthe valve sizes and configurations were used. Thismethod is an approximation, use values accordingly.
Copper Seal BonnetsCopper seal bonnet valves with CF flangesprovide metal seals between the inside of thevalve and the atmosphere. They are availablein all standard sizes and port configurations.
Poppet ValveGeneral Specifications
• Electropolished 304 stainlesssteel die-formed body
• 15 micron filter on air cylinder exhaust• Full opening• Viton® poppet O-ring, standard• .38 to 4.0 inch port ODs• Helium leak rate 10-9 std. cc./sec. or less• Viton® Seal Bonnet:
10-9 Torr vacuum rating,Bakeable to 204˚C intermittent,CF, NW, ISO and ASA flanges
• Copper Seal Bonnet:10-10 Torr vacuum rating, CF flanges,bakeable to 204˚C intermittent
• Pneumatically Operated: Normally closed,60 to 80 psig operating air pressure
• Maximum differential pressure20 psi across valve seat
• External differential presures greaterthan 5 psi on the bellows may resultin premature bellows failure
Options
• Micro-switch• Actuators• O-rings
• Fittings• Air Solenoids• Heater Jackets
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. VALVE-LIT 9/02
OPTIONS
Actuator OptionsAll pneumatically actuated valves with air-to-open, spring-to-close actuators (port ODsthrough 2 inches) can be furnished with air-to-open, air-to-close actuators at no extra charge.Air-to-open, air-to-close actuators with a spring assist can be furnished for an additional $25.00.
O-ring OptionsStandard Nor-Cal valves use chemical resistant Viton® O-rings for closure. Viton O-ringsshould not be heated to above 204˚C. Even prolonged exposures of 150˚C may degradethe O-rings. The following special O-rings can be provided as options:
• High temperature Kalrez® O-rings allow the valve to be baked to 316˚C intermittentlyor 280˚C for prolonged periods where the O-ring is allowed to expand.
• Silicone O-rings provide adequate sealing performance in thermal cycling from -65˚C to 232˚C.
• Chemical resistant Kalrez® and Chemraz® are also available.
Micro-Switch OptionsThe Micro-Switch Option is available on all pneu-matically actuated Nor-Cal valves. Add $100.00to valve cost. A pair of 5-amp micro-switchesare opened or closed by the movement of the valvestem. One switch closes when the valve is fullyopen and the other when it is fully closed. Thesecan be connected to control panels with alarms orlights for positive position indication. Normally,electrical leads are approximately ten inches long,but may be cut to any length upon request.
How to Specify OptionsSeveral options are available on poppetvalves. The options are described indetail on these two pages. One or moreoptions can be added to a particular valveby adding the option suffix to the basicvalve model number.
Please add option suffixesin the following order:
1. Actuator: "-A"= air-to-open, air-to-close "-AS"= air-to-open, air-to-close with spring assist "-SA"=spring-to-open, air-to-close
2. Micro-switch: "-M"
3. O-ring: "-KT" = high temp Kalrez®
"-KC" = chemical resistant Kalrez®
"-CR" = Chemraz®
"-S" = Silicone
4. Angle Valve Fitting: (see table below)
5. Air Solenoid: (see table next page)
Examples of modelnumbers with options: ESVP-1502-CF-AS-M-S11 or CAIVP-3002-ISO-S-S32 or CSV-1002-NW-CR-F2
Right Angle Valve Fitting OptionsAll Nor-Cal right angle valves (ESV, CSV, ESVP and CSVP models)are available with the six fitting options described in the followingtable. These options are designed to make it easy for our customersto retrofit our valves with thermocouple gauges, leak valves, up-to-airvalves or gas introduction lines. Other fittings or configurations areavailable upon request.
F1 Left 1⁄4 Female VCR Both F2 Left 3⁄8 Female VCR Both F3 Left 1⁄8 Female NPT Bottom F4 Right 1⁄4 Female VCR Both F5 Right 3⁄8 Female VCR Both F6 Right 1⁄8 Female NPT Bottom
Note: Available on ESV, ESVP, CSV and CSVP models only. Dimensions in inches
A
A
A
A
Right ProfileLeftProfile
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. VALVE-LIT 9/02
OPTIONS
Thermal ProductsAll Nor-Cal poppet valves and gate valves can be provided withsilicone foam or fiberglass insulated heater jackets to reduceresident time of corrosives or particle buildup in semiconduc-tor applications. These jackets are available with PID control-lers or thermostats with high temperature shutoffs. Jacketand control specifications can be tailored to meet your specificneeds. Call for price and model number. Refer to the ThermalProducts catalog located in this binder for more information.
Air Solenoid OptionsAll pneumatic poppet valves can be provided with air solenoids with several current ratingsfor electropneumatic actuation. (Gate valves come standard with a 120V, 50/60Hz airsolenoid valve. See solenoid chart for gate valves on page 27) Valves with air-to-open,spring-to-close actuation require three-way air solenoids, while air-to-open, air-to-closeactuators require four-way solenoids (see table above). Both three and four-way airsolenoids are available in four current ratings. A pneumatic valve ordered with this optionwill arrive with an air solenoid installed. Fourteen inch long electrical leads are providedfor connection to the power supply. Air solenoids can be purchased separately in a kitcomplete with instructions for installation by the customer. When placing your orderplease specify the model number of the valve that the air solenoid will be installed on,so that our sales staff can confirm whether a three-way or four-way solenoid is required.
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. VALVE-LIT 9/02
MANUALLY OPERATED ANGLE VALVES
Manually Operated Copper Seal Bonnet Angle Valves Model Port Number OD Description A B C D Price
CSV-038 .38 No Flanges 1.50 4.06 4.44 2.73 CSV-0382-CF Rotatable 1.33 CF on Both Ports 1.60 4.16 4.54 2.73 CSV-050 .50 No Flanges 1.50 4.06 4.56 2.73 CSV-0502-CF Rotatable 1.33 CF on Both Ports 1.60 4.16 4.66 2.73 CSV-075 .75 No Flanges 2.00 4.56 5.31 2.73 CSV-0752-CF Rotatable 1.33 CF on Both Ports 2.50 5.06 5.81 2.73 CSV-100 1.00 No Flanges 1.88 4.32 5.32 2.73 CSV-1002-CF Rotatable 2.12 CF on Both Ports 2.05 4.49 5.49 2.73 CSV-150 1.50 No Flanges 2.25 5.63 7.13 3.25 CSV-1502-CF Rotatable 2.75 CF on Both Ports 2.46 5.84 7.34 3.25 CSV-200 2.00 No Flanges 3.25 7.85 9.85 4.05 CSV-2002-CF Rotatable 3.38 CF on Both Ports 3.48 8.08 10.08 4.05 CSV-250 2.50 No Flanges 3.00 8.27 10.77 4.61 CSV-2502-CF Rotatable 4.50 CF on Both Ports 3.38 8.65 11.15 4.61 CSV-300 3.00 No Flanges 3.25 8.68 11.68 5.62 CSV-3002-CF Rotatable 4.62 CF on Both Ports 3.53 8.96 11.96 5.62
Dimensions in inches
Specifications
• Electropolished 304 stainless steel body• .38 to 3 inch port ODs• Self-lubricating bronze nut• Acme threads for fewer turns• Bakeable to 204˚C intermittent• Copper Seal Bonnet: 10-10 Torr
vacuum rating, CF flanges
Options
• Fittings• O-rings• Heater Jackets
CSV O-Ring and Gasket Kits Port OD Model Number Price
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. VALVE-LIT 9/02
MANUALLY OPERATED ANGLE-IN-LINE VALVES
Specifications
• Electropolished 304 stainless steel body• .75 to 3.0 inch port OD's• Self-lubricating bronze nut• Acme threads for fewer turns• Bakeable to 204˚C intermittent• Viton Seal Bonnet:
10-9 Torr vacuum rating,CF, NW and ISO flanges
Options
• O-rings• Heater Jackets
Manually Operated Viton Seal Angle-In-Line Valves Model Port Number OD Description A B C D Price
AIV-075 .75 No Flanges 3.70 3.47 4.01 2.25 AIV-0752-CF Rotatable 1.33 CF on Both Ports 4.70 3.47 4.01 2.25 AIV-0752-NWB NW-16B on Both Ports 4.00 3.47 4.01 2.25 AIV-100 1.00 No Flanges 3.90 3.42 4.14 2.25 AIV-1002-CF Rotatable 2.12 CF on Both Ports 4.23 3.42 4.14 2.25 AIV-1002-NWB NW-25B on Both Ports 4.20 3.42 4.14 2.25 AIV-150 1.50 No Flanges 4.82 4.55 5.61 3.00 AIV-1502-CF Rotatable 2.75 CF on Both Ports 5.24 4.55 5.61 3.00 AIV-1502-NWB NW-40B on Both Ports 5.12 4.55 5.61 3.00 AIV-200 2.00 No Flanges 6.70 6.19 9.15 3.50 AIV-2002-CF Rotatable 3.38 CF on Both Ports 7.15 6.19 9.15 3.50 AIV-2002-NWB NW-50B on Both Ports 7.00 6.19 9.15 3.50 AIV-250 2.50 No Flanges 7.75 6.99 10.31 4.00 AIV-2502-CF Rotatable 4.50 CF on Both Ports 8.50 6.99 10.31 4.00 AIV-2502-ISO ISO-63-250-OF on Both Ports 8.25 6.99 10.31 4.00 AIV-300 3.00 No Flanges 10.05 7.71 11.38 4.50 AIV-3002-CF Rotatable 4.62 CF on Both Ports 10.61 7.71 11.38 4.50 AIV-3002-ISO ISO-80-300-OF on Both Ports 10.55 7.71 11.38 4.50
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. VALVE-LIT 9/02
MANUALLY OPERATED ANGLE-IN-LINE VALVES
CF Flanges
Manually Operated Copper Seal Bonnet Angle-In-Line ValvesModel PortNumber OD Description A B C D Price
CAIV-075 .75 No Flanges 3.70 3.47 4.01 2.73 CAIV-0752-CF Rotatable 1.33 CF on Both Ports 4.70 3.47 4.01 2.73 CAIV-100 1.00 No Flanges 3.90 3.42 4.14 2.73 CAIV-1002-CF Rotatable 2.12 CF on Both Ports 4.48 3.42 4.14 2.73 CAIV-150 1.50 No Flanges 4.82 4.55 5.61 3.25 CAIV-1502-CF Rotatable 2.75 CF on Both Ports 5.24 4.55 5.61 3.25 CAIV-200 2.00 No Flanges 6.70 6.19 9.15 4.05 CAIV-2002-CF Rotatable 3.38 CF on Both Ports 7.15 6.19 9.15 4.05 CAIV-250 2.50 No Flanges 7.75 6.99 10.31 4.61 CAIV-2502-CF Rotatable 4.50 CF on Both Ports 8.50 6.99 10.31 4.61 CAIV-300 3.00 No Flanges 10.05 7.71 11.38 5.62 CAIV-3002-CF Rotatable 4.62 CF on Both Ports 10.61 7.71 11.38 5.62
Dimensions in inches
A
Specifications
• Electropolished 304 stainless steel body• .75 to 3.0 inch port OD's• Self-lubricating bronze nut• Acme threads for fewer turns• Bakeable to 204˚C intermittent• Copper Seal Bonnet:
