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One dimensional metal nanowires grown by physical vapour ...

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Max-Planck-Institut für Intelligente Systeme One dimensional metal nanowire grown by physical vapor deposition DSL D S L ÜNN CHICHT ABOR Gunther Richter Max Planck Institute for Intelligent Systems (formerly MPI for Metals Research) Stuttgart, Germany MECANO Meeting, Ecole des Mines, Paris 30 th October 2012
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Page 1: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

One dimensional metal nanowire grown by

physical vapor deposition

DSL

D S LÜNN CHICHT ABOR

Gunther Richter

Max Planck Institute for Intelligent Systems

(formerly MPI for Metals Research)

Stuttgart, Germany

MECANO Meeting, Ecole des Mines, Paris

30th October 2012

Page 2: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Acknowledgment

Universität Stuttgart/MPI für Intelligente Systeme

Karla Hillerich Lisa Hofacker Matthias Kolb Matthias Schamel

Carola Schopf Dominic Linsler Christian Kappel Vanessa Dörlich

Friderike Baras Dominic Zug

Horst P. Strunk

Karlsruher Institut für Technologie

Wenting Huang Andreas Sedlmeyr Reiner Mönig

Oliver Kraft

Page 3: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Overview

Motivation

Examples in nature

Artificial metal nanowhisker:

- Microstructure

- Growth

Nucleation site

Incorporation site

- Mechanical properties

- Composites

Summary

Page 4: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Influence of FIB machining?

Motivation

2 µm2 µm

FIB cutting top-down approach

PVD growth bottom-up process

2 µm

Andreas Schneider

for nano structuring

Page 5: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Overview

Motivation

Examples in nature

Artificial metal nanowhisker:

- Microstructure

- Growth

Nucleation site

Incorporation site

- Mechanical properties

- Composites

Summary

Page 6: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Historical Whisker: hair silver

Page 7: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Whisker 1574

Found in:

Freiberg

Schwarzwald

Kupferberg

Joachimsthal

Kongsberg

AgS_Heizent.wmv

As long as I am talking about silver matte, I should for the sake of the eager reader tell something that is

characteristic of its nature and behaviour. First: When silver matte is cast into an ingot, and while it is still

hot, it can be hammered and shaped as you wish, just like lead. And further: It is possible to cats figures or

coin medals from it which look like vitreous silver.

When you have cast it into funny little decorative figures, lightly cut or scratch them with a knive and hold

them over a gentle charcoal fire until they get hot, whereupon silver will sprout or grow out of them very

delicately just as it grows in the mineral. This is amusing and very pretty to watch. I am telling this so that

anybody who would like to do this for fun and play with it some more should know how it is done.

Page 8: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Old reviews

Page 9: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Whisker 1574

Vorkommen:

Freiberg

Schwarzwald

Kupferberg

Joachimsthal

Kongsberg

Page 10: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Whisker 1574

Vorkommen:

Freiberg

Schwarzwald

Kupferberg

Joachimsthal

Kongsberg

Page 11: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Overview

Motivation

Examples in nature

Artificial metal nanowhisker:

- Microstructure

- Growth

Nucleation site

Incorporation site

- Mechanical properties

- Composites

Summary

Page 12: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

arteficial Whisker

Substrate: Silicon wafer, Tungsten foil + 30 nm Carbon by magnetron sputtering

Growth parameters: UHV (2·10-10 mbar), Metal thermal evaporation, TS ~ 60% TM

Cu growth: TS = 650°C – 700°C, R = 0.05 nm/s

Crystal morphology: needle / prismatic, diameter 20 -200 nm, Length < 300 µm

Isometric Copper islands grown on a clean Silicon surface

Page 13: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Microstructure

No defects as grain boundaries or

dislocations

the metallic whisker are perfect

single crystalline [011] [111]

[101]

a

bc

x

yz

1.0 nm

ab

c

Copper

Page 14: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Nano-whisker tip

x [111]

Page 15: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

HRTEM || whisker axis

10 nm

HRTEM investigation:

e-beam axis: - no edge dislocations detectable

- no screw dislocation detectable

- projected side facets flat

- surface oxidized

- no contaminations visible on surface

e-beam || axis: - 6-fold symmetry

- no stacking faults

- misfit dislocations in Ni

- no dislocations in Cu whisker

- Ni/Cu core-shell structure

- Ni grows epitaxial by island growth

Page 16: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Crystal shape

Shape:

