VD901

Oil Rotary Vacuum Pump [VD Series]

VD series is a direct-drive low noise oil rotary vacuum pump. This pump is suitable for a wide range of applications such as

evaporator, sputtering and food packaging.

Optimized Design Operation for Quiet

Easy MaintenancePump head can be removed without disconnecting the vacuum piping (except VD151, VD201). ＊See attached figure.Oil level gauge and drain valve accessible for easy oil exchange and daily inspection.

Forced Oil Circulation System Ensures Stable Pumping Speed Below Atmospheric PressureWhen equipped with the optional oil mist trap and oil return mechanism, the VD301, VD401 and VD601 can continuously run at all pressure ranges below atmospheric pressure.

Features

Evaporation, sputtering, and ion plating

Analytical instrument and leak test system

Gas exchange, gas filling, and vacuum insulation

Vacuum drying, freeze drying, vacuum degassing, vacuum packing, vacuum chuck and vacuum molding, etc.

Appl icat ions

Low Vacuum

Pump

Low Vacuum Pump

Oil Rotary Vacuum Pump [VD Series]

Ｇ.Ｌ.

Oil mist trap（option）Totally-enclosed fan-cooled Flange inducton motor3phase 0.55kW 4P

Rubber legs

Oil m

ist t

rap

TMX-

1

260

53 64 90 84

51317013020 20

4243

37 33

47 1822

2(395

)

10420 20

100 9

Oil drain plug M12Oil level gauge

Filter cap

Gas ballast valve

Outlet G1

Oil cap G3/4

Inlet (JIS B 8365 KF25 equivalency)

242(4

39)

44

34116260120

19 34 90 75 40

2020 20536 20130170

32

G.L.

2352

Oil drain valve G3/8

Oil mist trap (option)Totally-enclosed fan-cooled Flange inducton motor3phase 0.75kW 4P

Rubber legs

Oil m

ist t

rap

TMX-

1

Oil level gauge

Gas ballast valve

Oil cap G3/4

Outlet G1

Inlet (JIS B 8365 KF25 equivalency)

603 [623]

Ø166

363 [383]232

236

131

39563

47 33

40

31

200

(215

)

365

210 [230]

210150

(324

)28

114

0

Oil cap G1 (PF1)

Oil level gauge

Note : [ ]VD401 dimension

Gas ballast port G3/8

Inlet �ange 4-M8 tap, Central diameter Ø85JIS B 2290 VG40 equivalency

Outlet �ange 4-M8 tap, Central diameter Ø85JIS B 2290 VG40 equivalency

Drip-proof protected Flange induction motor 3phase 1.5kW 4P

Oil drain valve G1/24-Ø10128

135

(559

)Oi

l mis

t tra

p TM

201

(629

)Oi

l mis

t tra

p TM

401

Oil mist trap (option)

Unit: mm

Unit: mm

Unit: mm

Dimensions

VD151

VD201

VD301, 401

Motor

Piping

Pump

Oil cap G1

Inlet �ange 4-M8 tap, Central diameter Ø100JIS B 2290 VG50 equivalency

Outlet �ange4-M8 tap, Central diameter Ø85JIS B 2290 VG40 equivalency

Oil level gauge

(676

)Oi

l mis

t tra

p TM

401

Gas ballast port G3/8

328

164

G.L.87

200

326

182540 8-Ø11

Ø214

570(820)

486

270 45

15129

1

306 56 36

230280

41

(371

)

Oil mist trap (option)

Oil drain valve G1/2

Totally-enclosed Fan-cooled Flange induction Motor 3phase 3.7kW 4P

158

298

180

281

92 4-Ø11

Ø166

360390

(724)

435255 56 36

G.L.

164 32

8 (371

)

41

87230280

45

Oil level gauge

Gas ballast port G3/8 Oil cap G1

Outlet �ange 4-M8 tap, Central diameter Ø85 JIS B 2290 VG40 equivalency

Inlet �ange 4-M8 tap, Central diameter Ø100JIS B 2290 VG50 equivalency

Drip-proof protected Flange induction motor 3phase 2.2kW 4P

Oil drain valve G1/2

(676

)Oi

l mis

t tra

p TM

401

Oil mist trap (option)

Unit: mm

Unit: mm

When a pump is removed (VD301〜VD901)

VD601

VD901

www.ulvac.co. jpULVAC, Inc. Components Division www.ulvac.co.jp/eng

Overseas Sales in Japan TEL +81-467-89-2261

USA : ULVAC Technologies, Inc. TEL +1-978-686-7550 PHILIPPINES : ULVAC Singapore Philippines Branch TEL +63-2-828-7700GERMANY : ULVAC GmbH TEL +49-89-960909-0 VIETNAM : ULVAC Singapore Vietnam Representative Office TEL +84-8-62556762CHINA : ULVAC (SHANGHAI) Trading Co.,Ltd. TEL +86-21-6127-6618 THAILAND : ULVAC (THAILAND) LTD TEL +66-2-312-4447TAIWAN : ULVAC TAIWAN, Inc. TEL +886-3-579-5688 MALAYSIA : ULVAC MALAYSIA SDN. BHD. TEL +60-3-5121-4700KOREA : ULVAC KOREA, Ltd. TEL +82-31-683-2922 INDIA : ULVAC, Inc., India Branch TEL +91-40-27007006SINGAPORE : ULVAC SINGAPORE PTE LTD TEL +65-6542-2700

This catalog is subject to change without notice. This catalog is published in order to sell this product in overseas. Please see Japanese catalog when purchasing in Japan.