10-10 Torr vacuum rating, CF flanges
Options
• O-rings• Heater Jackets
CAIV O-Ring and Gasket Kits Port OD Model Number Price
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. VALVE-LIT 9/02
PNEUMATICALLY ACTUATED ANGLE-IN-LINE VALVESPneumatically Actuated Viton Seal Angle-In-Line Valves
Model Port Number OD Description A B C Price
AIVP-075 .75 No Flanges 3.70 4.32 2.25 AIVP-0752-CF Rotatable 1.33 CF on Both Ports 4.70 4.32 2.25 AIVP-0752-NWB NW-16B on Both Ports 4.00 4.32 2.25 AIVP-100 1.00 No Flanges 3.90 4.27 2.25 AIVP-1002-CF Rotatable 2.12 CF on Both Ports 4.23 4.27 2.25 AIVP-1002-NWB NW-25B on Both Ports 4.20 4.27 2.25 AIVP-150 1.50 No Flanges 4.82 5.69 3.00 AIVP-1502-CF Rotatable 2.75 CF on Both Ports 5.24 5.69 3.00 AIVP-1502-NWB NW-40B on Both Ports 5.12 5.69 3.00 AIVP-200 2.00 No Flanges 6.70 7.94 3.50 AIVP-2002-CF Rotatable 3.38 CF on Both Ports 7.15 7.94 3.50 AIVP-2002-NWB NW-50B on Both Ports 7.00 7.94 3.50 AIVP-250 2.50 No Flanges 7.75 7.64 4.00 AIVP-2502-CF Rotatable 4.50 CF on Both Ports 8.50 7.64 4.00 AIVP-2502-ISO ISO-63-250-OF on Both Ports 8.25 7.64 4.00 AIVP-300 3.00 No Flanges 10.05 8.70 4.50 AIVP-3002-CF Rotatable 4.62 CF on Both Ports 10.61 8.70 4.50 AIVP-3002-ISO ISO-80-300-OF on Both Ports 10.55 8.70 4.50
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. VALVE-LIT 9/02
Manually Operated Viton Seal In-Line ValvesModel PortNumber OD Description A B C D E F Price
ILV-038 .38 No Flanges 1.50 .94 1.50 4.06 2.25 4.44 ILV-0382-CF Rotatable 1.33 CF on Both Ports 1.60 .94 1.50 4.06 2.25 4.44 ILV-0382-NWB NW-10B on Both Ports 1.65 .94 1.50 4.06 2.25 4.44 ILV-050 .50 No Flanges 1.50 1.00 1.62 4.19 2.25 4.69 ILV-0502-CF Rotatable 1.33 CF on Both Ports 1.60 1.00 1.62 4.19 2.25 4.69 ILV-0502-NWB NW-10B on Both Ports 1.65 1.00 1.62 4.19 2.25 4.69 ILV-075 .75 No Flanges 2.00 1.12 1.87 4.44 2.25 5.19 ILV-0752-CF Rotatable 1.33 CF on Both Ports 2.50 1.12 1.87 4.44 2.25 5.19 ILV-0752-NWB NW-16B on Both Ports 2.15 1.12 1.87 4.44 2.25 5.19 ILV-100 1.00 No Flanges 1.88 1.37 2.25 4.69 2.25 5.69 ILV-1002-CF Rotatable 2.12 CF on Both Ports 2.05 1.37 2.25 4.69 2.25 5.69 ILV-1002-NWB NW-25B on Both Ports 2.03 1.37 2.25 4.69 2.25 5.69 ILV-150 1.50 No Flanges 2.25 1.88 3.12 6.52 3.00 8.02 ILV-1502-CF Rotatable 2.75 CF on Both Ports 2.46 1.88 3.12 6.52 3.00 8.02 ILV-1502-NWB NW-40B on Both Ports 2.40 1.88 3.12 6.52 3.00 8.02 ILV-200 2.00 No Flanges 3.25 2.62 4.12 8.73 3.50 10.73 ILV-2002-CF Rotatable 3.38 CF on Both Ports 3.48 2.62 4.12 8.73 3.50 10.73 ILV-2002-NWB NW-50B on Both Ports 3.40 2.62 4.12 8.73 3.50 10.73 ILV-2002-ASA Rotatable ASA-5-200R on Both Ports 3.50 2.62 4.12 8.73 3.50 10.73 ILV-250 2.50 No Flanges 3.00 3.12 4.93 10.20 4.00 12.70 ILV-2502-CF Rotatable 4.50 CF on Both Ports 3.38 3.12 4.93 10.20 4.00 12.70 ILV-2502-ISO ISO-63-250-OF on Both Ports 3.25 3.12 4.93 10.20 4.00 12.70 ILV-2502-ASA Rotatable ASA-5-250R on Both Ports 3.25 3.12 4.93 10.20 4.00 12.70 ILV-300 3.00 No Flanges 3.25 3.68 5.62 11.04 4.50 14.04 ILV-3002-CF Rotatable 4.62 CF on Both Ports 3.53 3.68 5.62 11.04 4.50 14.04ILV-3002-ISO ISO-80-300-OF on Both Ports 3.50 3.68 5.62 11.04 4.50 14.04 ILV-3002-ASA Rotatable ASA-6-300R on Both Ports 3.50 3.68 5.62 11.04 4.50 14.04
Dimensions in inches
MANUALLY OPERATED IN-LINE VALVES
Specifications
• Electropolished 304 stainless steel body• .38 to 3 inch port ODs• Self-lubricating bronze nut• Acme threads for fewer turns• Bakeable to 204˚C intermittent• Viton® Seal Bonnet: 10-9 Torr vacuum
Manually Operated Copper Seal Bonnet In-Line ValvesModel PortNumber OD Description A B C D E F Price
CILV-038 .38 No Flanges 1.50 .94 1.50 4.06 2.73 4.44 CILV-0382-CF Rotatable 1.33 CF on Both Ports 1.60 .94 1.50 4.06 2.73 4.44 CILV-050 .50 No Flanges 1.50 1.00 1.62 4.19 2.73 4.69 CILV-0502-CF Rotatable 1.33 CF on Both Ports 1.60 1.00 1.62 4.19 2.73 4.69 CILV-075 .75 No Flanges 2.00 1.12 1.87 4.44 2.73 5.19 CILV-0752-CF Rotatable 1.33 CF on Both Ports 2.50 1.12 1.87 4.44 2.73 5.19 CILV-100 1.00 No Flanges 1.88 1.37 2.25 4.69 2.73 5.69 CILV-1002-CF Rotatable 2.12 CF on Both Ports 2.05 1.37 2.25 4.69 2.73 5.69 CILV-150 1.50 No Flanges 2.25 1.88 3.12 6.52 3.25 8.02 CILV-1502-CF Rotatable 2.75 CF on Both Ports 2.46 1.88 3.12 6.52 3.25 8.02 CILV-200 2.00 No Flanges 3.25 2.62 4.12 8.73 4.05 10.73 CILV-2002-CF Rotatable 3.38 CF on Both Ports 3.48 2.62 4.12 8.73 4.05 10.73 CILV-250 2.50 No Flanges 3.00 3.12 4.93 10.20 4.61 12.70 CILV-2502-CF Rotatable 4.50 CF on Both Ports 3.38 3.12 4.93 10.20 4.61 12.70 CILV-300 3.00 No Flanges 3.25 3.62 5.55 11.04 5.62 14.04 CILV-3002-CF Rotatable 4.62 CF on Both Ports 3.53 3.62 5.55 11.04 5.62 14.04
Dimensions in inches
Specifications
• Electropolished 304 stainlesssteel body
• .38 to 3 inch port ODs• Self-lubricating bronze nut• Acme threads for fewer turns• Bakeable to 204˚ C intermittent• Copper Seal Bonnet:
10-10 Torr vacuum rating,CF flanges
Options
• O-rings• Heater Jackets
C
A
B
FD
A
E
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. VALVE-LIT 9/02
PNEUMATICALLY ACTUATED IN-LINE VALVES
Pneumatically Actuated Viton Seal In-Line ValvesModel PortNumber OD Description A B C D E F Price
ILVP-038 .38 No Flanges 1.50 .94 1.50 3.62 2.25 5.76 ILVP-0382-CF Rotatable 1.33 CF on Both Ports 1.60 .94 1.50 3.62 2.25 5.76 ILVP-0382-NWB NW-10B on Both Ports 1.65 .94 1.50 3.62 2.25 5.76 ILVP-050 .50 No Flanges 1.50 1.00 1.62 3.75 2.25 5.89 ILVP-0502-CF Rotatable 1.33 CF on Both Ports 1.60 1.00 1.62 3.75 2.25 5.89 ILVP-0502-NWB NW-10B on Both Ports 1.65 1.00 1.62 3.75 2.25 5.89 ILVP-075 .75 No Flanges 2.00 1.12 1.87 4.00 2.25 6.14 ILVP-0752-CF Rotatable 1.33 CF on Both Ports 2.50 1.12 1.87 4.00 2.25 6.14 ILVP-0752-NWB NW-16B on Both Ports 2.15 1.12 1.87 4.00 2.25 6.14 ILVP-100 1.00 No Flanges 1.88 1.37 2.25 4.25 2.25 6.39 ILVP-1002-CF Rotatable 2.12 CF on Both Ports 2.05 1.37 2.25 4.25 2.25 6.39 ILVP-1002-NWB NW-25B on Both Ports 2.03 1.37 2.25 4.25 2.25 6.39 ILVP-150 1.50 No Flanges 2.25 1.88 3.12 5.86 3.00 8.45 ILVP-1502-CF Rotatable 2.75 CF on Both Ports 2.46 1.88 3.12 5.86 3.00 8.45 ILVP-1502-NWB NW-40B on Both Ports 2.40 1.88 3.12 5.86 3.00 8.45 ILVP-200 2.00 No Flanges 3.25 2.62 4.12 7.62 3.50 12.11 ILVP-2002-CF Rotatable 3.38 CF on Both Ports 3.48 2.62 4.12 7.62 3.50 12.11 ILVP-2002-NWB NW-50B on Both Ports 3.40 2.62 4.12 7.62 3.50 12.11 ILVP-2002-ASA Rotatable ASA-5-200R on Both Ports 3.50 2.62 4.12 7.62 3.50 12.11 ILVP-250 2.50 No Flanges 3.00 3.12 4.93 9.11 4.00 12.03 ILVP-2502-CF Rotatable 4.50 CF on Both Ports 3.38 3.12 4.93 9.11 4.00 12.03 ILVP-2502-ISO ISO-63-250-OF on Both Ports 3.25 3.12 4.93 9.11 4.00 12.03 ILVP-2502-ASA Rotatable ASA-5-250R on Both Ports 3.25 3.12 4.93 9.11 4.00 12.03 ILVP-300 3.00 No Flanges 3.25 3.68 5.62 9.98 4.50 13.38 ILVP-3002-CF Rotatable 4.62 CF on Both Ports 3.53 3.68 5.62 9.98 4.50 13.38 ILVP-3002-ISO ISO-80-300-OF on Both Ports 3.50 3.68 5.62 9.98 4.50 13.38 ILVP-3002-ASA Rotatable ASA-6-300R on Both Ports 3.50 3.68 5.62 9.98 4.50 13.38 ILVP-400 4.00 No Flanges 4.22 4.88 7.38 12.83 6.50 18.27 ILVP-4002-CF Rotatable 6.00 CF on Both Ports 4.66 4.88 7.38 12.83 6.50 18.27 ILVP-4002-ISO ISO-100-400-OF on Both Ports 4.47 4.88 7.38 12.83 6.50 18.27 ILVP-4002-ASA Rotatable ASA-7.5-400R on Both Ports 4.47 4.88 7.38 12.83 6.50 18.27
Dimensions in inches
C
A
B
FD
A
E
Specifications
• Electropolished 304 stainless steel body• 15 micron air filter on air cylinder exhaust• .38” to 6.0” inch port ODs• .38” to 2.0” OD: air-to-open, spring-to-close• Over 2” OD: air-to-open, air-to-close• 60 to 80 psig operating air pressure• Bakeable to 204˚ C intermittent• Viton Seal Bonnet: 10-9 Torr vacuum
rating, CF, NW, ISO and ASA flanges
Options
• O-rings• Air Solenoids• Micro-Switch• Actuators• Heater Jackets
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. VALVE-LIT 9/02
PNEUMATICALLY ACTUATED IN-LINE VALVES
Specifications
• Electropolished 304 stainless steel body• 15 micron air filter on air cylinder exhaust• .38” to 6.0” inch port ODs• .38” to 2.0” OD: air-to-open, spring-to-close• Over 2” OD: air-to-open, air-to-close• 60 to 80 psig operating air pressure• Bakeable to 204˚ C intermittent• Copper Seal Bonnet: 10-10 Torr
vacuum rating, CF flanges
Options
• O-rings• Air Solenoids• Micro-Switch• Actuators• Heater Jackets
CILVP O-Ring and Gasket Kits Port OD Model Number Price
Pneumatically Actuated Copper Seal Bonnet In-Line ValvesModel PortNumber OD Description A B C D E F Price
CILVP-038 .38 No Flanges 1.50 .94 1.50 3.74 2.73 5.76 CILVP-0382-CF Rotatable 1.33 CF on Both Ports 1.60 .94 1.50 3.74 2.73 5.76 CILVP-050 .50 No Flanges 1.50 1.00 1.62 3.88 2.73 5.89 CILVP-0502-CF Rotatable 1.33 CF on Both Ports 1.60 1.00 1.62 3.88 2.73 5.89 CILVP-075 .75 No Flanges 2.00 1.12 1.87 4.12 2.73 6.14 CILVP-0752-CF Rotatable 1.33 CF on Both Ports 2.50 1.12 1.87 4.12 2.73 6.14 CILVP-100 1.00 No Flanges 1.88 1.37 2.25 4.38 2.73 6.39 CILVP-1002-CF Rotatable 2.12 CF on Both Ports 2.05 1.37 2.25 4.38 2.73 6.39 CILVP-150 1.50 No Flanges 2.25 1.88 3.12 5.86 3.25 8.44 CILVP-1502-CF Rotatable 2.75 CF on Both Ports 2.46 1.88 3.12 5.86 3.25 8.44 CILVP-200 2.00 No Flanges 3.25 2.62 4.12 7.50 4.05 12.11 CILVP-2002-CF Rotatable 3.38 CF on Both Ports 3.48 2.62 4.12 7.50 4.05 12.11 CILVP-250 2.50 No Flanges 3.00 3.12 4.93 9.11 4.61 12.03 CILVP-2502-CF Rotatable 4.50 CF on Both Ports 3.38 3.12 4.93 9.11 4.61 12.03 CILVP-300 3.00 No Flanges 3.25 3.62 5.55 9.98 5.62 13.38 CILVP-3002-CF Rotatable 4.62 CF on Both Ports 3.53 3.62 5.55 9.98 5.62 13.38 CILVP-400 4.00 No Flanges 4.22 4.88 7.38 12.83 6.73 18.27 CILVP-4002-CF Rotatable 6.00 CF on Both Ports 4.66 4.88 7.38 12.83 6.73 18.27