- Low indexed {111}, {100} facets for surface

- Low energy Wulff shape dominates geometry

Page 17: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Fe Nanowhisker

Substrate: Mo foil

Temperature: 800°C α-Fe

Surface not defined by low surface energy {110} facet

[001]

[100]

[010]

Page 18: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Overview

Motivation

Examples in nature

Artificial metal nanowhisker:

- Microstructure

- Growth

Nucleation site

Incorporation site

- Mechanical properties

- Composites

Summary

Page 19: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Mathematical NW lengthening model

Ruth, V & Hirth, J.P., Kinetics of diffusion-controlled whisker growth, J. Chem. Phys. 41, 3139-3149 (1964)

Metal

flux 5 min 120 min 120 min

Page 20: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Substrate surface contribution

0

1000

2000

3000

4000

5000

6000

7000

8000

0,0E+00 2,0E-04 4,0E-04 6,0E-04 8,0E-04 1,0E-03 1,2E-03 1,4E-03

Whisker length [m]

Tim

e [

s]

100200

300400

500600

0

2

4

6

8

10

12

14

5

10

15

20

Beta

Diff

usio

n le

ngth

(µm

)

Whisker radius (nm)

Vl (m/s) w/D (1/m2) ß X (µm)

4,4E-08 6,8E+06 10,6 380

1,3E-08 1,9E+07 57,2 230

2,2E-08 3,0E+07 0,5 180

2,0E-08 7,2E+06 9,2 370

1,8E-07 9,1E+08 0,7 33

Whisker growth:

- NW growth by adatom diffusion on

substrate surface

- direct impingement on whisker facets

- Adatom incorporation: tip or root

Whisker formation:

- nucleation at preferred sites

- transformation from 2D nucleus to 1D

proto-whisker

- predominant growth by adatom

diffusion on substrate surface

- direct impingement on whisker facets

- whisker formation kinetically driven

Page 21: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Substrate-Whisker interface

Si substrate

CuxSi

Ni film

C layer

Ni/Cu whisker

Sabine Haag

Page 22: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

C-Film Structuring

Preferred nucleation in C holes

Page 23: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Growth mechanism I

1800

1900

2000

2100

2200

2300

2400

0 10 20 30 40 50Beschichtungszeit t [min]

Länge [nm

]

Sequence of deposition steps:

30 nm C/Si(111)

10 min deposition @ 680°C

SEM analysis

Secondary nucleation on NW side

facets

island growth

No lengthening

deactivation of atom incorporation

Page 24: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

50 nm Au colloids deposited by spin coating

Artificial nucleation site

30 nm deposition steps @ 680°C

Lengthening and structure rotation

Incorporation site still active

Growth mechanism II

Page 25: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Growth mechanism III

Fe-Cu-nanowhisker:

1. 180 nm Cu @ 680°C

2. 30 nm Fe @ 680°C

substrate 30 nm/Si(100)

Miscibility gap

TEM grid

Formation of second

phase (Fe rich) at

interface

Nucleation and film

growth on NW surface

Page 26: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Phenomenological growth model

Suitable Substrate:

- Si

- metal surface

Nucleation site:

- Colloids

- Defects in “non-wetting layer”

Metal condensation

Adatom diffusion

Nucleation

Nuclei growth

“Proto-whisker formation”

Nucleation and layer growth

on facets

Thickening

Adatom incorporation at

interface

Lengthening

Page 27: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Overview

Motivation

Examples in nature

Artificial metal nanowhisker:

- Microstructure

- Growth

Nucleation site

Incorporation site

- Mechanical properties

- Composites

Summary

Page 28: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

cyclic in situ bending

Page 29: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

0 50 100 150 200 250 3000

2

4

6

8

be

nd

ing

stre

ss (

GP

a)

diameter (nm)

-2 -1 0 1 2 3 4 50

1

2 graphisch bestimmt

berechnet

y-K

oo

rdin

ate

in

m

x-Koordinate in m

Results

0 50 100 150 200 250 3000

1

2

3

4 m=0.47

shea

r st

ress

(GPa

)

diameter (nm)

m=0.41

Mckenzie

Frenkel

Bending stress:

- Lower limit of strength by curvature measurement

- No diameter dependence

Only small dislocation free volumes are tested

(colmpare results from Bei and Pharr)

Shear stress

whisker axis || <110> calculation of shear stress

- Close to predicted value for partial dislocation

(compare talk R. Mönig)

Page 30: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Overview

Motivation

Examples in nature

Artificial metal nanowhisker:

- Microstructure

- Growth

Nucleation site

Incorporation site

- Mechanical properties

- Composites

Summary

Page 31: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Advanced microstructures: Au-Ag core shell

structures

0 1 2 3 4 5 6

Ag L

Inte

nsity

(a.u

.)

Energy (keV)

Au M

50 nm

10 µm 4 µm 2 µm

A

D E

B C

D E

Page 32: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Au-Ag core shell structures: Annealing

10 µm 1 µm2 µm

A B C

D

Measurement area and

microscope type

IAu Mα/IAg Lα

as deposited

IAu Mα/IAg Lα

after annealing

Film SEM Ag not detectable 11.9

0.5

Whisker SEM 0.4

0.1 12.2

2.8

Whisker TEM 0.5

0.1 13.9

1.3

Page 33: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Au(Ag)-Metallic nano-tubes

2 nm

[100]

[011]

200 nm

022

111

111

-

-

- -

[011]

Page 34: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Tube formation: Model

A B C D

: Substrate and Au grain boundaries : Au: Ag

Ag nano-whisker growth:

- Si(100) substrate

- R = 0.05 nm/s, TS = 800°C

- Cooling to RT

Page 35: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Tube formation: Model

A B C D

: Substrate and Au grain boundaries : Au: Ag

Au film deposition:

- TS = RT no interdiffusion

- R = 0.02 nm/s cube-on-cube epitaxy on Ag whisker

polycrystalline Au film on substrate, columnar grains

- grain diameter ~ 100 nm

Page 36: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Tube formation: Model

A B C D

: Substrate and Au grain boundaries : Au: Ag

Au(Ag) nano-tube formation:

- TS < 300°C activation of Ag diffusion

- t = 70 h D = 2.7·10-25 m2/s L ~ Å

Dgb = 7.6·10-15 m2/s Lgb ~ µm

- Ag depletion by surface diffusion

H. Mehrer, Ed., Landolt-Börnstein New Series, Group III:

Crystal and Solid State Physics, Volume 26, Diffusion in Solid Metals and Alloys (Springer-Verlag Berlin 1990)

Page 37: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Tube formation: Model

A B C D

: Substrate and Au grain boundaries : Au: Ag

Au(Ag) nano-tube:

- wall thickness < 10 nm, length ~ 15 µm

- single crystalline, dislocation free, stacking faults from wall formation

- attached to substrate

- no Kirkendall effect but lost-wax process

H. Mehrer, Ed., Landolt-Börnstein New Series, Group III:

Crystal and Solid State Physics, Volume 26, Diffusion in Solid Metals and Alloys (Springer-Verlag Berlin 1990)

Page 38: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Non Metal Nanowhisker

• Electron beam deposition of NaCl @ 250°C

• Evaporation of Na-Cl dimers

• Substrate: MgO, Al2O3, Ge, W

• Growth direction: <100>

• 2nd material deposition (e.g. V)

Core shell structures without Kirkendall effect

Page 39: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Summary

Nanowhiskers:

- Unique microstructure Wulff-shape

- Root growth Arrays of nanowhiskers by tuning nucleation site

- 3D-substrate Advanced composites

- Unique properties Theoretical mechanical strength limit reached

Page 40: One dimensional metal nanowires grown by physical vapour ...

Max-Planck-Institut für Intelligente Systeme

Acknowledgment

Universität Stuttgart/MPI für Intelligente Systeme

Karla Hillerich Lisa Hofacker Matthias Kolb Matthias Schamel

Carola Schopf Dominic Linsler Christian Kappel Vanessa Dörlich

Friderike Baras Dominic Zug

Horst P. Strunk

Karlsruher Institut für Technologie

Wenting Huang Andreas Sedlmeyr Reiner Mönig

Oliver Kraft

Thank you for your attention!


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