Oil Rotary Vacuum Pump [VD Series]

Model VD151 VD201 VD301 VD401 VD601 VD901

Designed

pumping speed

50Hz m3/h 14.4 20.2 30 40 60 90

L/min 240 336 500 670 1000 1500

CFM 8.47 11.89 17.66 23.54 35.31 52.97

60Hz m3/h 17.3 24.2 36 48 72 108

L/min 288 403 600 800 1200 1800

CFM 10.18 14.24 21.29 28.25 42.38 63.57

Ultimate

pressure ＊1

GP close Pa 0.67

Torr 5×10-3

mbar 6.7×10-3

GP open Pa 6.7 2

Torr 5×10-2 1.5×10-2

mbar 6.7×10-2 2.0×10-2

Motor ＊2 Type Totally Enclosed Fan Cooled Motor Drip-proof protected Flange Motor Totally Enclosed Fan Cooled Motor

kw (number of poles) 0.55 (4) 0.75 (4) 1.5 (4) 2.2 (4) 3.7 (4)

HP (number of poles) 0.75 (4) 1 (2) 2 (4) 2.95 (4) 4.96 (4)

Voltage/Freqency ＊3 200V / 220V / 230V / 240V / 380V / 400V / 415V-50Hz

200V / 220V / 230V / 240V / 380V / 400V / 440V / 460V-60Hz

200V / 50Hz, 60Hz

220V / 60Hz

Oil ＊4 ULVOIL R-7

Oil capacity 0.7 to 1.1 L 1.0 to 2.5 L 2.5 to 4.0 L

Cooling method Air cooled

Inlet JIS B 8365 KF25 equivalency JIS B 2290 VG40 equivalency JIS B 2290 VG50 equivalency

Outlet G1 JIS B 2290 VG40 equivalency

Weight 29 kg 34 kg 59 kg 61 kg 88 kg 105 kg

External dimensions W×L×H 170×514×240mm 170×536×265mm 236×603×324mm 236×623×324mm 298×725×371mm 294×820×371mm

Certification CE CE (Option)

Standard accessories Motor, Oil for 1 pump, Operation manual

Options ＊5 Oil mist trap Oil mist trap, Gas ballast valve, Oil return mechanism, Helium tight, CE

＊1 Measured with a Pirani gauge. (Approx. 6.7×10-2Pa when measured with a McLeod vacuum gauge.)＊2 Options: The pump is also compatible with a totally-enclosed fan-cooled motor, increased safety explosion-resistant motor, and pressure resistant explosion-resistant flange motor.＊3 Other voltage is available upon request.＊4 Other oil types are available upon request.＊5 TM401 and TM-2 are available oil mist trap for VD601 and VD901. Please use TM-2 if repeated intake pressure exceeds 10,000Pa.

1171E/2012062000UYO

Speci f icat ions

VD151, 201 VD301, 401 VD601, 901

Pumping Speed (JIS B8316/1985)Type： VD151,VD201Power： 3φ 0.55kw, 0.75kw 50/60HzOil： ULVOIL R-7

VD201 50HzVD201 60Hz

VD151 50HzVD151 60Hz

0

5

10

15

20

25

Pum

ping

Spe

ed [m

3 /h]

Gas Ballast ClosedGas Ballast Opened

Pressure

10–1

10–110–3 10–2

102 103 104 1051 10

10 102 7601PaTorr

(Note : 1mbar=100Pa)

0

10

20

30

40

Pum

ping

Spe

ed [m

3 /h]

Pumping Speed (JIS B8316/1985)Type： VD301,VD401Power： 3φ 1.5kw 50/60HzOil： ULVOIL R-7

VD401 60Hz

VD401 50Hz

VD301 60Hz

VD301 50Hz

Gas Ballast ClosedGas Ballast Opened

Pressure

10–1

10–110–3 10–2

102 103 104 1051 10

10 102 7601PaTorr

(Note : 1mbar=100Pa)

Pumping Speed (JIS B8316/1985)Type： VD601,VD901Power： 3φ 2.2kw, 3.7kw 50/60HzOil： ULVOIL R-7

VD901 60Hz

VD901 50Hz

VD601 60Hz

VD601 50Hz

0

20

40

60

80

100

Pum

ping

Spe

ed [m

3 /h]

Gas Ballast ClosedGas Ballast Opened

Pressure

10–1

10–110–3 10–2

102 103 104 1051 10

10 102 7601PaTorr

(Note : 1mbar=100Pa)

Pumping Speed Curves