Dimensions in inches
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. VALVE-LIT 9/02
MANUALLY OPERATED TEE VALVES
Specifications
• Electropolished 304 stainless steel body• Vacuum port on bottom• .38 to 3 inch port ODs• Self-lubricating bronze nut• Acme threads for fewer turns• Bakeable to 204˚ C intermittent• Viton® Seal Bonnet:
10-9 Torr vacuum rating,CF, NW, ISO and ASA flanges
Options
• O-rings• Heater Jackets
Manually Operated Viton Seal Tee Valves Model Port Number OD Description A B C D Price
ESV-038T .38 No Flanges 1.50 4.06 4.44 2.25 ESV-0383T-CF Rotatable 1.33 CF on All Ports 1.60 4.16 4.54 2.25 ESV-0383T-NWB NW-10B on All Ports 1.65 4.21 4.59 2.25 ESV-050T .50 No Flanges 1.50 4.06 4.56 2.25 ESV-0503T-CF Rotatable 1.33 CF on All Ports 1.60 4.16 4.66 2.25 ESV-0503T-NWB NW-10B on All Ports 1.65 4.21 4.71 2.25 ESV-075T .75 No Flanges 2.00 4.56 5.31 2.25 ESV-0753T-CF Rotatable 1.33 CF on All Ports 2.50 5.06 5.81 2.25 ESV-0753T-NWB NW-16B on All Ports 2.15 4.71 5.46 2.25 ESV-100T 1.00 No Flanges 1.88 4.32 5.32 2.25 ESV-1003T-CF Rotatable 2.12 CF on All Ports 2.05 4.49 5.49 2.25 ESV-1003T-NWB NW-25B on All Ports 2.03 4.47 5.47 2.25 ESV-150T 1.50 No Flanges 2.25 5.63 7.13 3.00 ESV-1503T-CF Rotatable 2.75 CF on All Ports 2.46 5.84 7.34 3.00 ESV-1503T-NWB NW-40B on All Ports 2.40 5.78 7.28 3.00 ESV-200T 2.00 No Flanges 3.25 7.85 9.85 3.50 ESV-2003T-CF Rotatable 3.38 CF on All Ports 3.48 8.08 10.08 3.50 ESV-2003T-NWB NW-50B on All Ports 3.40 8.00 10.00 3.50 ESV-2003T-ASA Rotatable ASA-5-200R on All Ports 3.25 8.10 10.10 3.50 ESV-250T 2.50 No Flanges 3.00 8.27 10.77 4.00 ESV-2503T-CF Rotatable 4.50 CF on All Ports 3.38 8.65 11.15 4.00 ESV-2503T-ISO ISO-63-250-OF on All Ports 3.25 8.52 11.02 4.00 ESV-2503T-ASA Rotatable ASA-5-250R on All Ports 3.25 8.52 11.02 4.00 ESV-300T 3.00 No Flanges 3.25 8.68 11.68 4.50 ESV-3003T-CF Rotatable 4.62 CF on All Ports 3.53 8.96 11.96 4.50 ESV-3003T-ISO ISO-80-300-OF on All Ports 3.50 8.93 11.93 4.50 ESV-3003T-ASA Rotatable ASA-6-300R on All Ports 3.50 8.93 11.93 4.50
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. VALVE-LIT 9/02
MANUALLY OPERATED TEE VALVES
Manually Operated Copper Seal Bonnet Tee Valves Model Port Number OD Description A B C D Price
CSV-038T .38 No Flanges 1.50 4.06 4.44 2.73 CSV-0383T-CF 1.33 Rotatable CF on All Ports 1.60 4.16 4.54 2.73 CSV-050T .50 No Flanges 1.50 4.06 4.56 2.73 CSV-0503T-CF 1.33 Rotatable CF on All Ports 1.60 4.16 4.66 2.73 CSV-075T .75 No Flanges 2.00 4.56 5.31 2.73 CSV-0753T-CF 1.33 Rotatable CF on All Ports 2.50 5.06 5.81 2.73 CSV-100T 1.00 No Flanges 1.88 4.32 5.32 2.73 CSV-1003T-CF 2.12 Rotatable CF on All Ports 2.05 4.49 5.49 2.73 CSV-150T 1.50 No Flanges 2.25 5.63 7.13 3.25 CSV-1503T-CF 2.75 Rotatable CF on All Ports 2.46 5.84 7.34 3.25 CSV-200T 2.00 No Flanges 3.25 7.85 9.85 4.05 CSV-2003T-CF 3.38 Rotatable CF on All Ports 3.48 8.08 10.08 4.05 CSV-250T 2.50 No Flanges 3.00 8.27 10.77 4.61 CSV-2503T-CF 4.50 Rotatable CF on All Ports 3.38 8.65 11.15 4.61 CSV-300T 3.00 No Flanges 3.25 8.68 11.68 5.62 CSV-3003T-CF 4.62 Rotatable CF on All Ports 3.53 8.96 11.96 5.62
Dimensions in inches
Specifications
• Electropolished 304 stainless steel body• Vacuum port on bottom• .38 to 3 inch port ODs• Self-lubricating bronze nut• Acme threads for fewer turns• Bakeable to 204˚ C intermittent• Copper Seal Bonnet:
10-10 Torr vacuum rating,CF flanges
Options
• O-rings• Heater Jackets
CSV-T O-Ring & Gasket Kits Port OD Model Number Price
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. VALVE-LIT 9/02
Pneumatically Actuated Viton Seal Tee Valves Model Port Number OD Description A B C D Price
ESVP-038T .38 No Flanges 1.50 3.62 5.77 2.25 ESVP-0383T-CF Rotatable 1.33 CF on All Ports 1.60 3.67 5.87 2.25 ESVP-0383T-NWB NW-10B on All Ports 1.65 3.77 5.92 2.25 ESVP-050T .50 No Flanges 1.50 3.62 5.77 2.25 ESVP-0503T-CF Rotatable 1.33 CF on All Ports 1.60 3.67 5.87 2.25 ESVP-0503T-NWB NW-10B on All Ports 1.65 3.77 5.92 2.25 ESVP-075T .75 No Flanges 2.00 4.12 6.26 2.25 ESVP-0753T-CF Rotatable 1.33 CF on All Ports 2.50 4.62 6.76 2.25 ESVP-0753T-NWB NW-16B on All Ports 2.15 4.27 6.41 2.25 ESVP-100T 1.00 No Flanges 1.88 3.88 6.02 2.25 ESVP-1003T-CF Rotatable 2.12 CF on All Ports 2.05 4.05 6.19 2.25 ESVP-1003T-NWB NW-25B on All Ports 2.03 4.03 6.17 2.25 ESVP-150T 1.50 No Flanges 2.25 4.98 7.56 3.00 ESVP-1503T-CF Rotatable 2.75 CF on All Ports 2.46 5.19 7.77 3.00 ESVP-1503T-NWB NW-40B on All Ports 2.40 5.13 7.71 3.00 ESVP-200T 2.00 No Flanges 3.25 6.74 11.23 3.50 ESVP-2003T-CF Rotatable 3.38 CF on All Ports 3.48 6.97 11.46 3.50 ESVP-2003T-NWB NW-50B on All Ports 3.40 6.89 11.38 3.50 ESVP-2003T-ASA Rotatable ASA-5-200R on All Ports 3.50 6.99 11.48 3.50 ESVP-250T 2.50 No Flanges 3.00 7.18 10.10 4.00 ESVP-2503T-CF Rotatable 4.50 CF on All Ports 3.38 7.56 10.48 4.00 ESVP-2503T-ISO ISO-63-250-OF on All Ports 3.25 7.43 10.35 4.00 ESVP-2503T-ASA Rotatable ASA-5-250R on All Ports 3.25 7.43 10.35 4.00 ESVP-300T 3.00 No Flanges 3.25 7.62 11.00 4.50 ESVP-3003T-CF Rotatable 4.62 CF on All Ports 3.53 7.90 11.28 4.50 ESVP-3003T-ISO ISO-80-300-OF on All Ports 3.50 7.87 11.25 4.50 ESVP-3003T-ASA Rotatable ASA-6-300R on All Ports 3.50 7.87 11.25 4.50 ESVP-400T 4.00 No Flanges 4.22 9.55 14.99 6.50 ESVP-4003T-CF Rotatable 6.00 CF on All Ports 4.66 9.99 15.43 6.50 ESVP-4003T-ISO ISO-100-400-OF on All Ports 4.47 9.80 15.24 6.50 ESVP-4003T-ASA Rotatable ASA-7.5-400R on All Ports 4.47 9.80 15.24 6.50
Dimensions in inches
PNEUMATICALLY ACTUATED TEE VALVES
A
A
C
B
A
DSpecifications• Electropolished 304 stainless steel body• 15 micron air filter on air cylinder exhaust• Vacuum port on bottom• .38 to 6 inch port ODs• .38 to 2 inch ODs: air-to-open,
spring-to-close• 2 to 4 inch ODs: air-to-open, air-to-close• 60 to 80 psig operating air pressure• Bakeable to 204˚ C intermittent• Viton Seal Bonnet: 10-9 Torr vacuum
rating, CF, NW, ISO and ASA flanges
Options• O-rings• Air Solenoids• Micro-Switch• Actuators• Heater Jackets
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. VALVE-LIT 9/02
Pneumatically Actuated Copper Seal Bonnet Tee Valves Model Port Number OD Description A B C D Price
CSVP-038T .38 No Flanges 1.50 3.75 5.77 2.73 CSVP-0383T-CF Rotatable 1.33 CF on All Ports 1.60 3.85 5.82 2.73 CSVP-050T .50 No Flanges 1.50 3.75 5.77 2.73 CSVP-0503T-CF Rotatable 1.33 CF on All Ports 1.60 3.85 5.82 2.73 CSVP-075T .75 No Flanges 2.00 4.25 6.26 2.73 CSVP-0753T-CF Rotatable 1.33 CF on All Ports 2.50 4.75 6.76 2.73 CSVP-100T 1.00 No Flanges 1.88 4.00 6.02 2.73 CSVP-1003T-CF Rotatable 2.12 CF on All Ports 2.05 4.17 6.19 2.73 CSVP-150T 1.50 No Flanges 2.25 4.98 7.56 3.25 CSVP-1503T-CF Rotatable 2.75 CF on All Ports 2.46 5.19 7.77 3.25 CSVP-200T 2.00 No Flanges 3.25 6.62 11.23 4.05 CSVP-2003T-CF Rotatable 3.38 CF on All Ports 3.48 6.85 10.58 4.05 CSVP-250T 2.50 No Flanges 3.00 7.18 10.10 4.61 CSVP-2503T-CF Rotatable 4.50 CF on All Ports 3.38 7.56 10.48 4.61 CSVP-300T 3.00 No Flanges 3.25 7.62 11.00 5.62 CSVP-3003T-CF Rotatable 4.62 CF on All Ports 3.53 7.90 11.28 5.62 CSVP-400T 4.00 No Flanges 4.22 9.55 14.99 6.73 CSVP-4003T-CF Rotatable 6.00 CF on All Ports 4.66 9.99 15.43 6.73
Dimensions in inches
PNEUMATICALLY ACTUATED TEE VALVES
Specifications• Electropolished 304 stainless steel body• 15 micron air filter on air cylinder exhaust• Vacuum port on bottom• .38 to 6 inch port ODs• .38 to 2 inch ODs: air-to-open,
spring-to-close• 2 to 4 inch ODs: air-to-open, air-to-close• 60 to 80 psig operating air pressure• Bakeable to 204˚ C intermittent• Copper Seal Bonnet: 10-10 Torr
vacuum rating, CF flanges
Options
• O-rings• Air Solenoids• Micro-Switch• Actuators• Heater Jackets
CSVP-T O-Ring & Gasket Kits Port OD Model Number Price
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. VALVE-LIT 9/02
Manually Operated Copper Seal Bonnet Straight-Through ValvesModel Port PortNumber ID* OD Description A B C D Price
CSTV-075 .65 .75 No Flanges 5.00 3.51 4.71 2.73 CSTV-0752-CF .65 .75 Rotatable 1.33 CF on Both Ports 6.00 3.51 4.71 2.73
CSTV-150 1.38 1.50 No Flanges 7.00 5.47 7.69 4.05 CSTV-1502-CF 1.38 1.50 Rotatable 2.75 CF on Both Ports 7.42 5.47 7.69 4.05
* Full opening straight-through diameter Dimensions in inches
Specifications
• Electropolished 304 stainless steel body• Full-opening, straight-through ID• .75, 1.13 and 1.5 inch port ODs• Self-lubricating bronze nut• Acme threads for fewer turns• Bakeable to 204˚C intermittent• Viton Seal Bonnet: 10-9 Torr vacuum
rating, CF and NW flanges• Copper Seal Bonnet: 10-10 Torr vacuum
rating, CF flanges
Options
• O-rings • Heater Jackets
MANUALLY OPERATED STRAIGHT-THROUGH VALVES
Manually Operated Viton Seal Straight-Through ValvesModel Port PortNumber ID* OD Description A B C D Price
STV-075 .65 .75 No Flanges 5.00 3.30 4.50 2.25 STV-0752-CF .65 .75 Rotatable 1.33 CF on Both Ports 6.00 3.30 4.50 2.25 STV-0752-NWB .65 .75 NW-16B on Both Ports 5.30 3.30 4.50 2.25
STV-112 1.00 1.12 No Flanges 5.50 3.86 5.15 3.00 STV-1122-CF 1.00 1.12 Rotatable 2.12 CF on Both Ports 5.83 3.86 5.15 3.00 STV-1122-NWB 1.00 1.12 NW-40B on Both Ports 5.80 3.86 5.15 3.00
STV-150 1.38 1.50 No Flanges 7.00 5.47 7.69 3.50 STV-1502-CF 1.38 1.50 Rotatable 2.75 CF on Both Ports 7.42 5.47 7.69 3.50 STV-1502-NWB 1.38 1.50 NW-25B on Both Ports 7.30 5.47 7.69 3.50
* Full opening straight-through diameter Dimensions in inches
C B
D
A Bored NWFlanges
A
CF Flanges
A
STV O-Ring Kits Port OD Model Number Price
.75 ESV-075-95 1.12 STV-112-95 1.50 STV-150-95
Dimensions in inches
CSTV O-Ring & Gasket Kits Port OD Model Number Price
.75 CSV-075-95 1.50 CSTV-150-95
Dimensions in inches
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. VALVE-LIT 9/02
PNEUMATICALLY ACTUATED STRAIGHT-THROUGH VALVES
CF Flanges
Specifications• Electropolished 304 stainless steel body• Full-opening, straight-through ID• .75, 1.13 and 1.5 inch ODs• .75 inch OD: air-to-open, spring-to-close• 1.13 and 1.5 inch OD: air-to-open/close• 60 to 80 psig operating air pressure• Bakeable to 204˚C intermittent• Viton Seal Bonnet: 10-9 Torr vacuum
rating, CF and NW flanges• Copper Seal Bonnet: 10-10 Torr
vacuum rating, CF flanges
Options• O-rings • Air Solenoids• Micro-switch • Actuators• Heater Jackets
Pneumatically Actuated Viton Seal Straight-Through Valves Model Port Port Number ID* OD Description A B C Price
STVP-075 .65 .75 No Flanges 5.00 3.92 2.25 STVP-0752-CF .65 .75 Rotatable 1.33 CF on Both Ports 6.00 3.92 2.25 STVP-0752-NWB .65 .75 NW-16B on Both Ports 5.30 3.92 2.25 STVP-112 1.00 1.12 No Flanges 5.50 5.10 3.00 STVP-1122-CF 1.00 1.12 Rotatable 2.12 CF on Both Ports 5.83 5.10 3.00 STVP-1122-NWB 1.00 1.12 NW-40B on Both Ports 5.80 5.10 3.00 STVP-150 1.38 1.50 No Flanges 7.00 6.11 3.50 STVP-1502-CF 1.38 1.50 Rotatable 2.75 CF on Both Ports 7.42 6.11 3.50 STVP-1502-NWB 1.38 1.50 NW-40B on Both Ports 7.30 6.11 3.50
* Full opening straight-through diameter Dimensions in inches
Pneumatically Actuated Copper Seal Bonnet Straight-Through Valves Model Port Port Number ID* OD Description A B C Price
CSTVP-075 .65 .75 No Flanges 5.00 3.92 2.73 CSTVP-0752-CF .65 .75 Rotatable 1.33 CF on Both Ports 6.00 3.92 2.73 CSTVP-150 1.38 1.50 No Flanges 7.00 6.11 4.05 CSTVP-1502-CF 1.38 1.50 Rotatable 2.75 CF on Both Ports 7.42 6.11 4.05
* Full opening straight-through diameter Dimensions in inches
B
C
AA A
BoredNW Flanges
CSTVP O-Ring & Gasket Kits Port OD Model Number Price
.75 CSVP-075-95 1.50 CSTVP-150-95
Dimensions in inches
STVP O-Ring KitsPort OD Model Number Price
.75 ESVP-075-95 1.12 STVP-112-95 1.50 STVP-150-95
Dimensions in inches
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. VALVE-LIT 4/03
Nor-Cal’s new series of metal sealangle valves are intended for use inUHV or cryogenic applications wheretemperature extremes preclude the useof our elastomer seal valves. Approvedfor use in beamline facilities, thesevalves have a temperature operatingrange from 400˚C to -250˚C.
Maximum temperature bakeouts mayrequire poppet seal replacement after 50cycles, while hundreds of cycles arepossible with moderate bakeouts. A dialindicator at the top of the valve indicatesthe proper torque for closure and alsowhen the seal should be replaced.
The poppet seal is easily replaced with aslotted screw driver. After seal replacementthe valve must be torqued to a higher valuethan during normal operation to make itseat. (See torque specifications table onthis page) After closing the valve to itsnormal torque value loosen the set screwbelow the closure nut, rotate the indicatorto the furthest counter-clockwise line ontop of the valve and retighten the set screw.The valve may be closed to this markindefinitely. Periodic checks with a torquewrench will indicate seat wear and theproper mark to use for alignment. Whenthe indicator has reached the last mark werecommend seal replacement. Do notexceed the maximum torque specifications.
SEALING MECHANISM
Specifications• Bakeable to 400°C open, 300°C closed• Operable at cryogenic temperatures• Vacuum rated to below 10-10 Torr• Beamline approved• All stainless steel construction• Electropolished surfaces• Extended life stainless steel bellows• Easily replaceable copper poppet seal• Pulled port body for higher
conductance• Clean room assembled• Leak rate 10-10 std. cc./sec. or less• DiaI indicator for closure• Heater Jackets available
BAKEABLE ALL-METAL VALVES
Manually Operated All-Metal Angle ValvesModel Port (Open)Number OD Description A B C Price
AMV-0752-CF .75 Rotatable 1.33 CF on Both Ports 1.50 5.40 1.50 $ 495.00AMV-1502-CF 1.50 Rotatable 2.75 CF on Both Ports 2.45 6.87 1.50 $ 520.00
Port lengths that match other manufacturers' products are available upon request. Dimensions in inches
Torque Specifications (Inch Pounds)
Model Number Seating Normal Maximum
AMV-075-CF 60 50 120 AMV-150-CF 120 100 200
Replacement Poppet SealsPort OD Model Number
.75 AMV-075-95 1.50 AMV-150-95
Dimensions in inches
B
A
A
C
Stainless Steel Bellows
Stainless Steel Knife Edge Seat
OFHC® Copper Poppet Seal
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. VALVE-LIT 9/02
GATE VALVES
Specifications• 304 SS vacuum furnace brazed body• Electropolished inside and out• Welded AM-350 bellows• Viton gate O-ring, standard• 1.5 to 12 inch nominal IDs• Helium leak rate 2x10-9 std. cc./sec.• Maximum Pressure Differential:
At Opening:4 inch ID or smaller:
760 Torr on gate side,20 torr on carriage side
Greater than 4 inch ID:20 Torr either direction
Closed: 760 Torr in either direction• Viton Seal Bonnet: 10-9 Torr
vacuum rating, Bakeable to 150˚C• Copper Seal Bonnet: 10-10 Torr vacuum
rating, Bakeable to 200˚C with CF flangesand gate in open position
• Pneumatically Actuated: Normally closed120V, 50/60Hz air solenoid, standard,Maximum 80 psig operating airpressure, standard. (Higher operatingpressures available upon request)Reed-switch position indicator, standard
• Manually operated:Acme threads for fewer turns
General InformationNor-Cal stainless steel gate valves sharewith our poppet valves the innovativedesign, highest grade materials andsuperior workmanship that has made us amajor supplier of valves to the vacuumindustry. The estimated service interval onthese valves is 100,000 cycles, dependingon the application.
Our gate valves have an ultra-slim profilewhich makes them perfect for applicationswhere space is limited, and their smallervolume results in lower outgassing andfaster pumpdown. Larger sizes have aunique feature in the actuator whichdampens the vibration which can arisewhen the gate is opened. This makes thesevalves ideal for semiconductor and othervibration sensitive processes. The carriageassembly and actuator can be removedwithout disassembling the body from thesystem for easy maintenance. The 304stainless steel bodies are vacuum furnacebrazed to 1100°C at 10-6 Torr before beingelectropolished inside and out. The weldedAM-350 bellows have a short stroke for alonger cycle life.
Nor-Cal gate valves are available withNW(ISO-KF), ISO(clamp and bolt type),CF and ASA flanges in port sizes from1.5 to 12 inches. Larger sizes are availableupon request. Choose from manual orpneumatic actuation and Viton® orcopper seal bonnet.
BakeabilityNor-Cal gate valves with Viton® sealbonnet and gate and standard Reed-switchposition indicators are bakeable to 150˚C,as long as the actuator is not baked above60˚C. A gate valve with copper sealbonnet, Viton® gate and micro-switchoption can be baked to 200˚C, except forthe actuator. With the air solenoid andposition indicators removed, a copper sealbonnet valve with high temperature Kalrez®
gate O-ring can be baked to 250˚C with thegate in the open position. Silicone heaterjackets for bakeouts up to 200˚C can beprovided. Please ask your Nor-Calrepresentative for pricing.
How to Specify OptionsOne or more options can be ordered byadding the option suffix to the basic valvemodel number. Please add the optionsuffixes in the following order:
1. Micro-switch: "-M" (Add $300 to price)2. O-ring: "-KT" = high temp Kalrez
"-KC"= chemical resistant Kalrez "-CR"= Chemraz " -S "= Silicone
3. Air Solenoid: (See table below)Examples of model numbers with options: GVP-4002-ISO-M-S32 GVMP-4002-CF-KT-S22
Air Solenoid OptionsAll pneumatic gate valves come standard with a 4-Way, 120V, 50/60Hz air solenoid. Solenoidsare mounted on all Viton seal bonnet gate valves with four inch ID and larger. Solenoids forViton seal bonnet gate valves with under four inch ID and all sizes of copper seal gate valves areshipped unmounted with the valve. Solenoids for these valves can be provided mounted withan optional mounting bracket for an additional $55.00. Specify when ordering. Specify otherAir solenoid options by adding the correct suffix to model number. See chart below. Example:GVMP-1502-CF-S22. Air Solenoids can be ordered separately. Call for price and part number.
Options
• Micro-switch• O-rings• Air Solenoids• Heater Jackets
*Without O-ring grooves. Grooves can be provided on request. Dimensions in inches.
Specifications
• 1.5 to 12 inch nominal IDs• Normally closed• 4 way, 120V, 60Hz air solenoid, standard• Reed-switch position indicator, standard• 60 to 80 psig operating air pressure• Viton Seal Bonnet: 10-9 Torr vacuum
rating, Bakeable to 150˚C, CF, NW,ISO and ASA flanges
Options
• O-rings• Micro-Switch• Air Solenoids• Heater Jackets
Non-Rotatable CF or ASA Flanges
G
B A
E
C
DF
NW or ISO Flanges
G
B A
F
E
C
D
NOTE: Solenoids for Viton seal bonnet gate valves with under four inch ID and all sizes of copperseal gate valves are shipped unmounted with the valve. Solenoids for these valves can be providedmounted with an optional mounting bracket for an additional $55.00. Specify when ordering.
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. VALVE-LIT 9/02
PNEUMATICALLY ACTUATED GATE VALVES
Specifications
• 1.5 to 12 inch nominal IDs• Normally closed• 4-way, 120V, 60Hz air solenoid, standard
Solenoid is bagged and shippedunmounted with valve
• Reed-switch position indicator, standard• 60 to 80 psig operating air pressure• Copper Seal Bonnet:
10-10 Torr Vacuum rating,Bakeable to 200˚C with CF flanges
Pneumatically Actuated Copper Seal Bonnet Gate ValvesNom. Model Flange Conductance
ID Number Type (molecular-l/sec.) A B C D E F G Price
• O-rings• Micro-Switch• Air Solenoids• Heater Jackets
NOTE: Solenoids for Viton sealbonnet gate valves with under fourinch ID and all sizes of copper sealgate valves are shipped unmountedwith the valve. Solenoids for thesevalves can be provided mountedwith an optional mounting bracketfor an additional $55.00.Specify when ordering.
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. VALVE-LIT 9/02
MANUAL BALL VALVES
E
AB
C
D
Port Model Valve FlangeID Number ID A B C D E Type Price
to 1x10-9 Torr• Bakeable to 150ºC• Heater jackets are available on request
Manual Ball ValvesBall valves are a low cost, manually operated, straight throughisolation device. Their simple, robust design provides high reliabil-ity in “dirty” applications. They are commonly used on MOCVD andCVD equipment downstream from the chamber or vacuum pump toisolate traps or abatement tools. A forged 316L stainless steel bodyand Teflon seat make these valves ideal for corrosive environments.Other applications include vacuum and other facilities requirements.A quarter-turn of the handle quickly switches the valve from open toclose. They are available with NW-16 through 50 flanges asstandards. Call for other flange configurations.
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. VALVE-LIT 9/02
Kalrez® is a registered trademark of DuPont Dow Elastomers.Viton® is a registered trademarks of DuPont Dow Elastomers.Chemraz® is a registered trademark of Green Tweed Co.Genesis™ is a registered trademark of Nor-Cal Products, Inc.Intellisys™ is a registered trademark of Nor-Cal Products, Inc.DeviceNet™ is a registered trademark of Open DeviceNet VendorAssociation
FLANGE DIMENSIONS
This table provides general specificationson standard flanges for specific valve sizes.For specific information on a particularflange refer to the appropriate catalog.Again, these are standard flanges only.Other sizes or types of flanges forNor-Cal valves are available uponrequest. Call your Nor-Cal Productsrepresentative for more information.
Flange DimensionsNom Flange No. Holes/ Thread BoltID Type Clamps Size Circle OD
*Without O-ring groove. Grooves can be provided on request. Dimensions in inches
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. INTELLISYS-LIT 6/02
100%
0%10%20%30%40%50%60%70%80%90%
0
0
100200300400500600700800
8070605040302010
VALVE ANGLE (% Open)
PRESSURE (mTorr)
TIMESeconds
1 2 3 4 5 6STEPS
Pressure Set PointCompetitor ACompetitor BNor-Cal Intellisys
mTorr
The Fastest, Most Precise Pressure Control System
ADAPTIVE PRESSURE CONTROL TECHNOLOGY
Due to Nor-Cal’s continued improvement program, pricingand specifications are subject to change without notice.
Intellisys SystemIncreases Throughput
Using a typical semiconductor process “recipe”,the performance of an Intellisys pressure controllerand throttling butterfly valve is compared to twocompetitive brands. During the tests, pressureand valve plate angle are recorded simultaneouslyfor each of the three brands.Nor-Cal’s valve closes completely in 0.125 seconds,as compared to 1.7 and 1.8 seconds, achievingpressure set point three seconds sooner. The othervalves’ slower speeds necessitate gradual rampsand partial openings to avoid set point undershootor overshoot. With our advanced algorithm theIntellisys system can essentially achievepressure step transitions.The Nor-Cal Intellisys system shaved off over tenseconds from the closest competitors’ time, withan average of about two to three seconds savedper pressure transition. This example representsa 15% increase in throughput.
TM
Nor-Cal Products offers unequalled performance with the Intellisysdownstream pressure control system, providing measurable processbenefits through higher resolution, speed and reliability.
Adaptive Pressure ControllerThe Intellisys Adaptive Pressure Controller (APC) mergesclosed loop motor control with adaptive pressure controlto provide advanced control system performance.An advanced adaptive algorithm eliminates pressureovershoot or gradual ramps during pressure transi-tion. A Digital Signal Processor (DSP) enablesDeviceNet™ communications protocol andprogramming flexibility for customer orprocess specific requirements.
Throttling Butterfly ValvesIntellisys motor control technologyeliminates belts, gears and positionswitches, improving reliability,while increasing speed by at least afactor of twenty. High-torquegeared drives are also available asan option. Standard sizes rangefrom one to twelve inches.
NEW! IQ-Series Butterfly ValvesSubstantial cost and space savings can be realized with the IQ-Series butter-fly valves. All the control electronics are incorporated on to the valve motor
drive, resulting in a compact size that is easy to integrate on any system.
Capacitance Diaphragm GaugesNor-Cal Capacitance Diaphragm Gauges (CDG) feature aceramic diaphragm designed to help stabilize output noisedue to thermally induced variations found in other metaldiaphragm designs. Heated, non-heated and DeviceNet™compatible gauges are available with several tube fittingsand in standard pressure ranges from 0.1 to 1000 Torr.
Universal Valve DriveOur Universal Valve Drive (UVD) easily replaces olderdrive technology found on other manufacturers’ pressure
control valves. When usedwith our APC, the universalvalve drive can upgradea competitive valve toapproach Intellisysperformance levels.
Intellisys and PMI are registered trademarks of Nor-Cal Products, Inc.DeviceNet is a trademark of the Open DeviceNet Vendor Association (ODVA)Viton is a registered trademark of DuPont Dow Elastomers.Kalrez is a registered trademark of DuPont Dow Elastomers.Chemraz is a registered trademark of Green Tweed Co.
Visit www.n-c.comfor more detailedinformation
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. INTELLISYS-LIT 6/02
Specifications
Compatible Controllers: All Nor-CalAPC ControllersMaterials: Wetted materials316 stainless steel, Viton®
Seals: Viton® (standard); other materialsavailable upon requestLeak Rate: 1 x 10–9 atm.scc/sec HeTime Open-to-Close: 125 -250 millisecond,depending on sizeControl Resolution: 3.2 arc secondValve Position: Visual IndicatorDifferential Pressure: 15 psi maximumacross valve plateCycle Life: 1 million open-close cyclesHeat Capabilities: Up to 200ºC withoptional heater kitsAmbient Operating Temp. Range: 0–50ºCCE Certified: Machinery and EMC Directives
Visual Throttle Plate Indicator
Hard Stop
Direct-drive Motor
Oldham Coupling
Precision Shaft Bearings
Precision Shaft Bearings
Optional Heater Jacket Special Flush NW Clamps
Dual O-rings
Dual O-rings
High Efficiency Thermal Insulator
Motor Drive toValve Body Interface
Optimally DesignedThrottle Plate
}
}
Features and Benefits
• Higher system throughput• Optimally designed throttle
plate for improved control linearity• Smallest footprint available• Direct-drive motor eliminates
belts, gears and micro-switches• Fully serviceable valve motor subassembly• Easy installation and replacement• 316 stainless steel and Viton®
O-rings on all wetted parts• High open conductance• Low closed conductance
The Intellisys throttling butterfly valve’smicro-stepped, direct-drive motor eliminatesbelts, gears and limit switches, extendingMTBF while reducing the complexity and sizeof the drive assembly. High-torque, gear drivesare also available in all sizes as an option.All wetted parts are made from 316 stainlesssteel for corrosion resistance.Combined with a Nor-Cal APC, the high speedvalve drive enables systems to reach processpressures sooner, reducing cycle time andincreasing yield. The TBV can cycle fromopen to closed in 125 milliseconds,providing faster time to set point.Competing valves cycle in 1.6 to7.5 seconds. The optimallydesigned throttle plateprovides improved controllinearity, higher openconductance leading tocontrol accuracy within0.25% of set point.(See chart to right)
THROTTLING BUTTERFLY VALVES
Double O-rings on the top and bottomshaft seals ensure vacuum integrity,even during cycling.Intellisys Throttling Butterfly Valves arenow available in a full range of standardsizes from one to twelve inch IDs.Low cost, direct-drive valves are offered withNW-25, 40 and 50 flanges as well as ISO-63,
80, 100 and 160 flanges.High-torque geared drivesare available as an option.Other options include alumi-num valve bodies, heatersfor up to 200ºC internaltemperatures and specialO-ring materials, such asKalrez® or Chemraz®.
Intellisys Throttling Butterfly Valves (TBV)
4.00
3.50
3.00
2.50
2.00
1.50
1.00
0.50
0.00
-0.50
0 10 20 30 40 50 60VALVE ANGLE (Degrees Open)
CONT
ROL
ACCU
RACY
(%
Dev
iatio
n fro
m S
etpo
int)
CONTROL RESOLUTION Comparison of 4" TBV against
Competitors' Models
Maximum Deviation .04%
Competitor ACompetitor BNor-Cal Products
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. INTELLISYS-LIT 6/02
Includes Viton O-rings. All valves are available in aluminum construction Dimensions in inchesand/or with JIS or ASA flanges as well as with high-torque gear drives. Call for part numbers and pricing.
CLOSED
OPEN
VA
LVE
CO
NT
RO
LLER2.38
2.53
3.21
1.91 1.28
FLOWIntellisysTMTHROTTLING BUTTERFLY VALVE
A
.23
D
C
B
E
CLOSED
OPEN
VA
LVE
CO
NT
RO
LLER
FLOWIntellisysTMTHROTTLING BUTTERFLY VALVE
2.38
2.53
3.21
1.91 1.28
D
C
AB
.23
E
TBV O-ring OptionsOption Description Price
KT High Temperature Kalrez®
KC Chemical Resistant Kalrez®
CR Chemraz®
Viton® O-rings are standard. As an option, other O-ringscan be provided. Add the desired option suffix to the mainpart number. EXAMPLE: TBV-200-NW-50-KT
APC to Valve CableModel Number Length Price
TBV-CRD-10 10 feet
Other cable lengths are available upon request.
Universal Valve Drive (UVD)Our Universal Valve Drive can easily replace the older drive technologyfound on other manufacturers’ pressure control valves. When combinedwith our Intellisys adaptive pressure controller, the valve drive canupgrade a competitive valve to nearly the same performance levelsprovided by Intellisys. Drive-to-valve adapters for mostmanufacturers’ valves are available from stock. Custominterfaces can quickly be designed for your specificapplication. The UVD can be customized to fit anymanufacturer’s throttle valve. Call for more details.
Seals: Viton® standard, other materialsare available upon request
Operation:Power Input: 24 VDC, 100 W max., 60 Wnominal (with one heated gauge connected)Differential pressure: 15 psi maximumacross the valve plateHeating capabilities: Up to 150ºC withoptional heater jacketsAmbient Operating Conditions: 0 to 45ºC @0 to 95% humidity, non condensingLeak Rate: 1 x 10-9 atm·scc/sec He
Peripheral I/O:DeviceNet Communications:Micro-style 5-pin male connectorSerial Communication: RS-232 or RS-485on DB-15 female “Auxiliary” connectorCapacitance Diaphragm Gauge:One or two gauge operation.Second gauge requires external powerAnalog / TTL: Two each, analog andopen collector outputs
Inherent Performance:Maximum speed: 125 msec open to closedControl Plate Resolution: 3.2 arc secondsMaximum torque: 280 in-oz
Pressure Control Performance:Accuracy: The greater of 5 mV or 0.25% ofreadingRepeatability: Within 2.5 mV or0.12% of readingControl Range: 0.5% to 100% ofthe vacuum gauge range
Other sizes, flanges and materials of construction are available. Call for pricing Dimensions in inches
Nor-Cal Products’ new IQ-Series ThrottlingButterfly Valve with on-valve control is theideal choice for leading edge 200mm and300mm tools with DeviceNetTM communica-tions networks. In addition, IQ-TBVs can helpthe system designer meet continually scruti-nized tool footprint allotments. With itscompact, low cost design, the IQ valve isspecifically produced with the system designerin mind. One of the unique features of the IQvalve is that the pressure control electronicsare integrated on the valve. As a result, con-troller space requirements are reduced byover 80% compared to typical “buried box”controllers and by almost 50% compared tocompetitive “integral controller” products.Furthermore, all interface and communicationsconnections are made directly to the valvegreatly simplifying interconnecting cableinstallations.
The same patented closed loop motor controltechnology and proven adaptive pressure controlalgorithm found in Nor-Cal’s stand-alone pressurecontroller is included in the IQ valve. As a result,the valve moves from the fully open to closed posi-tion in 1/8 second while offering over 100,000steps of addressable control resolution throughoutthe stroke. In comparison, other standard “inte-gral controller” products require nearly 8 secondsto actuate while only providing 10,000 controlsteps. Due to the IQ valve’s fast speed and ultra-fine resolution, throughput increases of 5 to 15%with 2 to 10 fold reductions in wafer scrap are pos-sible.
As with the traditional Intellisys downstreampressure control products, the IQ valve can beoperated in a number of modes. The closedloop pressure control mode is enabled when-ever the valve is allowed to modulate the valveplate position automatically so as to cause thechamber pressure to match the system pres-sure set point. Alternatively, the IQ valve canbe operated in valve position control mode inwhich the tool software commands the valve to
IQ Series Throttling Butterfly Valves
a series of predetermined angles. A “slowmode” is also available, which is ideally suitedfor applications in which the rate of pressurechange has to be controlled precisely.Operation in any of these three modes can beaccessed and enabled “on the fly” or throughactivation of one of five pre-programmableset points stored in the IQ valve’s non-volatilememory. Last, the popular PMI™ functioncan also be used with the IQ-series valves.This function allows the user to monitor thetorque produced by the motor as it actuatesthe valve. Over time, as process by-productscondense on the inner surfaces of the valvebore and plate, the torque profile will increaseand register as a percentage of maximumtorque. Needed valve maintenance can thenbe performed on a scheduled basis ratherthan running the valve until failure.
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. INTELLISYS-LIT 6/02
Specifications
Power Input:3-pin 100-240 VAC Input Connector
System Interface:Serial Connector: DB-9 receptacle for RS-232 DCE or RS-485/ Modbus serial interface.TTL Connector: DB-37 receptacle containsall TTL and analog I/OAnalog Set Point: 0-10 and 0-5 VDC linearlyproportional to pressure or valve positionPressure Output: 0-10 VDC analog outputsignals proportional to pressure, one foreach vacuum gauge attachedValve Angle Output: 0-10 and 0-5 VDCproportional to valve position, 0 V isclosed, 10 V(5V) is openSignal Interface: 9 digital (TTL) controlinput signals to operate the APC. 4 opencollector status outputs, 2 process limitrelays, Form C contacts
Device Interface:Gauge Connector: Two DB-9 receptaclesprovide ±15 VDC @ 800mA for one or twovacuum gauges with differential signal inputfor increased noise immunityPressure Input: 0-10 VDC linearlyproportional to pressureValve Connector: DB-15 receptacleprovides power to operate the highperformance valve
Approvals:CE (EMC and Low Voltage Directives)
Operating Range:0 to 400C @ 0-95% humidity noncondensing
Weight: 3 lbs. 8 oz. (1.7 Kg)Valve Performance:
(when operated with an Intellisys APC)Control Range: From 0.5% to100% of the vacuum gauge rangeAccuracy: The greater of 5 mVor 0.25% of readingRepeatability: Within 2.5 mVor 0.25% of readingMaximum Speed: 0.125 to 0.250seconds open-to-closedControl Resolution: 100 thousandto 1.5 million steps
The Intellisys Adaptive Pressure Controller(APC) provides advanced control systemperformance by combining closed loopmotor control with adaptive pressure control.The Intellisys APC system provides more than100,000 control steps in the typical throttlingbutterfly valve operating range - a 60 timesimprovement over existing technology.The adaptive algorithm eliminates pressureovershoot, undershoot and gradual rampsduring pressure transitions. Moreover, DigitalSignal Processing (DSP) enables DeviceNet™communications protocol and programmingflexibility for customer or process specificrequirements. When used with an Intellisysvalve, the APC provides at least a twentytimes increase in throttle valve speedover competitive products. An industryfirst preventative maintenanceindicator (PMI™), reducesunscheduled maintenanceand downtime by alertingthe user when the throttleplate and bore should becleaned. This is madepossible by the APC’s abilityto sense changes in motortorque from condensable
by-product buildup in the valve. As a safetyfeature, the PMI will automatically stop themotor when maximum torque is reached,preventing damage to the valve.The user can program up to five pressurecontrol or valve position set points storedin non-volatile memory, while monitoringsystem pressure and valve position. Adjust-able soft start routines can be programmedto reduce particle disturbance within theload lock or chamber.The versatile auto-sensing power supply forthe APC accepts 100-240 VAC input providingpower to the valve, as well as filtered ±15 VDCfor up to two heated CDGs. Flexible RS-232 andTTL/analog interface allows compatibility withmost host controllers.
Adaptive Pressure Controller (APC)
APC Order InformationModel Number Description Price
APC-001-B.1 For Gear Drive Throttling Valve. Buried Box. APC-001-B.2 For Direct Drive Throttling Valve. Buried Box.
Includes 6 foot power cord. Other power cord lengths available upon request.
APC Cables Model Number Description Length Connectors Price
TBV-CRD-10 APC to Valve Cable 10 feet CDG-CRD-10 APC to Gauge Cable 10 feet Bare Leads CDG-CRD-DB9-10 APC to Gauge Cable 10 feet DB-9 gauge CDG-CRD-DB15-10 APC to Gauge Cable 10 feet DB-15 gauge
Other lengths available on request.
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
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CAPACITANCE DIAPHRAGM GAUGES
Nor-Cal Capacitance Diaphragm Gauges (CDGs) complement Intellisys adaptive pressure control-lers and throttle valves with vacuum pressure measurements of superior accuracy and repeatability.The CDG’s ceramic diaphragm helps minimize zero drift and stabilizes output noise due to thermallyinduced variations. 45ºC heated and non-heated (temperature compensated) devices are availablewith several tube fittings and in standard pressure ranges from 0.1 to 1000 Torr. The unheated CDGachieves an accuracy of 0.2%, while the 45ºC heated CDG achieves 0.15% accuracy.Improved thermal and mechanical diaphragmproperties reduce problems associated with metaldiaphragms, such as hysteresis, non-linear motionrange, temperature induced changes, material im-perfections and corrosiveness.The gauge’s aluminum oxide ceramic diaphragm
is created with no internal stress, surface tension ripples, grain or imperfections. The diaphragmreturns quickly and accurately to the same position for a given pressure, so measurements remainrepeatable over time. And, because the diaphragm isn’t damaged by exposure to atmosphericpressure or repeated cycling, there is no need for isolation valves. The corrosion resistant ceramicdiaphragm improves process consistency and prolongs sensor life. All CDG parts that come intocontact with process gasses are made from inert materials to ensure consistent performance andlong life in corrosive environments.The Intellisys CDG is 100% electrically and mechanically compatible with competitive gauges foreasy replacement installations. DeviceNet™ compatible gauges can also be ordered as an option.Please call for more information.
Accuracy: 0.2% of reading ± temperature effects 0.15% of reading Materials Exposed to Gases: Ceramic (AlO2), 316 Stainless Steel Max. Overrange Pressure: 1000 Torr for 0.1, 1, 10 & 100 Torr sensors
1500 Torr for 1000 Torr sensor Resolution: 0.0025% of Full Scale for 0.1/1 Torr sensors
0.0015% of Full Scale for 10/100/1000 Torr sensors Sensor Temp. Effects: 0.1-Torr 1/10/100/1000 Torr Zero Coefficient 0.005% of Full ScaleS/ºC 0.005% of FS/ºC 0.0025% of FS/ºC Span Coefficient 0.01% of reading/ºC Time Constant: <30 ms Operating Temps.: 5ºC to 50ºC 15ºC to 40ºC Power: 23 mA 300 mA Weight: 0.57 lbs. 1.07 lbs. Internal Volume: 6 cc 7 cc
APC to CDG CablesModel Number Connectors Price
CDG-CRD-10 Bare Leads CDG-CRD-DB9-10 DB-9 gauge CDG-CRD-DB15-10 DB-15 gauge
Use part-tree to select family, range and fitting. Bare tubefitting is standard. For VCR, CF or NW fitting option add$60 to cost. Example Part number: CDG091-M11-VCR
Capacitance Diaphragm Gauges
IntellisysTM
CAPACITANCE DIAPHRAGM GAUGE
IntellisysTM
CAPACITANCE DIAPHRAGM GAUGE
1/2 FVCR
1.33 CFNW-16
1.93
3.15
1.85
.50
3.09
6.08
2.05
2.48
5.45
Heated CDG UnheatedCDG
1
0
-1200 300 400 500 600100
Drift
(mV)
Time (Hours)
Ceramic Diaphragm Zero Drift vs. Hours of Operation
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
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Set point 150ºC. 2000C manually resetable over-temp. Includes a 12“ power cordwith AMP connector. 240 VAC Option: Change “-1” at end of part number to “-2.”Example: HT-TBV-100-150-2. Call for larger sizes and for temps. below 150ºC.For temps. up to 200ºC a PID controlled heater jacket is recommended.* Includes two special NW clamps.
TBV Heaters and Controllers
Many semiconductor processes are carriedout in vacuum chambers with internal tem-peratures in the 700ºC range. Processby-products exit the chamber in vapor phase,but sublimate in the foreline and vacuum pumpexhaust when gas temperatures drop suffi-ciently for them to form solids. The resultantbuildup can increase wafer defects fromparticle backstreaming, reduce throughputof vacuum lines, impede the function ofthrottle valves and isolation valves, damagesome dry pumps and reduce the efficiencyof the scrubber. This buildup can be reducedor eliminated by heating vacuum lines andassociated components from the chamberto the scrubber, or by using a combinationof heaters and foreline traps, which collectthe by-products, preventing them fromcontinuing downstream.A CE certified, thermostat controlled heaterjacket is available for Intellisys TBV’s for 150ºCinternal temperatures. For temperatures up to200ºC a CE certified heater and PID controllerprovide precise temperature control. Heatersfor all TBV valves cover the valve body as wellas the mating flanges. Heaters for TBV valveswith NW flanges are provided with specialaluminum clamps. Standard sizes areavailable up to six inches. Larger sizesare available on request.
TBV Heater Jackets for PID ControlModel Use with TBVNumber Part Number Voltage Price
Maximum temperature 200ºC. Includes 12” power cord with AMP connector and twobuilt-in type K thermocouples with 6’ lead and mini-connector.240 VAC Option: Change “-1” at end of part no. to “-2.” Example: HC-TBV-100-200-2.* Includes two special NW clamps.
Typical Heated Line Configurations
1. Heated foreline to pump and heated exhaust lineto scrubber. No foreline trap.
2. Heated foreline to foreline trap before pump.3. Heated foreline to pump and heated exhaust to foreline
PID Heater Controller
The HC-935A-1-1 features single temperature sensor input from athermocouple or RTD sensor, and dual control outputs. The outputsmay operate in a variety of modes including: heat, cool, alarm andtimer. The timer function operates in a choice of delay-ON, delay-OFF,signal-ON or signal-OFF modes. Front panel lock capability and aLED display round out the feature set. Other HC-935 controllersare available for one, two and four zones. Call for pricing.
Model Max. OutputNumber Watts Zones Price
HC-935A-1-1 960 @ 120V 1
Features• 1/32 DIN package• NEMA 4X• Countdown timer• Programmable alarms• Universal power supply• Small panel footprint• ±0.25% accuracy• Worldwide flexibility• Low cost multi-zone
temperature control
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. INTELLISYS-LIT 6/02
TECHNICAL INFORMATION
Pin Assignments for the Intellisys TBV and TBV-IQ Valves, CDG and APC Controller
Active High Output SignalsActive Low Output SignalsActive Low Input Signals
View or download technical bulletins, frequently asked questions,PDF catalogs and operator’s manuals for Intellisys adaptive
pressure control products at www.n-c.com.
Call 1-800-824-4166 for Intellisys Technical Support.
Intellisys is a trademark of Nor-Cal Products, Inc.Penduroll is a registered trademark of V-Tex Corporation
ADAPTIVE PRESSURE CONTROLTM
General Features and Benefits
• Space saving, low cost design
• Low particle generation
• High reliability
• Easy maintenance, split body allows O-ringreplacement without removing valve from system
• Body can be heated to 150ºC with optional heater jackets
• Available in ISO and JIS flange styles
General Specifications
ConstructionWetted Materials:
Body: Cast aluminum AC4CHValve plate: Aluminum A5052Other parts: A 6061, A7075, SS304 and SS316, Viton®
Seals: Viton® standard, other materials available upon request
Body and plate surface treatment:Bare aluminum standard, hard anodizing optional
Valve DesignOperating Pressure: 3.8 x 10-8 to 760 Torr (5 x 10-8 to 1000 mbar)
Heating or Bakeout Capabilities:Body: 150ºC max with optional heater jackets
Actuator: 60ºC maximum
Ambient Operating Conditions: 0 to 60ºC
Leak Rate: 1 x 10-9 atm·scc/sec He across seatand to atmosphere (bare aluminum body)
Service Life : 200,000 cycles - Open to Fully Closed (All valves)1 million cycles - Open to Partially Closed (3-position valves)1 million cycles - Open to Control Closed Position (TPV)
Throttling PendulumValves and AdaptivePressure Controllers
Intellisys throttling pendulum valves provide equipment manufac-turers with unmatched pressure control performance and lowparticle generation. Other pendulum valves use one actuationmethod to move the gate and another method to seal, creating an“out of control” area near the closed position. To compensate forthis, system designers often add secondary bypass lines withcostly throttling butterfly valves for high pressure, high flowregimes, such as NF3 cleans. Intellisys pendulum valves utilizeexclusive closed-loop motor control and a patented Penduroll®actuator mechanism to move the sealing gate rapidly across thevalve bore and transition to the axial direction. The result is pre-cise pressure control over the entire valve stroke, most notablynear the closed position. The Intellisys control system is the onlychoice for demanding 300mm Etch and CVD applications whichrequire fast, accurate pressure control across the entire rangeof critical process flows and chamber pressures.Nor-Cal Products’ closed-loop motor control monitors andcontrols the exact position of the valve’s gate mechanism.The adaptive pressure controller provides over eight million stepsof addressable resolution to position the gate exactly where itneeds to be to control pressure or to seal. In addition, the Nor-Calcontrol system’s speed of actuation is unequaled in providing opti-mal transient response, pressure set-point stability, and overallprocess improvement. The APC’s adaptive algorithm outperforms“learn modes” by optimizing phase and gain settings in real timeduring varying chamber pressure and flow conditions.
Isolation Pendulum ValvesNor-Cal Products’ pneumatically actuated isolation pendulumvalves contain the same patented Penduroll™ mechanism that isfound in the Intellisys™ throttling pendulum valves. These valvesoffer the user a compact and low cost alternative to competitivedesigns. In addition, the smooth actuation results in low particlegeneration and rapid open-to-close speeds.In-situ serviceability of the valve is made possible throughthe incorporation of a removable bonnet cover. The entire gateassembly and sealing O-ring can be accessed without removingthe valve from the system, making regular inspections,cleanings and O-ring replacements quick and easy.
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
E C
D
B
A
F
Maintenance Space
E C
D
F
B
A
G
Maintenance Space
PENDULUM VALVES
Nom. ID Part Number A B C D E F Weight8.00 TPV-800-ISO-200 3.46 3.78 19.90 14.40 6.50 9.29 49 lbs. (22 Kg)
Other sizes and flange configurations available. Call for details. Dimensions in inches
Specifications
Compressed air source: CDA or equivalent at 65 to 85 psigMaximum speed: 3 seconds open to closed
(250 mm size and below)
Specifications
Power Input: 36 VDC to valve supplied from APC. Customer supplied4.5 to 16 VDC to optional position sensor
Performance: (when operated with an Intellisys APC Controller)Control Range: From .5% to 100% of the vacuum gauge rangeAccuracy: The greater of 5 mV or 0.25% of readingRepeatability: Within 2.5 mV or 0.12% of readingMaximum Speed: 1 to 3 seconds open-to-closedControl resolution: 8 million to 20 million steps
Options:High Temperature: Heated and insulated valve body
with PID or thermostat controlsPosition Indicators: Open/closed optical valve position indicator with LED’sSafety Lock: Closed position safety lock pin. Operated by a spring-to-
close electric solenoid. (Requires customer supplied24-76 VDC relay and power, relay logic signal from APC)
Rough Pump Port: NW-25 roughing port on main casting allowspump-down of chamber prior to opening pendulum valve
Intellisys Throttling Pendulum Valves
Isolation Pendulum ValvesNom. ID Model Number A B C D E F G Weight6.00 IPV-600-ISO-160 3.15 3.78 15.90 12.20 5.32 5.87 8.50 40 lbs. (18 Kg)8.00 IPV-800-ISO-200 3.46 3.78 19.90 14.40 6.50 5.28 9.29 49 lbs. (22 Kg)
APC-001-PM.2 Full functionality including RS-485/Modbus serial interface. Allows up to 16controllers on one communications line.
APC-001-P.2 Full functionality includingRS-232 DCE serial interface.
ADAPTIVE PRESSURE CONTROLLERS
Intellisys Pendulum Valve ControllersThe Intellisys Adaptive Pressure Controller (APC) merges closed loop motor control with adaptive pressure control to provideadvanced control system performance. An advanced adaptive algorithm eliminates pressure overshoot or gradual ramps duringpressure transition. A Digital Signal Processor (DSP) enables DeviceNet™ communications protocol and programming flexibilityfor customer or process specific requirements.
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Call for Pricing. - International product pricing will vary.
Scale in MilliTorr
Scal
e In
Tor
r Sc
ale
in M
illiT
orr
Time in Seconds
Perc
ent V
alve
Ang
le
1.5
1.0
0.5
2.02.5
0102030405060708090
100
0
10
30
20
40
50
0 10 20 30 40 50 60
STEP 1 STEP 2 STEP 3 STEP 4 STEP 5
Scale In Torr
VALVE ANGLE
SYSTEM PRESSURE
Set-Point
Nor-Cal Competitor
A
Competitor's time to reach set-point lags due to inability to close gate completely.
Competitor never reaches set-point due to high "closed" position conductance. Note that competitor remains at 0% valve angle.
Flow rate is increased to 2 slm which causes a sudden jump in base pressure.
A
B
C
B C
Most dry etch processes and manyadvanced CVD applications require theuse of a wide range of operating pres-sures, including some low pressureconditions that are well into the mo-lecular flow regime. That is, in part,driving OEM’s to use large diameterpump stacks with high capacity turbopumps. This means that the days ofinserting a simple butterfly valvebetween the chamber and the pump aregone due to the limited control rangeand non-sealing nature of large diam-eter butterfly valves, as well as to thespace they consume in the pump stack.To address these problems, OEM systemdesigners turned their attention to the useof throttling gate or pendulum valves,thereby addressing the pressure controland isolation valve issue with a singlesolution. Until now, controlling the large,heavy gate proved slow and cumbersome.Metal-to-metal contact of structural partsoften resulted in particle generation andmechanism failure causing havoc withprocess yields. Finally, existing valvedesigns are unable to provide the full rangeof pressure and mass flow requirementsdue to their inability to control pressurein the near closed position.Specifically, designers have hadto counteract the “low controllableconductance” limitation by inserting anadditional throttle valve in the by-passline around the throttling gate valve.(See illustration below.) In othercases, forcing the system through timeconsuming control learn algorithmsfor every new process condition hasbecome necessary. In either case, acompromise involving valuable space,cost or process performance has oftenbeen the only solution until now.
The high speed, ultra-high resolutionand exclusive actuation method ofIntellisys throttling pendulum valveseliminate the previous products’shortcomings. Using a simulated semi-conductor process, the Intellisys pendu-lum valve system was compared with asimilar system from, historically, thesole manufacturer of such valves. (Seechart above) In both cases, the testused the following abbreviated processrecipe with a 40 liter chamber connectedto an 1800 lps, ISO-250 turbo pump.
Step 1 Pump system to base pressureStep 2 Flow 80 sccm N2 & command
system to a process set-pointof 50 mTorr
Step 3 Evacuate system tobase pressure
Step 4 Flow 2 slm N2 and commandsystem to a cleaning steppressure of 2.5 Torr
Step 5 Evacuate system tobase pressure
The graph clearly illustrates significantperformance differences between thetwo valves. During the initial ramp frombase pressure to 50 mTorr, the Intellisyssystem drives the pendulum gate to apoint where the sealing O-ring is just
in contact with the sealing surface,whereas the competitive valve cannotand exhibits a significant leak-by in theclosed position. (See Step 2.) As a re-sult, the rate of pressure change wascompromised and the time taken toreach set-point more than doubled.Furthermore, using the competitivevalve led to pressure oscillations thatmeasured ±8% of set-point lasting3 to 4 seconds.Another noteworthy observationoccurred in the cleaning step.(See Step 4.) The Intellisys valveefficiently reached the target pressureof 2.5 Torr in approximately 3 seconds.However, even though the competitivevalve traveled completely closed andremained closed for the duration of theprocess step, the maximum achievablepressure leveled out at just over 2 Torr.This phenomenon is, again, attributableto the high leak rate of the competitivevalve when in the closed position.Inherent valve design and pressurecontrol performance limitations,such as these, have a direct effect onvacuum system design complexity. Inthe past, processes that required opera-tion over a wide range of flow rates andpressures essentially dictated that thetool vacuum foreline be complex. Eventhough it was only for use during certainoperations the added control valve by-pass took up space and could add upto $5,000 in system cost for everychamber. In contrast, the Intellisyspendulum valve system enables fullcommand of all control applicationswith just one valve and associated pres-sure controller, thereby saving extraspace, cost and integration efforts.
Simplified SystemDesign with SingleValve Approach
Chamber
Competitor's Throttling Pendulum Valve
HighVacuumPump
HighVacuumPump
To Rough Pump
To Rough Pump
Throttling Butterfly Valve with Controller
Isolation Valve
IsolationValve
TM
Nor-Cal'sIntellisysThrottling Pendulum Valve
Throttling Butterfly Valve and Controller eliminated with Intellisys TPVsystem.
Savings of approximately $5000.00
Chamber
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. GENESIS-LIT 11/02
GenesisTM
Due to Nor-Cal’s continuing improvement program, pricing and specifications are subject to change without notice.
GENERAL INFORMATION
The Genesis modular vacuum valve system provides semiconductor equipmentdesigners with unlimited possibilities for downstream vacuum subassemblies.Nippleless valve bodies and block fittings can be assembled by two attachmentmethods using universal ISO-KF centering ring/O-ring hardware, providing maxi-mum flexibility and the smallest footprint possible.
Simple and robust, Genesis valves are ratedat one million cycles before service. Duringtesting, these valves were cycled millionsof times while maintaining vacuum integrity.The welded bellows is AM-350 for corrosionresistance, longevity and flexibility. The bel-lows fully retracts from the side port when thevalve is open, eliminating buildup of processby-products on the bellows and subsequentparticle generation during operation. Valvecenter plates have been eliminated in order toprovide precise alignment between the poppetand valve seat. A composite stem bushingresists wear even at high temperatures.Valve return springs are shot peened in order
Soft Start Valve ActuatorFor reduced particle contamination in loadlocks and process chambers, Genesis valvescan be provided with a patented low cost softstart actuator with no increase in valve size. Adouble-acting air piston, opens a soft start cir-cuit inside the valve when air is supplied to thetop of the air cylinder. The soft start by-passopening can be provided fully open or with aspecified orifice, depending on the desiredpump down. (See charts page 4 and below)
After the chamber has been pumped fromatmosphere to the desired cross overpressure, the main valve circuit is opened bysupplying air to the bottom of the air cylinder.Each circuit can be operated independantlyand is air-to-open, spring-to-close.
Open/Closed Position IndicatorThe Genesis valve can be provided withCE certified proximity open/closed positionindicators. These proximity indicators detectthe position of the piston in the air cylinder.The technician has a visual indication ofpower to the circuit and the position ofthe valve, as does the operator watchingthe panel. With the soft start option onlyone position indicator can be providedfor the fully open position.
Air SolenoidAs an option, low 1.8 wattage, CE certifiedair solenoids in several current ratings canbe provided on the valve, ready to attach tothe house air supply. One three-way air sole-noid is required for a standard Genesis valveand two three-way air solenoids are requiredfor a soft start version. Air solenoids canalso be supplied as a kit with assemblyhardware and instructions.
O-ringsStandard Genesis valves are furnished withViton® O-rings. They are resistant to mostchemicals, but should not be heated to tem-peratures in excess 204ºC. Even prolongedexposures of 150ºC may begin to degrade theO-rings. The following O-rings can be pro-vided as options. High temperature Kalrez®
O-rings allow the valve to be heated to 316ºCintermittently or 280ºC for prolonged periodswhere the O-ring is allowed to expand.Chemical resistant Kalrez and Chemraz®
are also available.TIME (Seconds)
Cha
mbe
r P
ress
ure
(Tor
r)
800
700
600
500
400
300
200
100
0
0 5 10 15 20 25 30 35 40 45
Typical 30 Liter Chamber Pump-Down with Soft-Start
Open 1.5" valveat desired
cross-over pressure
Open soft-start with 0.070" orifice
Main ValveOnly
Features and Benefits• Million cycle reliability• Low cost soft start option• Low cost heated option• Smallest footprint available• Modular design• Corrosion resistant
to provide millions of cycles without loss offorce. Teflon® coated air cylinders feature a15 micron air filter to prevent particlemigration either into or out of the air cylinder.
Genesis valves and fittings have a patentednippleless body, which provides the highestconductance and smallest footprint available.Air solenoids, open/closed position indicators,and soft start actuators can be added with noaddition to size. All valves are designed foreasy O-ring or bellows replacement. Designsymmetry allows the air actuator to be orientedat 90º increments for easy access to the airsolenoid and visibility of position indicators.
Valve Options
Teflon Coated Air Cylinder
Main Valve Stem
Double ActingAir Piston
Soft Start Stem
High Temp.CompositeStem Bushing
Interchangeable Orifice
Welded AM-350 Bellows
Nickel CoatedAluminumBody
Genesis valve bodies and fittings are electro-less nickel coated aluminum for excellentthermal characteristics and corrosion resis-tance. Components are machined from solid6061-T6 aluminum to eliminate welds, leakpaths and entrapments. All tapped holes aresupplied with stainless steel threaded insertsfor long term serviceability.
Genesis Valves
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. GENESIS-LIT 11/02
GENERAL INFORMATION
Block Subassemblieswith Double Stud FastenersSpecial subassemblies, such as diverter valvesor roughing/high vacuum circuits can be as-sembled quickly using double stud fastenerswith valves and block fittings. These subas-semblies can be provided as a unit fromNor-Cal or you may choose to assemble themfrom individual components. They are ideal forlimited space installations, such as on clustertool frames, and provide highest conductance,while eliminating unnecessary hardware.Double stud fasteners can be used to make abulkhead attachment from a valve directly toa chamber. Stud fasteners can be installedusing a jeweler’s screwdriver and an ignitionwrench. An installation tool for stud fastenersis provided with each stud fastener kit orassembly, or one can be purchased separately.
Modular Valve System
Finger ClampComponent AssemblyElbows, reducers, chamber ports, roughinglines, or other vacuum components can beattached directly to valve bodies or fittings withfinger clamps. Unnecessary valve ports havebeen eliminated, shortening the gas path andincreasing system conductance.For ultimate versatility standard nipples andelbows can be attached with finger clamps inorder to make a drop-in replacement valve,such as an angle-in-line or tee valve. Once thefinger clamp bolt is loosened it can be pivotedout of the way in order to remove or install theflange and centering ring. The finger clampdoes not need to be removed from the valve orfitting. The clamp is self-aligning when tight-ened, for ease of flange installation.
Bulkhead Attachment to Chamber with Double Stud Fasteners Optional
Modular Heater
Genesis Valve with Soft Start Actuator
Genesis Tee Fitting
VCR Test Portattached withFinger Clamps
Finger ClampAttachment
Foreline to Vacuum Pump
Heaters and Insulators
A unique, UL listed modular heater provides 120ºC or150ºC internal temperatures in valves or fittings at afraction of the cost of a silicone heater. Genesis heatersuse thick film technology to provide uniform heatthroughout the component. Each heater containsa control set point and a resetable high tempera-ture shut off. The 1.5 and 2.0 inch sizes alsohave a low temperature alert that can be con-nected to a remote alarm. Each thermostatcan be replaced without destroying the heater.The same heater can be attached to a valvebody or fitting with two screws. A trim-to-fit,molded insulator covers the heated componentand mating flanges. These clean room compat-ible insulators are constructed of .50 inch thickmolded silicone. When in use, the exteriorsurface remains touch-safe. Insulators meetUL 94 V-O requirements. Insulators for othercomponents are available upon request.
Molded Insulator
Modular Thick Film Heater
ResetableHigh Temp.Thermostat
Replaceable Set Point Thermostat
Genesis is a registered trademarks of Nor-Cal Products, Inc.Teflon is a registered trademark of DuPont de Nemours & Co., Inc.Viton is a registered trademark of DuPont Dow Elastomers.Kalrez is a registered trademark of DuPont Dow Elastomers.Chemraz is a registered trademark of Green Tweed Co.
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. GENESIS-LIT 11/02
GENESIS VALVES & VALVE OPTIONS
Follow the part tree to add one or more options to a particular Genesis valve. Add option suffixes to the basic valve part number in the order show bypart tree. EXAMPLES: GNV-152-S2-P1-KT-B21, GNV-102-P2-A11 & GNV-202-S0-P1
C
A
B
D
Genesis Modular ValvesValve Model Bolt Size Number Flange A B C D Thread Circle Price
SPECIFICATIONS• Million cycle service interval• Electroless nickel coated aluminum bodies• TeflonTM coated aluminum air cylinder• Welded AM-350 bellows• Viton O-rings standard• High temperature composite stem bushing• Air-to-open, spring-to-close actuation• 60-80 psi required air pressure• Helium leak rate 1x10-9 Torr standard
cc./sec. maximum• Differential pressure, 25 psi maximum• 5/32 inch One-Touch air fittings standard.
Other sizes are available in US andMetric tubing diameters
• Larger valve sizes available. Call for details.
Position Indicator OptionActuator Option Description Add to Price
Soft Start/Standard P1O One position indicator - main valve open only Standard P1C One position indicator - main valve closed only Standard P2 Two position indicators - main valve open and closed
Refer to diagram at left for dimensions.
Viton Replacement O-rings,Bellows Assemblies and Valve
Rebuild Kits are available on Page 5
SPECIFICATIONS
Air Solenoid OptionActuator Option Kit Quantity Description Price
• -25ºC to 70ºC temperature range• Not available on heated valves
• CE certified• Shielded• M5 threads x 30mm long
• 5/32 inch One-Touch air fittings supplied• Remote mount on heated valves
• 24 inch long electrical leads with quick disconnect• 1.8 watt power consumption
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. GENESIS-LIT 11/02
SOFT START OPTIONS & ASSEMBLY HARDWARE
800
700
600
500
400
300
200
100
0
TIME (Seconds)
Cham
ber P
ress
ure
(Tor
r)
0 30 60 90 120 150 180 210
(1.5" Valve on 30 Liter Chamber)
Pump-Down with Various Soft-Start Orifices
No Orifice0.147" Orifice0.109" Orifice0.070" Orifice
Assembly Hardware
Double Stud FastenersValve ModelSize Number Thread A Price
.75–1.5 GNSF-150 12-24 .625 GNSF-150-K 12-24 .625
2.0 GNSF-200 1/4-20 .730 GNSF-200-K 1/4-20 .730
To order Stud Fastener Tool separately - order Model Number GNSF-T. Price $5.00. Dimensions in inchesB
A0.15
0.375
A
Double stud fasteners allow two Genesiscomponents to be connected using a standardISO-KF centering ring and O-ring. Each kitcontains four double stud fasteners for oneconnection and an installation tool.
DIMENSIONSfor Modular Valve Joining
with Double Studs Fasteners
NOM. ID A B 1.0 2.28 4.40 1.5 2.65 5.15 2.0 3.40 6.65
Dimensions in inches
Soft Start Orifice KitsModel Number Contents PriceGNV-075-SO-K 3 orifice sizes and a 1/8 inch allen wrench for installation GNV-075-SO-1 0.070 orifice GNV-075-SO-2 0.109 orifice GNV-075-SO-3 0.147 orifice GNV-075-SO-T 1/8 inch allen wrench for orifice installation
Dimensions in inches
Finger ClampsValve ModelSize Number Material Bolt Torque Price
.75–1.5 GNCP-150-S Stainless 12-24 x 7/8 60 in. lbs. 2.0 GNCP-200-S Stainless 1/4-20 x 7/8 100 in. lbs.
Dimensions in inchesFinger Clamps allow a standard ISO-KF flange to be attached directly to a Genesis valve or fittingusing a standard ISO-KF centering ring and O-ring. Each kit contains four finger clamps, hexhead bolts and washers for one connection.
Two fastening systems are available forGenesis valves and fittings providing maximumflexibility and the smallest footprint possible.Nippleless valve bodies and block fittings canbe assembled with finger clamps or doublestud fasteners using universal ISO-KF center-ing ring/O-ring hardware, providing maximumflexibility and the smallest footprint possible.
Soft Start Actuator OptionOption Description Add to Price
S0 Soft start actuator - no orifice. For 1”, 1.5” and 2” valves. S1 Soft start actuator with 0.147 orifice installed. For 1”, 1.5” and 2” valves. S2 Soft start actuator with 0.109 orifice installed. For 1”, 1.5” and 2” valves. S3 Soft start actuator with 0.070 orifice installed. For 1”, 1.5” and 2” valves.
Refer to the “Pump Down Curves” graph to right. Dimensions in inchesSoft start actuators for larger valves available. Call for information.
Finger ClampAssembly
Double StudFastener Assembly
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. GENESIS-LIT 11/02
GENESIS HEATERS INSULATORS & ACCESSORIES
Valve HeatersValve Model SetSize Number Point Watts A Price
Dimensions in inchesSPECIFICATIONS• Compact, modular design• 120 VAC, 240 VAC available upon request• 120ºC or 150ºC set points, standard• Manually resetable 200ºC
over temperature shutoff, standard
Genesis heaters use thick film technology to provide uniform heat throughout the component. Each heater contains a control set point and aresetable high temperature shut off. The 1.5 and 2.0 inch sizes also have a low temperature alert that can be connected to a remote alarm.Each thermostat can be replaced without destroying the heater. The same heater can be attached to a valve body or fitting with two screws.
• Low temperature alert, standardon 1.5 and 2.0 inch
• 12 inch power cord with AMP 3-pin connector• Two 12 inch low temperature alert cords
with AMP MR connectors, standard on1.5 and 2.0 inch
• UL listed. CE certification pending
Heater Power CordsModel Number Length PriceHT-GN-PCD-6 6 ft. HT-GN-PCD-12 12 ft.
Fused 120 VAC power cords. Other length power cordsare available on request. Call for price.
F
D
A
A
0.75
EC
B
0.75
Optio
nal H
eate
r
Heater and InsulatorDimensions Diagram
Viton O-ringsIncludes bellows O-ring and poppet O-ring.Other O-ring materials available. Call for pricing.
Valve ModelSize Actuator Number Price
.75 & 1.0 Standard GNV-100-95 Soft Start GNV-100-95-S0
1.5 Standard GNV-150-95 Soft Start GNV-150-95-S0
2.0 Standard GNV-200-95 Soft Start GNV-200-95-S0
Dimensions in inches
Genesis Valve Repair Kits
First maintenance is recommended at one million cycles, depending on the cleanliness of the process. Typical service will require O-ring replacement.
Bellows AssemblyBellows, top flange and poppet weldmentassembly. Requires O-ring kit to seal.
Valve ModelSize Actuator Number Price
.75 & 1.0 Standard GNV-100-16 Soft Start GNV-100-16-S0
1.5 Standard GNV-150-16 Soft Start GNV-150-16-S0
2.0 Standard GNV-200-16 Soft Start GNV-200-16-S0
Dimensions in inches
Valve RebuildIncludes all valve parts except the body and position indicator.*
Valve ModelSize Actuator Number Price
.75 & 1.0 Standard GNV-100-99 Soft Start GNV-100-99-S0
1.5 Standard GNV-150-99 Soft Start GNV-150-99-S0
2.0 Standard GNV-200-99 Soft Start GNV-200-99-S0
Dimensions in inches
Valve Heater InsulatorsValve ModelSize Number B C D E F Price
• Clean room compatible• Meets UL 94 V-O• Insulators for other components available
* Position indicator type must be specified when ordering. See page 3.
Example: GNV-150-99-S0-P10
Nor-Cal Products, P. O. Box 518, Yreka, CA 96097 • 800-824-4166 or 530-842-4457 • FAX 530-842-9130 • Email [email protected]
Prices subject to change without notice. - International product pricing will vary. GENESIS-LIT 11/02
GENESIS MODULAR FITTINGS
SPECIFICATIONS• Electroless nickel coated 6061 T-6 aluminum• Stainless steel threaded inserts• Attach to standard components with finger clamps• Optional modular heater available• Attach to Genesis valves and fittings with double stud fasteners
Genesis fittings provide the most compact, highest conductance, corrosion resistantvacuum connection available when used with Genesis valves, fittings and double stud fasteners.These fittings can also attach with finger clamps to standard ISO-KF components with universalO-rings, which are also available from Nor-Cal Products.
90º ElbowValve Model Bolt Size Number A B Thread Circle Price
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